JPS6355540U - - Google Patents
Info
- Publication number
- JPS6355540U JPS6355540U JP14928686U JP14928686U JPS6355540U JP S6355540 U JPS6355540 U JP S6355540U JP 14928686 U JP14928686 U JP 14928686U JP 14928686 U JP14928686 U JP 14928686U JP S6355540 U JPS6355540 U JP S6355540U
- Authority
- JP
- Japan
- Prior art keywords
- casing
- driven part
- wafer
- insulating material
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011810 insulating material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Details Of Measuring And Other Instruments (AREA)
Description
第１図は本考案のウエハ塔載部材を示す図、第
２図は従来のウエハ塔載部材を示す図である。 １……チヤツクトツプ、２……筐体、３……被
駆動部、４……モータ（駆動源）。
２図は従来のウエハ塔載部材を示す図である。 １……チヤツクトツプ、２……筐体、３……被
駆動部、４……モータ（駆動源）。
Claims (1)
- 駆動源に接続される被駆動部、該被駆動部に固
着される筐体及び該筐体に回着されるチヤツクト
ツプから成り、前記筐体は絶縁材料により形成さ
れていることを特徴とするウエハ塔載部材。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14928686U JPS6355540U (ja) | 1986-09-29 | 1986-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14928686U JPS6355540U (ja) | 1986-09-29 | 1986-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6355540U true JPS6355540U (ja) | 1988-04-14 |
Family
ID=31064350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14928686U Pending JPS6355540U (ja) | 1986-09-29 | 1986-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6355540U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12070875B2 (en) | 2019-05-17 | 2024-08-27 | Wolfspeed, Inc. | Silicon carbide wafers with relaxed positive bow and related methods |
-
1986
- 1986-09-29 JP JP14928686U patent/JPS6355540U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12070875B2 (en) | 2019-05-17 | 2024-08-27 | Wolfspeed, Inc. | Silicon carbide wafers with relaxed positive bow and related methods |