JPS6347330A - Sealing method and device for continuous heat treatment furnace - Google Patents

Sealing method and device for continuous heat treatment furnace

Info

Publication number
JPS6347330A
JPS6347330A JP19259086A JP19259086A JPS6347330A JP S6347330 A JPS6347330 A JP S6347330A JP 19259086 A JP19259086 A JP 19259086A JP 19259086 A JP19259086 A JP 19259086A JP S6347330 A JPS6347330 A JP S6347330A
Authority
JP
Japan
Prior art keywords
case
sealing
cases
chamber
rollers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19259086A
Other languages
Japanese (ja)
Inventor
Toshiyuki Nasu
敏幸 那須
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
Ishikawajima Harima Heavy Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ishikawajima Harima Heavy Industries Co Ltd filed Critical Ishikawajima Harima Heavy Industries Co Ltd
Priority to JP19259086A priority Critical patent/JPS6347330A/en
Publication of JPS6347330A publication Critical patent/JPS6347330A/en
Pending legal-status Critical Current

Links

Landscapes

  • Heat Treatments In General, Especially Conveying And Cooling (AREA)

Abstract

PURPOSE:To simplify operations for charging and taking-out of works and to shorten the time for the operations by housing the works in a case, transferring the case in a furnace by conveying rollers and bringing sealing members into tight contact with the case surface thereby providing sealing. CONSTITUTION:The works 16 are housed into the case 17 consisting of a cap 19 and a bottom plate 18. Vent ports 21 are respectively provided to the front and rear parts of the cap 19. Such cases 17 are held connected and are continuously loaded in this state by feed rollers 22 onto the conveying rollers 6 of sealing chambers 1, 2, 3. Upper rollers 13 are lowered by rods 12 and the cases 17 are pressed by the upper and lower rollers 13, 14 between the respective sealing chambers 1, 2, 3, by which the hermetic state between the sealing chambers 1, 2, 3 is maintained. The spacings between the cases 17 are properly opened and the heating treatment and cooling treatment are carried out in a heating chamber 4 and a cooling chamber 15; thereafter, the cases are again connected and are passed in this state through the sealing chambers 2, 1 in the same manner as mentioned above. The cases are taken out by taking-out rollers 23. The works 16 are thereby conveyed while the airtightness between the respective chambers is automatically and satisfactorily maintained, by which the operations for the continuous heat treatment is simplified and the time for the operations is shortened.

Description

【発明の詳細な説明】 「産業上の利用分野」 本発明は、連続式焼結炉1.4統式焼鈍炉、連続式ホッ
トプレス炉等の1!!続式熱処理炉のシール方法及び装
置1:関する。
DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention is directed to continuous sintering furnaces, 1.4-unit annealing furnaces, continuous hot press furnaces, etc. ! Sealing method and apparatus for continuous heat treatment furnace 1: Related.

