JPS6365235U - - Google Patents
Info
- Publication number
- JPS6365235U JPS6365235U JP1986159959U JP15995986U JPS6365235U JP S6365235 U JPS6365235 U JP S6365235U JP 1986159959 U JP1986159959 U JP 1986159959U JP 15995986 U JP15995986 U JP 15995986U JP S6365235 U JPS6365235 U JP S6365235U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- vacuum chamber
- load lock
- vacuum
- lock chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986159959U JPS6365235U (th) | 1986-10-17 | 1986-10-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986159959U JPS6365235U (th) | 1986-10-17 | 1986-10-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6365235U true JPS6365235U (th) | 1988-04-30 |
Family
ID=31084878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986159959U Pending JPS6365235U (th) | 1986-10-17 | 1986-10-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6365235U (th) |
-
1986
- 1986-10-17 JP JP1986159959U patent/JPS6365235U/ja active Pending
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