JPS63382B2 - - Google Patents
Info
- Publication number
- JPS63382B2 JPS63382B2 JP58030015A JP3001583A JPS63382B2 JP S63382 B2 JPS63382 B2 JP S63382B2 JP 58030015 A JP58030015 A JP 58030015A JP 3001583 A JP3001583 A JP 3001583A JP S63382 B2 JPS63382 B2 JP S63382B2
- Authority
- JP
- Japan
- Prior art keywords
- soot
- electrode
- glass body
- tube burner
- porous glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/06—Concentric circular ports
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/46—Comprising performance enhancing means, e.g. electrostatic charge or built-in heater
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/60—Relationship between burner and deposit, e.g. position
- C03B2207/62—Distance
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Light Guides In General And Applications Therefor (AREA)
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Description
【発明の詳細な説明】
［技術分野］
本発明は気相軸付法による多孔質ガラス体の製
造方法に係わる。DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a method for manufacturing a porous glass body using a vapor phase axial method.
［背景技術］
CVD法と称する方法により多孔質ガラス体を
製造する方法には、回転する棒状出発部材があ
り、この出発部材に、ガラスのすすを気相により
横方向から吹き付け、前記出発部材の長さ方向に
順次すすを堆積させて行くような方法および第１
図、第２図に示すように、回転する出発部材の回
転軸線方向にガラスのすすを気相により吹き付け
て順次成長堆積させるような方法がある。前記二
つの方法のうち後者を気相軸付法（VAD法）と
呼んでいるが、第１図はこの例を示すものであ
る。図において、多重管バーナー２よりのガラス
原料ガスを含む酸水素焔３を回転する出発部材１
の軸方向に吹出し、回転軸線方向にガラスのすす
４を堆積させる。[Background Art] A method for producing a porous glass body by a method called the CVD method includes a rotating rod-shaped starting member, and glass soot is blown horizontally onto the starting member in a vapor phase to form a porous glass body. A method in which soot is deposited sequentially in the length direction, and a first
As shown in FIGS. 2 and 2, there is a method in which glass soot is sequentially grown and deposited by blowing glass soot in a vapor phase in the direction of the rotational axis of a rotating starting member. The latter of the above two methods is called the vapor phase attachment method (VAD method), and FIG. 1 shows an example of this method. In the figure, a starting member 1 rotates an oxyhydrogen flame 3 containing frit gas from a multi-tube burner 2.
The glass soot 4 is blown out in the axial direction and deposits glass soot 4 in the rotational axis direction.
この際、堆積するガラスのすす４の収率向上を
はかるため、多重管バーナー２と出発部材１との
間に直流電源５により、吹出すガラス原料ガスを
含む酸水素焔に影響を及ぼすように電界を加える
方法がすでに提案されている。 At this time, in order to improve the yield of the soot 4 deposited on the glass, a DC power supply 5 is connected between the multi-tube burner 2 and the starting member 1 so as to affect the oxyhydrogen flame containing the glass raw material gas that is blown out. A method of applying an electric field has already been proposed.
この場合、すす４の堆積、成長に従つて、多重
管バーナー２はすす４の成長面との間隔を一定に
保持する必要性から、電界のかかつている出発部
材１そのものが、多重管バーナー２より次第に離
れて行くことになり、期待するすすの収率の低下
が免れないばかりでなく、更に多重管バーナー２
よりのガラス原料ガスがドーパント濃度、種類の
異なつた複数のガラス原料ガスよりなり、これら
のガラス原料ガスを区分して吹出し、最終的に所
望の屈折率分布を有する多孔質ガラス体を製造す
るような場合、製造中における電界の変動は製造
される多孔質ガラス体の長さ方向各断面における
半径方向の予定される屈折率分布に変動を与える
結果となる。 In this case, as the soot 4 accumulates and grows, it is necessary to maintain a constant distance between the multi-tube burner 2 and the growth surface of the soot 4. As a result, not only the expected soot yield will inevitably decrease, but also the multi-tube burner 2
The frit gas consists of a plurality of frit gases with different dopant concentrations and types, and these frit gases are divided and blown out to finally produce a porous glass body having a desired refractive index distribution. In this case, fluctuations in the electric field during manufacturing result in fluctuations in the expected radial refractive index distribution in each longitudinal section of the porous glass body to be manufactured.
［発明の開示］
本発明は以上説明したような加える電界の変動
をなくすため、VAD法によりすすを堆積するに
際し、バーナーとすす成長面の外周近傍に配設し
た電極との間に直流電圧を印加し、前記すす成長
面と電極およびバーナーの相対的間隔を一定に保
持しながら多孔質ガラス体を製造しようとするも
のである。[Disclosure of the Invention] In order to eliminate the fluctuations in the applied electric field as explained above, the present invention applies a DC voltage between the burner and the electrode disposed near the outer periphery of the soot growth surface when depositing soot by the VAD method. The purpose is to manufacture a porous glass body while maintaining constant relative distances between the soot growth surface, the electrode, and the burner.