「従来の技術」 従来、例えば、連続式焼結炉としては、藁5図に示すも
のが知られている。この連続式焼結炉は、前室a1加熱
室す、冷却室0%後室dとから溝底され、各室a % 
d Cは、搬送用のローラーeが配置てれると共に、高
温下において被処理物でか酸素や水分等の存在を嫌うt
めに、各室a % dは図示しない真壁ポンプf二より
臭突に排気さするようになっている。そして、上記従来
の連続式焼結炉にあっては、焼結でれる被処理物(鉄粉
を加圧成形し次もの4#)fをトレイg上に!置した状
態で扉h1  を開けて前室d内の搬送用のローラーθ
上C装置いた後、nhl を閉じて前室d内を真空に排
気する。次いで%nh2 を開けてトレイgを被処理物
でとさもに真空状態の加熱室す内ζ二移送し次後に、j
h2 を閉じる7そして、加熱室す内での移送中に被処
理物では、図示しない加熱装置(二より徐々に加熱され
て焼結される。ζら(:、焼結の完了しfc被処理物f
は冷却室C内を通過中ζ二徐々に冷却されるh続いて、
扉h3 を開けて被処理物fを後室d内に移送して、j
ih3 を閉じた後、扉h4  を開けて被処理物fを
炉外に取り吊子7ここで、各f3h1〜h4  にはO
Uングが設けられており、各Jjlh、〜h4  閉鎖
時には、外部あるいは各室a * l) e Om 1
1間をそれぞれ遮断している。
"Prior Art" Conventionally, for example, as a continuous sintering furnace, one shown in Fig. 5 is known. This continuous sintering furnace has a grooved bottom from the front chamber A1 heating chamber, the cooling chamber 0% and the rear chamber D, and each chamber A%
d C is equipped with rollers e for conveyance, and t, which dislikes the presence of oxygen, moisture, etc., because the workpiece is under high temperature.
For this purpose, each chamber a % d is evacuated from a Makabe pump f2 (not shown) into a stink hole. In the conventional continuous sintering furnace mentioned above, the sintered workpiece (iron powder is pressure-formed and the next 4#) is placed on the tray g! Open the door h1 and move the conveyor roller θ inside the front chamber d.
After opening the upper C device, close the NHL and evacuate the inside of the front chamber d. Next, open the %nh2 and transfer the tray g with the workpiece into the heating chamber in a vacuum state.
Close h2 7 Then, during the transfer in the heating chamber, the workpiece is gradually heated and sintered by a heating device (not shown). thing f
While passing through the cooling chamber C, ζ2 is gradually cooled.
Open the door h3 and transfer the workpiece f into the rear chamber d.
After closing ih3, open the door h4 and take the workpiece f out of the furnace.
When closed, the outside or each room a * l) e Om 1
1 is cut off from each other.

「発明が解決しようとする問題点」 しかしながら、上記従来の連続式焼結炉にあっては、シ
ール装置が開閉式の扉h1へh4  である九め、炉内
への被処理物fの装入及び炉外への被処理物fの取シ出
しのたびに6扉h1〜h4  を開閉操作し、かつ各室
a、d内の排気が必要であり、従って、被処理物fの装
入及び取り出し作業が煩雑である2共C;時間がかかる
という問題がある、本発明は、上記事情に鑑みてなされ
友もので、その目的とするところは、被処理物の炉内へ
の装入及び炉外への取り出しにおいて1!%続的にシー
ルすることができ、作業が大+1ic簡略化できると共
I:、作業時間を著しく低減できる連続式熱処理炉のシ
ール方法及び装置を提供すること1:ある。
``Problems to be Solved by the Invention'' However, in the conventional continuous sintering furnace described above, the sealing device does not allow the loading of the workpiece f into the furnace until the opening/closing door h1 is connected to the opening/closing door h4. It is necessary to open and close six doors h1 to h4 each time the workpiece f is loaded into the furnace and taken out from the furnace, and it is necessary to exhaust the inside of each chamber a and d. The present invention was made in view of the above circumstances, and its purpose is to charge the workpiece into the furnace. and 1 in taking it out of the furnace! An object of the present invention is to provide a method and apparatus for sealing a continuous heat treatment furnace, which can perform continuous sealing, significantly simplify work, and significantly reduce work time.

「問題点を解決する次めの手段」 上記目的を達成するためζ二、本発明の方法框、被処理
物をケース内に収容し、該ケースを搬送用ローラーで移
送すると共に、上記ケースの表面にシール部材を密接あ
るいは近接させてシールするものである。
"Next Means to Solve the Problem" In order to achieve the above object, the method frame of the present invention and the workpiece are accommodated in a case, and the case is transported by a conveying roller. A sealing member is placed closely or close to the surface for sealing.

そして、搬送ローラーを制御して炉入口部l:おいては
各ケースを互いに連結状態として移送し、かつ炉内部に
おいては各ケースを分離し%てらに炉出口部に;おいて
は再度各ケースを連結状態とするのが望ましい。
Then, by controlling the conveyor rollers, each case is transferred to the furnace inlet section in a connected state, and inside the furnace, each case is separated and then transferred to the furnace outlet section again. It is desirable to have them in a connected state.

