JPS635512A - Operation monitoring system for semiconductor manufacture device - Google Patents
Operation monitoring system for semiconductor manufacture deviceInfo
- Publication number
- JPS635512A JPS635512A JP15034386A JP15034386A JPS635512A JP S635512 A JPS635512 A JP S635512A JP 15034386 A JP15034386 A JP 15034386A JP 15034386 A JP15034386 A JP 15034386A JP S635512 A JPS635512 A JP S635512A
- Authority
- JP
- Japan
- Prior art keywords
- signal
- semiconductor manufacturing
- signals
- request signal
- input device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 239000004065 semiconductor Substances 0.000 title claims abstract description 16
- 238000012544 monitoring process Methods 0.000 title claims description 7
- 238000000034 method Methods 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 2
- 230000004931 aggregating effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は半導体製造装置の稼動監視方式に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a system for monitoring the operation of semiconductor manufacturing equipment.
従来半導体製造装置の稼動監視方式は、人間が装置の稼
動状況を目視確認して状況を把握し、各装置の稼動状況
を集計するのが最初の段階であった。In the conventional operation monitoring system for semiconductor manufacturing equipment, the first step was for humans to visually check the operating status of the equipment, grasp the situation, and compile the operating status of each piece of equipment.
次の段階では、上位コンビエータが、各半導体製造装置
に取シ付けられた稼動状況入°力ａｔで状態変更時に発
生した信号を収集することによ）、各半導体製造装置の
稼動状況を把握していた。In the next stage, the host combiator grasps the operating status of each semiconductor manufacturing equipment by collecting signals generated when the status changes using the operating status input attached to each semiconductor manufacturing equipment. was.
゛上述た従来の半導体製造装置の稼動監視方式は、上位
コンピュータがいかなる場合においても稼動状況入力装
置から送られてくる信号を受は取らなければならないの
で上位コンビーータを稼動監視専用として使用しなけれ
ばならないという欠点があった。``In the conventional operation monitoring method for semiconductor manufacturing equipment described above, the upper level computer must receive and receive signals sent from the operating status input device in any case, so the upper level converter must be used exclusively for operation monitoring. There was a drawback that it was not possible.
本発明の方式は、半導体製造装置の稼動に関しての複数
の状態の変化に応答してそれぞれ対応する状態信号を発
生する複数の状態信号発生手段と、上位コンビエータか
ら定期的に前記各状態信号に対応するそれぞれの要求信
号を一定間隔で発生する要求信号発生手段と、前記状態
信号と前記要求信号との供給をうけ前記状態信号を前記
要求信号に対する応答信号として送出するゲート手段と
を含んで構設される。The system of the present invention includes a plurality of status signal generation means that generate corresponding status signals in response to a plurality of status changes related to the operation of semiconductor manufacturing equipment, and a host combinator that periodically responds to each of the status signals. request signal generation means for generating respective request signals at regular intervals, and gate means for receiving the state signal and the request signal and transmitting the state signal as a response signal to the request signal. be done.
次に、本発明について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.
第１図は本発明の一実施例を示す構成図である。FIG. 1 is a block diagram showing an embodiment of the present invention.
入力スイッチで、例えば第１の入力スイッチ３は稼動中
状態入力スイッチ、第２の入力スイッチ４は製品待ち状
態入力スイッチ、第３の入力スイッチ５け試行状態入力
スイッチ、第４の入カスイッ４の出力要求信号７は故障
状態出力要求信号、第３の出力要求信号８は試行状態出
力要求信号、第２の出力要求信号９は製品待ち状態出力
要求信号、第１の出力要求信号１０は稼動中状態出力要
求信号である。１１は、応答信号である。２１〜２４は
ナントゲートであ逆対応する第１〜第４の出力要求信号
が論理値１１′のときに開く。For example, the first input switch 3 is a working state input switch, the second input switch 4 is a product waiting state input switch, the third input switch 5 is a trial state input switch, and the fourth input switch 4 is a trial state input switch. The output request signal 7 is a failure state output request signal, the third output request signal 8 is a trial state output request signal, the second output request signal 9 is a product waiting state output request signal, and the first output request signal 10 is an operating state output request signal. This is a status output request signal. 11 is a response signal. Numerals 21 to 24 are Nant gates which open when the corresponding first to fourth output request signals have a logical value of 11'.
半導体製造装置の状態が変化した場合に稼動状況入力装
置２の対応する入力スイッチが応動する。When the state of the semiconductor manufacturing equipment changes, the corresponding input switch of the operating status input device 2 responds.
例えば稼動開始時には第１のスイッチ３が閉じ論理値１
１＃をナントゲート２１に与え稼動終了に応答して第１
のスイッチ３は開きナントゲート２１の論理値１１′を
除く。For example, at the start of operation, the first switch 3 is closed and the logical value is 1.
1# to the Nantes gate 21 and in response to the end of operation, the first
The switch 3 opens to remove the logic value 11' of the Nant gate 21.
次に上位コンビエータ１は、定期的に第４の出力要求信
号７から第１の出力要求信号１０までを一定間隔で送信
しくこれはナントゲート２１〜２４にそれぞれ論理値１
１′を与える）、稼動状況入力装置２が各出力要求信号
７〜１０を受信したときにナントゲート２１〜２４を開
いて対応する応答信号１１を送信する。上位コンビエー
タ１は送信された応答信号によ）半導体製造装置の状態
を認識する。Next, the host combiator 1 periodically transmits the fourth output request signal 7 to the first output request signal 10 at regular intervals, which have a logic value of 1 to each of the Nante gates 21 to 24.
1'), when the operating status input device 2 receives each output request signal 7-10, it opens the Nantes gates 21-24 and transmits the corresponding response signal 11. The host combinator 1 recognizes the state of the semiconductor manufacturing equipment (based on the transmitted response signal).
