JPS63282943A - magneto-optical recording medium - Google Patents
magneto-optical recording mediumInfo
- Publication number
- JPS63282943A JPS63282943A JP11864687A JP11864687A JPS63282943A JP S63282943 A JPS63282943 A JP S63282943A JP 11864687 A JP11864687 A JP 11864687A JP 11864687 A JP11864687 A JP 11864687A JP S63282943 A JPS63282943 A JP S63282943A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic layer
- recording
- magneto
- recording medium
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
Abstract
Description
【発明の詳細な説明】
艮権宏駅
本発明は磁性層を再生用及び記録用の2つの異なる機能
に分離した光磁気記録媒体に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magneto-optical recording medium in which a magnetic layer is separated into two different functions, one for reproduction and one for recording.
従来技術
本発明者は先に特開昭59−45644号及び同60−
164302号においてマグネトプラムバイトヘキサゴ
ナルフェライト磁性体を光磁気記録媒体に用いることを
提案した。ここで使用される磁性体は光磁気記録媒体に
おける記録、再生又は消去特性を改良するため結晶内の
Feの一部を他の金属で置換したものである。しかし記
録特性(記録感度)を改良するためにFeの一部をIn
。Prior Art The present inventor previously disclosed Japanese Patent Application Laid-open No. 59-45644 and No. 60-
No. 164302 proposed the use of magnetoplumbite hexagonal ferrite magnetic material in magneto-optical recording media. The magnetic material used here is one in which part of the Fe in the crystal is replaced with another metal in order to improve the recording, reproducing, or erasing characteristics of the magneto-optical recording medium. However, in order to improve the recording characteristics (recording sensitivity), some of the Fe was
.
Sc、Zn等で置換してキュリ一温度を下げると、記録
保持に寄与する保磁力Hcが著しく低下するし、また消
去特性を改良するためにFeの一部をA氾、Ga、Rh
、Cr等で置換して飽和磁化Msを小さくし、適正値に
すると、再生特性に寄与する磁気光学効果(この場合は
ファラデー回転角θF)が著しく減少する。If the Curie temperature is lowered by substituting Sc, Zn, etc., the coercive force Hc, which contributes to recording retention, will be significantly lowered, and in order to improve the erasing characteristics, some of the Fe may be replaced with A, Ga, Rh, etc.
, Cr, etc. to reduce the saturation magnetization Ms to an appropriate value, the magneto-optic effect (in this case, the Faraday rotation angle θF) that contributes to the reproduction characteristics is significantly reduced.
従って前記提案の光磁気記録媒体では記録、再生及び消
去特性を全て満足することは困難であった。しかもこれ
らの記録媒体は磁性膜を作製する際、基板温度を550
°C以上と高くする必要があり、このため特殊な耐熱基
板しか使用できず、基板を高温に維持して均一に加熱す
ることは困難であり、量産化も困難であった。Therefore, it is difficult for the proposed magneto-optical recording medium to satisfy all of the recording, reproducing and erasing characteristics. Moreover, when producing the magnetic film of these recording media, the substrate temperature is kept at 550°C.
It is necessary to raise the temperature to a high temperature of .degree. C. or higher, and therefore only special heat-resistant substrates can be used.It is difficult to maintain the substrate at a high temperature and heat it uniformly, and mass production is also difficult.
目 的
本発明の目的は記録、再生及び消去特性を全て満足する
と共に、基板の使用範囲を拡大し、且つ量産化も可能な
光磁気記録媒体を提供することである。Object The object of the present invention is to provide a magneto-optical recording medium that satisfies all recording, reproducing and erasing characteristics, expands the range of use of the substrate, and can be mass-produced.
構 成
本発明の光磁気記録媒体は耐熱基板上に磁性層を有する
光磁気記録媒体において、磁性層を再生用及び記録用の
2つの機能の異なる層に分割し、再生用磁性層はBi含
有鉄ガーネット及びCo含有フェライトの少くとも1種
の磁性体で構成し、記録用磁性層はHeが大きく、且つ
適正なMsを有するマグネトプラムバイトヘキサゴナル
フェライト磁性体とこの磁性体に対し融点降下作用のあ
る金属、金属の合金、又は化合物を含有して構成したこ
とを特徴とするものである。Structure The magneto-optical recording medium of the present invention is a magneto-optical recording medium having a magnetic layer on a heat-resistant substrate, in which the magnetic layer is divided into two layers with different functions, one for reproduction and one for recording, and the magnetic layer for reproduction is made of Bi-containing iron. The recording magnetic layer is composed of at least one type of magnetic material such as garnet and Co-containing ferrite, and has a magnetoplumbite hexagonal ferrite magnetic material having a large He content and an appropriate Ms, and a melting point lowering effect on this magnetic material. It is characterized by containing a metal, a metal alloy, or a compound.