また、本発明の装置は、被処理物を収容するケースと、
、該ケースの移送通路にケースを挾持すべく設けられた
シール部材と、該シール部材により仕切られ念シール室
と、該シール室を排気する排気手段とを儲えたものであ
る。
Further, the apparatus of the present invention includes a case that accommodates the object to be processed;
, a sealing member provided to clamp the case in the transfer passage of the case, a sealed chamber partitioned by the sealing member, and an exhaust means for evacuating the sealing chamber.

「作用」 本発明の連続式熱処理炉のシール方法及rメ装置にあっ
ては、初処理物を収容したケースを移送しながら、ケー
スイ:シール部材を密接あるいは近接させてシールを行
なう。
"Operation" In the sealing method and apparatus for a continuous heat treatment furnace of the present invention, sealing is performed by bringing the case and the sealing member into close contact with each other or in close proximity to each other while transporting the case containing the first treated material.

「実施倒」 以下、第1図ないし第4図に基づいて本発明の一実施例
を説明する。
"Implementation" An embodiment of the present invention will be described below with reference to FIGS. 1 to 4.

8g 1図は主要部の断面図、第2図は全体配置を示T
概略構、成因、第3図はシール部の詳細図、第4因はケ
ース1部の断面図である。これらの図において、符号1
.2.3はシール室、4.5はそれぞれ加熱室及び冷却
室である。そして、加熱室4の上流側C二は、シール室
1.2.3が、かつ冷却室5の下流側にFi、シール室
1.2がそれぞれ配置式れている7また、各室1.2.
3.4.5には搬送用ローラー6が設けられ、かつ真空
ポンプ7.8.9.10.11により真空に排気される
ようになっている。
8g Figure 1 is a sectional view of the main parts, Figure 2 shows the overall arrangement.
Schematic structure and causes, FIG. 3 is a detailed view of the seal portion, and the fourth factor is a sectional view of a first part of the case. In these figures, the symbol 1
.. 2.3 is a sealing chamber, and 4.5 is a heating chamber and a cooling chamber, respectively. Seal chambers 1.2.3 are arranged on the upstream side C2 of the heating chamber 4, and seal chambers 1.2.3 and 1.2 are arranged on the downstream side of the cooling chamber 5, respectively. 2.
3.4.5 is provided with conveying rollers 6 and is evacuated to vacuum by a vacuum pump 7.8.9.10.11.

上記各シール室1.2.3は、第1図と第3図(=示す
ように、シリンダー等の駆動源(図示せず)に連結式れ
九ロッド12によシ上下に移動可能な上ローラ−13と
、固定状態の下ローラ−14とによって区画てれている
。これらの上下ローラー13.14はfJI4農のもの
で、軸受15(二よって回転自在C二支持されている。
As shown in Figures 1 and 3, each of the seal chambers 1.2.3 has a top that can be moved up and down by a rod 12 that is connected to a drive source (not shown) such as a cylinder. It is divided by a roller 13 and a fixed lower roller 14. These upper and lower rollers 13 and 14 are made by fJI4 and are rotatably supported by bearings 15 (2).

t7t、上下ローラー13 、 l 4に挾持され、被
処理物16を収容する矩形のケース17は、底板18と
、蓋19とから放り、蓋19はビン20によジ底板18
に取付けられている、このケース17は、耐熱性及び熱
伝導性の良好な黒鉛等で形成てれている。さらに、ケー
ス17の蓋19の前後面19&(二は、通気口21が開
口して形成されており、これらの通気口21は、第4因
(;示す二うに、隣接するケース17の前後面19aど
うしの開口位置が左右にずれて互いに連通しないように
なっている。さらに、ケース17の長ざLは搬送用ロー
ラー6のピッチPの2倍よフ大きく設定されており、搬
送時の安定化を図っている。
At t7t, the rectangular case 17, which is held between the upper and lower rollers 13 and 14 and accommodates the object to be processed 16, is released from the bottom plate 18 and the lid 19, and the lid 19 is inserted into the bin 20.
The case 17 attached to the main body is made of graphite or the like, which has good heat resistance and thermal conductivity. Furthermore, the front and rear surfaces 19 & (2) of the lid 19 of the case 17 are formed by opening vent holes 21, and these vent holes 21 The opening positions of the cases 19a are shifted to the left and right so that they do not communicate with each other.Furthermore, the length L of the case 17 is set to be twice as large as the pitch P of the conveyance rollers 6, thereby ensuring stability during conveyance. We are trying to make this happen.

