JPS6325817A - Magneto-resistance effect type magnetic head - Google Patents

Magneto-resistance effect type magnetic head

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Publication number
JPS6325817A
JPS6325817A JP16876586A JP16876586A JPS6325817A JP S6325817 A JPS6325817 A JP S6325817A JP 16876586 A JP16876586 A JP 16876586A JP 16876586 A JP16876586 A JP 16876586A JP S6325817 A JPS6325817 A JP S6325817A
Authority
JP
Japan
Prior art keywords
magnetic
sensing part
magnetic sensing
bias
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16876586A
Other languages
Japanese (ja)
Inventor
Toru Katakura
片倉 亨
Munekatsu Fukuyama
宗克 福山
Hideo Suyama
英夫 陶山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP16876586A priority Critical patent/JPS6325817A/en
Publication of JPS6325817A publication Critical patent/JPS6325817A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To set the bias magnetization in a magneto-resistance (MR) magnetic sensing part to an optimum state in all of its area by specifying the practical arrangement constitution of an electrode, which gives a sense current to the MR magnetic sensing part, and a bias magnetic field impressing means. CONSTITUTION:An MR magnetic sensing part 2, which is so arranged that a sense current Is flows in the same direction as a signal magnetic field Hs, and a pair of electrodes 7 and 8 which flow the sense current Is to the magnetic sensing part 2 are provided. One electrode 7 is provided with a part 7A, which overlaps one end of the magnetic sensing part 2 and is electrically connected there, and a part 7B which is extended in the direction approximately orthogonal to the essential supply direction of the sense current Is in the magnetic sensing part 2 and is electrically insulated from the magnetic sensing part 2. The magnetic sensing part 2 is formed on the first magnetic substrate 1 with an insulating layer 11 between them by sticking. The unstable mutual influence between the magnetic field due to the front electrode 7 to the MR magnetic sensing part 2 and the bias magnetic field is avoided to stably obtain a proper bias magnetization state in the MR magnetic sensing part 2.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、磁気抵抗(以下MRという)効果型磁気ヘッ
ドに係わる。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetoresistive (hereinafter referred to as MR) effect type magnetic head.

〔発明の概要〕[Summary of the invention]

本発明は、磁気ヘッドのMR効果を有するMR惑磁部に
対するセンス電流を与えるための電極と、バイアス磁界
の印加手段との実質的配置構成を特定することによって
、MR感磁部におけるバイアス磁化をそのほぼ全域にお
いて最適の状態に設定できるようにする。
The present invention improves the bias magnetization in the MR magnetic sensing part by specifying the substantial arrangement of the electrodes for applying a sense current to the MR magnetic sensing part having the MR effect of the magnetic head and the means for applying a bias magnetic field. To make it possible to set the optimum state in almost the entire range.

〔従来の技術〕[Conventional technology]

従来のMR型磁気ヘッドのシールド型構造を採る磁気ヘ
ッドは、第7図にその平曲図をボし、第8図に断面図を
示すように、第1及び第2の磁性基板(21)及び(2
2)間にMR効果を有するMR感磁部(2)等より成る
磁気ヘッド本体を挟み込んだ構成を採る。(3)は磁気
媒体との対接ないしは対向面で、磁気媒体は図示しない
が第7図において紙面と直交する方向に磁気ヘッドに対
し相対的に移行するようになされている。MR感磁部(
2)は、その前端面が、磁気媒体との対接ないしは対向
面(3)に臨んで基板α))上に被着形成される。
A magnetic head that adopts the shield type structure of a conventional MR type magnetic head has first and second magnetic substrates (21) as shown in FIG. and (2
2) A configuration is adopted in which a magnetic head main body consisting of an MR magnetic sensing part (2) etc. having an MR effect is sandwiched between them. (3) is a surface that is in contact with or faces the magnetic medium, which is not shown, but is adapted to move relative to the magnetic head in a direction perpendicular to the plane of the paper in FIG. MR magnetic sensing part (
2) is formed on the substrate α) with its front end facing the surface (3) facing or facing the magnetic medium.

感磁部(2)の前後両端には、この感磁部(2)に与え
られる信号磁界に基く抵抗変化を例えば電圧変化として
検出するためのセンス電流Isを感磁(部(2)に給電
するに供する対となる前方電極(7)と後方電極(8)
とが設けられる。これら電極(7)及び(8)は、各端
部が感磁部(2)の各前方及び後方端部に重なるように
被着され、前方電極(7)は、感磁部(2)の前方端か
ら、面(3)に沿う方向にすなわち、感磁部(2)にお
けるセンス電流ISの本来の通電方向に対し直交する方
向に引き出される。
At both front and rear ends of the magnetically sensitive section (2), a sense current Is is supplied to the magnetically sensitive section (2) for detecting a change in resistance based on a signal magnetic field applied to the magnetically sensitive section (2), for example, as a voltage change. A pair of front electrodes (7) and rear electrodes (8) used for
and is provided. These electrodes (7) and (8) are attached so that each end overlaps each front and rear end of the magnetically sensitive part (2), and the front electrode (7) is attached to the magnetically sensitive part (2). It is drawn out from the front end in a direction along the surface (3), that is, in a direction perpendicular to the original direction of conduction of the sense current IS in the magnetically sensitive part (2).

一方、MR1!5磁部(2)には、その磁気抵抗特性が
、最も直線性にすぐれ感度の高い特性を示す状態で信号
磁界を受けることができるように、所要の最適バイアス
磁化状態を形成するためのバイアス磁界を与えるバイア
ス磁界印加手段が設けられる。
On the other hand, the MR1!5 magnetic part (2) is formed with the required optimum bias magnetization state so that it can receive the signal magnetic field in a state where its magnetoresistive characteristics exhibit the most excellent linearity and high sensitivity characteristics. A bias magnetic field applying means is provided for applying a bias magnetic field for the purpose of applying the bias magnetic field.

このバイアス磁界印加手段としては、組立製造の簡呂化
等から通電によって所要のバイアス磁界を発生するバイ
アス導体(10)が感磁部(2)を横切って設けられる
As this bias magnetic field applying means, a bias conductor (10) which generates a required bias magnetic field when energized is provided across the magnetic sensing part (2) in order to simplify assembly and manufacturing.

