JPS635233B2 - - Google Patents

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Publication number
JPS635233B2
JPS635233B2 JP56197556A JP19755681A JPS635233B2 JP S635233 B2 JPS635233 B2 JP S635233B2 JP 56197556 A JP56197556 A JP 56197556A JP 19755681 A JP19755681 A JP 19755681A JP S635233 B2 JPS635233 B2 JP S635233B2
Authority
JP
Japan
Prior art keywords
fluid
compartment
valve
piston
suction cup
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56197556A
Other languages
Japanese (ja)
Other versions
JPS5899393A (en
Inventor
Yoji Ise
Juji Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Convum Ltd
Original Assignee
Myotoku Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Myotoku Ltd filed Critical Myotoku Ltd
Priority to JP19755681A priority Critical patent/JPS5899393A/en
Publication of JPS5899393A publication Critical patent/JPS5899393A/en
Publication of JPS635233B2 publication Critical patent/JPS635233B2/ja
Granted legal-status Critical Current

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Description

【発明の詳細な説明】 本発明は比較的簡単な構成で所定量の流体を1
時的に送給できるようにした流体送給装置および
この装置を利用し、真空解除の際、吸盤内に高圧
空気を1時的に送給して吸盤内の負圧を急速に除
去し、被着物体の迅速な取外しを可能にした真空
吸着式つかみ装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention has a relatively simple configuration and allows a predetermined amount of fluid to be
Utilizing a fluid feeding device that can supply fluids temporarily and this device, when the vacuum is released, high-pressure air is temporarily fed into the suction cup to rapidly remove negative pressure inside the suction cup. This invention relates to a vacuum suction type gripping device that enables quick removal of adhered objects.

次にその詳細を図示の実施例について説明する
と、第1図および第2図において1は扁平角状の
装置本体で、その下部にはエゼクタポンプAが構
成されている。即ち下部長手方向に貫通穿設され
た孔部には右端からエゼクタ孔2aを有するエゼ
クタブロツク2、およびスペーサ3を介し上記エ
ゼクタ孔2aに対応するノズル孔4aを有するノ
ズルブロツク4が順次嵌装され、このノズル孔4
aとエゼクタ孔2a間に形成された吸気室5が本
体1の下面に設けた吸込口6に逆止弁7を介し連
通している。
Next, the details will be explained with reference to the illustrated embodiment. In FIGS. 1 and 2, reference numeral 1 denotes a flat square device main body, and an ejector pump A is constructed in the lower part thereof. That is, an ejector block 2 having an ejector hole 2a and a nozzle block 4 having a nozzle hole 4a corresponding to the ejector hole 2a are fitted in order from the right end into the hole drilled through the lower longitudinal direction. and this nozzle hole 4
An intake chamber 5 formed between the ejector hole 2a and the ejector hole 2a communicates with an intake port 6 provided on the lower surface of the main body 1 via a check valve 7.

上記エゼクタポンプAの貫通孔部左端にはバル
ブ保持用ヘツド8が螺着され、これにやや大径の
パイロツトバルブ9が摺動自在に嵌装保持され、
背面に設けた戻しばね10に弾発されて先端部の
シール部材9aがノズル孔4aを閉じており、先
端部9a周辺の空隙11が通孔12を介し本体下
面に穿設された圧縮空気導入口13に連通してお
り、バルブ9背面の空隙部9′は本体1の左側面
に設けた電磁切換弁14により上記圧縮空気導入
口13と大気中への開口15に交互に連通するよ
うになつている。図においてパイロツトバルブ背
面の空隙9′に連通する通孔16は切換弁14の
ばねに押圧された弁体(図示せず)により大気へ
の開口15への通路が閉じられ、圧縮空気導入口
13側の通孔13′に連通している。
A valve holding head 8 is screwed onto the left end of the through hole of the ejector pump A, and a pilot valve 9 of a slightly larger diameter is slidably fitted and held on this head.
The sealing member 9a at the tip closes the nozzle hole 4a by the return spring 10 provided on the back, and a gap 11 around the tip 9a is used to introduce compressed air through a through hole 12 drilled on the bottom surface of the main body. The gap 9' on the back side of the valve 9 is connected to the compressed air inlet 13 and the opening 15 to the atmosphere alternately by an electromagnetic switching valve 14 provided on the left side of the main body 1. It's summery. In the figure, the passage of the passage hole 16 communicating with the air gap 9' on the back of the pilot valve to the atmosphere opening 15 is closed by a valve body (not shown) pressed by the spring of the switching valve 14, and the passage to the opening 15 to the atmosphere is closed. It communicates with the side through hole 13'.