上記加熱室4及び冷却室5には、それぞれ図示しない加
熱装置及び冷却装置が設置されている。
A heating device and a cooling device (not shown) are installed in the heating chamber 4 and the cooling chamber 5, respectively.

ま九、搬送用ローラー6の速度は、各シール室1.2内
は同速、かつ各室3.4.5内は同速と−i!t1.シ
ール室2内での速度はシール室3内での速度より若干遅
(設定嘔れている。そして、上記搬送用ローラー6の上
流側及び下流側には、それぞれ、搬入ローラー22及び
搬出ローラー23が設置されておシ、各ローラー22.
23は上記各室3.4.5内での搬送用ローラー6と同
速とされている。次だし、搬出ローラー23のうちシー
ル室1寄りの数本のみはシール室l内での搬送用ローラ
ー6の速度よル若干遅(設定ざnている。
Nine, the speed of the conveying roller 6 is the same speed in each seal chamber 1.2, and the same speed in each chamber 3.4.5 -i! t1. The speed in the sealing chamber 2 is slightly slower than the speed in the sealing chamber 3 (the setting is slightly lower).And, on the upstream and downstream sides of the conveyance roller 6, there are a carry-in roller 22 and a carry-out roller 23, respectively. is installed, each roller 22.
23 has the same speed as the conveying roller 6 in each chamber 3.4.5. Among the delivery rollers 23, only a few of them near the sealing chamber 1 are set at a speed slightly slower than that of the conveying roller 6 in the sealing chamber 1.

さらに、各室1.2.3.4の圧力は、順次低く(真空
度が高く)なっておフ、いわゆる差動排気が行なわれて
お夛、かつ各室4.5の圧力は同圧とされている。
Furthermore, the pressure in each chamber 1.2.3.4 is gradually lowered (the degree of vacuum is higher), so-called differential pumping is performed, and the pressure in each chamber 4.5 is the same pressure. It is said that

次に、上記のように構成された。4i式熱処理炉を用い
て本発明の方法を実見する場合について説明する。
It was then configured as described above. A case will be described in which the method of the present invention is actually demonstrated using a 4i type heat treatment furnace.

まず、外部(大気中)の搬入ローラー22によ多連接し
てシール室1内に送シ込まnるケース17は、その上下
面を上下ローラー13.14が伝動することによってシ
ールされる、この場合、搬入ローラー22の速度を搬送
用ローラーGの速度よp早くしている九め、各ケース1
7同志が確実に接触して、炉外の大気がケース17間の
隙間から通気口21を通ってシール室l内に侵入するこ
とはない、、!た、シール室1(熱処理炉)の側壁24
とケース17との開の隙間25から侵入する大気は真空
ポンプ7により連続的に排気されている。
First, the case 17 is conveyed into the sealing chamber 1 by multiple connection rollers 22 outside (in the atmosphere). In the ninth case, the speed of the carry-in roller 22 is p faster than the speed of the conveyance roller G, each case 1
7 comrades are securely in contact with each other, and the atmosphere outside the furnace does not enter the sealing chamber l through the vent 21 from the gap between the cases 17! In addition, the side wall 24 of the sealing chamber 1 (heat treatment furnace)
The atmosphere entering through the open gap 25 between the case 17 and the case 17 is continuously exhausted by the vacuum pump 7.

次いで、ケース17が、シール室lからシール室2に移
送される際も上述と同様iニシールされ、かつ真空ポン
プ8によってシール室2は、より高真空になっている。
Next, when the case 17 is transferred from the seal chamber 1 to the seal chamber 2, it is sealed in the same manner as described above, and the seal chamber 2 is brought into a higher vacuum by the vacuum pump 8.

