JPS6347247U - - Google Patents
Info
- Publication number
- JPS6347247U JPS6347247U JP14072186U JP14072186U JPS6347247U JP S6347247 U JPS6347247 U JP S6347247U JP 14072186 U JP14072186 U JP 14072186U JP 14072186 U JP14072186 U JP 14072186U JP S6347247 U JPS6347247 U JP S6347247U
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- base
- screw holes
- sensor chip
- semiconductor pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 3
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図は本考案の一実施例を示す側面断面図、
第２図は従来例を示す側面断面図である。
１…基台、２，３…ねじ孔、４…圧力センサチ
ツプ、８，９…第１及び第２圧力導入パイプ。
FIG. 1 is a side sectional view showing an embodiment of the present invention;
FIG. 2 is a side sectional view showing a conventional example. DESCRIPTION OF SYMBOLS 1... Base, 2, 3... Screw hole, 4... Pressure sensor chip, 8, 9... First and second pressure introduction pipes.
Claims (1)
ねじ孔の１つを塞ぐように接着されたダイヤフラ
ム型の半導体圧力センサチツプと、該圧力センサ
チツプを包むように上記基台の周囲に固着された
キヤツプと、上記ねじ孔の少なくとも１つに螺着
された圧力導入パイプとを備えたことを特徴とす
る半導体圧力センサ。 a base having two screw holes; a diaphragm-type semiconductor pressure sensor chip adhered to the base so as to close one of the screw holes; and a diaphragm type semiconductor pressure sensor chip adhered around the base so as to surround the pressure sensor chip. 1. A semiconductor pressure sensor, comprising: a cap having a cylindrical shape, and a pressure introducing pipe screwed into at least one of the screw holes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14072186U JPS6347247U (en) | 1986-09-12 | 1986-09-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14072186U JPS6347247U (en) | 1986-09-12 | 1986-09-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6347247U true JPS6347247U (en) | 1988-03-30 |
Family
ID=31047837
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14072186U Pending JPS6347247U (en) | 1986-09-12 | 1986-09-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6347247U (en) |
-
1986
- 1986-09-12 JP JP14072186U patent/JPS6347247U/ja active Pending