17は本体1の右側面下部に穿設されたピスト
ン室で、ピストン室17は通孔17′を介し吸込
口6に連通しており、ピストン室17にはピスト
ン18が戻しばね19で弾発して嵌装され、これ
には本体1の背面に取付けた圧力スイツチ20が
連結杆21を介し連結されている。(第2図)。上
記ピストン18の代りにベローその他適当な圧力
検出器を使用してもよい。
Reference numeral 17 denotes a piston chamber bored in the lower right side of the main body 1. The piston chamber 17 communicates with the suction port 6 through a through hole 17'. A pressure switch 20 attached to the back surface of the main body 1 is connected to this via a connecting rod 21. (Figure 2). A bellows or other suitable pressure sensor may be used in place of the piston 18.

Bは本体1の上部に構成された真空解除用の流
体送給装置である。即ち本体上部に穿設された孔
部22には接続管23を介し長管24が接続し、
その外端部には閉塞栓25が螺着されて弁室26
が形成され、弁室26の左端部には流体導入口2
7が設けられ、右端部は弁座28、絞り弁29等
を経て流体送出口30に連通しており、流体導入
口27は第2図に示す如く本体1の背面に取付け
た切換弁31を介し上記空隙11から通孔32を
経て接続された高圧側の通孔33と、大気への開
口34に交互に連通するようになつている。図示
しないが流体導入口27は切換弁31のばねに押
圧された弁体により高圧側通孔33に連通してい
る。
Reference numeral B denotes a fluid supply device for releasing the vacuum, which is constructed on the upper part of the main body 1. That is, a long pipe 24 is connected to a hole 22 bored in the upper part of the main body via a connecting pipe 23.
A blocking plug 25 is screwed onto the outer end of the valve chamber 26.
is formed, and a fluid inlet 2 is formed at the left end of the valve chamber 26.
7 is provided, and the right end communicates with a fluid outlet 30 via a valve seat 28, a throttle valve 29, etc., and the fluid inlet 27 is connected to a switching valve 31 attached to the back of the main body 1 as shown in FIG. The air gap 11 communicates alternately with a high pressure side through hole 33 connected via a through hole 32 and an opening 34 to the atmosphere. Although not shown, the fluid inlet 27 communicates with the high pressure side through hole 33 by a valve body pressed by a spring of the switching valve 31.

上記弁室26には一端に連結杆35を介しピス
トン36を有する弁体37が嵌装され、ばね38
で押圧されて弁座28に圧着して流体送出口30
を閉じており、ピストン36には逆止弁39を設
け、この逆止弁39を介し上記ピストン36によ
り区画された弁室26の流体導入口27側の隔室
aと流体送出口30側の隔室bが連通している。
37′は弁体37の案内部、40はポンプAのエ
ゼクタ孔2aの開口端に接続された消音器、41
は通孔12,32等加工開口部の止栓である。
A valve body 37 having a piston 36 is fitted into one end of the valve chamber 26 via a connecting rod 35, and a spring 38
is pressed against the valve seat 28 and the fluid delivery port 30
The piston 36 is provided with a check valve 39, and the valve chamber 26 divided by the piston 36 has a compartment a on the fluid inlet 27 side and a compartment a on the fluid outlet 30 side. Compartment b is in communication.
37' is a guide portion of the valve body 37, 40 is a silencer connected to the open end of the ejector hole 2a of pump A, and 41
is a stopper for the processed openings of the through holes 12, 32, etc.

第3図は本装置の配線図の1例を示し、切換弁
14のソレノイド14aは圧力スイツチ20(常
時閉)およびポンプ作動用切換スイツチ42と共
に電源Eに直列に接続され、切換スイツチ42の
開接点42aは真空解除用切換弁31のソレノイ
ド31aに接続されている。43は電源スイツチ
である。
FIG. 3 shows an example of the wiring diagram of this device, in which the solenoid 14a of the switching valve 14 is connected in series with the power source E together with the pressure switch 20 (normally closed) and the pump operation switching switch 42, and the switching valve 14 is connected in series to the power source E. The contact 42a is connected to the solenoid 31a of the vacuum release switching valve 31. 43 is a power switch.

本装置の作用を説明すると、本体1下面の吸込
口6に流体送給装置Bの流体送出口30を導管4
4を介し接続し、これを真空吸着式つかみ装置の
吸盤Cに導管45を介し接続し、本体下面の導入
口13をコンプレツサー等の圧縮空気供給源に接
続すれば、圧縮空気は導入口13から通孔12を
経てパイロツトバルブ9前部の空隙11に流入す
るが、また通孔13′から切換弁14、通孔16
を通りパイロツトバルブ9背面の空隙9′にも入
り、バルブ9前後の空気が均合い、バルブ9はば
ね10に押圧されてその先端部9aがノズル孔4
aを閉じている。また圧縮空気は空隙11から上
部の通孔32,33、切換弁31、通孔27等を
経て隔室aに入り、さらに逆止弁39を開いた隔
室bに入るが、送出口30が弁体37により閉じ
ているので圧縮空気は隔室aと隔室bがほぼ同圧
となるまで隔室b内に充填される。
To explain the operation of this device, the fluid delivery port 30 of the fluid delivery device B is connected to the conduit 4 to the suction port 6 on the bottom surface of the main body 1.
4, connect this to the suction cup C of the vacuum suction type gripping device via a conduit 45, and connect the inlet 13 on the bottom of the main body to a compressed air supply source such as a compressor, then compressed air will flow from the inlet 13. It flows into the gap 11 in front of the pilot valve 9 through the through hole 12, and also flows into the switching valve 14 and through hole 16 through the through hole 13'.
The air passes through the gap 9' on the back of the pilot valve 9, and the air before and after the valve 9 is balanced, and the valve 9 is pressed by the spring 10 so that its tip 9a enters the nozzle hole 4.
A is closed. Compressed air enters the compartment a from the gap 11 through the upper passage holes 32, 33, the switching valve 31, the passage hole 27, etc., and then enters the compartment b where the check valve 39 is opened. Since it is closed by the valve body 37, compressed air is filled into compartment b until compartment a and compartment b have approximately the same pressure.

この状態で電源スイツチ43を閉じ、ポンプ作
動用切換スイツチ42を閉接点42b側に切換え
てソレノイド14aを作動すると、切換弁14の
弁体が高圧側の通路13′を閉じ、パイロツトバ
ルブ背面の空隙9′を開口15を経て大気に開放
するのでバルブ9前後の空気圧の均合が破れ、バ
ルブ9は空隙11の内圧に押さればね10に抗し
左行してノズル孔4aを開き、ポンプが作動して
吸込口6に接続された吸盤C内を減圧するので部
品Dを吸着して所要の場所等に搬送することがで
きる。
In this state, when the power switch 43 is closed and the pump operating changeover switch 42 is switched to the closed contact 42b side to operate the solenoid 14a, the valve body of the changeover valve 14 closes the high pressure side passage 13', and the air gap on the back of the pilot valve is closed. 9' is opened to the atmosphere through the opening 15, the balance of air pressure before and after the valve 9 is broken, and the valve 9 is pushed by the internal pressure of the gap 11 and moves to the left against the spring 10 to open the nozzle hole 4a, and the pump starts. When activated, the pressure inside the suction cup C connected to the suction port 6 is reduced, so that the part D can be sucked and transported to a required location.

