JPS6358221B2 - - Google Patents

Description

[Detailed description of the invention]

The present invention relates to a method for heat treating an amorphous magnetic alloy material. In recent years, amorphous magnetic alloys have attracted much attention as a new type of soft magnetic material, and active research is being conducted. In the solid state, metals usually exist ^as crystals in ^which the atoms are in a regulated arrangement.
When cooled and solidified at a high rate of sec, an amorphous alloy with an atomic arrangement similar to that in the molten state is obtained even in the solid state. Even by X-ray diffraction or electron beam diffraction, this amorphous alloy does not show a diffraction image showing a crystalline structure, and the atomic arrangement does not have long-range regularity, which is structurally different from crystalline alloys. It has the following. Unlike ordinary crystalline materials, magnetic alloys made of such amorphous magnetic alloys do not have magnetocrystalline anisotropy, have low coercive force (Hc), and are expected to have excellent soft magnetism. Electric resistance is large,
It has both excellent properties and advantages in use as various soft magnetic materials, such as high hardness, good workability such as thin plate processing, and easy and inexpensive manufacturing method. Conventionally, such amorphous magnetic alloys contain Fe, Co, and Ni as iron group element components;
Those containing vitrifying elements such as Si, B, C, and P are known. These have properties depending on their composition, and their uses can be considered depending on their properties, and some of them have been put into practical use. For example, an Fe-based material whose main component is Fe as an iron group element has a large magnetostriction, but is suitable for use as a transformer material because of its large saturation magnetic flux density (Bs) and low cost.
In addition, Co-based metals whose main component is Co as an iron group element are
Although Bs is lower than Fe and the cost is higher, it is suitable as a material for magnetic heads because a composition with zero magnetostriction can be obtained. However, conventional amorphous magnetic alloys containing one or more vitrifying elements such as Si, B, C, and P, which have good soft magnetic properties, have relatively low crystallization temperatures. It has the disadvantage that its properties are not fully utilized or its handling is difficult. On the other hand, recently, Zr
Amorphous magnetic alloy materials have been proposed that contain , either alone or in combination with other vitrifying elements. To give a typical composition, for example, (Co _0.9 Ni _0.1 )
₉₀ Zr ₁₀ , (Co _0.2 Fe _0.8 ) ₉₀ Zr ₁₀ , etc. Such an amorphous magnetic alloy containing Zr as a vitrifying element has a composition with Bs that is satisfactory for practical use.
In addition, a composition with zero magnetostriction can be obtained, and the crystallization temperature is much higher than that of conventional materials, thus improving the above-mentioned drawbacks. However, such an amorphous magnetic alloy material containing Zr as a vitrifying element has not yet achieved sufficiently satisfactory characteristics in terms of magnetic permeability or magnetic loss in its original state. Incidentally, it is known that magnetic permeability or magnetic loss changes depending on the history of processing of the material. Heat treatment annealing is one of the conventional treatment methods for amorphous magnetic alloy materials. This heat treatment annealing is performed after ultra-quenching from the liquid phase to obtain an amorphous magnetic alloy material.
The material is heated and maintained at a temperature below the crystallization temperature (Tcry) and then cooled, thereby eliminating internal strain during thin plate manufacturing by ultra-quenching and increasing magnetic permeability. However, this heat treatment
The disadvantage is that it cannot be applied to alloys of In this case, in particular, as the vitrifying element
For amorphous magnetic alloy materials containing Zr, for example, if the composition has Bs = 10KG or more, which is the minimum required for a recording magnetic head for a high coercive force recording medium,
Since Tc > Tcry, this cannot be a technology for improving the magnetic permeability of high Bs materials. on the other hand,
Even among Zr-based alloys, there are cases where Tc<Tcry.