そして、感磁部(2)を覆って第1の磁性基板(21)
上に、−ガラス等の非磁性の絶縁性融着材(13)によ
って第2の磁性基板(22)が接合され、第1及び第2
の磁性基板(21)及び(22)によって磁気シールド
効果が得られるようにしている。(11)は、絶縁層で
バイアス導体(工0)と、両電極(7)及び(8)や感
磁部(2)との間に介在され、また、例えば基板(21
)が導電性を有する場合にこれの上に被着される。
Then, a first magnetic substrate (21) is placed over the magnetically sensitive part (2).
A second magnetic substrate (22) is bonded thereon by a non-magnetic insulating bonding material (13) such as glass, and the first and second
The magnetic substrates (21) and (22) provide a magnetic shielding effect. (11) is an insulating layer interposed between the bias conductor (work 0) and both electrodes (7) and (8) or the magnetic sensing part (2), and for example, the substrate (21
) is deposited on this when it has conductivity.

ところがこのような構成によるMR型磁気ヘッドでは、
そのMR感磁部(2)によって適正のバイアス磁化状態
が得難い。
However, in the MR type magnetic head with such a configuration,
It is difficult to obtain an appropriate bias magnetization state due to the MR magnetic sensing portion (2).

すなわち、今この構成による磁気ヘッドにおいて、その
感磁部(2)におけるセンス電流Isの本来の通電方向
、すなわち信号磁界の印加方向に沿う方向の各位置にお
ける磁化分布を、計算で求めると第9図に示すようにな
る。この図において曲線(9■)は、バイアス導体(1
0)には通電せずにセンス電流l5=2(lnAの電流
を電極(7)に流した場合にこれによって生じた磁界に
よる磁化の分布を示すものであり、曲線(92)はバイ
アス導体(10)にのみIb=30mAを流したことに
よって生じたバイアス磁界による磁化の分布を示すもの
であり、MR感磁部(2)には、バイアス導体(10)
からのバイアス磁界のみならず、このMR感磁部(2)
への通電のための電極(7)に通ずる電流による磁界の
影響も受ける。これがため、今1s=2On+Aとして
、バイアス導体(10)へのバイアス電流1bを変化さ
せたときのMR感磁部(2)の磁化分布は、第10図に
示すようになる。この図において、曲線(101)〜(
104)はバイアス導体(10)への通電方向を、第7
図で矢印すで示すように電極(7)に対する電流■sの
通電方向aと同じ向きにして、そのバイアス電流1bを
夫々40mA、 30mA、 20−八、 10mAと
したときの感磁部(2)の磁化分布であり、曲線(10
5)はIb=Oとしたとき、曲線(106)は、電流1
bの向きbを、電極(7)における通電方向aと逆向き
にした場合のI b =−30mAでの同様の磁化分布
をポしたものである。
That is, in the magnetic head with this configuration, the magnetization distribution at each position along the original direction of conduction of the sense current Is in the magnetic sensing portion (2), that is, the direction of application of the signal magnetic field, is calculated as follows. The result will be as shown in the figure. In this figure, the curve (9■) is the bias conductor (1
0) shows the distribution of magnetization due to the magnetic field generated when a current of 15 = 2 (lnA) is passed through the electrode (7) without energizing the bias conductor ( 10) shows the distribution of magnetization due to the bias magnetic field generated by flowing Ib=30mA only in the MR magnetic sensing part (2), the bias conductor (10)
In addition to the bias magnetic field from the MR magnetic sensing part (2)
It is also affected by the magnetic field due to the current flowing through the electrode (7) for energizing. Therefore, when 1s=2On+A is set and the bias current 1b to the bias conductor (10) is changed, the magnetization distribution of the MR magnetic sensing part (2) becomes as shown in FIG. 10. In this figure, curves (101) to (
104) sets the current direction to the bias conductor (10) to the seventh
As shown by the arrow in the figure, the magnetically sensitive part (2 ) is the magnetization distribution of the curve (10
5), when Ib=O, the curve (106) shows the current 1
This figure shows a similar magnetization distribution at I b =-30 mA when the direction b of b is opposite to the current direction a in the electrode (7).

このようにMR感磁部(2)で、前方電極(7)から発
生ずる磁界の影響によって感磁部(2)の全域に亘って
最適のバイアス状態に設定することが難しく、特に感磁
部(2)の信号磁界に対して実質的感知部となる前方部
において適正なバイアスが設定でき難いということは磁
気ヘッドの特性上大きな影響を及ぼすものである。
In this way, it is difficult to set the optimum bias state over the entire area of the MR magnetic sensing part (2) due to the influence of the magnetic field generated from the front electrode (7), especially in the magnetic sensing part (2). (2) The fact that it is difficult to set an appropriate bias in the front section, which is essentially the sensing section for the signal magnetic field, has a large effect on the characteristics of the magnetic head.

これは感磁部(2)におい°ζ、電極(7)が被着され
た部分では、実質的にその通電が電極(7)においてな
され、その通電方向は、電極(7)への通電方向、つま
り、感磁部(2)における本来の通電方向とは直交する
方向となり、これによる磁界の影響を受けることに因る
This is due to the fact that in the magnetically sensitive part (2) °ζ, in the part where the electrode (7) is attached, the current is substantially applied to the electrode (7), and the current direction is the same as the current direction to the electrode (7). In other words, the direction is perpendicular to the original current direction in the magnetically sensitive part (2), and is affected by the magnetic field.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

本発明は、上述したようなMR型磁気ヘッドにおけるM
R感磁部に対するバイアス磁界の問題の解消をはかる。
The present invention provides M in an MR type magnetic head as described above.
Aiming to solve the problem of bias magnetic field for the R magnetic sensing part.

