JPS63201048U - - Google Patents
Info
- Publication number
- JPS63201048U JPS63201048U JP9004787U JP9004787U JPS63201048U JP S63201048 U JPS63201048 U JP S63201048U JP 9004787 U JP9004787 U JP 9004787U JP 9004787 U JP9004787 U JP 9004787U JP S63201048 U JPS63201048 U JP S63201048U
- Authority
- JP
- Japan
- Prior art keywords
- donut
- radius
- core
- disk substrate
- shaped disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002093 peripheral effect Effects 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 2
- 239000000110 cooling liquid Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Description
第１図と第２図は本考案に係る研削具の構造例
を示す縦断面図であり、このうち、第１図は被加
工物であるドーナツ型デイスク基板に対しての研
削作業に入る前の両者の位置関係を、第２図は研
削時における両者の位置関係をそれぞれ示す。第
３図は装置全体の位置関係を示す説明図、第４図
は従来装置の説明図である。
１……天板部、２……シヤンク部、３……周壁
部、４……コア部、５……内周面、６……第１砥
石部、６ａ……垂直面、６ｂ，６ｃ……傾斜面、
７……第２砥石部、７ａ……垂直面、７ｂ，７ｃ
……傾斜面、８……中心通路、９……分岐路、１
０……通孔、１１……仕切板、１２……仕切空間
、１３……通孔、１４……分岐路、１５……液溜
部、１６……底部、１７……スリツト、１８……
開口面、１９……排水口、２０……チヤツク、２
１……外周縁、２２……内周縁、２３……円孔、
２４……吸着テーブル、２５……吸引孔、Ｄ……
ドーナツ型デイスク基板。
Figures 1 and 2 are longitudinal cross-sectional views showing an example of the structure of the grinding tool according to the present invention, of which Figure 1 is before starting the grinding work on the donut-shaped disk substrate that is the workpiece. FIG. 2 shows the positional relationship between the two during grinding. FIG. 3 is an explanatory diagram showing the positional relationship of the entire device, and FIG. 4 is an explanatory diagram of a conventional device. DESCRIPTION OF SYMBOLS 1...Top plate part, 2...Shank part, 3...Peripheral wall part, 4...Core part, 5...Inner peripheral surface, 6...First grindstone part, 6a...Vertical surface, 6b, 6c... ...slanted surface,
7...Second whetstone part, 7a...Vertical surface, 7b, 7c
... Sloped surface, 8 ... Center passage, 9 ... Branch road, 1
0...Through hole, 11...Partition plate, 12...Partition space, 13...Through hole, 14...Branch path, 15...Liquid reservoir, 16...Bottom, 17...Slit, 18...
Opening surface, 19...Drain port, 20...Chick, 2
1...Outer peripheral edge, 22...Inner peripheral edge, 23...Circular hole,
24... Suction table, 25... Suction hole, D...
Donut-shaped disk board.
Claims (1)
設したシヤンク部とからなり、前記天板部におけ
る周縁下側部には周壁部を、下面中心部にはコア
部をそれぞれ垂設し、周壁部の内周面とコア部の
外周面とには、相対向させて被加工物であるドー
ナツ型デイスク基板を研削するための第１砥石部
と第２砥石部とを周設し、 コア部における第２砥石部までの半径をｒ１、 周壁部における第１砥石部までの半径をｒ２、 コア部の外周最大半径をｒ３、 周壁部の内周最小半径をｒ４、 ドーナツ型デイスク基板の内周半径をｒ５、 ドーナツ型デイスク基板の外周半径をｒ６、 とするとき、 ｒ１＜ｒ３＜ｒ５，ｒ２＞ｒ４＞ｒ６ であつて、 ｒ１＋ｒ２＝ｒ５＋ｒ６ となるようにして形成するとともに、 第１砥石部近傍の天板部には冷却液の通孔を設
け、第２砥石部近傍の天板部にはコア部を介して
供給される冷却液のための液溜部をコア部近傍の
底部にスリツトを設けることで形成したことを特
徴とするドーナツ型デイスク基板の内外周研削具
。[Claims for Utility Model Registration] Consisting of a circular top plate and a shank part standing upright at the center of the upper surface of the top plate. A core part is provided vertically in each part, and a first grinding wheel part for grinding a donut-shaped disk substrate, which is a workpiece, is provided on the inner circumferential surface of the peripheral wall part and the outer circumferential surface of the core part, facing each other. A second whetstone part is provided around the core part, a radius of the core part to the second whetstone part is r 1 , a radius of the peripheral wall part to the first whetstone part is r 2 , a maximum radius of the outer periphery of the core part is r 3 , a peripheral wall part When the minimum inner radius of the donut-shaped disk substrate is r 4 , the inner radius of the donut-shaped disk substrate is r 5 , and the outer radius of the donut-shaped disk substrate is r 6 , r 1 < r 3 < r 5 , r 2 > r 4 > r 6 , and r 1 + r 2 = r 5 + r 6. At the same time, a cooling liquid passage hole is provided in the top plate near the first grinding wheel, and a hole near the second grinding wheel is formed. 