このように本発明の光磁気記録媒体は従来の磁性層を、
再生専用としてθ、の大きい磁性層、及び記録(記録保
持及び消去)専用としてHeが大きく、且つ適正なMs
を有する磁性層の2つの機能の異なる層に分離したもの
である。なおこれらの2つの層は基板に対しいずれが上
にあっても下にあってもよい。In this way, the magneto-optical recording medium of the present invention replaces the conventional magnetic layer with
A magnetic layer with a large θ for reproduction only, and a large He and appropriate Ms for recording (record retention and erasing) only.
The magnetic layer is separated into two layers with different functions. Note that either of these two layers may be located above or below the substrate.
本発明の再生用磁性層はBi含有ガーネット及びCo含
有フェライトの少くとも1種の磁性体で構成される。こ
れら磁性体の具体例をθ、値と共に下記に示す。The reproducing magnetic layer of the present invention is composed of at least one kind of magnetic material: Bi-containing garnet and Co-containing ferrite. Specific examples of these magnetic materials are shown below along with θ and values.
【 糺−栽 方傳蚤劉虱(A−1)
1.2Bi203−0.3Y20.−0.6Ga20
3−1.9F82032.0(λ=633nm)(A−
2) Bi2O3・0.5Gd203−0.6A&03
・1.9Fe2031.5(λ=6330m)(A−3
) Bi、03・0.5DY203−COO−GeO□
−1,5Fe20. 1.0(λ=633nm)(A
−4) Bi2O3・0.5DY203−0.4In2
03・2.3Fe2031.5(λ=633nm)(A
−5)Co0・0.4A馬03・0.6Fe2032.
0(127800m)(A−6) CoO・O−6Mn
0 ・O−2GeO□+ o、5Fe、o31.5 (
λ=7800m)(A−7) Co0・0.6Zn0・
0−2T102 ・O−5Fe2o31 、O(127
800m)(F8) Coo・O−6Rh203 ・0
.4Fe203 2.5 (127800m
)(A−9)CoO・0.6Cr203・0.4Fe2
032.0(127800m)なお再生用磁性層はこれ
ら組成のターゲット又は焼結物を基板等の表面上にスパ
ッタリング又は蒸着法により成膜することにより形成さ
れる。[Tsu-Cai Hoden Flea Liu Fu (A-1)
1.2Bi203-0.3Y20. -0.6Ga20
3-1.9F82032.0 (λ=633nm) (A-
2) Bi2O3・0.5Gd203-0.6A&03
・1.9Fe2031.5 (λ=6330m) (A-3
) Bi, 03・0.5DY203-COO-GeO□
-1,5Fe20. 1.0 (λ=633 nm) (A
-4) Bi2O3・0.5DY203-0.4In2
03・2.3Fe2031.5(λ=633nm)(A
-5) Co0/0.4A horse 03/0.6Fe2032.
0 (127800m) (A-6) CoO・O-6Mn
0 ・O-2GeO□+ o, 5Fe, o31.5 (
λ=7800m) (A-7) Co0・0.6Zn0・
0-2T102 ・O-5Fe2o31 , O(127
800m) (F8) Coo・O-6Rh203 ・0
.. 4Fe203 2.5 (127800m
) (A-9) CoO・0.6Cr203・0.4Fe2
032.0 (127800 m) Note that the reproducing magnetic layer is formed by depositing a target or sintered material having these compositions on the surface of a substrate or the like by sputtering or vapor deposition.
厚さは通常、0.1〜1μm程度である。The thickness is usually about 0.1 to 1 μm.