f問題点を解決するための手段〕 本発明は、第1図にその平面図を示し、第2図にその断
面図を示すように、信号磁界H5の方向とIHI一方向
にセンス電15!i! T sを流すように配されたM
R1F!!、磁部(2)と、この感磁部(2)にセンス
電流Isを流すための対の電Th (71及び(8)と
を設ける。そして、一方の電極(7)には、感磁部(2
)の一端に宙ね合されて電気的に接続される部分(7A
)と感磁部(21のセンス電流Isの本来の通電方向と
ほぼ直交する方向に延在すると共に感磁部(2)と電気
的に絶縁される部分(7B)とが設けられる。
Means for Solving Problem f] The present invention, as shown in a plan view in FIG. 1 and in a sectional view in FIG. i! M arranged to flow T s
R1F! ! , a magnetic part (2), and a pair of electric currents Th (71 and (8)) for flowing a sense current Is through this magnetically sensitive part (2). Part (2
) is electrically connected to one end of the part (7A
) and a portion (7B) extending in a direction substantially perpendicular to the original direction of conduction of the sense current Is of the magnetic sensing portion (21) and electrically insulated from the magnetic sensing portion (2).

感磁部(2)は、第1の磁性基板+11上に例えば絶縁
rf4(11)を介して被着形成される。(3)は磁気
媒体との対接ないしは対向面を示し、磁気媒体は図示し
ないが、この面(3)に対接ないしは対向して第1図に
おいて紙面と直交する方向に移動するようになされてい
る。そして面(3)から、磁気媒体上の記録信号磁界に
よる信号磁界HSが感磁部(2)に与えられるように、
感磁部(2)はその前方端面が磁気媒体との対接ないし
は対向面(3)に臨むように、且つ面(3)とほぼ直交
する方向に延在して形成される。
The magnetically sensitive part (2) is formed on the first magnetic substrate +11 via an insulating rf4 (11), for example. (3) indicates a surface that faces or faces the magnetic medium, and although the magnetic medium is not shown, it moves in a direction perpendicular to the plane of the paper in FIG. 1, facing or facing this surface (3). ing. Then, from the surface (3), so that the signal magnetic field HS due to the recording signal magnetic field on the magnetic medium is applied to the magnetic sensing part (2).
The magnetically sensitive portion (2) is formed so that its front end face faces a surface (3) that faces or faces the magnetic medium, and extends in a direction substantially perpendicular to the surface (3).

一方、この感磁部(2)おけるセンス電流Isの方向は
、信号磁界方向に沿う方向に選定されるものとして、こ
れがため、この感磁部(2)に対する対の電極(7)及
び(8)は、感磁部(2)の前方端及び後方端に配置さ
れるものであり、感磁部(2)の信号磁界の影響を大き
く受ける前方端側の電極(7)(以下前方電極という)
において、前述した感磁部(2)への接続部分(7^)
と、感磁部(2)と電気的には絶縁され、センス電流I
sの方向とほぼ直交する方向に延在する部分(7B)と
が設けられるものである。
On the other hand, the direction of the sense current Is in this magnetically sensitive part (2) is selected to be along the direction of the signal magnetic field, so that the pair of electrodes (7) and (8) for this magnetically sensitive part (2) is selected. ) are arranged at the front and rear ends of the magnetically sensitive part (2), and the electrodes (7) on the front end side (hereinafter referred to as front electrodes) are greatly affected by the signal magnetic field of the magnetically sensitive part (2). )
In, the connection part (7^) to the magnetic sensing part (2) mentioned above
is electrically insulated from the magnetic sensing part (2), and the sense current I
A portion (7B) extending in a direction substantially perpendicular to the direction of s is provided.

そして、感磁部(2)に所要のバイアス磁界を与えるた
めのバイアス導体(10)を必要に応じてセンス電流I
sとほぼ直交する方向に設ける。このようなバイアス導
体(10)を設ける場合、その少なくとも感磁部(2)
を横切る部分とその近傍においては、前方電極(7)と
同一幅、同一位置をもって互いに重なり合うように絶縁
!<11)を介して配置する。
Then, the bias conductor (10) for giving the required bias magnetic field to the magnetic sensing part (2) is connected to the sense current I as necessary.
Provided in a direction substantially perpendicular to s. When such a bias conductor (10) is provided, at least the magnetically sensitive part (2)
Insulate the parts that cross the front electrode (7) and the vicinity so that they overlap each other with the same width and the same position as the front electrode (7)! <11).

感磁部(2)は、例えばff13図に示すように、対の
第1及び第2の軟磁性薄膜(4)及び(5)が非磁性薄
膜(6)を介して積層されて成る。第1及び第2図の軟
磁性薄膜(4)及び(5)の少なくとも一方はMR効果
を有する軟磁性薄膜、例えば、Fe+ Co、 Ni或
いはこれらのうちの2種以上の合金より成る。また、こ
れら軟磁性薄膜(4)及び(5)の一方は、センダスト
For example, as shown in FIG. At least one of the soft magnetic thin films (4) and (5) in FIGS. 1 and 2 is made of a soft magnetic thin film having an MR effect, such as Fe+Co, Ni, or an alloy of two or more of these. Moreover, one of these soft magnetic thin films (4) and (5) is Sendust.

Co系アモルファス合金、MOパーマロイ等の高透磁率
軟磁性薄膜によって構成することができる。軟磁性薄膜
(4)及び(5)間に介在させる非磁性薄膜(6)は、
5i(h 、Aj22031 Ti、 Mo、へg等の
無機物薄lり、非磁性金属vrt膜等によって構成する
。そして、この非磁性薄膜(6)は、内軟磁性薄膜(4
)及び(5)間に、交換相互作用に比し静磁的相互作用
が支配的に作用するような5人〜10000人、1列え
ば5人〜500人の厚さに選定する。
It can be constructed from a high magnetic permeability soft magnetic thin film such as a Co-based amorphous alloy or MO permalloy. The non-magnetic thin film (6) interposed between the soft magnetic thin films (4) and (5) is
5i (h, Aj22031 Ti, Mo, Heg, etc.), non-magnetic metal VRT film, etc.Then, this non-magnetic thin film (6) is composed of an inner soft magnetic thin film (4
) and (5), the thickness is selected to be 5 to 10,000 people, or 5 to 500 people in one row, such that magnetostatic interaction acts more dominantly than exchange interaction.