而して真空系内が所定の負圧に達したときはピ
ストン18が左行して圧力スイツチ20が開くの
で切換弁14のソレノイド14aが作動を停止
し、通孔16が高圧側通孔13′と連通するので
バルブ9前後の空気圧が再び均合い、バルブ9は
ばね10により右行してノズル孔4aを閉じ、エ
ゼクタポンプAは停止するが、逆止弁7より系内
は所定の負圧に保持される。空気漏れ等により真
空度が低下したときは圧力スイツチ20が閉じ、
ポンプAが作動して系内を再び所定の真空度に高
める。
When the inside of the vacuum system reaches a predetermined negative pressure, the piston 18 moves to the left and the pressure switch 20 opens, so the solenoid 14a of the switching valve 14 stops operating, and the passage hole 16 closes to the high pressure side passage hole 13. ', the air pressure before and after the valve 9 is balanced again, the valve 9 moves to the right by the spring 10 and closes the nozzle hole 4a, and the ejector pump A stops, but the check valve 7 maintains a predetermined negative pressure in the system. held under pressure. When the degree of vacuum decreases due to air leakage, etc., the pressure switch 20 closes.
Pump A operates to increase the vacuum level in the system to a predetermined level again.

被着体Dの搬送後は切換スイツチ42を開接点
42a側に切換えればソレノイド14aへの通電
が切れてエゼクタポンプAが停止すると共に、ソ
レノイド31aが作動して真空解除用切換弁31
が通孔27を開口34を介し大気に開放するので
隔室aの圧力が低下して逆止弁37が閉じ、隔室
bの内圧によりピストン36がばね38に抗し左
行し、右端の弁体37が送出口30を開くので隔
室b内に充填された圧縮空気は送出口30から導
管44,45を経て吸盤C内に強力に送結され
る。従つて例えば導管45が長く流入空気に対す
る抵抗が大きな場合でも、吸盤C内の負圧を急速
に解除して被着体Dを瞬間的に離すことができ、
搬送動作を極めて正確に行うことができる。圧縮
空気の送給速度は絞り弁29ににより調節するこ
とができる。圧縮空気の送給量は隔室bの内容積
により決定される。必要に応じ隔室bに空気溜槽
等を附設してもよい。
After conveying the adherend D, if the changeover switch 42 is switched to the open contact 42a side, the power to the solenoid 14a is cut off and the ejector pump A is stopped, and the solenoid 31a is activated to close the vacuum release changeover valve 31.
opens the through hole 27 to the atmosphere through the opening 34, so the pressure in the compartment a decreases and the check valve 37 closes, and the internal pressure in the compartment b causes the piston 36 to move to the left against the spring 38, and the right end Since the valve body 37 opens the outlet 30, the compressed air filled in the compartment b is strongly transmitted from the outlet 30 through the conduits 44 and 45 into the suction cup C. Therefore, for example, even if the conduit 45 is long and has a large resistance to the inflowing air, the negative pressure inside the suction cup C can be rapidly released and the adherend D can be instantly separated.
Conveying operations can be performed extremely accurately. The feed rate of compressed air can be adjusted by means of a throttle valve 29. The amount of compressed air to be fed is determined by the internal volume of compartment b. If necessary, an air reservoir tank or the like may be attached to compartment b.

また、上記流体送給装置Bは、パイロツトバル
ブ9および逆止弁7、圧力スイツチ20等を使用
せず単にノズル孔4aに開閉弁を介し圧縮空気を
送給して吸気室5に接続した吸盤C内を減圧する
ようにしたつかみ装置、その他従来の真空吸着式
つかみ装置における残存負圧の急速な除去等にも
使用することができる。また本流体送給装置は例
えば切削加工等における切削屑の吹き飛ばしによ
る除去等にも使用することができる。
Further, the fluid supply device B simply supplies compressed air to the nozzle hole 4a via an on-off valve without using a pilot valve 9, a check valve 7, a pressure switch 20, etc., and uses a suction cup connected to the intake chamber 5. It can also be used for the rapid removal of residual negative pressure in gripping devices designed to reduce the pressure inside C, and other conventional vacuum suction type gripping devices. Further, the present fluid feeding device can also be used, for example, to remove cutting waste by blowing it off during cutting.