1. A tool for grinding an inner and outer periphery of a donut-shaped disk substrate, characterized in that a liquid reservoir for a cooling liquid supplied through the core is formed in the top plate by providing a slit at the bottom near the core.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9004787U JPH0546845Y2 (en) | 1987-06-11 | 1987-06-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9004787U JPH0546845Y2 (en) | 1987-06-11 | 1987-06-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63201048U true JPS63201048U (en) | 1988-12-26 |
| JPH0546845Y2 JPH0546845Y2 (en) | 1993-12-08 |
Family
ID=30949570
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9004787U Expired - Lifetime JPH0546845Y2 (en) | 1987-06-11 | 1987-06-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0546845Y2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04217451A (en) * | 1990-03-09 | 1992-08-07 | Artur Fischer Gmbh | Device for forming hole |
| JPH10329037A (en) † | 1994-08-22 | 1998-12-15 | Kiyokuei Kenma Kako Kk | Round hole grinding tool for annular board and round hole grinding method utilizing the same |
| US8033893B2 (en) | 2007-01-18 | 2011-10-11 | Showa Denko K.K. | Grinding method of a disk-shaped substrate and grinding apparatus |
| JP2011200976A (en) * | 2010-03-25 | 2011-10-13 | Ts Precision Co Ltd | Coolant supplying device |
| JP2014083644A (en) * | 2012-10-25 | 2014-05-12 | Koyo Mach Ind Co Ltd | Surface grinding method and coolant supply apparatus for surface grinder |
-
1987
- 1987-06-11 JP JP9004787U patent/JPH0546845Y2/ja not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04217451A (en) * | 1990-03-09 | 1992-08-07 | Artur Fischer Gmbh | Device for forming hole |
| JPH10329037A (en) † | 1994-08-22 | 1998-12-15 | Kiyokuei Kenma Kako Kk | Round hole grinding tool for annular board and round hole grinding method utilizing the same |
| US8033893B2 (en) | 2007-01-18 | 2011-10-11 | Showa Denko K.K. | Grinding method of a disk-shaped substrate and grinding apparatus |
| JP2011200976A (en) * | 2010-03-25 | 2011-10-13 | Ts Precision Co Ltd | Coolant supplying device |
| JP2014083644A (en) * | 2012-10-25 | 2014-05-12 | Koyo Mach Ind Co Ltd | Surface grinding method and coolant supply apparatus for surface grinder |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0546845Y2 (en) | 1993-12-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH037978U (en) | ||
| JPS63201048U (en) | ||
| JPS6112653U (en) | Bakyu whip | |
| JPS6351446U (en) | ||
| JPS6364460U (en) | ||
| JPS59126559U (en) | Electric shaver motor fixing structure | |
| JPS6192533U (en) | ||
| JPS59189235U (en) | Coating equipment | |
| JPS62154648U (en) | ||
| JPS6446159U (en) | ||
| JPS5826403U (en) | nail polisher | |
| JPS6364442U (en) | ||
| JPS58157448U (en) | Floor suction device | |
| JPS6416270U (en) | ||
| JPS63186549U (en) | ||
| JPS5863915U (en) | Milling cutter for precision finishing | |
| JPH02104963U (en) | ||
| JPH0370905U (en) | ||
| JPS6176443U (en) | ||
| JPS6150653U (en) | ||
| JPS60168423U (en) | pouring equipment | |
| JPS6053443U (en) | Centering jig for machine tools | |
| JPS6278746U (en) | ||
| JPS60117034U (en) | Semiconductor vacuum rotary chuck | |
| JPS63109332U (en) |