JPS6343434U - - Google Patents
Info
- Publication number
- JPS6343434U JPS6343434U JP13471086U JP13471086U JPS6343434U JP S6343434 U JPS6343434 U JP S6343434U JP 13471086 U JP13471086 U JP 13471086U JP 13471086 U JP13471086 U JP 13471086U JP S6343434 U JPS6343434 U JP S6343434U
- Authority
- JP
- Japan
- Prior art keywords
- test head
- pivotably supported
- gravity
- center
- rotational axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005484 gravity Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案に係るテストヘツド支持機構の
一実施例を示す図、第２図ａ及びｂは同実施例に
おけるアームを示す図、第３図は第２図とは別の
実施例を示す図、第４図は第１図の実施例の動作
説明図、第５図は第１図とは別の実施例を示す図
、第６図及び第７図はそれぞれ従来のテストヘツ
ド軽減機構を示す図である。
１……テストヘツド、２……プローバ装置、９
……ピン、１０……アーム、１１……支持台、１
２……支柱。
FIG. 1 shows an embodiment of the test head support mechanism according to the present invention, FIGS. 2 a and b show arms in the same embodiment, and FIG. 3 shows a different embodiment from FIG. 2. 4 is an explanatory diagram of the operation of the embodiment in FIG. 1, FIG. 5 is a diagram showing an embodiment different from that in FIG. 1, and FIGS. 6 and 7 each show a conventional test head reduction mechanism. It is a diagram. 1...Test head, 2...Prober device, 9
...Pin, 10...Arm, 11...Support stand, 1
2... Prop.
Claims (1)
テストヘツド支持機構において、前記テストヘツ
ドの回転軸が実質的に前記テストヘツドの重心を
通るように前記テストヘツドを枢支したことを特
徴とするテストヘツド支持機構。 1. A test head support mechanism comprising a test head pivotably supported by a support member, characterized in that the test head is pivotably supported such that the rotational axis of the test head substantially passes through the center of gravity of the test head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13471086U JPS6343434U (en) | 1986-09-02 | 1986-09-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13471086U JPS6343434U (en) | 1986-09-02 | 1986-09-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6343434U true JPS6343434U (en) | 1988-03-23 |
Family
ID=31036203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13471086U Pending JPS6343434U (en) | 1986-09-02 | 1986-09-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6343434U (en) |
-
1986
- 1986-09-02 JP JP13471086U patent/JPS6343434U/ja active Pending
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