Although it can be used as a practical material, when such a material is subjected to such heat treatment annealing, the magnetic permeability certainly improves, but it does not require rapid cooling after heat treatment or complicated cooling temperature. Control must be carried out, and internal strain occurs during cooling, so it is not possible to obtain particularly good initial magnetic permeability values. In contrast, a technology for heat-treating thin plates obtained by ultra-quenching in a magnetic field was developed in JP-A-51-
This is disclosed in Japanese Patent No. 73925, Japanese Patent No. 52-114421, etc., and it is stated that the maximum magnetic permeability μm is significantly improved by heat treatment in a magnetic field. In this case, the heat treatment temperature is below the crystallization temperature, and the magnetic field is applied as a static magnetic field only from a fixed magnetic field axis direction. In this way, if a magnetic field is applied from a fixed direction during heat treatment, uniaxial induced magnetic anisotropy with the easy axis in the direction of magnetic field application occurs in the amorphous magnetic alloy thin plate. In such a case, magnetization tends to be oriented along the induced easy axis of magnetization, and therefore the residual magnetic flux density (Br) increases. Therefore, if a magnetic field is applied in the opposite direction at this time, the magnetization and the energy of the magnetic field will be reduced, and due to the movement of the domain wall by 180°,
Magnetization reversal easily occurs and the coercive force (Hc) becomes small. Therefore, since the residual magnetic flux density (Br) increases as described above, it is natural that the maximum magnetic permeability μmBr/Hc as a static magnetization characteristic increases. However, when a Zr-based amorphous magnetic alloy material was subjected to such heat treatment in a magnetic field and its magnetic properties were measured, it was confirmed that the magnetic permeability under alternating current conditions decreased. That is, the magnetic permeability (μ ₁₀ ) under a magnetic field of about 10 mOe, that is, the effective magnetic permeability, does not increase significantly. Furthermore, magnetic loss is not significantly reduced. The present invention was made in view of the above-mentioned circumstances, and provides an amorphous magnetic alloy material containing Zr as a vitrifying element, which improves its magnetic permeability, that is, its dynamic and static characteristic values, and The main purpose of the present invention is to provide a heat treatment method that can reduce the magnetic loss and make Zr-based amorphous alloy material usable as a practical material. As a result of intensive research for this purpose, the present inventors applied heat treatment in a prescribed magnetic field to an amorphous magnetic alloy material containing Zr as a vitrification element, thereby producing multiaxial magnetic anomalies in the alloy material. The inventors discovered that such objects can be achieved by imparting polarity, leading to the present invention. That is, the present invention provides an amorphous magnetic alloy material having a composition represented by the following formula, while being maintained at a temperature lower than the Curie point and the crystallization temperature.
The object of the invention is to apply or induce a magnetic field, and to vary the applied or induced magnetic field in order to produce multiaxial magnetic anisotropy in the material. Formula M _p T _q (Zr _k Y _l ) _rwhere , M is one or more selected from Fe, Co, and Ni, T is one or more transition elements other than the iron group, and Y is glass. is one or more of the chemical elements. Also, p, q, r, k and l are p+q+r
=100at%, k+l=100%, O≦q≦10at%, 5
The relationships are as follows: ≦r≦30at%, O<k≦100%. According to the present invention, multiaxial magnetic anisotropy is imparted to the alloy material, which not only prevents a decrease in the dynamic characteristic value of magnetic permeability, especially the initial magnetic permeability and the effective magnetic permeability, but also On the contrary, it has been significantly improved, its static characteristic values have also been significantly improved, and magnetic loss has also been significantly reduced. In addition, Tc with zero magnetostrictive composition or high Bs composition
The present invention can also be applied to Zr-based alloys of >Tcry, and in this case, it is possible to significantly improve magnetic permeability and reduce magnetic loss. Therefore, it is possible to obtain extremely excellent properties as a practical material such as a material for a magnetic head, such as having low magnetostriction, high saturation density, and high magnetic permeability. Furthermore
Zr-based alloys with Tc<Tcry can also be heat-treated at a relatively low temperature below Tc, and can be slowly cooled after heat treatment, significantly improving magnetic permeability and magnetic loss. be able to. The processing method of the present invention will be explained in detail below. The amorphous magnetic alloy material to which the present invention is applied contains Zr alone or in combination with other vitrifying elements as a vitrifying element, and has a composition represented by the above formula. The meanings of each symbol in the above formula are as described above, but at least one element T in the first to third transition series other than the iron group includes Nb, Mo, Ti,
V, Cr, Mn, Cu, Zn, Ta, W, Au, Ag, Pd,
Typical examples include one or more of Rh, Ru, and the like. In this case, the atomic ratio b of T is
It is preferably 0 to 5 at%. On the other hand, the one or more vitrifying elements represented by Y include Si, B, P, C, Ge, Sn, Ga, In,
One or more types of Sb, Al, etc. can be mentioned, especially
Preferably, it is one or more of Si, P, and B. In this case, the ratio l of other vitrifying elements in the vitrifying component consisting of other vitrifying elements and Zr
can be appropriately selected from a wide range of values in the range of 0% to less than 100%, but it is generally 0 to 90.
% is preferable. This is because, in such a range, Tcry is sufficiently high and the advantages due to high Tcry can be tolerated. In addition, the atomic ratio r of the vitrification component is 5 to
The content is 30 at%, and more preferably 8 to 30 at%. This is because in such a case, the degree of amorphization of the alloy will be good and Tc will be sufficiently large. At this time, M is 1 to 3 of Fe, Co, and Ni.
It consists of seeds, and its composition ratio may be various. The amorphous magnetic alloy material having such a composition may be a thin wire or a thin film, but is usually a thin plate having a thickness of 5 to 200 μm. On the other hand, such an amorphous magnetic alloy material has multiaxial magnetic anisotropy when subjected to the heat treatment of the present invention, which will be described later. It is directional. Therefore, according to conventional methods, the torque curve can be measured to determine the number of peaks within a rotation angle of 0 to 180 degrees, or its Fourier analysis can be performed, and furthermore, the angle due to the applied magnetic field of ferromagnetic resonance can be determined. If we perform dependence measurements, it is obvious that there are two or more easy axes of magnetization.
Multiaxial magnetic anisotropy is observed. In this case, a normal ferromagnetic resonance measurement (9.34GHz,
1300 Oe) and measure the angular dependence of the resonant magnetic field within the plane of the thin plate, the ratio Ha/Ho of the anisotropic magnetic field Ha in each easy axis direction and the unique resonant magnetic field Ho is approximately 1.
% or more, especially 5% or more. On the other hand, clear uniaxial magnetic anisotropy is observed in thin sheets after heat treatment in a uniaxial static magnetic field, and weak uniaxial magnetic anisotropy is usually observed in thin sheets immediately after quenching. Even if this is observed, the presence of multiple easy magnetization axes with multi-axis magnetic anisotropy as in the present invention will not be clearly observed. Furthermore, when measuring the in-plane torque curve of the sample thin plate using a torque magnetometer and observing the number of peaks within a rotation angle of 0 to 180 degrees, two or more clear peaks appeared only in the case of the present invention. On the other hand, immediately after rapid cooling, after heat treatment in a non-magnetic field, or after heat treatment in a static magnetic field, within the measurement error range, 1
Either a book peak appears or no peak appears at all. Therefore, if such normal torque curves or ferromagnetic resonance measurements are performed, they will be a means of confirming whether or not they have multiaxial anisotropy. The developed Zr-based amorphous magnetic alloy material differs from conventional materials in this respect. In addition, in the above, the number of easy magnetization axes is 2 to 6,
Preferably, it exists within the plane of the thin plate and has magnetic anisotropy of 2 to 6 axes. In addition, it is preferable that the easy axes intersect with each other at an angle of π/n (n is an integer of 2 or more) and be symmetrical within the plane of the thin plate. Preferably, the orientation constants are approximately equal amounts. Such an anisotropy constant can be easily obtained by Fourier analysis of the torque curve according to a conventional method. Next, the method of heat treating an amorphous magnetic alloy material of the present invention is usually carried out as follows. First, an amorphous magnetic alloy is obtained as a substantially amorphous thin plate or film by ultra-quenching a material having a corresponding composition from a liquid or gas phase. In order to obtain an amorphous magnetic alloy thin plate by ultra-quenching from the liquid phase, an alloy of the corresponding composition is melted to form a melt, and this melt is heated from the molten state to approximately 10 ⁴ °C/sec or more, usually 10 ⁴ Ultra-rapid cooling at a cooling rate of ~10 ⁶ °C/sec,
It may be cooled and solidified. In order to ultra-quench the molten alloy liquid, various methods such as the known twin-roll method, single-roll method, or inside-in-division method may be used. Therefore, the melting conditions for the alloy, the jetting conditions for the alloy liquid, the shape and dimensions of the nozzle during jetting, the shape, dimensions, material, etc. of the cooling body such as twin rolls are within the range of conditions for the known ultra-quenching method. It may be determined as appropriate. In addition, when melting the alloy, it is preferable to perform it in an inert gas such as argon or while flowing an inert gas, but the spouting of this melt is performed in an atmosphere of either an inert gas or air. You may go to In this case, the obtained thin plate generally has a
