JPS6338317U - - Google Patents
Info
- Publication number
- JPS6338317U JPS6338317U JP12947186U JP12947186U JPS6338317U JP S6338317 U JPS6338317 U JP S6338317U JP 12947186 U JP12947186 U JP 12947186U JP 12947186 U JP12947186 U JP 12947186U JP S6338317 U JPS6338317 U JP S6338317U
- Authority
- JP
- Japan
- Prior art keywords
- lid
- reaction tube
- basket
- disk
- gap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims 3
- 235000012431 wafers Nutrition 0.000 claims 3
- 239000000112 cooling gas Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12947186U JPS6338317U (2) | 1986-08-27 | 1986-08-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12947186U JPS6338317U (2) | 1986-08-27 | 1986-08-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6338317U true JPS6338317U (2) | 1988-03-11 |
Family
ID=31026068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12947186U Pending JPS6338317U (2) | 1986-08-27 | 1986-08-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6338317U (2) |
-
1986
- 1986-08-27 JP JP12947186U patent/JPS6338317U/ja active Pending
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