本発明の流体送給装置は上述のように単に流体
導入口27を高圧側と低圧側に交互に切換えるだ
けで作動して所定量の流体を一時的に送給するこ
とができ、構造が著しく簡単となる上、上記ピス
トン36は単に弁体37を移動して流体送出口3
0を開閉するために設けられているので移動距離
も短く、摺動による摩耗も少ない利点を有し、ま
た本装置を利用した真空吸着式つかみ装置は上述
のように真空解除の際、吸盤C内に一時的に高圧
の空気を送給し、同吸盤C内の負圧を急速に解除
して被着体を瞬間的に離脱させることができ、搬
送動作を極めて正確に行い得る等の優れた特長を
有している。
As described above, the fluid feeding device of the present invention operates by simply switching the fluid inlet 27 alternately between the high pressure side and the low pressure side, and can temporarily feed a predetermined amount of fluid, and the structure is significantly simplified. In addition to being simple, the piston 36 simply moves the valve body 37 to open the fluid delivery port 3.
Since it is provided to open and close the zero, it has the advantage of short travel distance and less wear due to sliding.In addition, as mentioned above, the vacuum suction type gripping device using this device has the suction cup C when releasing the vacuum. By temporarily supplying high-pressure air into the suction cup C, the negative pressure inside the suction cup C can be rapidly released, allowing the adherend to be instantly detached. It has several features.

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本発明の1実施例を示し、第1図は縦断
正面図、第2図は平面図、第3図は配線図であ
る。 1……装置本体、A……エゼクタポンプ、2…
…エゼクタブロツク、3……スペーサ、4……ノ
ズルブロツク、5……吸気室、6……吸込口、7
……逆止弁、9……パイロツトバルブ、13……
流体導入口、14……ポンプ作動用切換弁、18
……ピストン、20……圧力スイツチ、B……流
体送給装置、26……弁室、29……絞り弁、3
6……ピストン、37……弁体、39……逆止
弁、C……吸盤、D……被着体。
The drawings show one embodiment of the present invention, with FIG. 1 being a longitudinal sectional front view, FIG. 2 being a plan view, and FIG. 3 being a wiring diagram. 1...Device main body, A...Ejector pump, 2...
...Ejector block, 3...Spacer, 4...Nozzle block, 5...Intake chamber, 6...Suction port, 7
...Check valve, 9...Pilot valve, 13...
Fluid inlet, 14...Switching valve for pump operation, 18
... Piston, 20 ... Pressure switch, B ... Fluid feeding device, 26 ... Valve chamber, 29 ... Throttle valve, 3
6... Piston, 37... Valve body, 39... Check valve, C... Suction cup, D... Adherent.

Claims (1)