さらに、ケース17がシール室31;入ると、シール室
3内の搬送用ローラー6の速度がシール室2内の搬送用
ローラー6よりも早(しである九め、連続して送り込ま
れたケース17は互いに離れて間隙りを生ずる。そして
、シール室3内は真空ポンプ9により真空排気されてい
るため、通気口21からケース17内も排気され、被処
理物16の脱ガスが行なわれる。絖いて、加熱室4に搬
入されtケース17は徐々に加熱されて被処理物16は
焼結される。そして、焼結処理が終了した被処理物16
は冷却室5を通過中に徐々に冷却され次後、シール室2
,1内を上下ローラー13.14でシールてれた状態で
移送され、搬出ローラー23で大気中に搬出される。こ
の場合、各シール室2.1内の搬送用ローラー6の速度
が冷却室5の速度より遅ぐ設定されているので、冷却室
5内で分離していた各ケース17は再び連接して、ケー
ス17間の隙間から通気口21を通って大気が侵入する
ことが7i−(、シール性が良好に保次れる。
Furthermore, when the case 17 enters the sealing chamber 31, the speed of the conveying roller 6 in the sealing chamber 3 is faster than that of the conveying roller 6 in the sealing chamber 2. 17 are separated from each other to create a gap. Since the inside of the seal chamber 3 is evacuated by the vacuum pump 9, the inside of the case 17 is also evacuated through the vent 21, and the object to be processed 16 is degassed. Then, the T case 17 is carried into the heating chamber 4 and is gradually heated to sinter the workpiece 16.The workpiece 16 after the sintering process is then heated.
is gradually cooled while passing through the cooling chamber 5, and then passes through the sealing chamber 2.
, 1 in a sealed state by upper and lower rollers 13 and 14, and is transported to the atmosphere by a transport roller 23. In this case, since the speed of the conveying roller 6 in each sealing chamber 2.1 is set to be slower than the speed of the cooling chamber 5, the cases 17 that were separated in the cooling chamber 5 are connected again, Air enters through the vent 21 from the gap between the cases 17 (7i-), and the sealing performance is maintained well.

なお、脱ワツクス工程が必要な被処理物16の場合(七
うiツクスの射出成形品等の場合〕には、加熱室3と冷
却室4との間にシール室を設けて、このシール室でも加
熱を行ない、脱ワツクス処理をすればよい、fた、前後
のシール室1,2の数は必要な真9度に応じて増加させ
てもよい、はらニ、ホットプレス(:使用する場合には
、ケース17の底板18を蓋19に嵌合させて、底板1
8と蓋19との間(:被処理物16を挟圧ざぜるように
丁ればよい。さらにま九、本実施例においては、シール
部材として、上下(:移動可能な上ローラ−13と固定
状態の下ローラ−14七を用い、ケース17の高さH(
=応じて上ローラ−13を上下に移動調整テることによ
り、上下ローラー13゜14間にケース17を挾持して
、ケース17の表面を上下ローラー13.14が転動し
、シール性を確保しているが、これに限らず、ケース1
7の表面を摺動する摺動部材を上下(=移動可能に設は
乏り、あるいはケース17の表面に近接し几構成のシー
ル部材を用いてもよい、この近接した構成のシール部材
の場合には、シール部材とケース17との隙間から外気
が侵入すること(:なるが、各7c窒ポンプ7.8.9
によシ遵続的に排気することによって、そのシール性を
保持する。
In addition, in the case of the workpiece 16 that requires a wax-removal process (in the case of an injection molded product such as a seven-layer product), a sealing chamber is provided between the heating chamber 3 and the cooling chamber 4, and this sealing chamber is However, the number of sealing chambers 1 and 2 at the front and rear may be increased according to the required true 9 degrees. To do this, fit the bottom plate 18 of the case 17 to the lid 19, and then close the bottom plate 1.
8 and the lid 19 (: the object to be processed 16 may be pinched and compressed.Furthermore, in this embodiment, the upper and lower rollers (: movable upper roller 13 and Using the fixed lower roller 147, the height H of the case 17 (
= By moving and adjusting the upper roller 13 up and down accordingly, the case 17 is sandwiched between the upper and lower rollers 13 and 14, and the upper and lower rollers 13 and 14 roll on the surface of the case 17, ensuring sealing performance. However, this is not limited to case 1.
The sliding member that slides on the surface of the case 17 is not designed to be movable up and down, or it is possible to use a seal member that is close to the surface of the case 17 and has a closed structure. (However, each 7c nitrogen pump 7.8.9
Maintain its sealing properties by continuously evacuation.