また、この感磁部(2)の内軟磁性S股(4)及び(5
1は、その飽和磁束密度、厚さ等の選定によって両薄股
(4)及び(5)の磁束量が一致するようにして磁束が
両991Q f41及び(5)に関して全体的に閉じる
ように選定される。そして、内軟磁性薄膜(4)及び(
5)をMR効果を有する磁性薄膜とするときは、内軟磁
性MIIQ(41及び(5)は同一材料、寸法、形状と
することが望ましいが、一方をMR効果がないか殆んど
ない材料によって構成するときは、この軟磁性薄膜は、
MR効果のある他方の軟磁性薄膜に比し、電気抵抗が充
分大となるように、その構成材料の比抵抗、厚さ等の選
定を行う。
In addition, the inner soft magnetic S crotches (4) and (5) of this magnetic sensing part (2)
1 is selected so that the amount of magnetic flux of both thin legs (4) and (5) matches by selecting the saturation magnetic flux density, thickness, etc., so that the magnetic flux is closed as a whole regarding both 991Q f41 and (5). be done. Then, the inner soft magnetic thin film (4) and (
When 5) is a magnetic thin film having an MR effect, it is desirable that the inner soft magnetic MIIQ (41 and (5) be the same material, size, and shape, but one of them should be made of a material that has no or almost no MR effect. When constructed by, this soft magnetic thin film is
The specific resistance, thickness, etc. of the constituent material are selected so that the electrical resistance is sufficiently larger than that of the other soft magnetic thin film that has the MR effect.

〔作用〕[Effect]

本発明構成にれば、MR感磁部(2)において適正なバ
イアス磁化状態が得られる。すなわち、第2図で示した
ように前方電極(7)上に、これと一致するようにバイ
アス導体(10)を配置した構成において、MR感磁部
(2)における、センス電流Isの本来の通電方向に沿
う方向に関する前方端からの各位置の磁化分布をみると
、第4図に示すようになる。この図において曲線(41
)〜(43)−は夫々l5−20m八として、I b 
= 30m^、Ib=OmA。
According to the configuration of the present invention, an appropriate bias magnetization state can be obtained in the MR magnetic sensing section (2). That is, in the configuration in which the bias conductor (10) is arranged on the front electrode (7) so as to match the front electrode (7) as shown in FIG. 2, the original sense current Is in the MR magnetic sensing part (2) is The magnetization distribution at each position from the front end in the direction along the energization direction is as shown in FIG. In this figure, the curve (41
) to (43)- are respectively l5-20m8, I b
= 30m^, Ib=OmA.

Ib=−30mAとしたときの各磁化分布を示す。ごれ
によればMR感磁部(2)の前方側に片寄った位置での
広範囲の領域、したがって実質的感知部において平坦な
磁化状態が得られている。したがって、その磁化状態を
最通状態に確実に設定できることになる。
Each magnetization distribution when Ib=-30mA is shown. According to the graph, a flat magnetization state is obtained in a wide range of the MR magnetic sensing part (2) at a position offset to the front side, and therefore in the substantial sensing part. Therefore, the magnetization state can be reliably set to the open state.

上述したところから分るように、本発明では、信号磁界
が、MR惑感磁(2)におけるセンス電流Isの通電方
向と同一方向である場合、言い換えれば、感磁部(2)
の前方端に一方の電極(7)が設けられ、これがセンス
電流!Sの方向とほぼ直交する方向に延在して給電端の
導出を余儀なくされる場合に特に有怠義なものであり、
このような磁気ヘッドとしては、前述したように、MR
感磁部(2)が21−の軟磁性薄膜(4)及び(5)を
非磁性膜(6)を介して車ね合わせた積層構造を採る場
合がある。なお、このようにMR感磁部(2)を積層構
造とするときは、バルクハウゼンノイズが効果的に除去
される。これについて説明する。
As can be seen from the above, in the present invention, when the signal magnetic field is in the same direction as the sense current Is in the MR magnetic sensing part (2), in other words, the magnetic field sensing part (2)
One electrode (7) is provided at the front end of the , and this is the sense current! This is especially lazy when extending in a direction substantially perpendicular to the direction of S and forcing the feeding end to be drawn out.
As such a magnetic head, as mentioned above, MR
The magnetically sensitive part (2) may have a laminated structure in which soft magnetic thin films (4) and (5) of 21- are connected together via a non-magnetic film (6). Note that when the MR magnetic sensing section (2) has a laminated structure in this way, Barkhausen noise is effectively removed. This will be explained.

まず、バルクハウゼンノイズの発生原因について説明す
ると、従来一般のMR型磁気ヘッドのように、その感磁
部が単層のMR磁磁性映によって構成されている場合、
このMRm性薄膜は、磁気異方性エネルギー、形状異方
性等に起因する静磁エネルギー等の和が層全体として最
小となるような状態を保持すべく第11図に示すような
磁区構造をとる。すなわち、この単層磁性薄膜が、長方
形の磁性層IQ(51)であり短辺方向に磁気異方性を
有する場合、その市内において、短辺方向に沿って磁化
方向が交互に逆向きの磁区(52)が生じると共に、こ
れら隣り合う磁区(52)に関して閉ループを形成する
ようにその両端間に、磁性層の長辺方向に沿って順次逆
向きの磁区(53)が生じている。したがって、このよ
うな磁性層に外部磁界が与えられるとfIi!壁(54
) 、  (55)が移動し、これによりバルクハウゼ
ンノイズが発生する。
First, to explain the cause of Barkhausen noise, when the magnetic sensing part is composed of a single layer of MR magnetomagnetic mirror, as in conventional general MR type magnetic heads,
This MRm thin film has a magnetic domain structure as shown in Figure 11 in order to maintain a state in which the sum of magnetostatic energy caused by magnetic anisotropy energy, shape anisotropy, etc. is minimized as a whole layer. Take. In other words, if this single-layer magnetic thin film is a rectangular magnetic layer IQ (51) and has magnetic anisotropy in the short side direction, within the city, the magnetization direction is alternately opposite along the short side direction. Magnetic domains (52) are generated, and magnetic domains (53) in opposite directions are generated in sequence along the long side direction of the magnetic layer between both ends of the adjacent magnetic domains (52) so as to form a closed loop. Therefore, when an external magnetic field is applied to such a magnetic layer, fIi! Wall (54
), (55) move, which generates Barkhausen noise.

