JPS6373353U - - Google Patents
Info
- Publication number
- JPS6373353U JPS6373353U JP16586786U JP16586786U JPS6373353U JP S6373353 U JPS6373353 U JP S6373353U JP 16586786 U JP16586786 U JP 16586786U JP 16586786 U JP16586786 U JP 16586786U JP S6373353 U JPS6373353 U JP S6373353U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- evaporated
- evaporation sources
- vacuum
- closable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 claims description 6
- 230000008020 evaporation Effects 0.000 claims description 6
- 238000007738 vacuum evaporation Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図はこの考案の一実施例を示す概略側断面
図である。 １…真空容器、５，６…蒸発源、９，１０…シ
ヤツタ、４…被蒸着部。
図である。 １…真空容器、５，６…蒸発源、９，１０…シ
ヤツタ、４…被蒸着部。
Claims (1)
- 真空容器内に被蒸着部から離間して配設された
１つ又は複数のアーク蒸発源と、該各蒸発源の近
傍にそれぞれ開閉自在に取り付けられると共に、
前記被蒸着部と対応する側における各蒸発源の上
方を覆うことが可能なシヤツタとを備えたことを
特徴とする真空蒸着装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16586786U JPS6373353U (ja) | 1986-10-28 | 1986-10-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16586786U JPS6373353U (ja) | 1986-10-28 | 1986-10-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6373353U true JPS6373353U (ja) | 1988-05-16 |
Family
ID=31096300
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16586786U Pending JPS6373353U (ja) | 1986-10-28 | 1986-10-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6373353U (ja) |
-
1986
- 1986-10-28 JP JP16586786U patent/JPS6373353U/ja active Pending