JPS6323629U - - Google Patents
Info
- Publication number
- JPS6323629U JPS6323629U JP11784986U JP11784986U JPS6323629U JP S6323629 U JPS6323629 U JP S6323629U JP 11784986 U JP11784986 U JP 11784986U JP 11784986 U JP11784986 U JP 11784986U JP S6323629 U JPS6323629 U JP S6323629U
- Authority
- JP
- Japan
- Prior art keywords
- detection circuit
- output
- discharge
- circuit
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 11
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図はこの考案の冷陰極真空測定装置の一実
施例のブロツク構成図、第２図は冷陰極真空計の
圧力と放電電流との関係図である。
１…冷陰極真空計、３…電流検出回路、５…変
化値検知回路、６…比較回路、８…放電停止検知
回路、９…アンド回路、１２…高圧力表示回路。
FIG. 1 is a block diagram of an embodiment of the cold cathode vacuum measuring device of this invention, and FIG. 2 is a diagram showing the relationship between pressure and discharge current of the cold cathode vacuum gauge. DESCRIPTION OF SYMBOLS 1...Cold cathode vacuum gauge, 3...Current detection circuit, 5...Change value detection circuit, 6...Comparison circuit, 8...Discharge stop detection circuit, 9...AND circuit, 12...High pressure display circuit.
Claims (1)
け、かつ前記両極の対称軸方向に強い磁場を与え
て磁界内で定電圧放電させ、この放電電流を電流
検出回路で検出して放電電流と真空度との間の一
定の関係から真空度を測定する冷陰極真空測定装
置において、前記電流検出回路の出力の変化を検
知する変化値検知回路と、この変化値検知回路の
出力が設定値以上になつたのを検出して出力する
比較回路と、前記検出回路の出力値が設定値以下
になつたことを検出して出力する放電停止検知回
路と、この放電停止検知回路と前記比較回路とか
ら同時に出力された時に駆動表示する高圧力表示
回路とを備えてなることを特徴とする冷陰極真空
測定装置。 A constant voltage is applied between the anode and cathode of a cold cathode vacuum gauge, and a strong magnetic field is applied in the direction of the symmetry axis of the two poles to cause a constant voltage discharge within the magnetic field, and this discharge current is detected by a current detection circuit to generate a discharge. In a cold cathode vacuum measuring device that measures the degree of vacuum from a certain relationship between current and degree of vacuum, there is a change value detection circuit that detects a change in the output of the current detection circuit, and an output of this change value detection circuit is set. a comparison circuit that detects when the output value of the detection circuit becomes equal to or higher than the set value and outputs the output; a discharge stop detection circuit that detects and outputs when the output value of the detection circuit becomes equal to or less than the set value; and this discharge stop detection circuit and the comparison circuit. 1. A cold cathode vacuum measurement device comprising: a high pressure display circuit that displays a drive signal when simultaneously output from the circuit;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11784986U JPS6323629U (en) | 1986-07-30 | 1986-07-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11784986U JPS6323629U (en) | 1986-07-30 | 1986-07-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6323629U true JPS6323629U (en) | 1988-02-16 |
Family
ID=31003749
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11784986U Pending JPS6323629U (en) | 1986-07-30 | 1986-07-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6323629U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020052013A (en) * | 2018-09-28 | 2020-04-02 | 株式会社島津製作所 | Vacuum detector and electron beam irradiation system |
-
1986
- 1986-07-30 JP JP11784986U patent/JPS6323629U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020052013A (en) * | 2018-09-28 | 2020-04-02 | 株式会社島津製作所 | Vacuum detector and electron beam irradiation system |
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