これに比し、本発明構成においては、その感磁部(2)
が非磁性薄膜(6)を介して軟磁性M 股(41及び(
5)が積層された構造とされていることによって、外部
磁界が与えられていない状態では、第3図にボずように
、磁性@pJ (41及び(5)は、矢印M1及びM2
で示すように夫々磁化容易軸方向に互いに反平行の磁化
状態にあり、磁壁が生じていない。尚、このように磁壁
が存在しないことについては磁性流体を用いたビッタ−
(Bitter)法による磁区観察によって確認したと
ころである。そして、このような感磁部(2)に対し、
その磁化困難軸方向に外部磁界Hを強めていくと、第1
2図A−Cにその磁化状態を、磁性薄膜(5)に関して
は実線矢印で、磁性薄膜(4)に関しては破線矢印で模
式的に示すように、第12図Aで示す第3図に示した反
平行の磁化状態から外部磁界Hにより第12図Bに示す
ように回転磁化過程により磁化が回転し、更に強い外部
磁界により、第12図Cに示すように、両磁性薄股(4
)及び(5)が同方向に磁化される。この場合側磁性薄
膜(4)及び(5)においてその市内で磁化が回転する
ので、磁壁は生ずることがなく、バルクハウゼンノイズ
の発生が回避される。つまり、両磁性薄ff!X!(4
1及び(5)の磁化困難軸方向を磁束の伝搬方向とする
ことによって磁壁移動に起因するバルクハウゼンノイズ
が回避される。
In contrast, in the configuration of the present invention, the magnetically sensitive portion (2)
is a soft magnetic M crotch (41 and () through a non-magnetic thin film (6)
5) has a laminated structure, so that when no external magnetic field is applied, the magnetism @pJ (41 and (5) are indicated by arrows M1 and M2, as shown in Fig. 3).
As shown in , the magnetization states are antiparallel to each other in the direction of the easy axis of magnetization, and no domain wall is generated. In addition, regarding the absence of domain walls in this way, the bitter using magnetic fluid
This was confirmed by magnetic domain observation using the (Bitter) method. And for such a magnetically sensitive part (2),
When the external magnetic field H is strengthened in the direction of the hard magnetization axis, the first
The magnetization state is schematically shown in FIG. 3, shown in FIG. 12A, as shown in FIG. The external magnetic field H causes the magnetization to rotate from the antiparallel magnetization state through the rotational magnetization process as shown in FIG.
) and (5) are magnetized in the same direction. In this case, since the magnetization rotates within the side magnetic thin films (4) and (5), no domain wall is generated, and Barkhausen noise is avoided. In other words, both magnetic thin ff! X! (4
Barkhausen noise caused by domain wall movement can be avoided by setting the direction of the hard magnetization axis of 1 and (5) as the propagation direction of the magnetic flux.

更にこのような感磁部(2)を有する磁気ヘッドの動作
を第13図〜第15図を参照して説明する。第13図〜
第15図は、感磁部(2)の両磁性薄験(4)及び(5
)のみを模式的に示したもので、これら磁性M IIQ
 (4)及び(5)は第13図中にe−aでボず方向に
初期状態で磁化容易軸を有する。そしてこれら磁性tW
 股f4+及び(5)にセンス電流Isを通ずる。この
通電によって非磁性薄膜(図丞せず)を挟んで対向する
両磁性薄膜(4)及び(5)には電流Isと直交する互
いに逆向きの磁界が発生し、これによって磁性薄膜(4
)及び(5)は同図に実線及び破線矢印M1及びM2で
ボずように磁化される。一方、ごの感+iI部(2)に
は電流Isに沿う方向に外部からバイアス磁界HFIが
与えられると、このバイアス磁界H,によって、磁性薄
膜(4)及び(5)の磁化の向きは、第14図に矢印M
B1及びMB2で示ずように所要の角度だけ回転される
。このバイアス磁界Haによって与えられる磁化の方向
は、電流Isの方向に対してはぼ45゜となるように、
そのバイアス磁界H,の大きさが選ばれるものである。
Further, the operation of the magnetic head having such a magnetic sensing portion (2) will be explained with reference to FIGS. 13 to 15. Figure 13~
Figure 15 shows both magnetic thin samples (4) and (5) of the magnetically sensitive part (2).
) is shown schematically, and these magnetic M IIQ
(4) and (5) have an axis of easy magnetization in the initial state in the direction of the edge at ea in FIG. And these magnetic tW
A sense current Is is passed through the crotch f4+ and (5). This energization generates magnetic fields in opposite directions perpendicular to the current Is in both magnetic thin films (4) and (5) facing each other with a non-magnetic thin film (not shown) in between, which causes the magnetic thin film (4)
) and (5) are magnetized as shown by solid line and broken line arrows M1 and M2 in the figure. On the other hand, when a bias magnetic field HFI is externally applied to the +iI part (2) in the direction along the current Is, the direction of magnetization of the magnetic thin films (4) and (5) is changed by this bias magnetic field H. Arrow M in Figure 14
It is rotated by the required angle as shown by B1 and MB2. The direction of magnetization given by this bias magnetic field Ha is approximately 45° with respect to the direction of the current Is,
The magnitude of the bias magnetic field H, is selected.

面、このようにバイアス磁界HBによってセンス電流I
sに対してほば45゜の磁化を与えるごとによって妬い
感度と直線性を得ることができることについては、通常
のMR型磁気ヘッドにおいて行われていると同様である
In this way, the bias magnetic field HB causes the sense current I
The fact that it is possible to obtain jealousy sensitivity and linearity by applying magnetization at an angle of approximately 45° with respect to s is the same as in ordinary MR type magnetic heads.