「発明の効果」 以上説明し友ように、本発明C二よれば、被処理物を収
容したケースを移送しながら、該ケースにシール部材を
密接あるいは近接づせてシールを行なうものであるから
、連続的にシールすることができ、被処理物の炉内への
装入及び炉外への取り出し作業が大幅に簡略化でれると
共に、作業時間が著しく低減できる。まな、シール部〔
炉入口部及び炉出口部〕において各ケースを連結状態と
し、かつ炉内部では各ケースを分離するようC=搬送用
ローラーを制御するよう(二できるから、シール性能を
低下させることなく%被処理物の脱ガス及び脱ワツクス
等の処理を効率よ(行なえ%従って、製品の品質の向上
を図ることができる。
"Effects of the Invention" As explained above, according to present invention C2, the sealing member is brought into close contact with or close to the case while the case containing the object to be processed is being transported, thereby performing sealing. , it is possible to seal continuously, and the work of loading the workpiece into the furnace and taking it out of the furnace can be greatly simplified, and the working time can be significantly reduced. Mana, seal part [
The conveying rollers are controlled so that each case is connected at the furnace inlet and furnace outlet, and each case is separated inside the furnace. Processes such as degassing and wax removal can be carried out efficiently (%), thus improving product quality.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図ないし第4図は本発明の一実施例を示すもので、
第1図はシール室の部分詳細図、g2図は全体配置を示
す概略構成図、第3図はシール部の断面図、第4図は第
1図の■−y腺に沿う断面図、第5図は従来の連続式焼
結炉の概略横取図である。 1.2.3・・・・・・シール室 6・・・・・・搬送用ローラー 7.8.9・・・・・・真空ポンプ 13・・・・・・上ローラ− 14・・・・・・下ローラ− 16・・・・・・被処理物 17・・・・・・ケース 22・・・・・・搬入ローラー 23・・・・・・搬出ローラー。
1 to 4 show an embodiment of the present invention,
Fig. 1 is a partial detailed view of the seal chamber, Fig. g2 is a schematic configuration diagram showing the overall arrangement, Fig. 3 is a sectional view of the sealing part, Fig. 4 is a sectional view along the ■-y gland in Fig. 1, FIG. 5 is a schematic cross-sectional view of a conventional continuous sintering furnace. 1.2.3... Seal chamber 6... Conveyance roller 7.8.9... Vacuum pump 13... Upper roller 14... ... Lower roller 16 ... Processing object 17 ... Case 22 ... Carrying-in roller 23 ... Carrying-out roller.

Claims (1)

