JPS63199054U - - Google Patents

Info

Publication number
JPS63199054U
JPS63199054U JP9108787U JP9108787U JPS63199054U JP S63199054 U JPS63199054 U JP S63199054U JP 9108787 U JP9108787 U JP 9108787U JP 9108787 U JP9108787 U JP 9108787U JP S63199054 U JPS63199054 U JP S63199054U
Authority
JP
Japan
Prior art keywords
gas
piston
cylinder
amount
driving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9108787U
Other languages
English (en)
Other versions
JPH0733866Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9108787U priority Critical patent/JPH0733866Y2/ja
Publication of JPS63199054U publication Critical patent/JPS63199054U/ja
Application granted granted Critical
Publication of JPH0733866Y2 publication Critical patent/JPH0733866Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)

Description

【図面の簡単な説明】
第1図は本考案の実施例に係るガス漏出量測定
装置の概略構成図である。 10:シリンダ、14:リザーバ、16:差圧
検出器、20:ピストン、30:パルスモータ、
32:パルスジエネレータ。

Claims (1)

  1. 【実用新案登録請求の範囲】 漏出ガスが導入されるシリンダと、 該シリンダ内を移動して内容積を可変させるピ
    ストンと、 該ピストンを駆動する駆動手段と、 該シリンダ内のガス圧とレフアランスガスのガ
    ス圧との差を検出する差圧検出器と、 該差圧が零になるように該駆動手段を制御する
    制御手段と、 該ピストンの移動量を用いてガス漏出量を求め
    る手段と、 を有することを特徴とするガス漏出量測定装置
    。
JP9108787U 1987-06-13 1987-06-13 ガス漏出量測定装置 Expired - Lifetime JPH0733866Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9108787U JPH0733866Y2 (ja) 1987-06-13 1987-06-13 ガス漏出量測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9108787U JPH0733866Y2 (ja) 1987-06-13 1987-06-13 ガス漏出量測定装置

Publications (2)

Publication Number Publication Date
JPS63199054U true JPS63199054U (ja) 1988-12-21
JPH0733866Y2 JPH0733866Y2 (ja) 1995-08-02

Family

ID=30951548

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9108787U Expired - Lifetime JPH0733866Y2 (ja) 1987-06-13 1987-06-13 ガス漏出量測定装置

Country Status (1)

Country Link
JP (1) JPH0733866Y2 (ja)

Also Published As

Publication number Publication date
JPH0733866Y2 (ja) 1995-08-02

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