そして、この状態で第15図に示すように、信号磁界H
5がセンス電流Isに沿う方向、すなわち磁化困難軸方
向に与えられると磁化が回転し夫々その磁化の方向が矢
印MSよ及びMS2に示すように反時計及び時針方向に
角度θ1及び−01回転する。
In this state, as shown in FIG. 15, the signal magnetic field H
5 is applied in the direction along the sense current Is, that is, in the direction of the hard magnetization axis, the magnetization rotates, and the direction of the magnetization rotates counterclockwise and in the hour hand direction by angles θ1 and -01, respectively, as shown by arrows MS and MS2. .

これによって各磁性薄膜(4)及び(5)が例えば共に
MR磁性薄膜である場合は、それぞれ抵抗変化が生じる
ことになるが、このMR磁性薄膜の抵抗の変化は角度の
変化をθとするとき cos2 θに比例するので、今
、第14図における内磁性薄膜(4)及び(5)の磁化
MB1及びMB2が互いに90°ずれているとすると、
θ1及び−θ1の変化で、内磁性薄膜(4)及び(5)
に関して抵抗の変化の増減が一致する。つまり、一方の
磁性薄膜(4)の抵抗が増加すれば、他方の磁性薄膜(
5)もその抵抗は増加する方向に変化する。
As a result, if the magnetic thin films (4) and (5) are both MR magnetic thin films, a change in resistance will occur, but the change in resistance of this MR magnetic thin film is calculated when the change in angle is θ. Since it is proportional to cos2 θ, if the magnetizations MB1 and MB2 of the inner magnetic thin films (4) and (5) in FIG. 14 are shifted by 90 degrees from each other, then
By changing θ1 and -θ1, the internal magnetic thin films (4) and (5)
The increase or decrease in resistance changes with respect to In other words, if the resistance of one magnetic thin film (4) increases, the resistance of the other magnetic thin film (4) increases.
5) The resistance also changes in the direction of increasing.

そして、これら磁性FX IIQ (4)及び(5)の
抵抗変化、すなわち感磁部(2)の両端の端子t1及び
も2間に抵抗変化を生じ、この抵抗変化を端子t1及び
+2間の電圧変化として検出することができることにな
る。
Then, the resistance change of these magnetic FX IIQ (4) and (5), that is, the resistance change occurs between the terminals t1 and 2 at both ends of the magnetic sensing part (2), and this resistance change is caused by the voltage between the terminals t1 and +2. This means that it can be detected as a change.

上述したように、MR感磁部(2)を、第1及び第2の
軟磁性薄膜(4)及び(5)が非磁性薄膜(6)を介し
て積層された構造とすることによっ°(バルクハウゼン
ノイズの改善がはかられるが、この場合上述したところ
から、理解されるように感磁部(2)へのセンス電流I
sの方向は、信号磁界HSの印加方向と同一方向に選定
されるのである。
As described above, the MR magnetic sensing part (2) has a structure in which the first and second soft magnetic thin films (4) and (5) are laminated with the nonmagnetic thin film (6) in between. (Barkhausen noise is improved, but in this case, from the above, it is understood that the sense current I to the magnetically sensitive part (2)
The direction of s is selected to be the same direction as the direction in which the signal magnetic field HS is applied.

〔実施例〕〔Example〕

第1図及び第2図を参照して、本発明の一例を詳細に説
明する。
An example of the present invention will be described in detail with reference to FIGS. 1 and 2.

この場合、例えばNi−Zn系フェライト、Mn−Zn
系フェライト等より成る第1の磁性基板(:Ll)上に
例えば厚さ0.8μmの5i02等の絶縁層(11)を
形成し、これの上に第1の軟磁性薄膜(4)、非磁性薄
膜(6)、第2の軟磁性薄膜(5)を順次スパッタリン
グ或いは蒸着装置によって形成し、フォトリソグラフィ
ー技術によってパターン化してMR感磁部(2)を形成
する。
In this case, for example, Ni-Zn ferrite, Mn-Zn
For example, an insulating layer (11) of 5i02 or the like having a thickness of 0.8 μm is formed on a first magnetic substrate (Ll) made of a magnetic ferrite or the like, and a first soft magnetic thin film (4) and a non-magnetic thin film (4) are formed on this. A magnetic thin film (6) and a second soft magnetic thin film (5) are sequentially formed by sputtering or an evaporation device, and patterned by photolithography to form an MR magnetically sensitive part (2).

非磁性薄膜(6)は、絶縁性或いは導電性の非磁性材例
えば5t02 、 Ti等によって構成し、その厚さは
、内磁性薄膜(4)及び(5)間に、実質的に交換相互
作用が殆ど働くことがなく、クーロンの法則に従う相互
作用による結合、つまり静磁的結合が生じる厚さの例え
ば20人に選定する。
The non-magnetic thin film (6) is made of an insulating or conductive non-magnetic material such as 5T02, Ti, etc., and its thickness is such that there is no substantial exchange interaction between the inner magnetic thin films (4) and (5). The thickness is selected to be, for example, 20, so that there is almost no effect and coupling by interaction according to Coulomb's law, that is, magnetostatic coupling occurs.

両磁性薄j1央(4)及び(5)の少(とも一方は、前
述したようにFe、 Ni、 Coの単体、若しくはこ
れら2種以上の合金によって構成し得る。
One of the two magnetic thin layers (4) and (5) may be composed of Fe, Ni, Co, or an alloy of two or more of these, as described above.

そし°(、MR感磁部(2)の前方端及び後方端には、
このMR感磁部(2)に磁気媒体信号磁界の印加方向に
沿ってセンス電流ISを通ずるための電極(7)及び(
8)を電気的に被着する。Ll及び+2は、これら電極
(7)及び(8)の端子を示す。
At the front and rear ends of the MR magnetic sensing part (2),
An electrode (7) and (
8) is electrically deposited. Ll and +2 indicate the terminals of these electrodes (7) and (8).

