JPS6320355U - - Google Patents
Info
- Publication number
- JPS6320355U JPS6320355U JP11408986U JP11408986U JPS6320355U JP S6320355 U JPS6320355 U JP S6320355U JP 11408986 U JP11408986 U JP 11408986U JP 11408986 U JP11408986 U JP 11408986U JP S6320355 U JPS6320355 U JP S6320355U
- Authority
- JP
- Japan
- Prior art keywords
- electron
- sample
- detector
- attracting
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 239000002245 particle Substances 0.000 claims 3
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Description
第１図は本考案の一実施例の構成図、第２図は
第１図の一実施例の要部を説明するための図、第
３図は他の実施例を説明するための図、第４図は
従来装置を説明するための図である。
１：対物レンズ、２，４：２次電子検出器、３
：試料、５，８ａ，８ｂ，８ｃ：電子吸引電極、
６：分割抵抗、７：電源、９：支持基板、Ｄ：２
次電子検出器、ＥＢ：電子ビーム。
FIG. 1 is a block diagram of one embodiment of the present invention, FIG. 2 is a diagram for explaining the main part of the embodiment of FIG. 1, and FIG. 3 is a diagram for explaining another embodiment. FIG. 4 is a diagram for explaining a conventional device. 1: Objective lens, 2, 4: Secondary electron detector, 3
: Sample, 5, 8a, 8b, 8c: Electron attracting electrode,
6: Dividing resistor, 7: Power supply, 9: Support board, D: 2
Secondary electron detector, EB: electron beam.
Claims (1)
し、該走査に基づいて該試料より放射される２次
電子を捕獲電極を有する２次電子検出器により検
出し、該検出信号に基づいて該試料像を観察する
装置において、前記試料と２次電子検出器との間
に複数の電子吸引電極を設け、該試料に最も近い
試料側電子吸引電極には接地電位あるいは若干の
正電位を印加し、２次電子検出器側に最も近い検
出器側電子吸引電極には前記捕獲電極に印加され
る電位あるいは若干低い電位を印加し、該試料側
電子吸引電極と該検出器側電子吸引電極との間に
配置された中間電子吸引電極にはそれぞれ異なつ
た電位が印加されるように構成したことを特徴と
する荷電粒子線装置。 (2) 前記電子吸引電極はリング状部材で形成さ
れた実用新案登録請求の範囲第１項記載の荷電粒
子線装置。 (3) 前記電子吸引電極に印加する電位を調整で
きるように構成した実用新案登録請求の範囲第１
項及び第２項記載の荷電粒子線装置。[Claims for Utility Model Registration] (1) Scanning a desired area on a sample with an electron beam, and detecting secondary electrons emitted from the sample based on the scanning with a secondary electron detector having a capture electrode. , in an apparatus for observing an image of the sample based on the detection signal, a plurality of electron-attracting electrodes are provided between the sample and the secondary electron detector, and the sample-side electron-attracting electrode closest to the sample is connected to a ground potential. Alternatively, a slight positive potential is applied, and the potential applied to the capture electrode or a slightly lower potential is applied to the detector-side electron-attracting electrode closest to the secondary electron detector, and the sample-side electron-attracting electrode and the 1. A charged particle beam device characterized in that different potentials are applied to intermediate electron-attracting electrodes arranged between the detector-side electron-attracting electrode and the detector-side electron-attracting electrode. (2) The charged particle beam device according to claim 1, wherein the electron attracting electrode is formed of a ring-shaped member. (3) Claim 1 of the utility model registration, which is configured so that the potential applied to the electron-attracting electrode can be adjusted.
Charged particle beam device according to Items 1 and 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11408986U JPS6320355U (en) | 1986-07-25 | 1986-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11408986U JPS6320355U (en) | 1986-07-25 | 1986-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6320355U true JPS6320355U (en) | 1988-02-10 |
Family
ID=30996503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11408986U Pending JPS6320355U (en) | 1986-07-25 | 1986-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6320355U (en) |
-
1986
- 1986-07-25 JP JP11408986U patent/JPS6320355U/ja active Pending
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