【特許請求の範囲】 1 一端に流体導入口27、他端に流体送出口3
0を有する弁室26に一端にピストン36を有す
る弁体37を嵌装し、ばね38で弾発して上記流
体送出口30を閉塞し、上記ピストン36には逆
止弁39を設けて該逆止弁39を介し上記ピスト
ン36により区画された弁室26の流体導入口2
7側隔室aと流体送出口30側隔室bを連通せし
め、上記流体導入口27から高圧の流体を導入す
ることにより該流体が上記逆止弁39を通り隔室
bに充填され、上記流体導入口27を低圧部に開
放することにより、上記逆止弁39が閉じ上記隔
室bの内圧によりピストン36がばね38に抗し
移動して弁体37により上記流体送出口30が開
き、該隔室b内に充填された流体を上記送出口3
0から送出するようにした流体送給装置。 2 上記隔室bを長手方向に適当長さ延出すると
共にこれに対応して上記弁体37とピストン36
を適当長さの連結杆35をもつて連結してなる特
許請求の範囲第1項記載の流体送給装置。 3 ノズル孔4aとこれに対応するエゼクタ孔2
aの間に吸気室5を設けたエゼクタポンプAと;
上記吸気室5に接続された吸盤Cを有するつかみ
装置と;一端に流体導入口27、他端に流体送出
口30を有する弁室26に一端にピストン36を
有する弁体37を嵌装し、ばね38で弾発して上
記流体送出口30を閉塞し、上記ピストン36に
は逆止弁39を設けて該逆止弁39を介し上記ピ
ストン36により区画された弁室26の流体導入
口27側隔室aと流体送出口30側隔室bを連通
せしめた流体送給装置Bを備え、上記流体送出口
30を上記吸盤Cに接続し、上記ノズル孔4aに
圧縮空気が供給されるときは上記エゼクタポンプ
Aが作動して吸気室5を介し吸盤C内を負圧とし
て被着体を吸着し、その間上記流体送給装置Bの
流体導入口27より圧縮空気を導入し隔室a、逆
止弁39を経て隔室bに充填し、上記ノズル孔4
aへの圧縮空気の供給を断ちポンプ作用を停止し
たときは、上記流体導入口27を大気に開放し、
上記逆止弁39が閉じ、隔室bの内圧によりピス
トン36をばね38に抗し移動して弁体37によ
り流体送出口30を開き、上記隔室bに充填され
た圧縮空気を上記吸盤Cに送出し、該吸盤C内の
負圧を解除するようにしてなる真空吸着式つかみ
装置。
[Claims] 1. Fluid inlet 27 at one end, fluid outlet 3 at the other end.
A valve body 37 having a piston 36 at one end is fitted into the valve chamber 26 having a diameter of 0.0, the valve body 37 having a piston 36 at one end is biased by a spring 38 to close the fluid delivery port 30, and the piston 36 is provided with a check valve 39 to prevent the reverse. Fluid inlet 2 of the valve chamber 26 partitioned by the piston 36 via the stop valve 39
By communicating the seventh side compartment a and the fluid outlet 30 side compartment b, and introducing high-pressure fluid from the fluid inlet 27, the fluid passes through the check valve 39 and fills the compartment b. By opening the fluid inlet 27 to the low pressure part, the check valve 39 is closed, the piston 36 moves against the spring 38 due to the internal pressure of the compartment b, and the fluid outlet 30 is opened by the valve body 37. The fluid filled in the compartment b is transferred to the outlet port 3.
A fluid feeding device configured to send fluid from zero. 2. The compartment b is extended in the longitudinal direction by an appropriate length, and the valve body 37 and the piston 36 are
2. A fluid feeding device according to claim 1, wherein the two are connected by a connecting rod 35 of an appropriate length. 3 Nozzle hole 4a and corresponding ejector hole 2
an ejector pump A with an intake chamber 5 between;
a gripping device having a suction cup C connected to the intake chamber 5; a valve body 37 having a piston 36 at one end fitted into the valve chamber 26 having a fluid inlet 27 at one end and a fluid outlet 30 at the other end; The fluid delivery port 30 is closed by a spring 38, and the piston 36 is provided with a check valve 39, and the fluid inlet port 27 side of the valve chamber 26 partitioned by the piston 36 is opened via the check valve 39. When a fluid supply device B is provided in which a compartment a and a compartment b on the side of a fluid delivery port 30 are connected, the fluid delivery port 30 is connected to the suction cup C, and compressed air is supplied to the nozzle hole 4a. The ejector pump A operates to create a negative pressure in the suction cup C through the suction chamber 5 and adsorb the adherend, while compressed air is introduced from the fluid inlet 27 of the fluid feeder B to the compartment a and vice versa. The compartment b is filled through the stop valve 39, and the nozzle hole 4 is filled.
When the supply of compressed air to a is cut off and the pump action is stopped, the fluid inlet 27 is opened to the atmosphere,
The check valve 39 closes, the piston 36 is moved against the spring 38 by the internal pressure of the compartment b, and the fluid delivery port 30 is opened by the valve body 37, and the compressed air filled in the compartment b is transferred to the suction cup C. A vacuum suction type gripping device configured to release the negative pressure inside the suction cup C.
JP19755681A 1981-12-07 1981-12-07 Fluid feeder Granted JPS5899393A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19755681A JPS5899393A (en) 1981-12-07 1981-12-07 Fluid feeder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19755681A JPS5899393A (en) 1981-12-07 1981-12-07 Fluid feeder

Publications (2)

Publication Number Publication Date
JPS5899393A JPS5899393A (en) 1983-06-13
JPS635233B2 true JPS635233B2 (en) 1988-02-02

Family

ID=16376452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19755681A Granted JPS5899393A (en) 1981-12-07 1981-12-07 Fluid feeder

Country Status (1)

Country Link
JP (1) JPS5899393A (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5636036A (en) * 1979-08-31 1981-04-09 Shimadzu Corp Chucking and crosshead fixing device of machine such as universal tester

Also Published As

Publication number Publication date
JPS5899393A (en) 1983-06-13

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