JPS6360909U - - Google Patents
Info
- Publication number
- JPS6360909U JPS6360909U JP15586086U JP15586086U JPS6360909U JP S6360909 U JPS6360909 U JP S6360909U JP 15586086 U JP15586086 U JP 15586086U JP 15586086 U JP15586086 U JP 15586086U JP S6360909 U JPS6360909 U JP S6360909U
- Authority
- JP
- Japan
- Prior art keywords
- film thickness
- surrounded
- thickness meter
- crystal oscillator
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 8
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
Description
第１図は、この考案の一実施例に係る水晶式膜
厚計を基板と共に示す概略図である。第２図は、
従来の水晶式膜厚計を基板と共に示す概略図であ
る。
４……蒸発物質、８……水晶振動子、１０……
膜厚モニタ、１２……メツシユ電極、１４……バ
イアス電源、１６……実施例に係る水晶式膜厚計
。
FIG. 1 is a schematic diagram showing a crystal film thickness meter according to an embodiment of the invention together with a substrate. Figure 2 shows
FIG. 2 is a schematic diagram showing a conventional quartz crystal film thickness meter together with a substrate. 4... Evaporated substance, 8... Crystal oscillator, 10...
Film thickness monitor, 12... mesh electrode, 14... bias power supply, 16... crystal film thickness meter according to the example.
Claims (1)
膜厚モニタを備える水晶式膜厚計において、水晶
振動子の周囲を、導電性材料から成り接地電位に
されるかまたはバイアス電圧が印加されるメツシ
ユ電極で取り囲んでいることを特徴とする水晶式
膜厚計。 In a crystal film thickness meter equipped with a crystal oscillator and a film thickness monitor that measures changes in its vibration frequency, the quartz crystal oscillator is surrounded by a mesh made of a conductive material that is at ground potential or to which a bias voltage is applied. A crystal film thickness meter that is characterized by being surrounded by electrodes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15586086U JPS6360909U (en) | 1986-10-11 | 1986-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15586086U JPS6360909U (en) | 1986-10-11 | 1986-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6360909U true JPS6360909U (en) | 1988-04-22 |
Family
ID=31076941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15586086U Pending JPS6360909U (en) | 1986-10-11 | 1986-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6360909U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12050293B2 (en) | 2018-12-19 | 2024-07-30 | Pgs Geophysical As | Medetomidine compositions having improved anti-fouling characteristics |
-
1986
- 1986-10-11 JP JP15586086U patent/JPS6360909U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12050293B2 (en) | 2018-12-19 | 2024-07-30 | Pgs Geophysical As | Medetomidine compositions having improved anti-fouling characteristics |
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