［実施例］
第２図は本発明の一実施例を示す。第１図と同
一部分には同一符号を用いている。図において４
は図示していない回転する出発部材の軸線方向に
成長、堆積した多孔質ガラス体である。２は多重
管バーナーであり、６はリング状の電極である。
また７は多重管バーナー２の先端より突出させた
先端針状の電極であり、通常多重管バーナー２と
同電位に維持する。[Example] FIG. 2 shows an example of the present invention. The same reference numerals are used for the same parts as in FIG. In the figure 4
is a porous glass body grown and deposited in the axial direction of a rotating starting member (not shown). 2 is a multi-tube burner, and 6 is a ring-shaped electrode.
Reference numeral 7 denotes a needle-shaped electrode that protrudes from the tip of the multi-tube burner 2, and is normally maintained at the same potential as the multi-tube burner 2.
図示していないが、多重管バーナー２は金属製
隔壁または金属製隔壁と無機材質の隔壁の組合せ
よりなり、一定間隔を隔てて同心配置される多重
管バーナー２と電極６の間に電気的絶縁を施し、
場合に応じ、必要な一定間隔を保つて固定できる
ような機構により、一定の間隔おいて保持され
る。多重管バーナー２を構成する各隔壁８区分に
よる管路よりガラス原料ガスSiCl4、CeCl4、
POCl3、BBr3等が気相で供給され、これに燃料
としてのH2ガスおよびO2ガス、更に不活性ガス
としてAr、Heガス等が供給される。前記のよう
に、多重管バーナー２の先端より突出させた電極
７のかわりに、前記多重管バーナー２の金属製の
隔壁８を若干突出させ電極９とすることもでき
る。 Although not shown, the multi-tube burner 2 is made of a metal partition wall or a combination of a metal partition wall and an inorganic partition wall, and electrical insulation is provided between the multi-tube burner 2 and the electrode 6, which are arranged concentrically at a constant interval. give,
Depending on the case, they are held at regular intervals by a mechanism that allows them to be fixed at the required regular intervals. Frit gases SiCl 4 , CeCl 4 ,
POCl 3 , BBr 3 , etc. are supplied in a gas phase, and to this are supplied H 2 gas and O 2 gas as fuel, and Ar, He gas, etc. as inert gas. As described above, instead of the electrode 7 protruding from the tip of the multi-tube burner 2, the metal partition wall 8 of the multi-tube burner 2 may be slightly protruded to serve as the electrode 9.
前記出発部材側に配置される電極６と多重管バ
ーナー２側の電極間に直流高電圧を電源５により
印加する。図に示すように直流高電圧は出発部材
側が＋の極性となつているが、これを逆にするこ
ともある。電極６の位置は図に示すように、多孔
質ガラス体４の成長面の外周近傍にあるように配
置され、これに対して、多重管バーナー２は多孔
質ガラス体４の成長面に対して、火焔によりガラ
ス原料ガスの吹付け作業を行う際、電界をかけた
状態でガラス原料ガスよりのガラスのすすが多孔
質ガラス体の成長面に到達するような間隔をとつ
て、以後多重管バーナー２と電極６とは相対的に
一定の間隔を保つて維持され、多重管バーナー２
と多孔質ガラス体４の成長面とも相対的に一定間
隔を保つようにされ、多重管バーナー２より、す
でに説明したガラス原料ガス、燃料としてのガ
ス、不活性ガスが常に一定量供給される状態で作
業を行う。このような状態で、多重管バーナー２
を点火し、火焔中にガラス原料ガス等を送り出せ
ば、送り出された気体および酸化微粒子（すす）
の一部または全部が帯電されるが、その移動中に
帯電した気体および酸化微粒子は一部中和してイ
オンを失う。しかし、帯電の量と、電界の極性を
選択することにより、前記酸化微粒子は帯電した
状態で多孔質ガラス体４の表面に到達して付着
し、多孔質ガラス体４をその回転軸線方向に成長
させる。図に示すように、多重管バーナー２より
突出した電極７を備える構成をとるときは、火焔
を生成させたとき、火焔中に電極７が入ることに
なり、このようにすれば、電極７の近傍に電界の
集中を生じ、周辺を通過する酸化微粒子がイオン
化しやすい。 A DC high voltage is applied by a power source 5 between the electrode 6 disposed on the starting member side and the electrode on the multi-tube burner 2 side. As shown in the figure, the polarity of the DC high voltage is positive on the starting member side, but this may be reversed. As shown in the figure, the electrode 6 is arranged near the outer periphery of the growth surface of the porous glass body 4, whereas the multi-tube burner 2 is located near the growth surface of the porous glass body 4. When blowing frit gas using a flame, the multi-tube burner is used at intervals such that the glass soot from the frit gas reaches the growth surface of the porous glass body while an electric field is applied. 2 and the electrode 6 are maintained at a relatively constant interval, and the multi-tube burner 2
and the growth surface of the porous glass body 4, and the multi-tube burner 2 always supplies a constant amount of the frit gas, fuel gas, and inert gas as described above. Do the work. In this condition, the multi-tube burner 2
If you ignite the flame and send out frit gas etc. into the flame, the sent out gas and oxidized particles (soot)
Some or all of the particles are charged, but during their movement, the charged gas and oxidized particles are partially neutralized and lose ions. However, by selecting the amount of charge and the polarity of the electric field, the oxidized fine particles reach and adhere to the surface of the porous glass body 4 in a charged state, and grow in the direction of the rotation axis of the porous glass body 4. let As shown in the figure, when a configuration is adopted in which the electrode 7 protrudes from the multi-tube burner 2, the electrode 7 enters the flame when a flame is generated. An electric field is concentrated in the vicinity, making it easy for oxidized particles passing through the area to be ionized.
