JPS63282189A - 分子線エピタキシャル成長装置 - Google Patents

分子線エピタキシャル成長装置

Info

Publication number
JPS63282189A
JPS63282189A JP62113554A JP11355487A JPS63282189A JP S63282189 A JPS63282189 A JP S63282189A JP 62113554 A JP62113554 A JP 62113554A JP 11355487 A JP11355487 A JP 11355487A JP S63282189 A JPS63282189 A JP S63282189A
Authority
JP
Japan
Prior art keywords
molecular beam
guide tube
heater
main crucible
open part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62113554A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0352435B2 (th
Inventor
Toshihiro Nakamura
中村　智弘
Junji Saito
淳二 斉藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP62113554A priority Critical patent/JPS63282189A/ja
Publication of JPS63282189A publication Critical patent/JPS63282189A/ja
Publication of JPH0352435B2 publication Critical patent/JPH0352435B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP62113554A 1987-05-12 1987-05-12 分子線エピタキシャル成長装置 Granted JPS63282189A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62113554A JPS63282189A (ja) 1987-05-12 1987-05-12 分子線エピタキシャル成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62113554A JPS63282189A (ja) 1987-05-12 1987-05-12 分子線エピタキシャル成長装置

Publications (2)

Publication Number Publication Date
JPS63282189A true JPS63282189A (ja) 1988-11-18
JPH0352435B2 JPH0352435B2 (th) 1991-08-09

Family

ID=14615235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62113554A Granted JPS63282189A (ja) 1987-05-12 1987-05-12 分子線エピタキシャル成長装置

Country Status (1)

Country Link
JP (1) JPS63282189A (th)

Also Published As

Publication number Publication date
JPH0352435B2 (th) 1991-08-09

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term