JPS63248464A - 二流体ノズルヘツダ - Google Patents

二流体ノズルヘツダ

Info

Publication number
JPS63248464A
JPS63248464A JP8068887A JP8068887A JPS63248464A JP S63248464 A JPS63248464 A JP S63248464A JP 8068887 A JP8068887 A JP 8068887A JP 8068887 A JP8068887 A JP 8068887A JP S63248464 A JPS63248464 A JP S63248464A
Authority
JP
Japan
Prior art keywords
header
nozzle
strip
clogged
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8068887A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0555193B2 (2
Inventor
Nobuyoshi Rokusha
六車　信義
Kazuo Takagi
一夫 高木
Hidekazu Kono
英一 河野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Nisshin Co Ltd
Original Assignee
Nisshin Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nisshin Steel Co Ltd filed Critical Nisshin Steel Co Ltd
Priority to JP8068887A priority Critical patent/JPS63248464A/ja
Publication of JPS63248464A publication Critical patent/JPS63248464A/ja
Publication of JPH0555193B2 publication Critical patent/JPH0555193B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Nozzles (AREA)
JP8068887A 1987-03-31 1987-03-31 二流体ノズルヘツダ Granted JPS63248464A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8068887A JPS63248464A (ja) 1987-03-31 1987-03-31 二流体ノズルヘツダ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8068887A JPS63248464A (ja) 1987-03-31 1987-03-31 二流体ノズルヘツダ

Publications (2)

Publication Number Publication Date
JPS63248464A true JPS63248464A (ja) 1988-10-14
JPH0555193B2 JPH0555193B2 (2) 1993-08-16

Family

ID=13725274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8068887A Granted JPS63248464A (ja) 1987-03-31 1987-03-31 二流体ノズルヘツダ

Country Status (1)

Country Link
JP (1) JPS63248464A (2)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005230715A (ja) * 2004-02-20 2005-09-02 Kyoritsu Gokin Co Ltd ノズル装置及びノズル部材
JP2006093591A (ja) * 2004-09-27 2006-04-06 Shibaura Mechatronics Corp 基板の処理装置
JP2008110350A (ja) * 2006-10-27 2008-05-15 Ikeuchi:Kk 箱型スプレーヘッダー

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4936203U (2) * 1972-07-04 1974-03-30
JPS5331039U (2) * 1976-08-24 1978-03-17

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4936203U (2) * 1972-07-04 1974-03-30
JPS5331039U (2) * 1976-08-24 1978-03-17

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005230715A (ja) * 2004-02-20 2005-09-02 Kyoritsu Gokin Co Ltd ノズル装置及びノズル部材
JP2006093591A (ja) * 2004-09-27 2006-04-06 Shibaura Mechatronics Corp 基板の処理装置
JP2008110350A (ja) * 2006-10-27 2008-05-15 Ikeuchi:Kk 箱型スプレーヘッダー

Also Published As

Publication number Publication date
JPH0555193B2 (2) 1993-08-16

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Legal Events

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