一方、本発明の記録用磁性層はHcが大きく、且つ適正
なMsを有するマグネトプラムバイトヘキサゴナルフェ
ライト磁性体とこの磁性体に対し融点降下作用のある金
属、金属の合金又は酸化物、炭酸塩等の化合物を含む系
で構成される。ここで前記フェラト磁性体のHeは0.
5〜5KOeが好ましく、またMsは5−50emu/
gが好ましい。このような特性を有するマグネトプラム
バイトヘキサゴナルフェライト組成の具体例をHc値及
びMs値と共に下記に示す。On the other hand, the recording magnetic layer of the present invention includes a magnetoplumbite hexagonal ferrite magnetic material having a large Hc and an appropriate Ms, and a metal, metal alloy or oxide, carbonate, etc. that has a melting point lowering effect on this magnetic material. It consists of a system containing the following compounds. Here, He of the feratomagnetic material is 0.
5 to 5 KOe is preferable, and Ms is 5 to 50 emu/
g is preferred. Specific examples of magnetoplumbite hexagonal ferrite compositions having such characteristics are shown below along with Hc values and Ms values.
換 組成 □Ms(esu/g)(1)S■・A
馬03・0.調03・4(Fも03) 2
15(2)BaO−A馬へ・0.5In203・4
〔Fe2O3〕215(3)BaO・1.5A馬03・
SnO2・ZnO・4〔Fe2O3〕415(4) S
rO・1.5Ga20.・0.5Sc20.・3.5[
Fe2O,) 2 25(5) BaO−1
,5Cr203・0.5In203・3.5[Fe2O
,) 1.0 30Hα覗→融(esu/g)
(6)SrO・1.5A馬03・0.5Tモ0・0.5
Zn20・3.5〔Fe2O3〕4.020(7)Ba
O・1.5Rh203・0.5Sb203−4.0[F
e2O,] 4.0 25(8) Ba
O・ALO,・0.5Ti02・0.5Zn03.5(
Fe20.) 2.0 20またこれらフェ
ライト磁性体に対し融点降下作用のある金属、金属の合
金又は化合物の具体例としてはSn、 Pb、 Si、
In2Te2. Sb2Te3゜Bi2Te3.Ga
Sb、InSb、PbO,PbF2゜Na2CO3,B
i2O3,P2O,、H3BO3,NaCO3等及びそ
れらの混合物が挙げられる。更に記録用磁性層に用いら
れる焼結物及びターゲットの具体例としては下記のもの
が挙げられる。Replacement Composition □Ms (esu/g) (1) S■・A
Horse 03.0. Key 03.4 (F also 03) 2
15(2) BaO-A horse・0.5In203・4
[Fe2O3]215(3)BaO・1.5A horse 03・
SnO2・ZnO・4[Fe2O3]415(4) S
rO・1.5Ga20.・0.5Sc20.・3.5 [
Fe2O,) 2 25(5) BaO-1
,5Cr203・0.5In203・3.5[Fe2O
,) 1.0 30Hα peek → melt (esu/g) (6) SrO・1.5A horse 03・0.5Tmo 0・0.5
Zn20・3.5[Fe2O3]4.020(7)Ba
O・1.5Rh203・0.5Sb203-4.0[F
e2O,] 4.0 25(8) Ba
O・ALO,・0.5Ti02・0.5Zn03.5(
Fe20. ) 2.0 20 Specific examples of metals, metal alloys, or compounds that have a melting point lowering effect on these ferrite magnetic materials include Sn, Pb, Si,
In2Te2. Sb2Te3゜Bi2Te3. Ga
Sb, InSb, PbO, PbF2゜Na2CO3,B
Examples include i2O3, P2O, H3BO3, NaCO3, and mixtures thereof. Further, specific examples of the sintered material and target used for the recording magnetic layer include the following.
刈採 組 成
(B−1)SrO・ALO3−0,5SC203−4(
Fe20.)−PbO(B−2)BaO−A%03・0
.5In203・4(Fe20.)・PbO・PbF2
(B−3)Ba04.5A403・SnO□・Zn0・
4(Fe203:l ・Na2Co3(B−4)Srf
)1.5Ga203・0.5Sc203・3.5(Fe
203)・Bi203(B−5) Ba0・1.5Cr
203−0.5In203−3.5(Fe203) −
p2o、 −H3BO3(B−6)SrO−1,51,
03−0,5Te20−0.5Zn20−3.5(Fe
203)・Bi203(B−7)BaO−1,5Rh2
03・0.5Sb203−4.0(Fe203:l−B
i203(B−8)BaO・A鳥03・0.5Ti20
3・0.5Sc203・3.5〔Fe2O3〕・P2O
5・NaCO3記録用磁性層は基板上にこれら組成の焼
結物又はターゲットをスパッタリング、蒸着等の方法で
成膜することにより形成される。厚さは通常、0.1〜
1μm程度である。Harvesting composition (B-1) SrO・ALO3-0,5SC203-4(
Fe20. )-PbO(B-2)BaO-A%03.0
.. 5In203・4(Fe20.)・PbO・PbF2
(B-3) Ba04.5A403・SnO□・Zn0・
4(Fe203:l ・Na2Co3(B-4)Srf
)1.5Ga203・0.5Sc203・3.5(Fe
203)・Bi203(B-5) Ba0・1.5Cr
203-0.5In203-3.5 (Fe203) -
p2o, -H3BO3(B-6)SrO-1,51,
03-0,5Te20-0.5Zn20-3.5(Fe
203)・Bi203(B-7)BaO-1,5Rh2
03・0.5Sb203-4.0(Fe203:l-B
i203 (B-8) BaO・A bird 03・0.5Ti20
3・0.5Sc203・3.5[Fe2O3]・P2O
5.NaCO3 The recording magnetic layer is formed by depositing a sintered product or a target having these compositions on a substrate by sputtering, vapor deposition, or other methods. Thickness is usually 0.1~
It is about 1 μm.
基板としては通常のガラス、例えばソーダガラス、鉛ガ
ラス、ホウケイ酸ガラス、石英ガラス、アルミノケイ酸
ガラス、結晶化ガラス(商品名ミラクロンPH−3、ミ
ラクロンPC−1、ミラクロンPP−1、ミラクロンP
H−1);セラミック、例えばアルミナ、MgO,Ba
O。As the substrate, ordinary glass such as soda glass, lead glass, borosilicate glass, quartz glass, aluminosilicate glass, crystallized glass (product name: Milacron PH-3, Milacron PC-1, Milacron PP-1, Milacron P) can be used.
H-1); Ceramic, e.g. alumina, MgO, Ba
O.
AQN、PLZT;単結晶、例えばシリコン、GGG、
リチウムタンタレート、サファイア、MgO;金属板(
例えばアルマイト、アルミニウム、ステンレス、ジュラ
ルミン;プラスチック板、例えばポリアミドイミド、ポ
リイミド、アラミド、ポリケトンイミド、ポリビフェニ
ルイミド、ポリピロメリット酸イミド等が挙げられる。AQN, PLZT; single crystal, such as silicon, GGG,
Lithium tantalate, sapphire, MgO; metal plate (
Examples include alumite, aluminum, stainless steel, and duralumin; plastic plates such as polyamideimide, polyimide, aramid, polyketoneimide, polybiphenylimide, and polypyromellitic acid imide.
本発明の光磁気記録媒体には再生用及び記録用の各磁性
層の結晶配向性を改良するために、基板と磁性層との間
に下地層を設けたり、記録媒体の表面保護のため磁性層
上に保護層を設けたり、磁性層のファラデー効果を利用
して再生を行なうために磁性層上に反射層を設けたり(
但しこの場合基板としては透光性のものを使用する)、
ファラデー回転角を増大させて再生出力を向上するため
に磁性層と反射層との間に誘電層を設けたり、或いは記
録、消去時の熱伝導によるレーザー出力の損失を低減す
るために基板と磁性層或いは反射層との間に断熱層を設
けることができる。また光磁気記録媒体の記録、再生及
び消去を誤りなく行なうために、基板、下地層、磁性層
、反射層、断熱層、誘導層又は保護層自体に、或いは基
板又は前記層上に別途にガイドトラックを設けることが
できる。In the magneto-optical recording medium of the present invention, in order to improve the crystal orientation of each magnetic layer for reproduction and recording, an underlayer is provided between the substrate and the magnetic layer, and a magnetic layer is provided to protect the surface of the recording medium. A protective layer is provided on the magnetic layer, or a reflective layer is provided on the magnetic layer to perform reproduction using the Faraday effect of the magnetic layer (
However, in this case, use a translucent substrate)
A dielectric layer may be provided between the magnetic layer and the reflective layer to increase the Faraday rotation angle and improve reproduction output, or a dielectric layer may be provided between the substrate and the magnetic layer to reduce loss of laser output due to heat conduction during recording and erasing. A heat insulating layer can be provided between the layers or the reflective layer. In addition, to ensure error-free recording, reproduction, and erasing of the magneto-optical recording medium, a separate guide is provided on the substrate, underlayer, magnetic layer, reflective layer, heat insulating layer, induction layer, or protective layer itself, or on the substrate or the above layer. A track can be provided.
以上のような光磁気記録媒体の構成例を第1〜3図に示
す。即ち第1図の光磁気記録媒体は基板1上に、下地層
2、再生用磁性層3、記録用磁性層4及び反射層5を順
次設けたものであ=7=
る。第2図の光磁気記録媒体は基板1上に下地層2、記
録用磁性層4、再生用磁性層3、帯状ガイドトラック6
及び保護層7を順次設けたものである。また第3図の記
録媒体は基板1上に下地M2、再生用磁性層3、溝状ガ
イドトラック6′付き記録用磁性層4、反射層5及び保
護層7を順次設けたものである。Examples of the structure of the magneto-optical recording medium as described above are shown in FIGS. 1 to 3. That is, the magneto-optical recording medium shown in FIG. 1 has an underlayer 2, a magnetic layer for reproducing 3, a magnetic layer for recording 4, and a reflective layer 5 provided in this order on a substrate 1. The magneto-optical recording medium shown in FIG. 2 includes a substrate 1, an underlayer 2, a recording magnetic layer 4, a reproducing magnetic layer 3, and a strip-shaped guide track 6.
and a protective layer 7 are sequentially provided. The recording medium shown in FIG. 3 has a base M2, a reproducing magnetic layer 3, a recording magnetic layer 4 with groove-shaped guide tracks 6', a reflective layer 5, and a protective layer 7 provided on the substrate 1 in this order.
ここで下地層の材料としては軟磁性体、例えばNi−Z
nフェライト、Co−Znフェライト、M n −Z
nフェライト、M g −Z nフェラ −イト;誘
電体、例えばS i O、S j02 + S 13
N4 +MgO,Tie2.ZnO,Af1203.T
he2等が挙げられる。厚さは0.1〜1μm程度が適
当である。Here, the material of the underlayer is a soft magnetic material, such as Ni-Z.
n ferrite, Co-Zn ferrite, M n -Z
n ferrite, M g -Z n ferrite; dielectric, e.g. S i O, S j02 + S 13
N4 +MgO, Tie2. ZnO, Af1203. T
Examples include he2. Appropriate thickness is about 0.1 to 1 μm.
保護層の材料としては前述のような誘導体;基板に用い
られるようなイミド系樹脂やアクリル樹脂、スチレン樹
脂、エポキシ樹脂、フェーノール樹脂、ポリウレタン樹
脂、ポリカーボネート樹脂、ポリアミド樹脂、ポリエー
テルスルホン樹脂等の樹脂等が挙げられる。厚さは0.
1〜10μm程度が適当である。Materials for the protective layer include the aforementioned derivatives; resins used for substrates such as imide resins, acrylic resins, styrene resins, epoxy resins, phenol resins, polyurethane resins, polycarbonate resins, polyamide resins, and polyethersulfone resins. etc. Thickness is 0.
Approximately 1 to 10 μm is appropriate.
反射層の材料としては金属、例えばCr、Ni。The material for the reflective layer is metal, such as Cr or Ni.
Au、AQ、Ag、Rh、Pt、Cu、Pd。Au, AQ, Ag, Rh, Pt, Cu, Pd.
Nd、Cot Fe ;金属窒化物、例えばT a N
。Nd, Cot Fe; metal nitride, e.g. T a N
.
TsN、CrN等が挙げられる。厚さは0.1〜0.5
μm程度が適当である。Examples include TsN and CrN. Thickness is 0.1-0.5
Approximately μm is appropriate.
断熱層の材料としては前述のような誘導体が挙げられる
。厚さは0.1〜1μm程度が適当である。Examples of the material for the heat insulating layer include the above-mentioned derivatives. Appropriate thickness is about 0.1 to 1 μm.
以上のような各層の形成法としては無機材料の場合は通
常、蒸着、スパッタリング等の方法が、また有機材料の
場合は通常、塗布法(スピンコード法)が採用される。As a method for forming each layer as described above, in the case of an inorganic material, a method such as vapor deposition or sputtering is usually adopted, and in the case of an organic material, a coating method (spin code method) is usually adopted.
以下に本発明を実施例によって説明する。The present invention will be explained below by way of examples.
実施例1
ソーダガラス基板上にN i −Z nフェライトを基
板温度200℃でスパッタリングして0.2μm厚の下
地層を形成し、その上に前記A−1の焼結体、及び前記
B−1の焼結体を基板温度450℃で順次スパッタリン
グして夫々0.5μm厚の再牛用磁性層及び0.2μm
厚の記録用磁性層を形成した後、更にその上にptを基
板温度400℃でスパッタリングして0.1μm厚の反
射層を形成することにより第1図のタイプの光磁気ディ
スクを作った。Example 1 Ni-Zn ferrite was sputtered on a soda glass substrate at a substrate temperature of 200°C to form a base layer with a thickness of 0.2 μm, and the sintered body of A-1 and the B- The sintered body of No. 1 was sequentially sputtered at a substrate temperature of 450°C to form a magnetic layer with a thickness of 0.5 μm and a magnetic layer with a thickness of 0.2 μm.
After forming a thick recording magnetic layer, a 0.1 μm thick reflective layer was formed thereon by sputtering PT at a substrate temperature of 400° C., thereby producing a magneto-optical disk of the type shown in FIG.
実施例2
パイレックス(ホウケイ酸)ガラス基板上にZn○を基
板温度300℃でスパッタリングして0.1μm厚の下
地層を形成し、その上に前記B−2の焼結体及び前記A
−2の焼結体を基板温度450℃で順次スパッタリング
して夫々0.2μm厚の記録用磁性層及び0.5μm厚
の再生用磁性層を形成した。次にこの再生用磁性層上に
蒸着法で0.1μm厚のCr膜を形成し、更にその上に
スピンコード法により紫外線硬化性樹脂膜を形成した後
、これに、ガラス板上に巾1.0μm、トラックピッチ
1.8μmの帯状(溝状ガイド)Crパターンを有する
マスクを密着し、その上から全面露光し、樹脂膜を溶剤
で部分的に除去し、露出したCr膜にスパッタエツチン
グを行なって再生用磁性層上に帯状Crパターンからな
るガイドトラックを形成し、更にその上にシリコン樹脂
をスピンコードして5μm厚の保護層を形成することに
より第2図のタイプの光磁気ディスクを作った。Example 2 Zn○ was sputtered on a Pyrex (borosilicate) glass substrate at a substrate temperature of 300°C to form a 0.1 μm thick base layer, and the sintered body of B-2 and the A
The sintered body No.-2 was sequentially sputtered at a substrate temperature of 450° C. to form a magnetic layer for recording with a thickness of 0.2 μm and a magnetic layer for reproduction with a thickness of 0.5 μm, respectively. Next, a Cr film with a thickness of 0.1 μm was formed on this magnetic layer for reproduction by a vapor deposition method, and an ultraviolet curable resin film was further formed on it by a spin code method. A mask having a band-shaped (groove-shaped guide) Cr pattern with a track pitch of 1.8 μm and a track pitch of 1.8 μm was closely attached, the entire surface was exposed from above, the resin film was partially removed with a solvent, and the exposed Cr film was sputter etched. A magneto-optical disk of the type shown in Fig. 2 was created by forming a guide track consisting of a band-shaped Cr pattern on the reproducing magnetic layer, and then spin-coding silicone resin to form a 5 μm thick protective layer. Had made.