なお一般的について、火焔とともに送出された
気体および酸化微粒子は電界がなくても一部帯電
の状態で存在するものと推定される。そして多重
管バーナー２の先端を絞つたり、ノズル状とする
ことにより、送り出される気体や酸化微粒子の帯
電の量の多寡を調整できるものと推定される。 In general, it is assumed that the gas and oxidized particles sent out with the flame exist in a partially charged state even in the absence of an electric field. It is presumed that by constricting the tip of the multi-tube burner 2 or making it into a nozzle shape, the amount of charge on the gas and oxidized particles to be sent out can be adjusted.
［作用効果］
以上説明したように、本発明はガラスすすを堆
積させて多孔質ガラス体を作るに当り、多孔質ガ
ラス体の成長面の外周近傍に配置される電極と多
重管バーナーとの間に電界をかけた際、前記電極
と多重管バーナーと多孔質ガラス体の成長面の相
対間隔を一定に保つて作業を行うため、すすの堆
積収率を上げることができるのと同時に、結果的
に多孔質ガラス体を熱処理延線してできるガラス
フアイバーに極めて精度の高い屈折率分布をもた
せることができる。[Operations and Effects] As explained above, when depositing glass soot to produce a porous glass body, the present invention provides a method for depositing glass soot between the electrode placed near the outer periphery of the growth surface of the porous glass body and the multi-tube burner. When an electric field is applied to the surface, the relative spacing between the electrode, the multi-tube burner, and the growth surface of the porous glass body is kept constant. A glass fiber made by heat-treating and drawing a porous glass body can have an extremely precise refractive index distribution.
第１図は電界をかけた気相軸付法の説明図であ
る。第２図は本発明の実施例を示す。
１……出発部材、２……多重管バーナー、３…
…ガラス原料ガスを含む酸水素焔、４……多孔質
ガラス体、５……直流高圧電源、６……電極、７
……先端針状電極、８……多重管バーナーの隔
壁、９……電極。
FIG. 1 is an explanatory diagram of the gas phase axis mounting method in which an electric field is applied. FIG. 2 shows an embodiment of the invention. 1... Starting member, 2... Multi-tube burner, 3...
... Oxygen hydrogen flame containing frit gas, 4 ... Porous glass body, 5 ... DC high voltage power supply, 6 ... Electrode, 7
... Tip needle-shaped electrode, 8 ... Bulkhead of multi-tube burner, 9 ... Electrode.
Claims (1)
ーナーとすす成長面の外周近傍に配設した電極と
の間に直流電圧を印加し、前記すす成長面と電極
およびバーナーの相対的間隔を一定に保持するこ
とを特徴とする気相軸付法による多孔質ガラス体
の製造方法。1 When depositing soot using the vapor phase axis deposition method, a direct current voltage is applied between the burner and an electrode placed near the outer periphery of the soot growth surface, and the relative spacing between the soot growth surface, the electrode, and the burner is kept constant. 1. A method for producing a porous glass body by a vapor phase axis method, characterized in that the porous glass body is maintained at .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3001583A JPS59156930A (en) | 1983-02-23 | 1983-02-23 | Method for manufacturing porous glass body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3001583A JPS59156930A (en) | 1983-02-23 | 1983-02-23 | Method for manufacturing porous glass body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59156930A JPS59156930A (en) | 1984-09-06 |
| JPS63382B2 true JPS63382B2 (en) | 1988-01-06 |
Family
ID=12292028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3001583A Granted JPS59156930A (en) | 1983-02-23 | 1983-02-23 | Method for manufacturing porous glass body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59156930A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63185187U (en) * | 1987-05-21 | 1988-11-29 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2767726B2 (en) * | 1991-10-22 | 1998-06-18 | 株式会社フジクラ | Optical fiber preform manufacturing equipment |
| US6003342A (en) * | 1991-10-25 | 1999-12-21 | The Furukawa Electric Co., Ltd. | Apparatus for production of optical fiber preform |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5314723A (en) * | 1976-07-27 | 1978-02-09 | Sumitomo Electric Industries | Process for preparing highhpurity glass |
-
1983
- 1983-02-23 JP JP3001583A patent/JPS59156930A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63185187U (en) * | 1987-05-21 | 1988-11-29 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59156930A (en) | 1984-09-06 |
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