The thickness is 200 μm, in particular 20-60 μm. On the other hand, the amorphous magnetic alloy to be subjected to the treatment described below may be ultra-quenched from the gas phase and formed into a thin plate. To super-quickly cool from the gas phase,
An amorphous magnetic alloy thin plate may be formed by sputtering on various substrates such as quartz glass, alumina, rock salt, etc. Conditions for sputtering may be appropriately determined from known conditions. This allows the board to have a thickness
An amorphous magnetic alloy thin plate of about 500 Å to 2 mm is formed. The thin film obtained in this way can be used as is in the next step, but in some cases, the thin film can be peeled off from the substrate and used. Thereafter, a magnetic field is applied or induced while the thin plate or film obtained in this way is held and heated at a temperature below its Curie point and below its crystallization temperature, and this application or induction is The applied magnetic field is rotated by a predetermined angle at predetermined time intervals, and then cooled. In this case, the amorphous magnetic alloy material to be subjected to such heat treatment in a magnetic field may be a long continuous thin plate obtained as described above, or may be cut into a predetermined length or cut into a predetermined length. It may be a shaped thin plate or thin film, or even a thin plate rolled into a cylindrical shape.
For example, it may be a thin plate formed as a wound magnetic core, and various forms are possible when it is processed. The temperature of such heat treatment in a magnetic field in the present invention must be maintained at a temperature lower than the crystallization temperature of the amorphous magnetic alloy in the form of a thin plate or film obtained by the method described above. This is because the soft magnetic properties as an amorphous magnetic alloy are lost. At the same time, its holding temperature must be below the Curie point. This is because spontaneous magnetization does not occur above the Curie point and induced magnetic anisotropy does not occur. On the other hand, the lower limit of the holding temperature is generally 100°C or higher, more preferably 150°C or higher. Also, the retention time is generally
It is within 500 hours, preferably about 1 minute to 500 hours. As a heating method, in addition to performing in a resistance type electric furnace, high frequency heating, infrared heating, and various other methods are possible. Under such temperature-maintaining conditions, a magnetic field is applied or induced in the thin plate or film. In this case, the applied or induced magnetic field may have a direct current or alternating current intensity, or may be continuous or pulsed. It may be something that does.
Further, the magnetic field to be applied or induced may have two or more magnetic field generation sources, and a composite magnetic field of the magnetic fields from the two or more generation sources may be applied to or induced in the amorphous magnetic alloy material. . on the other hand,
an applied or induced magnetic field, or
When there are more than one magnetic field, the combined magnetic field is generally parallel to the plane direction of the upper or lower surface of the thin plate or thin film in terms of efficiency and other aspects during the intermittent rotation of the magnetic field described below. However, since such a magnetic field only needs to have a component in the planar direction on the upper surface or the lower surface, the magnetic field may be applied at an angle with respect to these. However, when it is perpendicular to the plane direction, there is no plane direction component, so the desired effect cannot be expected. Further, as for the strength of the magnetic field to be induced or applied, or the combined magnetic field thereof, it is generally preferable to effectively apply a strength of about 200 Oe or more, which substantially saturates the magnetic alloy in its longitudinal direction. However, in the width direction of the thin plate, it will be saturated with a magnetic field of less than this, and in the longitudinal direction, there will be a demagnetizing field based on the thickness of the thin plate or thin film and the unevenness existing on its surface, so a value of 500 Oe or more is more preferable. teeth
It is preferable to set it to about 1000 Oe or more. In addition, as a magnetic field generation source, one or more of external magnetic fields such as a known electromagnet, Helmholtz coil, solenoid coil, permanent magnet, etc. may be used.
