JPS6343434U - - Google Patents

Info

Publication number
JPS6343434U
JPS6343434U JP13471086U JP13471086U JPS6343434U JP S6343434 U JPS6343434 U JP S6343434U JP 13471086 U JP13471086 U JP 13471086U JP 13471086 U JP13471086 U JP 13471086U JP S6343434 U JPS6343434 U JP S6343434U
Authority
JP
Japan
Prior art keywords
test head
pivotably supported
gravity
center
rotational axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13471086U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13471086U priority Critical patent/JPS6343434U/ja
Publication of JPS6343434U publication Critical patent/JPS6343434U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】
第１図は本考案に係るテストヘツド支持機構の
一実施例を示す図、第２図ａ及びｂは同実施例に
おけるアームを示す図、第３図は第２図とは別の
実施例を示す図、第４図は第１図の実施例の動作
説明図、第５図は第１図とは別の実施例を示す図
、第６図及び第７図はそれぞれ従来のテストヘツ
ド軽減機構を示す図である。 １……テストヘツド、２……プローバ装置、９
……ピン、１０……アーム、１１……支持台、１
２……支柱。

Claims (1)

    【実用新案登録請求の範囲】
  1. テストヘツドを支持部材によつて枢支して成る
    テストヘツド支持機構において、前記テストヘツ
    ドの回転軸が実質的に前記テストヘツドの重心を
    通るように前記テストヘツドを枢支したことを特
    徴とするテストヘツド支持機構。
JP13471086U 1986-09-02 1986-09-02 Pending JPS6343434U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13471086U JPS6343434U (ja) 1986-09-02 1986-09-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13471086U JPS6343434U (ja) 1986-09-02 1986-09-02

Publications (1)

Publication Number Publication Date
JPS6343434U true JPS6343434U (ja) 1988-03-23

Family

ID=31036203

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13471086U Pending JPS6343434U (ja) 1986-09-02 1986-09-02

Country Status (1)

Country Link
JP (1) JPS6343434U (ja)

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