【特許請求の範囲】 1)被処理物を搬送用ローラーで移送しながら熱処理を
行なう連続式熱処理炉のシール方法において、上記被処
理物をケース内に収容し、該ケースを上記搬送用ローラ
ーで移送すると共に、上記ケースの表面にシール部材を
密接あるいは近接させてシールすることを特徴とする連
続式熱処理炉のシール方法。 2)搬送ローラーを制御して炉入口部においては各ケー
スを互いに連結状態として移送し、かつ炉内部において
は上記各ケースを分離し、さらに炉出口部においては再
度上記各ケースを連結状態とすることを特徴とする特許
請求の範囲第1項記載の連続式熱処理炉のシール方法。 3)被処理物を搬送用ローラーで移送しながら熱処理を
行なう連続式熱処理炉のシール装置において、上記被処
理物を収容するケースと、該ケースの移送通路にケース
を挾持すべく設けられたシール部材と、該シール部材に
より仕切られたシール室と、該シール室内を排気する排
気手段とを具備したことを特徴とする連続式熱処理炉の
シール装置。
[Claims] 1) A sealing method for a continuous heat treatment furnace in which a workpiece is heat-treated while being transported by a conveyance roller, wherein the workpiece is housed in a case, and the case is moved by the conveyance roller. A method for sealing a continuous heat treatment furnace, characterized in that, while the case is being transferred, a sealing member is placed in close contact with or in close proximity to the surface of the case to seal the case. 2) Controlling the conveyance rollers to transport the cases in a connected state at the furnace inlet, separate the cases inside the furnace, and connect the cases again at the furnace exit. A sealing method for a continuous heat treatment furnace according to claim 1, characterized in that: 3) In a sealing device for a continuous heat treatment furnace in which a workpiece is heat-treated while being transferred by a conveyance roller, a case for accommodating the workpiece and a seal provided to sandwich the case in a transfer passage of the case are used. 1. A sealing device for a continuous heat treatment furnace, comprising a member, a sealing chamber partitioned by the sealing member, and an exhaust means for evacuating the inside of the sealing chamber.
JP19259086A 1986-08-18 1986-08-18 Sealing method and device for continuous heat treatment furnace Pending JPS6347330A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19259086A JPS6347330A (en) 1986-08-18 1986-08-18 Sealing method and device for continuous heat treatment furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19259086A JPS6347330A (en) 1986-08-18 1986-08-18 Sealing method and device for continuous heat treatment furnace

Publications (1)

Publication Number Publication Date
JPS6347330A true JPS6347330A (en) 1988-02-29

Family

ID=16293807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19259086A Pending JPS6347330A (en) 1986-08-18 1986-08-18 Sealing method and device for continuous heat treatment furnace

Country Status (1)

Country Link
JP (1) JPS6347330A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6888528B2 (en) 1998-06-29 2005-05-03 Sanyo Electric Co., Ltd. Liquid crystal display apparatus having light collecting mechanism
JP2023034757A (en) * 2021-08-31 2023-03-13 株式会社ノリタケカンパニーリミテド Continuous heating furnace and heating treatment method for object to be treated using the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6888528B2 (en) 1998-06-29 2005-05-03 Sanyo Electric Co., Ltd. Liquid crystal display apparatus having light collecting mechanism
JP2023034757A (en) * 2021-08-31 2023-03-13 株式会社ノリタケカンパニーリミテド Continuous heating furnace and heating treatment method for object to be treated using the same

Similar Documents

Publication Publication Date Title
US3584847A (en) Advancing workpieces through a sputtering chamber
EP3427291B1 (en) Chamber for degassing substrates
JP6607368B2 (en) Continuous vacuum sintering equipment
JPH08178535A (en) Multi-chamber type heat processing furnace
JPS63148088A (en) Continuous type vacuum heat treating furnace
JP3524242B2 (en) Continuous vacuum sintering furnace
JPS6347330A (en) Sealing method and device for continuous heat treatment furnace
JPH0456707A (en) Continuous vacuum furnace
JP3196305B2 (en) Vacuum furnace
JP2009185349A (en) Multichamber heat treatment furnace
JPS62996B2 (en)
CN113677943A (en) Apparatus and method for thermal or thermochemical treatment of materials
JPH06297198A (en) Hot press
JPS5839702A (en) Continuous reduced pressure atmosphere sintering furnace
KR101442747B1 (en) The Vacuum insulation of the continuous automated vacuum molding apparatus and method
JPH05148650A (en) Thin film treating device
JP2002372373A (en) Vacuum furnace
JPH09184685A (en) In-line type vacuum heat treatment furnace
JP3310997B2 (en) Continuous processing equipment
CN100580358C (en) Furnace system with movable lock chamber
JPH0517472B2 (en)
JPH0544713Y2 (en)
JPS60115227A (en) Plasma processing method and apparatus for the same
JPH0215628B2 (en)
JP2871111B2 (en) Cooling method in vacuum furnace