Possible methods include inducing a magnetic field by passing a current through a thin plate or the like. In the present invention, the component of the above-mentioned applied or induced magnetic field, or their combined magnetic field, in the plane direction of the thin plate or thin film, that is, in the plane direction parallel to the upper or lower surface of the thin plate or thin film,
While substantially maintained at the above-mentioned heating temperature, the induced magnetic anisotropy is made multiaxial by intermittently rotating it by at least 180 degrees. This rotation is usually performed at intervals of a predetermined angle at a predetermined time, and as long as the in-plane direction component of the magnetic field rotates at least once in total, the in-plane direction component of the magnetic field can be rotated only in a certain direction. The magnetic field not only rotates intermittently by angle, but also rotates intermittently in a forward and reverse at random manner.
The result may be a rotation of at least 180°. That is, if the applied or induced magnetic field or their combined magnetic field rotates at least half a rotation intermittently, the induced magnetic anisotropy axis will rotate one rotation intermittently, and as a result of the intermittent rotation, the induced magnetic anisotropy will change. This is because the object is multi-axial, and therefore the purpose can be achieved even if the rotation is performed in a forward or reverse at random manner. However, in terms of the simplicity of the configuration of the device used, it is better to configure it so that it rotates intermittently in a fixed direction.
The number of rotations in units of 180° may be any value as long as it is one or more rotations. Such intermittent rotation is performed by rotating by a predetermined angle at predetermined time intervals. in this case,
This predetermined angle in the intermittent rotation may be different from each other, but as described above, the angle (π/
Since it is preferable that the two elements intersect with each other at n) and have symmetric multiaxial magnetic anisotropy, it is preferable to use π/n. On the other hand, when performing such intermittent rotation at predetermined angles, it is only necessary to maintain the static magnetic field for a predetermined period of time, usually for a certain period of time, at each predetermined angle. Therefore, during the rotational movement of the magnetic field during this holding time, the magnetic field may or may not be applied or induced. When a magnetic field is applied during rotational movement during the magnetic field retention time, the rotational movement time must be shortened to a certain degree or less with respect to the retention time. In order to perform such intermittent rotation of the magnetic field by a predetermined angle at predetermined time intervals, the applied or induced magnetic field, or their composite magnetic field may be rotated intermittently, or a material such as a thin plate may be rotated intermittently. It may be rotated intermittently, or furthermore, both may be rotated and at least one of them may be rotated intermittently. In this case, the angle of incidence of the applied magnetic field with respect to the surface of the thin plate or the like is usually held constant during this rotation, but in some cases the angle of incidence may be continuously changed during the rotation. Various aspects can be used to perform such heat treatment in a magnetic field. For example, a thin plate may be formed into a predetermined length or shape, and an external magnetic field having a magnetic field axis approximately parallel to the surface of the thin plate may be applied to the thin plate while the thin plate is intermittently rotated, or both may be used in combination. You can also do it. Alternatively, by continuously moving a long continuous thin plate through two normally orthogonal external magnetic fields and changing the magnitude of the two external magnetic fields in a predetermined manner, a composite magnetic field of the two external magnetic fields can be generated. It is also possible to use a method such as rotating the direction of the image intermittently. Alternatively, after forming a wound core from a thin plate, for example, the wound core and the external magnetic field partner may be rotated to perform intermittent rotation as described above, or, for example, the wound core may be wound with wires, and at the same time the wound core may be energized. A method may also be used, such as changing the current flowing through the winding or the wound magnetic core, and intermittently rotating the composite magnetic field of the magnetic field applied by the winding and the magnetic field induced by the energization. Furthermore, a thin plate is used as a wound magnetic core,
