JPS63204612A - Soi単結晶形成法 - Google Patents
Soi単結晶形成法Info
- Publication number
- JPS63204612A JPS63204612A JP62035674A JP3567487A JPS63204612A JP S63204612 A JPS63204612 A JP S63204612A JP 62035674 A JP62035674 A JP 62035674A JP 3567487 A JP3567487 A JP 3567487A JP S63204612 A JPS63204612 A JP S63204612A
- Authority
- JP
- Japan
- Prior art keywords
- seeds
- film
- single crystal
- seed
- grain boundary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Recrystallisation Techniques (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62035674A JPS63204612A (ja) | 1987-02-20 | 1987-02-20 | Soi単結晶形成法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62035674A JPS63204612A (ja) | 1987-02-20 | 1987-02-20 | Soi単結晶形成法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63204612A true JPS63204612A (ja) | 1988-08-24 |
| JPH0413849B2 JPH0413849B2 (cs) | 1992-03-11 |
Family
ID=12448423
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62035674A Granted JPS63204612A (ja) | 1987-02-20 | 1987-02-20 | Soi単結晶形成法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63204612A (cs) |
-
1987
- 1987-02-20 JP JP62035674A patent/JPS63204612A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0413849B2 (cs) | 1992-03-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |