JPS633480A - Ion laser device - Google Patents
Ion laser deviceInfo
- Publication number
- JPS633480A JPS633480A JP14850686A JP14850686A JPS633480A JP S633480 A JPS633480 A JP S633480A JP 14850686 A JP14850686 A JP 14850686A JP 14850686 A JP14850686 A JP 14850686A JP S633480 A JPS633480 A JP S633480A
- Authority
- JP
- Japan
- Prior art keywords
- members
- laser
- thin tube
- thin
- gas return
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 2
- 229910052782 aluminium Inorganic materials 0.000 abstract 2
- 238000007599 discharging Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 16
- 238000010891 electric arc Methods 0.000 description 4
- 230000010355 oscillation Effects 0.000 description 4
- 230000005855 radiation Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000001069 Raman spectroscopy Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000001093 holography Methods 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
〔奮業上の利用分野〕
本発明は、窒化アルミニウム製のレーザ細管を有するイ
オンレーザ装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application] The present invention relates to an ion laser device having a laser capillary made of aluminum nitride.
従来、この種のイオンレーザ装置は第２図に示すように
、レーザ電源１０をレーザ管１のアノード７とカソード
５とにそれぞれ接続し、アノード７、カソード５間で放
電させ、出力ミラー３と全反射ミラー４とで構成される
光共掘器によりレーザ発振し、レーザ光１３を出力させ
る。Conventionally, this type of ion laser device, as shown in FIG. Laser oscillation is performed by an optical co-excavator composed of a total reflection mirror 4 and a laser beam 13 is output.
イオンレーザは、イオン化された希ガスのエネルギーレ
ベル間の遷移によってレーザ発振を行なわせるものであ
シ、可視域においてワット台の大出力連続発振が得られ
る唯一のガスレーザなので、ラマン分光、ホログラフィ
、レーザ製版などに広く用いられている。しかし希ガス
のイオン化エネルギーが高いため、レーザ管内に数アン
ペアにおよぶ大Ｗ流アーク放電を行なわせる必要があシ
、このときレーザ細管では数ＫＷに達する熱発生がある
。したがって、イオンレーザの細管としては、イオンの
衝撃に耐えることができ、熱分解しにくいぺＩＪ ＩＪ
アセラミック等を選ぶ必要がある。さらに数ＫＷにおよ
ぶ熱をレーザ細管外部に放出させるため、管外部に冷却
水を通したシ、放熱フィン８を取シ付はファン９によシ
空冷するなどして冷却している。そして、前記大電流ア
ーク放ｗＫよりイオン化した希ガスはアノード７からカ
ソード５に向って流れるので、ガスリターンバス細管１
１により希ガスをカソード５からアノード７側へもどす
必要がある。Ion lasers perform laser oscillation by transitions between the energy levels of ionized rare gases, and are the only gas lasers that can provide continuous oscillation with a high output on the order of Watts in the visible range, so they are useful for Raman spectroscopy, holography, laser Widely used for plate making, etc. However, since the ionization energy of the rare gas is high, it is necessary to cause a large W flow arc discharge of several amperes in the laser tube, and at this time, heat generation of several kilowatts occurs in the laser tube. Therefore, as a thin tube for an ion laser, P-IJ IJ can withstand ion bombardment and is difficult to thermally decompose.
You need to choose something like aceramic. Furthermore, in order to release several kilowatts of heat to the outside of the laser thin tube, cooling water is passed through the outside of the tube, and the heat dissipating fins 8 are cooled by air cooling with a fan 9. Then, the rare gas ionized by the large current arc discharge wK flows from the anode 7 toward the cathode 5, so the gas return bus thin tube 1
1, it is necessary to return the rare gas from the cathode 5 to the anode 7 side.
上述した従来のイオンレーザ装ｗｈ、内径の大きなガス
リターンバス細管を用いるとアーク放電がガスリターン
バス細管１１内を通り、ガスリターンバス細管１１を破
損してしまうため、内径の小さなガスリターンバス細管
１１を複雑な形状に加工してアーク放電がレーザ細管６
の中央穴１２にのみ通るようＫしている。しかし、内径
の小さなガスリターンバス細管を複雑な形状に加工する
には高いレベルの加工技術を要するため、加工作業者が
限定され、高価となるという欠点がある。If a gas return bus capillary tube with a large inner diameter is used in the conventional ion laser device wh described above, the arc discharge will pass through the gas return bus capillary tube 11 and damage the gas return bus capillary tube 11, so a gas return bus capillary tube with a small inner diameter is used. 11 is processed into a complicated shape and the arc discharge is made into a laser thin tube 6.
It is K-shaped so that it passes only through the center hole 12 of. However, processing a gas return bus capillary tube with a small inner diameter into a complicated shape requires a high level of processing technology, which has the disadvantage that the number of processing workers is limited and the cost is high.
本発明は、アノードとカソード間に、放電用の中央穴を
有する窒化アルミニウム細管部材を複数個間隔をムいて
縦続して配列したレーザ細管を備えるイオンレーザ装置
において、窒化アルミニウム細管部材にガスリターンバ
ス穴を各細管部材毎に位置が異なるように設け、さらに
複数個の細管部材間の空隙に直径の大きな円筒部材と直
径の小さな円筒部材とを同軸状にかつその一部が１なる
ように設けたことを特徴とする。The present invention provides an ion laser device including a laser thin tube in which a plurality of aluminum nitride thin tube members each having a central hole for discharge are arranged in series at intervals between an anode and a cathode. Holes are provided at different positions for each capillary member, and a cylindrical member with a large diameter and a cylindrical member with a small diameter are provided coaxially in the gap between the plurality of capillary members so that a portion thereof becomes one. It is characterized by:
次に本発明について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.
第１図は本発明の一実施例の断面図である。レーザ細管
は、放電用の中央穴１７．１８．１９を有する窒化アル
ミニウム細管部材１４．１５．１６から構成され、細管
部材β１４，１５．１６にはガスリターンバス穴２０．
２１．２２がそれぞれ位置を異ならせて設けられている
。また、細管部材１４．１５および１５．１６の間の空
隙には、直径の大きい円筒部材２５と直径の小さい円筒
部材２６が一部が１なるように細管部材の中央穴１７．
１８．１９と同軸に設けられている。このような構成を
有するレーザ細管の外周には放熱フィン８が取シ付けら
れ、ファン９によって冷却される。レーザ細管の両端側
に７ノード７とカソード５が設置されておシ、これらカ
ソード５とアノード７間にレーザ電源１０を接続して放
電させ、出力ミラー３と全反射ミラー４にょυレーザ共
振器を構成させレーザ発振を生ぜしめ、レーザ出力１３
を得る。本実施例においては、細管部材間の空隙に円筒
部材が設けられているので放電は細管部材の中央穴を通
してのみ生じ、ガスリターンバス穴を通して生じること
はない。また、円筒部材は一体ではなく大小の直径を有
する二つの円筒部材で一部か重なるように配設している
ので、動作時にレーザ細管が熱膨張しても破損すること
を防止できる。FIG. 1 is a sectional view of an embodiment of the present invention. The laser capillary consists of an aluminum nitride capillary member 14, 15, 16 with a central hole 17, 18, 19 for discharge, and gas return bus holes 20, 16 in the capillary member β14, 15, 16.
21 and 22 are provided at different positions. In addition, in the gap between the thin tube members 14.15 and 15.16, a central hole 17 of the thin tube member is formed such that a cylindrical member 25 with a large diameter and a cylindrical member 26 with a small diameter are partially formed.
It is provided coaxially with 18.19. Radiation fins 8 are attached to the outer periphery of the laser thin tube having such a configuration, and the laser tube is cooled by a fan 9. Seven nodes 7 and a cathode 5 are installed at both ends of the laser tube, and a laser power source 10 is connected between the cathode 5 and anode 7 to cause discharge, and the output mirror 3 and total reflection mirror 4 are connected to the laser resonator. is configured to generate laser oscillation, and the laser output is 13.
get. In this embodiment, since the cylindrical member is provided in the gap between the capillary members, the discharge occurs only through the central hole of the capillary member and does not occur through the gas return bus hole. Further, since the cylindrical member is not integrated, but two cylindrical members having different diameters are arranged so as to partially overlap, it is possible to prevent the laser thin tube from being damaged even if it expands thermally during operation.