実施例3
ポリビフェニルイミド基板上にCo−Znフェライトを
基板温度300℃で蒸着して下地層を形成後、その上に
前記A−6の焼結体及び前記B−3の焼結体を基板温度
400°Cで順次蒸着して夫々0.5μm厚の再生用磁
性層及び0.2μm厚の記録用磁性層を形成した。次に
この記録用磁性層上に紫外線硬化性樹脂をスピンコード
して樹脂膜を形成し、これに実施例2で用いた帯状Cr
パターンを有するマスクを密着し、その上から全面露光
し、樹脂膜を溶剤で部分的に除去し、露出した記録用磁
性層にエツチングを行なってこの磁性層自体に溝状ガイ
ドトラックを形成した後、その上にAu及びS i O
2を基板温度400℃で順次蒸着して夫々0.1μm厚
の反射層及び1μm厚の保護層を形成することにより第
3図のタイプの光磁気ディスクを作った。Example 3 After forming a base layer by depositing Co-Zn ferrite on a polybiphenylimide substrate at a substrate temperature of 300°C, the sintered body of A-6 and the sintered body of B-3 were placed on the substrate. A magnetic layer for reproduction and a magnetic layer for recording, each having a thickness of 0.5 μm and 0.2 μm, were formed by successive deposition at a temperature of 400° C. Next, a resin film was formed by spin-coding an ultraviolet curable resin on this recording magnetic layer, and this was covered with the strip-shaped Cr film used in Example 2.
After applying a patterned mask and exposing the entire surface to light, the resin film is partially removed with a solvent, and the exposed recording magnetic layer is etched to form groove-shaped guide tracks in the magnetic layer itself. , Au and SiO on it
A magneto-optical disk of the type shown in FIG. 3 was fabricated by sequentially depositing 2 and 3 layers at a substrate temperature of 400 DEG C. to form a reflective layer of 0.1 .mu.m thick and a protective layer of 1 .mu.m thick, respectively.
実施例4
A−1の代りにA−3を用い、且つB−1の代りにB−
4を用いた他は実施例1と同じ方法で第1図のタイプの
光磁気ディスクを作った。Example 4 A-3 is used instead of A-1, and B-1 is used instead of B-1.
A magneto-optical disk of the type shown in FIG. 1 was manufactured in the same manner as in Example 1, except that 4 was used.
実施例5
B−2の代りにB−5を用い、且つA−2の代りにA−
4を用いた他は実施例2と同じ方法で第2図のタイプの
光磁気ディスクを作った。Example 5 B-5 is used instead of B-2, and A-2 is used instead of A-2.
A magneto-optical disk of the type shown in FIG. 2 was manufactured in the same manner as in Example 2, except that 4 was used.
実施例6
A−6の代りにA−5を用い、且つB−3の代りにB−
6を用いた他は実施例3と同じ方法で第3図のタイプの
光磁気ディスクを作った。Example 6 A-5 is used instead of A-6, and B-3 is used instead of B-3.
A magneto-optical disk of the type shown in FIG. 3 was manufactured in the same manner as in Example 3 except that 6 was used.
実施例7
A−1の代りにA−7を用い、且つB−1の代りにB−
7を用いた他は実施例1と同じ方法で第1図のタイプの
光磁気ディスクを作った。Example 7 A-7 is used instead of A-1, and B-1 is used instead of B-1.
A magneto-optical disk of the type shown in FIG. 1 was manufactured in the same manner as in Example 1, except that Example 7 was used.
実施例8
A−1の代りにA−8を用い、且つB−1の代り13B
−8を用いた他は実施例1と同じ方法で第1図のタイプ
の光磁気ディスクを作った。Example 8 A-8 is used instead of A-1, and 13B is used instead of B-1.
A magneto-optical disk of the type shown in FIG. 1 was produced in the same manner as in Example 1 except that -8 was used.
実施例9
B−2の代りにB−1を用い、A−2の代りにA−9を
用い、且つ下地層をNi−Znフェライトで0.2μm
厚に形成した他は実施例2と同じ方法で第2図のタイプ
の光磁気ディスクを作った。Example 9 B-1 was used instead of B-2, A-9 was used instead of A-2, and the base layer was made of Ni-Zn ferrite with a thickness of 0.2 μm.
A magneto-optical disk of the type shown in FIG. 2 was manufactured in the same manner as in Example 2, except that it was formed thicker.
次に以上の9種の光磁気ディスクについて下記条件で記
録、再生及び消去を行なった。Next, recording, reproduction, and erasing were performed on the above nine types of magneto-optical disks under the following conditions.