前方電極(7)は、感磁部(2)の前端上に電気的に連
結して被着される部分(7A)と、感磁部(2)におけ
るセンス電流のIsの本来の通電方向と直交する方向に
延在し、感磁部(2)とは絶縁層(11)を介して電気
的に絶縁される部分(7B)とを有してなる。
The front electrode (7) has a portion (7A) that is electrically connected and attached on the front end of the magnetically sensitive part (2), and a part (7A) that is electrically connected to the front end of the magnetically sensitive part (2) and the original direction of the sense current Is in the magnetically sensitive part (2). It has a portion (7B) that extends in a perpendicular direction and is electrically insulated from the magnetically sensitive portion (2) via an insulating layer (11).

電極(7)の幅Wは例えば7μmに選定され、部分(7
八)の感磁部(2)への被着幅W1は例えば2μmに選
定される。
The width W of the electrode (7) is selected to be 7 μm, for example, and the portion (7)
8) The adhesion width W1 to the magnetically sensitive portion (2) is selected to be, for example, 2 μm.

そして、電極(7)上に、少くとも感磁部(2)との重
ね合せ部分においては、電極(7)と合致する幅Wと位
置をもって絶縁層(11)を介してバイアス導体(10
)を被着する。すなわちこのバイアス導体(10)は、
感磁部(2)へのセンス′!!流1sと直交する方向に
延在し、この方向に通電がなされて、センス電流Isに
沿う方向のバイアス磁界H8を感磁部(2)に与えるよ
うにする*LB1及びt 82は、このバイアス導体(
10)の通電端子を示す。
Then, a bias conductor (10) is placed on the electrode (7) via an insulating layer (11) with a width W and a position that match the electrode (7), at least in the overlapped portion with the magnetically sensitive part (2).
). That is, this bias conductor (10) is
Sense to the magnetic sensing part (2)'! ! It extends in a direction perpendicular to the sense current Is, and is energized in this direction to apply a bias magnetic field H8 in the direction along the sense current Is to the magnetic sensing part (2). conductor(
10) shows the current-carrying terminal.

そして、基板(包)−ヒに、感磁部(2)等の磁気ヘッ
ド構成部を覆うようにガラス等の非磁性融着材(13)
を介して、例えば第1の磁性基N1(21)との間隔が
0.8μmとなるように第2の磁性基板(22)を接合
する。
Then, a non-magnetic adhesive material (13) such as glass is placed on the substrate (envelope) so as to cover the magnetic head components such as the magnetic sensing part (2).
For example, the second magnetic substrate (22) is bonded to the first magnetic group N1 (21) at a distance of 0.8 μm through the substrate.

上述の構成において、各層、例えば絶縁層(11)、バ
イアス導体(10) 、電極(7)及び(8)等は夫々
スパッタリング、蒸着によって各層を形成し、フォトリ
ソグラフィー技術によって所要のパターンに形成し得る
In the above structure, each layer, such as the insulating layer (11), the bias conductor (10), the electrodes (7) and (8), etc., is formed by sputtering or vapor deposition, and is formed into a desired pattern by photolithography. obtain.

上述の構成において、感磁Ql (2+には、その電極
導電層(7)及び+8)間に直流のセンス電流Isが与
えられた状態にあると共に、バイアス導体く10)に所
要の電流が通電されていて、所要のバイアス磁界HBが
与えられるようになされる。この状態でその磁気記録媒
体との対接ないしは対向面(3)に、磁気記録媒体が対
接ないしは対向しつつ第1図において紙面と直交する方
向に移行することによって、この媒体上の記録磁化に応
じた信号磁界HSがMR感磁部(2)にそのセンス電流
ISと同方向に与えられ、この磁界Hsの変化に応じた
抵抗変化が感磁部(2)に生じて、これによって磁気記
録媒体上の記録の読み出しが行われることになる。
In the above configuration, the magnetically sensitive Ql (2+ is in a state where a DC sense current Is is applied between its electrode conductive layers (7) and +8), and a required current is applied to the bias conductor (10). is applied so that the required bias magnetic field HB is applied. In this state, by moving the magnetic recording medium in a direction perpendicular to the paper plane in FIG. 1 while facing or facing the magnetic recording medium, the recorded magnetization on this medium is A signal magnetic field HS corresponding to the magnetic field Hs is applied to the MR magnetic sensing part (2) in the same direction as the sense current IS, and a resistance change corresponding to the change in the magnetic field Hs occurs in the magnetic sensing part (2). Reading of the recording on the recording medium will be performed.

尚、MR感磁部(2)の両値性薄膜(4)及び(5)の
いずれか一方の磁性層M’A (41又は(5)をMR
効果が殆どない磁性薄膜によって構成する場合において
も前述したように両磁性層(4)及び(5)の磁束量が
一致するように厚さ等の選定が行われると共にMR効果
の殆どない方の磁性薄膜に関しては、MR効果を有する
磁性薄膜にセンス電流の主たる部分が流れるようにこの
非MR磁性薄膜についての両端の電極(7)及び(8)
間の抵抗は、MRfa性薄膜のそれより充分大となるよ
うに、比抵抗の大きいFeCo51B系、CoZrNb
系の各アモルファス合金あるいはFe−^1−3t糸の
いわゆるセンダスト合金のような高比抵抗、高透磁率磁
性層によって構成し得る。このMR9J1果の小さい高
透磁率磁性層に用い得る材料としてはMoパーマロイ等
も考えられる。勿論、これらの材料は電極(7)、(8
1の材料としても考えられる。
In addition, the magnetic layer M'A (41 or (5) of either one of the bivalent thin films (4) and (5) of the MR magnetic sensing part (2) is
Even in the case of using a magnetic thin film that has almost no MR effect, the thickness etc. are selected so that the magnetic flux amounts of both magnetic layers (4) and (5) match as described above, and the one that has almost no MR effect is selected. Regarding the magnetic thin film, the electrodes (7) and (8) at both ends of the non-MR magnetic thin film are connected so that the main part of the sense current flows through the magnetic thin film having the MR effect.
The resistance between FeCo51B series and CoZrNb, which have high specific resistance, is sufficiently larger than that of the MRfa thin film.
It can be constructed by a high resistivity, high permeability magnetic layer, such as amorphous alloys of the system or so-called sendust alloys of Fe-^1-3t threads. Mo permalloy or the like may be considered as a material that can be used for this high permeability magnetic layer with a small MR9J1 effect. Of course, these materials are used for electrodes (7) and (8).
It can also be considered as the first material.

