JPS63200345U - - Google Patents
Info
- Publication number
- JPS63200345U JPS63200345U JP9005087U JP9005087U JPS63200345U JP S63200345 U JPS63200345 U JP S63200345U JP 9005087 U JP9005087 U JP 9005087U JP 9005087 U JP9005087 U JP 9005087U JP S63200345 U JPS63200345 U JP S63200345U
- Authority
- JP
- Japan
- Prior art keywords
- wafer carrier
- identification information
- recognition device
- opening
- size
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 8
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Description
第１図は本考案の第１の実施例を示す斜視図、
第２図ａ，ｂはウエハーキヤリアの認識状態を示
す斜視図、第３図は本考案の第２の実施例を示す
斜視図、第４図ａは従来のウエハーキヤリアのマ
ークを示す斜視図、第４図ｂは識別状態を示す図
、第５図ａ，ｂは従来における認識状態を示す斜
視図である。
１…ウエハーキヤリア、２…マーク、３…読取
器、３ａ，４ａ…センサー。
FIG. 1 is a perspective view showing a first embodiment of the present invention;
FIGS. 2a and 2b are perspective views showing the recognition state of the wafer carrier, FIG. 3 is a perspective view showing the second embodiment of the present invention, and FIG. 4a is a perspective view showing marks on a conventional wafer carrier. FIG. 4b is a diagram showing the identification state, and FIGS. 5a and 5b are perspective views showing the conventional recognition state. 1... Wafer carrier, 2... Mark, 3... Reader, 3a, 4a... Sensor.
Claims (1)
備えたウエハーキヤリアの標識からその判別情報
を読み取るウエハーキヤリア認識装置において、
ウエハーキヤリアの大小にかかわらず一定長さと
なる前記溝の配列方向の開口部側壁に前記判別情
報の表示用標識を設けた大小２種類以上のウエハ
ーキヤリアと、前記ウエハーキヤリアの前記表示
用標識を読み取るセンサーを組み込んだ読取器と
を備え、該読取器をウエハーキヤリアの大小に応
じて変化する開口部の幅方向に移動調整可能とし
たことを特徴とするウエハーキヤリア認識装置。 In a wafer carrier recognition device that reads identification information from a mark on a wafer carrier that has a plurality of parallel grooves on which semiconductor wafers are propped up,
A wafer carrier of two or more sizes, small and large, in which the identification information display mark is provided on the side wall of the opening in the arrangement direction of the grooves, which have a constant length regardless of the size of the wafer carrier, and the display mark of the wafer carrier is read. A wafer carrier recognition device comprising: a reader incorporating a sensor; and the reader is movable and adjustable in the width direction of an opening that changes depending on the size of the wafer carrier.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9005087U JPS63200345U (en) | 1987-06-11 | 1987-06-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9005087U JPS63200345U (en) | 1987-06-11 | 1987-06-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63200345U true JPS63200345U (en) | 1988-12-23 |
Family
ID=30949576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9005087U Pending JPS63200345U (en) | 1987-06-11 | 1987-06-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63200345U (en) |
-
1987
- 1987-06-11 JP JP9005087U patent/JPS63200345U/ja active Pending
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