A winding is applied to the wound magnetic core, and the wound magnetic core with the wound wire is placed in an external magnetic field, and at least one of the winding current and the external magnetic field is changed in a predetermined manner, and the magnetic field generated by the winding is It is also possible to use a method of intermittently rotating a composite magnetic field with an external magnetic field. As described in detail above, after the magnetic field treatment is performed in the heated and held state, the thin plate or thin film is cooled. Although this cooling may be performed after stopping the application of the magnetic field, it is preferably performed in the above-mentioned magnetic field. Further, although the cooling rate can be changed in various ways, slow cooling is generally preferred. The heat treatment in a magnetic field as detailed above may be performed in vacuum, in an inert gas, or even in air. In addition, the shape and dimensions of the sample thin plate or thin film to be processed can be changed in various ways, but from the viewpoint of processing efficiency, it is preferable to use a shape with less shape anisotropy, such as a disk or a wound core shape. . A preferred example of the apparatus used for the magnetic field heat treatment described in detail above is shown in FIG. In FIG. 1, an amorphous magnetic alloy material, ie a thin plate or film 1 thereof, is placed on a pedestal 5. In FIG. The pedestal 5 can be rotated intermittently at predetermined angles in the direction of arrow a in the figure by a motor (not shown). On the other hand, the pedestal 5 is housed in an electric furnace 4, and the amorphous magnetic alloy material 1 on the pedestal 5 can be heated and maintained at a constant temperature by the electric furnace 4. Further, magnetic poles 21 and 23 of electromagnets are arranged outside the electric furnace 4, and the amorphous magnetic alloy 1
A magnetic field can be applied in the plane direction. In such a configuration, the electric furnace 4 is energized to heat and maintain the amorphous magnetic alloy 1 at a predetermined temperature, and the pedestal 5
The electromagnet 2 is held at predetermined angles in the direction of arrow a, rotating intermittently for a predetermined period of time.
1 and 23 to apply a magnetic field. After that, if the electric furnace is continuously cooled, the magnetic anisotropy induced in the amorphous magnetic alloy becomes multiaxial in accordance with the predetermined angle in the intermittent rotation, and the magnetic anisotropy induced in the amorphous magnetic alloy becomes multiaxial in accordance with the predetermined angle in the intermittent rotation. The effect will be realized. On the other hand, FIG. 2 shows yet another example. Second
The example shown in the figure is an amorphous magnetic alloy material,
This is a case where a long continuous thin plate 15 is used and the above-described heat treatment in a magnetic field of the present invention is continuously applied to the plate. In FIG. 2, a solenoid coil 26,
Helmholtz coils 251 and 252 are arranged as shown. On the other hand, both coils 26;
An electric furnace 4 is disposed within the electric furnaces 251 and 252, and the continuous thin plate 15 is continuously moved in the direction of arrow b in the figure. With such a configuration, the Helmholtz coil 2
51, 252 generate a magnetic field _H1 , and a solenoid coil 26 generates a magnetic field in the longitudinal direction in the plane of the thin plate 15.
H ₂ will be applied successively, respectively.
In this case, the magnetic fields H ₁ and H ₂ are each pulsed magnetic fields and are applied to the continuous thin plate as shown in FIG. 4, for example. Therefore, the electric furnace 4, the Helmholtz coils 251, 252, and the solenoid coil 26 are energized, and the continuous thin plate 15 is moved in the direction indicated by the arrow b in the figure.
If the thin plate 15 is heated to a predetermined temperature as it passes through the electric furnace 4, a predetermined portion of the thin plate 15 that is heated in a predetermined manner in the electric furnace 4 will have the temperature shown in FIG. A magnetic field is applied continuously, and the magnetic field applied to a given part of the thin plate is
As the thin plate 15 is transferred, it rotates in 90° increments. Thereafter, as the thin plate 15 is transferred, it exits the electric furnace 4 and is cooled. As a result, there are two
Axial magnetic anisotropy is imparted to achieve the desired effects of the present invention. In the above, if the magnitudes of the pulsed magnetic fields H ₁ and H ₂ are changed in a predetermined manner and they are synchronized in a predetermined manner, magnetic anisotropy in three or more desired axes can be introduced into the thin plate 15. That will happen. Furthermore, FIG. 3 shows another example in which a long continuous thin plate 15 is wound in the longitudinal direction, for example, in a circular ring shape, for example, as a wound magnetic core, and a large amount of treatment is performed at one time.