記録条件
光源二波長780nm、ディスク面での出力15mWの
半導体レーザー光
線速:5m/秒
デユーティ:50%
記録磁界:2000e
再生条件
光源:波長780止、ディスク面での出力4mWの半導
体レーザー光
線速:記録条件と同じ
消去条件
光源:記録条件と同じ
線速:記録条件と同じ
デユーティ:記録条件と同じ
消去磁界: 10000e(但し磁界方向は記録時とは
逆)
その結果、記録時はビット約2μmで記録され、C/N
=40〜45dBの信号が得られた。また消去時は記録
は完全に消去された。Recording conditions Light source: Semiconductor laser with dual wavelengths of 780 nm and output of 15 mW on the disk surface Light speed: 5 m/s Duty: 50% Recording magnetic field: 2000e Reproduction conditions Light source: Semiconductor laser with a wavelength of 780 and an output of 4 mW on the disk surface Light speed: Recording conditions Same erasing conditions Light source: Same linear velocity as recording conditions: Same duty as recording conditions: Same erasing magnetic field as recording conditions: 10000e (however, the direction of the magnetic field is opposite to that during recording) As a result, when recording, the bits are recorded at approximately 2 μm. , C/N
A signal of =40 to 45 dB was obtained. Also, when erasing, the records are completely erased.
効 果
以上の如く本発明の光磁気記録媒体は従来の磁性層を再
生専用の磁性層及び記録専用の磁性層に分離したので、
記録、再生及び、消去特性を全て満足する上、いかなる
耐熱基板も使用でき、しかも量産化が容易である等の利
点がある。Effects As described above, the magneto-optical recording medium of the present invention separates the conventional magnetic layer into a read-only magnetic layer and a recording-only magnetic layer.
In addition to satisfying all the recording, reproducing and erasing characteristics, it has the advantage of being able to use any heat-resistant substrate and being easy to mass produce.
第1〜3図は夫々本発明光磁気記録媒体の一例の構成図
である。
1・・・耐熱基板 2・・・下地層3・・再生用磁
性層 4・・・記録用磁性層5・・・反射層 6
・・・帯状ガイドトラック6′・・・溝状ガイドトラッ
ク
7・・・保護層FIGS. 1 to 3 are block diagrams of an example of the magneto-optical recording medium of the present invention. 1...Heat-resistant substrate 2...Underlayer 3...Magnetic layer for reproduction 4...Magnetic layer for recording 5...Reflection layer 6
...Band-shaped guide track 6'...Groove-shaped guide track 7...Protective layer
Claims (1)
磁性層を再生用及び記録用の2つの機能の異なる層に分
割し、再生用磁性層はBi含有鉄ガーネット及びCo含
有フェライトの少くとも1種の磁性体で構成し、記録用
磁性層は保磁力が大きく、且つ適正な飽和磁化を有する
マグネトプラムバイトヘキサゴナルフェライト磁性体と
この磁性体に対し融点降下作用のある金属、金属の合金
、又は化合物を含有して構成したことを特徴とする光磁
気記録媒体。1. In a magneto-optical recording medium having a magnetic layer on a substrate,
The magnetic layer is divided into two layers with different functions, one for reproduction and one for recording.The magnetic layer for reproduction is composed of at least one kind of magnetic material such as Bi-containing iron garnet and Co-containing ferrite, and the recording magnetic layer is composed of a A magneto-optical device characterized by containing a magnetoplumbite hexagonal ferrite magnetic material having a large magnetic force and appropriate saturation magnetization, and a metal, metal alloy, or compound that has a melting point lowering effect on the magnetic material. recoding media.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11864687A JP2655843B2 (en) | 1987-05-14 | 1987-05-14 | Magneto-optical recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11864687A JP2655843B2 (en) | 1987-05-14 | 1987-05-14 | Magneto-optical recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63282943A true JPS63282943A (en) | 1988-11-18 |
| JP2655843B2 JP2655843B2 (en) | 1997-09-24 |
Family
ID=14741709
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11864687A Expired - Lifetime JP2655843B2 (en) | 1987-05-14 | 1987-05-14 | Magneto-optical recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2655843B2 (en) |
-
1987
- 1987-05-14 JP JP11864687A patent/JP2655843B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2655843B2 (en) | 1997-09-24 |
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