尚、上述した例では、バイアス導体(10)を設けて感
磁部(2)に外部磁界HBをり、えるようにした場合で
あるが、バイアス導体(10)が電極(7)に重ね合せ
られて設けられていることから、成る場合は、第5図に
その平面図を示し、第6図に断面図を示すようにバイア
ス導体(10)の配設を省略して、電極(7)を感磁部
(2)を横切るように設けて、その両端間にバイアス電
流1bを定電流源SRから供給すると共に、電極(7)
及び(8)間にセンス電流■Sをその定電流源SSから
重畳して供給するようにすることもできる。
In the above example, the bias conductor (10) is provided to apply the external magnetic field HB to the magnetically sensitive part (2), but if the bias conductor (10) is superimposed on the electrode (7), If the bias conductor (10) is provided as shown in FIG. 5 and its cross-sectional view is shown in FIG. is provided across the magnetic sensing part (2), and a bias current 1b is supplied from a constant current source SR between both ends of the electrode (7).
It is also possible to superimpose and supply the sense current ■S from the constant current source SS between (8) and (8).

〔発明の効果〕〔Effect of the invention〕

上述したように、本発明によれば、MR感磁部(2)に
対する前方電極(7)による磁界とバイアス磁界との不
安定な相互の影響を回避したので、安定して、適正なバ
イアス磁化状態をMR感磁部(2)に得ることができ、
感度の高い、直線性にすぐれた磁気ヘッドを確実に得る
ことができるものである。
As described above, according to the present invention, since the unstable mutual influence between the magnetic field by the front electrode (7) and the bias magnetic field on the MR magnetic sensing part (2) is avoided, stable and appropriate bias magnetization can be achieved. state can be obtained in the MR magnetic sensing part (2),
This makes it possible to reliably obtain a magnetic head with high sensitivity and excellent linearity.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明による磁気抵抗効果型磁気ヘッドの一例
の路線的拡大平面図、第2図はそのA−A線上の断面図
、第3図はその感磁部の説明図、第4図は感磁部の磁化
分布曲線図、第5図は本発明による磁気抵抗効果型磁気
ヘッドの他の例の路線的拡大平面図、第6図はそのA−
A線上の断面図、第7図は従来の磁気抵抗効果型磁気ヘ
ッドの路線的拡大平面図、第8図は第7図のA−A線上
の断面図、第9図及び第10図はそれぞれその感磁部の
磁化分布曲線図、第11図はffi層磁外磁性薄膜区構
造をボす図、第12図A−Cは感磁部の外部磁界による
磁化状態の説明図、第13図〜第15図は磁気ヘッドの
動作説明図である。 (21)及び(22)第1及び第2の磁性基板、(2)
は感磁部、(4)及び(5)はその第1及び第2の軟磁
性薄膜、(6)は非磁性薄膜、(71(81は電極、(
10)はバイアス導体である。
FIG. 1 is an enlarged plan view of an example of the magnetoresistive magnetic head according to the present invention, FIG. 2 is a cross-sectional view taken along the line A-A, FIG. 3 is an explanatory diagram of the magnetic sensing part, and FIG. 4 5 is an enlarged plan view of another example of the magnetoresistive magnetic head according to the present invention, and FIG. 6 is its A-
7 is a cross-sectional view along line A, FIG. 7 is an enlarged plan view of a conventional magnetoresistive magnetic head, FIG. 8 is a sectional view taken along line A-A in FIG. 7, and FIGS. 9 and 10 are respectively A diagram of the magnetization distribution curve of the magnetic sensitive part, Fig. 11 is a diagram showing the ffi layer extramagnetic thin film structure, Fig. 12 A-C is an explanatory diagram of the magnetization state of the magnetic sensitive part due to an external magnetic field, and Fig. 13 ~FIG. 15 is an explanatory diagram of the operation of the magnetic head. (21) and (22) first and second magnetic substrates, (2)
(4) and (5) are the first and second soft magnetic thin films, (6) is the non-magnetic thin film, (71 (81 is the electrode, (
10) is a bias conductor.

Claims (1)

【特許請求の範囲】 信号磁界の方向と同一方向にセンス電流を流すように配
された磁気抵抗感磁部と、 上記感磁部にセンス電流を流す対の電極とを有し、 上記電極の一方は、上記感磁部の一端に接続される部分
と上記感磁部の上記センス電流方向とほぼ直交する方向
に延在するとともに、上記感磁部と電気的に絶縁されて
上記感磁部上に延在する部分とを有することを特徴とす
る磁気抵抗効果型磁気ヘッド。
[Scope of Claims] A magnetoresistive magnetic sensing part arranged to flow a sense current in the same direction as the direction of a signal magnetic field, and a pair of electrodes that flow a sense current in the magnetic sensing part, One side extends in a direction substantially perpendicular to the direction of the sense current of the magnetically sensitive section and a portion connected to one end of the magnetically sensitive section, and is electrically insulated from the magnetically sensitive section. 1. A magnetoresistive magnetic head, comprising a portion extending upwardly.
JP16876586A 1986-07-17 1986-07-17 Magneto-resistance effect type magnetic head Pending JPS6325817A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16876586A JPS6325817A (en) 1986-07-17 1986-07-17 Magneto-resistance effect type magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16876586A JPS6325817A (en) 1986-07-17 1986-07-17 Magneto-resistance effect type magnetic head

Publications (1)

Publication Number Publication Date
JPS6325817A true JPS6325817A (en) 1988-02-03

Family

ID=15874032

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16876586A Pending JPS6325817A (en) 1986-07-17 1986-07-17 Magneto-resistance effect type magnetic head

Country Status (1)

Country Link
JP (1) JPS6325817A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04256443A (en) * 1990-08-27 1992-09-11 Phillips Petroleum Co Alkali metal catalyst composition

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04256443A (en) * 1990-08-27 1992-09-11 Phillips Petroleum Co Alkali metal catalyst composition

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