In this case, the thin plate 15 wound in the form of a ring is placed in electromagnets 21, 23, which are energized with a pulsed current i ₁ so that the thin plate 15 is energized, for example as shown in FIG. A magnetic field H ₁ like,
Apply in the width direction of the thin plate, that is, parallel to the winding axis.
On the other hand, the thin plate 15 wound in a circular ring is provided with a winding 3 made of a covered conductor, and the winding 3 is also energized with a pulse current i ₂ , so that in the longitudinal direction of the thin plate, for example, as shown in FIG. A pulsed magnetic field as shown in
Allow _H2 to be applied. Furthermore, the entire thin plate 15 is placed in the electric furnace 4. In such a configuration, when the electric furnace 4 is energized to heat and maintain the thin plate 15 at a predetermined temperature, and at the same time energization is applied to i ₁ and i ₂ , i ₁ flowing through the electromagnets 21 and 23 causes the external magnetic field shown in FIG. H ₁ is applied in the width direction of the thin plate, while
The i ₂ flowing through the winding 3 generates a magnetic field H ₂ in the longitudinal direction of the thin plate 15 as shown in FIG. As a result, the magnetic field applied to the thin plate rotates intermittently while being held at every 90° for a certain period of time. After a certain period of time, if the electric furnace 4 is turned off and cooled, the amorphous magnetic alloy thin plate 1
The magnetic anisotropy induced in 5 becomes biaxial, and the desired effect of the present invention is realized. The amorphous magnetic alloy obtained by the present invention described in detail above exhibits extremely excellent properties when used as a material for magnetic heads, various magnetic cores, or for other uses. EXAMPLES The present invention will be described in more detail below with reference to Examples. Example 1 Each raw material was weighed to have a composition of (Co _0.9 Ni _0.1 ) ₉₀ Zr ₁₀ and melted in a Tammann furnace in an argon gas stream. This melted alloy was sucked up in a quartz tube and rapidly cooled to prepare a master alloy. Next, this master alloy was melted and rapidly cooled at a cooling rate of about 10 ⁶ C/sec to produce a long thin plate with a thickness of 30 μm and a width of 3 cm. When this thin plate was subjected to X-ray diffraction and electron beam diffraction, no diffraction image indicating a crystal structure was detected. Also, the crystallization temperature (Tcry) of this thin plate is 490℃, the Curie point (Tc)
The temperature was 550℃, and its Bs was 9.8KG. Next, the obtained thin plate is molded into a cemented carbide mold.
It was punched into a disc shape of 20mmφ. This punched disk was subjected to the magnetic field heat treatment of the present invention using the apparatus shown in FIG. In other words, the entire device is
A disk-shaped thin plate 1 is placed under a vacuum of 10 ^-1 Torr and a magnetic field of 10 KOe is applied by the magnetic poles 21 and 23.
was rotated intermittently at 60 rpm. In this case, the intermittent rotation was maintained for 2 minutes every π/n (n is 2, 3, 4, or 6). While performing such intermittent rotation, the thin plate 1 was heated and maintained at 350° C. in the electric furnace 4. After maintaining this temperature for 40 minutes, only the electric furnace 4 was turned off and slow cooling was performed in vacuum while applying an intermittent rotating magnetic field. Torque curves were measured using a torque magnetometer for the four types of thin discs (samples A to D) of the present invention thus obtained. As a result, they have a rotation angle π/
It was confirmed that the material had multiaxial anisotropy with 2, 3, 4, or 6 easy axes of magnetization with respect to n. Next, a ring having an inner diameter of 5 mmφ and an outer diameter of 15 mmφ was obtained by etching the disk subjected to the magnetic field treatment as described above, and 30 of these rings were laminated with interlayer insulation. Next, the magnetic properties of the four types of samples obtained were measured. That is, the coercive force (Hc) and residual magnetic flux density (Br) were measured using an integral BH loop tracer, and the effective magnetic permeability μe under a magnetic field of 10 mOe at 1 KHz was measured using a Maxwell Bridge. The results are shown in Table 1. On the other hand, for comparison, the torque curve of the thin plate (sample E) immediately after quenching was measured in the same manner as above, and then each magnetic property was measured. In this case, in sample E, a weak, uniaxial easy axis of magnetization was observed. In addition, when a ring was cut out and the magnetic properties were measured, the results shown in Table 1 were obtained. Furthermore, for comparison, the thin plate immediately after quenching was extracted into a ring similar to the above, wound, and heated at 350℃ and 40℃ while applying a magnetic field of 20Oe in the circumferential direction of the ring in vacuum.
