JPS6340664U - - Google Patents
Info
- Publication number
- JPS6340664U JPS6340664U JP13296886U JP13296886U JPS6340664U JP S6340664 U JPS6340664 U JP S6340664U JP 13296886 U JP13296886 U JP 13296886U JP 13296886 U JP13296886 U JP 13296886U JP S6340664 U JPS6340664 U JP S6340664U
- Authority
- JP
- Japan
- Prior art keywords
- bypass
- valve
- main valve
- box
- advancing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Lift Valve (AREA)
- Details Of Valves (AREA)
Description
図面は本考案の実施態様を例示し、第１図は真
空装置用バルブの主弁体およびバイパス弁体まわ
りを示す中央縦断面図、第２図は第１図の―
線における断面図である。
１……バルブ、２……吸引管路、３……弁箱、
３ａ……流入側開口部、３ｂ……流出側開口部、
４……主弁座、５……主弁体、６……蓋板、７…
…進退手段、２１……流入側バイパス孔、２２…
…流出側バイパス孔、２３……バイパス通路、２
４……箱体、２５……バイパス弁体、２６……バ
イパス用進退手段。
The drawings illustrate an embodiment of the present invention, and FIG. 1 is a central vertical cross-sectional view showing the main valve body and bypass valve body of a valve for a vacuum device, and FIG.
FIG. 1...Valve, 2...Suction pipe line, 3...Valve box,
3a...Inflow side opening, 3b...Outflow side opening,
4... Main valve seat, 5... Main valve body, 6... Cover plate, 7...
...Advance/retreat means, 21...Inflow side bypass hole, 22...
... Outflow side bypass hole, 23 ... Bypass passage, 2
4...Box body, 25...Bypass valve body, 26...Bypass advancing/retracting means.
Claims (1)
負圧状態に保つための真空ポンプとを接続する吸
引管路の中間部に介在せしめるものであつて、弁
箱の流入側開口部から流出側開口部に至る流路の
中間部に主弁座が設けられ、該主弁座を開閉する
主弁体には、前記弁箱の蓋板に固設した進退手段
が連結され、前記主弁座の流入側および流出側に
おける弁箱の側部に、それぞれ流入側バイパス孔
および流出側バイパス孔が穿設され、該両バイパ
ス孔の外側にバイパス通路を形成する箱体が設け
られ、前記各バイパス孔のいずれか一方を開閉す
るバイパス弁体には、前記箱体に固設したバイパ
ス用進退手段が連結されてなることを特徴とする
真空装置用バルブ。 It is interposed in the middle of the suction pipe that connects the vacuum chamber that accommodates the workpiece and the vacuum pump that maintains the inside of the vacuum chamber in a negative pressure state. A main valve seat is provided in the middle part of the flow path leading to the side opening, and the main valve body that opens and closes the main valve seat is connected to an advancing/retracting means fixed to the lid plate of the valve box. An inflow side bypass hole and an outflow side bypass hole are formed in the sides of the valve box on the inflow side and the outflow side of the seat, respectively, and a box body forming a bypass passage is provided on the outside of both bypass holes. A valve for a vacuum device, characterized in that a bypass advancing/retracting means fixed to the box body is connected to a bypass valve body that opens and closes either one of the bypass holes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13296886U JPH0235102Y2 (en) | 1986-08-30 | 1986-08-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13296886U JPH0235102Y2 (en) | 1986-08-30 | 1986-08-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6340664U true JPS6340664U (en) | 1988-03-16 |
| JPH0235102Y2 JPH0235102Y2 (en) | 1990-09-21 |
Family
ID=31032848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13296886U Expired JPH0235102Y2 (en) | 1986-08-30 | 1986-08-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0235102Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004044969A1 (en) * | 2001-05-14 | 2004-05-27 | Tokyo Electron Limited | Valve unit and heat treatment system |
-
1986
- 1986-08-30 JP JP13296886U patent/JPH0235102Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004044969A1 (en) * | 2001-05-14 | 2004-05-27 | Tokyo Electron Limited | Valve unit and heat treatment system |
| CN100397577C (en) * | 2001-05-14 | 2008-06-25 | 东京毅力科创株式会社 | Valve device and heat treatment device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0235102Y2 (en) | 1990-09-21 |