JPS6360909U - - Google Patents
Info
- Publication number
- JPS6360909U JPS6360909U JP15586086U JP15586086U JPS6360909U JP S6360909 U JPS6360909 U JP S6360909U JP 15586086 U JP15586086 U JP 15586086U JP 15586086 U JP15586086 U JP 15586086U JP S6360909 U JPS6360909 U JP S6360909U
- Authority
- JP
- Japan
- Prior art keywords
- film thickness
- surrounded
- thickness meter
- crystal oscillator
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 8
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
Description
第１図は、この考案の一実施例に係る水晶式膜
厚計を基板と共に示す概略図である。第２図は、
従来の水晶式膜厚計を基板と共に示す概略図であ
る。 ４……蒸発物質、８……水晶振動子、１０……
膜厚モニタ、１２……メツシユ電極、１４……バ
イアス電源、１６……実施例に係る水晶式膜厚計
。
厚計を基板と共に示す概略図である。第２図は、
従来の水晶式膜厚計を基板と共に示す概略図であ
る。 ４……蒸発物質、８……水晶振動子、１０……
膜厚モニタ、１２……メツシユ電極、１４……バ
イアス電源、１６……実施例に係る水晶式膜厚計
。
Claims (1)
- 水晶振動子とその振動周波数の変化を測定する
膜厚モニタを備える水晶式膜厚計において、水晶
振動子の周囲を、導電性材料から成り接地電位に
されるかまたはバイアス電圧が印加されるメツシ
ユ電極で取り囲んでいることを特徴とする水晶式
膜厚計。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15586086U JPS6360909U (ja) | 1986-10-11 | 1986-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15586086U JPS6360909U (ja) | 1986-10-11 | 1986-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6360909U true JPS6360909U (ja) | 1988-04-22 |
Family
ID=31076941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15586086U Pending JPS6360909U (ja) | 1986-10-11 | 1986-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6360909U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12050293B2 (en) | 2018-12-19 | 2024-07-30 | Pgs Geophysical As | Medetomidine compositions having improved anti-fouling characteristics |
-
1986
- 1986-10-11 JP JP15586086U patent/JPS6360909U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12050293B2 (en) | 2018-12-19 | 2024-07-30 | Pgs Geophysical As | Medetomidine compositions having improved anti-fouling characteristics |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6360909U (ja) | ||
| JPS596321U (ja) | 圧電音叉振動子 | |
| JPS6413119U (ja) | ||
| JPH0257625U (ja) | ||
| JPS6456848U (ja) | ||
| JPS6355535U (ja) | ||
| JPS553208A (en) | Device to obtain plural resonance frequencies | |
| JPS61182120U (ja) | ||
| JPH03130621U (ja) | ||
| JPH07109969B2 (ja) | 圧電振動子の電極構造 | |
| JPS6280420U (ja) | ||
| JPS61146021U (ja) | ||
| JPS6320618U (ja) | ||
| JPS6280425U (ja) | ||
| JPS59169122U (ja) | 水晶振動子 | |
| JPS62114521U (ja) | ||
| JPH0232007U (ja) | ||
| JPH01113418U (ja) | ||
| JPS58115721U (ja) | 液晶表示素子 | |
| JPH0480124U (ja) | ||
| JPH0396627U (ja) | ||
| JPS6157887U (ja) | ||
| JPS61150335U (ja) | ||
| JPS61145917U (ja) | ||
| JPS59111306U (ja) | ３端子形圧電発振子 |