The thin plates (sample F) that had been heat-treated for a minute and then slowly cooled were stacked in the same manner as described above, and each magnetic property was measured. The measurement results of each magnetic property are also listed in Table 1. Furthermore, when a 5 mm diameter disk was removed from the ring (sample F) subjected to the static magnetic field treatment in this manner by etching and its torque curve was measured, clear uniaxial magnetic anisotropy was observed.

[Table] From the results in Table 1, it can be seen that the amorphous magnetic alloy thin plate according to the present invention having multiaxial magnetic anisotropy has a significantly high effective magnetic permeability and exhibits extremely excellent properties. Example 2 A thin plate of an amorphous magnetic alloy having a composition of (Co _0.2 Fe _0.8 ) ₉₀ Zr ₁₀ and having a thickness of 30 μm was prepared in the same manner as in Example 1.
Bs of this alloy is 15.7KG, Tc is 380℃, Tcry is
It was 490℃. Next, from this alloy 5 was prepared in exactly the same manner as in Example 1.
Seed disk sample lamina (H to L) and one ring lamina sample (M) were obtained, one of which was intact (sample L) and the other five (H to K and M). Heat treated in vacuum at 300℃ for 60 minutes,
Then, it was slowly cooled. In this case, this heat treatment was performed in a magnetic field of 10 KOe for samples H to K as in Example 1, and 20 Oe for sample M as in Example 1. At this time, for sample M, the magnetic field is a static magnetic field in the ring circumferential direction. On the other hand, sample H
For I, J, and K, the thin plate 1 was rotated at 60 rpm using the apparatus shown in Fig. 1, and was rotated for 2 minutes at predetermined angles of π/2, π/3, π/4, and π/6, respectively. I kept it one by one. Such samples H~K
When the torque curves were measured, the existence of 2-, 3-, 4-, and 6-axis magnetic anisotropy was confirmed. On the other hand, when a disk was removed from sample M and the torque curve was measured, uniaxial magnetic anisotropy was confirmed. Next, ring-shaped thin plates were extracted from these five types of disks (H to L) in the same manner as in Example 1, and 30 of each of these plates were stacked and the magnetic properties were measured without changing the sample M. did. Table 2 shows the results of magnetic loss W, Br, and Hc as magnetic properties. From the results in Table 2, it can be seen that the case according to the present invention is the best in terms of magnetic loss.

【table】 [Brief explanation of the drawing]

1, 2, and 3 are schematic diagrams each showing an example of an apparatus used in one aspect of the invention, and FIG. 4 shows, for example, the apparatus shown in FIGS. 2 and 3. FIG. 2 is a diagram showing an example of a change in magnetic field strength (H) of two generated external magnetic fields H ₁ and H ₂ with respect to time (t). 1,15...Amorphous magnetic alloy material.

Claims (1)

[Claims] 1. A magnetic field is applied or induced to an amorphous magnetic alloy material having a composition represented by the following formula while the temperature is maintained at a temperature lower than the Curie point and the crystallization temperature. Alternatively, a heat treatment method for an amorphous magnetic alloy material, which is characterized by changing the induced magnetic field to obtain an amorphous magnetic alloy material having a composition represented by the following formula and having multiaxial magnetic anisotropy. . Formula M _p T _q (Zr _k Y _l ) _r [wherein M is 1 selected from Fe, Co and Ni
T is one or more transition elements other than the iron group, and Y is one or more vitrifying elements.
Also, p, q, r, k and l are p+q+r=
100at%, k+l=100%, O≦q≦10at%, 5≦
They have the following relationships: r≦30at% and O<k≦100%. ]