以上説明したように本発明は簡単な構造の窒化アルミニ
ウム細管部材と円筒部材とからレーザ細Ｖを構成してい
るので、放１は長期間維持され、安定なレーザ出力が得
られる。また複雑な形状のガスリターンバス細管もなく
、単純な構造となり、力０工費も従来の数分の−ですみ
、加工の自動化も可能となるため、安価なイオンレーザ
装置を得ることができる。As explained above, in the present invention, the narrow laser V is constructed from a simple aluminum nitride thin tube member and a cylindrical member, so that the radiation 1 can be maintained for a long period of time and a stable laser output can be obtained. In addition, there is no need for a gas return bus thin tube with a complicated shape, resulting in a simple structure, the labor-free manufacturing cost is several minutes lower than that of the conventional method, and the process can be automated, making it possible to obtain an inexpensive ion laser device.
第１図は本発明のイオンレーザ装置を示す断面図、第２
図は従来のイオンレーザ装置を示す断面図である。
１・・・・・・レーザ管、２．２′・・・・・・光学窓
、３・・・・・・出力ミラー、４・・・・・・全反射ミ
ラー、５・・・・・・カソード、６・・・・・・レーザ
細管、７・・・・・・アノード、８・・・・・・放熱フ
ィン、９・・・・・・ファン、１０・・・・・・レーザ
電源、１１・・・・・・ガスリターンバスＭＨ管、１２
． １７゜１８．１９・・・・・・中央穴、１３・・・
・・・レーザ光、２０゜２１．２２・・・・・・ガスリ
ターンバス穴、１４． １５゜１６・・・・・・レーザ
細管部材、２５．２６・・・・・・円筒部材。
−１１１゜
代理人 弁理士 内 原 晋 −゛−Ｓノ′〜
、′−°。FIG. 1 is a cross-sectional view showing the ion laser device of the present invention, and FIG.
The figure is a sectional view showing a conventional ion laser device. 1... Laser tube, 2.2'... Optical window, 3... Output mirror, 4... Total reflection mirror, 5...・Cathode, 6... Laser tube, 7... Anode, 8... Radiation fin, 9... Fan, 10... Laser power supply , 11... Gas return bus MH pipe, 12
．． 17゜18.19...Central hole, 13...
... Laser light, 20°21.22 ... Gas return bus hole, 14. 15°16... Laser thin tube member, 25.26... Cylindrical member. −111゜Representative Patent Attorney Susumu Uchihara −゛−Sノ′〜 ,′−°.
Claims (1)
アルミニウム細管部材を複数個間隔を置いて縦続配列し
たレーザ細管を備えるイオンレーザ装置において、各窒
化アルミニウム細管部材にガスリターンバス穴を位置を
異ならせて設け、前記窒化アルミニウム細管部材の間の
空隙に直径の大きな円筒部材と直径の小さな円筒部材を
一部が重なるように前記中央穴と同軸状に設けたことを
特徴とするイオンレーザ装置。In an ion laser device equipped with a laser capillary tube in which a plurality of aluminum nitride capillary tube members each having a central hole for discharge are arranged in series at intervals between an anode and a cathode, each aluminum nitride capillary tube member has a gas return bus hole in a different position. The ion laser device is characterized in that a cylindrical member with a large diameter and a cylindrical member with a small diameter are provided coaxially with the central hole so that they partially overlap in the gap between the aluminum nitride thin tube members.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14850686A JPS633480A (en) | 1986-06-24 | 1986-06-24 | Ion laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14850686A JPS633480A (en) | 1986-06-24 | 1986-06-24 | Ion laser device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS633480A true JPS633480A (en) | 1988-01-08 |
Family
ID=15454283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14850686A Pending JPS633480A (en) | 1986-06-24 | 1986-06-24 | Ion laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS633480A (en) |
-
1986
- 1986-06-24 JP JP14850686A patent/JPS633480A/en active Pending
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