定期的要求信号発生についてはコンビエータの公知の技
術法説明は省略する。Regarding the periodic generation of the request signal, a description of the known technical methods of the combiator will be omitted.
このようにすることによフ上位コンビエータは出力要求
時以外は他の仕事をすることができコンビエータの使用
効率を向上できる。By doing this, the upper combiator can perform other work except when an output is requested, and the efficiency of using the combiator can be improved.
以上説明したように本発明には、上位コンピュータが半
導体製造装置に取シ付けた稼動状況入力装置２に対して
定期的に状態出力要求信号を一定間隔で出し各状態出力
要求信号に対する稼動状況入力装置２からの応答信号を
集計することにより、間けつ的定期的に稼動監視をする
ことによシ上位コンピュータの使用効率を向上できると
いう効果がある。As explained above, in the present invention, a host computer periodically outputs a status output request signal at regular intervals to the operating status input device 2 attached to the semiconductor manufacturing equipment, and inputs the operating status for each status output request signal. By aggregating the response signals from the device 2, there is an effect that the usage efficiency of the host computer can be improved by intermittent and regular operation monitoring.
第１図は本発明の一実施例を示す構成図である。
１・・・・・・上位コンビエータ、２・・・・・・稼動
状況入力装置、３・・・・・・第１人力スイッチ、４・
・・・・・第２人力スイッチ、５・・・・・・第３人力
スイッチ、６・・・・・・第４人力スイッチ、７・・・
・・・第４出力要求信号、８・・・・・・第３出力要求
信号、９・・・・・・第２出力要求信号、１０・・・・
・・第１出力要求信号、１１・・・・・・応答信号。
２１〜２４・・・・・・ナントゲート。FIG. 1 is a block diagram showing an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1...Upper combinator, 2...Operating status input device, 3...First manual switch, 4...
...Second manual switch, 5...Third manual switch, 6...Fourth manual switch, 7...
...Fourth output request signal, 8...Third output request signal, 9...Second output request signal, 10...
...First output request signal, 11...Response signal. 21-24... Nantes Gate.
Claims (1)
答してそれぞれ対応する状態信号を発生する複数の状態
信号発生手段と、 上位コンピュータから定期的に前記各状態信号に対応す
るそれぞれの要求信号を一定間隔で発生する要求信号発
生手段と、 前記状態信号と前記要求信号との供給をうけ前記状態信
号を前記要求信号に対する応答信号として送出するゲー
ト手段とを含むことを特徴とする半導体製造装置の稼動
監視方式。[Scope of Claims] A plurality of status signal generating means for generating corresponding status signals in response to changes in a plurality of statuses related to the operation of semiconductor manufacturing equipment, and a device that periodically responds to each of the status signals from a host computer. request signal generating means for generating respective request signals at regular intervals; and gate means for receiving the state signal and the request signal and transmitting the state signal as a response signal to the request signal. A system for monitoring the operation of semiconductor manufacturing equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15034386A JPS635512A (en) | 1986-06-25 | 1986-06-25 | Operation monitoring system for semiconductor manufacture device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15034386A JPS635512A (en) | 1986-06-25 | 1986-06-25 | Operation monitoring system for semiconductor manufacture device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS635512A true JPS635512A (en) | 1988-01-11 |
Family
ID=15494920
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15034386A Pending JPS635512A (en) | 1986-06-25 | 1986-06-25 | Operation monitoring system for semiconductor manufacture device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS635512A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0288448A (en) * | 1988-09-22 | 1990-03-28 | Nitto Boseki Co Ltd | Production of glass cloth for print-circuit board |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5956171A (en) * | 1982-09-25 | 1984-03-31 | Toshiba Corp | Equipment system monitoring device |
-
1986
- 1986-06-25 JP JP15034386A patent/JPS635512A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5956171A (en) * | 1982-09-25 | 1984-03-31 | Toshiba Corp | Equipment system monitoring device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0288448A (en) * | 1988-09-22 | 1990-03-28 | Nitto Boseki Co Ltd | Production of glass cloth for print-circuit board |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4361876A (en) | Microcomputer with logic for selectively disabling serial communications | |
| CN116192907A (en) | Industrial internet of things monitoring method and system based on service sub-platform | |
| CN110875867A (en) | Bus access arbitration device and method | |
| CN114458660A (en) | Control system and control method for electric control bus hydraulic valve | |
| CN111580470A (en) | STM32F 4-based multifunctional motion control method | |
| JPS59122147A (en) | Overall supervisory computer | |
| JPS60217450A (en) | Plant supervisory and controlling device | |
| SU1238036A2 (en) | Numerical control system for group of machine tools | |
| JPS61169955A (en) | Line system control device | |
| JPH04329098A (en) | Remote monitor | |
| JPS57137933A (en) | On-line diagnostic system of audio response device | |
| JPS6146109A (en) | Digital protective relaying device | |
| KR100427789B1 (en) | Data input / output method | |
| JPS63314939A (en) | Line abnormality detecting system | |
| CN110532035A (en) | One way link and chip in a kind of chip | |
| JPS63298436A (en) | Arithmetic logical operation unit | |
| JPH0420301B2 (en) | ||
| JPS58217070A (en) | Data transmitting system of multi-central processing unit control device | |
| JPS63114334A (en) | Connection system for external peripheral equipment | |
| JPH0120461B2 (en) | ||
| JPS59204351A (en) | Transmission control system | |
| JPH02193243A (en) | Remote bus access system | |
| JPS6347035B2 (en) | ||
| JPH07273808A (en) | Half-duplex serial line monitor circuit | |
| JPS62104299A (en) | Data processing system of concentrated wiring system |