JPS63253621A - 溶融シリコン定量滴下方法及びその装置 - Google Patents
溶融シリコン定量滴下方法及びその装置Info
- Publication number
- JPS63253621A JPS63253621A JP62088369A JP8836987A JPS63253621A JP S63253621 A JPS63253621 A JP S63253621A JP 62088369 A JP62088369 A JP 62088369A JP 8836987 A JP8836987 A JP 8836987A JP S63253621 A JPS63253621 A JP S63253621A
- Authority
- JP
- Japan
- Prior art keywords
- inert gas
- silicon
- melting cylinder
- melting
- molten
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Silicon Compounds (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62088369A JPS63253621A (ja) | 1987-04-10 | 1987-04-10 | 溶融シリコン定量滴下方法及びその装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62088369A JPS63253621A (ja) | 1987-04-10 | 1987-04-10 | 溶融シリコン定量滴下方法及びその装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63253621A true JPS63253621A (ja) | 1988-10-20 |
| JPH0261135B2 JPH0261135B2 (2) | 1990-12-19 |
Family
ID=13940879
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62088369A Granted JPS63253621A (ja) | 1987-04-10 | 1987-04-10 | 溶融シリコン定量滴下方法及びその装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63253621A (2) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0945773A (ja) * | 1995-07-28 | 1997-02-14 | Nec Corp | 金属薄膜の形成方法および形成装置 |
-
1987
- 1987-04-10 JP JP62088369A patent/JPS63253621A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0945773A (ja) * | 1995-07-28 | 1997-02-14 | Nec Corp | 金属薄膜の形成方法および形成装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0261135B2 (2) | 1990-12-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |