JPS634698B2 - - Google Patents

Info

Publication number
JPS634698B2
JPS634698B2 JP56113239A JP11323981A JPS634698B2 JP S634698 B2 JPS634698 B2 JP S634698B2 JP 56113239 A JP56113239 A JP 56113239A JP 11323981 A JP11323981 A JP 11323981A JP S634698 B2 JPS634698 B2 JP S634698B2
Authority
JP
Japan
Prior art keywords
temperature
chamber
cassette
constant temperature
processing chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56113239A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5815232A (ja
Inventor
Tadahiro Takigawa
Kanji Wada
Sadao Sasaki
Kazuyoshi Sugihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP56113239A priority Critical patent/JPS5815232A/ja
Publication of JPS5815232A publication Critical patent/JPS5815232A/ja
Publication of JPS634698B2 publication Critical patent/JPS634698B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP56113239A 1981-07-20 1981-07-20 荷電ビ−ム露光装置 Granted JPS5815232A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56113239A JPS5815232A (ja) 1981-07-20 1981-07-20 荷電ビ−ム露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56113239A JPS5815232A (ja) 1981-07-20 1981-07-20 荷電ビ−ム露光装置

Publications (2)

Publication Number Publication Date
JPS5815232A JPS5815232A (ja) 1983-01-28
JPS634698B2 true JPS634698B2 (it) 1988-01-30

Family

ID=14607088

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56113239A Granted JPS5815232A (ja) 1981-07-20 1981-07-20 荷電ビ−ム露光装置

Country Status (1)

Country Link
JP (1) JPS5815232A (it)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6070553U (ja) * 1983-10-21 1985-05-18 大日本印刷株式会社 ストロ−突刺し部を有する袋
JPS6089365A (ja) * 1983-10-21 1985-05-20 大日本印刷株式会社 耐突刺し性積層材に突刺し可能な部分を形成する方法
JPS60110268U (ja) * 1983-12-28 1985-07-26 大日本印刷株式会社 突刺し可能な部分を有する容器
JPS60110267U (ja) * 1983-12-28 1985-07-26 大日本印刷株式会社 突刺し可能な部分を有する袋
JPS60110269U (ja) * 1983-12-28 1985-07-26 大日本印刷株式会社 開封用切裂溝を有する袋
JPS60157665U (ja) * 1984-03-28 1985-10-21 大日本印刷株式会社 突刺し可能な部分を有する容器
JPS6129029A (ja) * 1984-07-19 1986-02-08 三菱電機株式会社 電磁継電器等における端子番号等の表示方法
AT393334B (de) * 1988-01-22 1991-09-25 Ims Ionen Mikrofab Syst Anordnung zur stabilisierung einer bestrahlten maske
JP2901193B2 (ja) * 1989-12-08 1999-06-07 三菱電機株式会社 露光装置における温度制御方法
JPH05228669A (ja) * 1991-12-27 1993-09-07 Polymer Processing Res Inst 光線による穴開きウェブの製法および装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54100668A (en) * 1978-01-26 1979-08-08 Toshiba Corp Electron-beam exposure unit
JPS5543844A (en) * 1978-09-25 1980-03-27 Hitachi Ltd Method and apparatus for photoresist sensitizing process
JPS55133537A (en) * 1979-04-06 1980-10-17 Hitachi Ltd Temperature controlling device for electron beam appliance

Also Published As

Publication number Publication date
JPS5815232A (ja) 1983-01-28

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