JPS636657U - - Google Patents
Info
- Publication number
- JPS636657U JPS636657U JP10070786U JP10070786U JPS636657U JP S636657 U JPS636657 U JP S636657U JP 10070786 U JP10070786 U JP 10070786U JP 10070786 U JP10070786 U JP 10070786U JP S636657 U JPS636657 U JP S636657U
- Authority
- JP
- Japan
- Prior art keywords
- beam device
- ion beam
- insulating member
- emitter
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 4
- 229910052594 sapphire Inorganic materials 0.000 description 5
- 239000010980 sapphire Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は本考案イオンビーム装置の一実施例の
要部を示す構成図、第２図は第１図例の絶縁サフ
アイヤブロツク部２１を示す拡大斜視図、第３図
は従来のイオンビーム装置の要部を示す構成図、
第４図は従来の他のイオンビーム装置のイオンガ
ンの要部を示す断面図、第５図は第４図例の絶縁
サフアイヤ部の部分拡大図である。
２０は冷凍機先端部、２１は絶縁サフアイヤブ
ロツク部、２２はイオンガン、２３はエミツタ、
２４及び２５は夫々鍔部用サフアイヤブロツク、
２６及び２７は夫々連結用サフアイヤブロツク、
４２は引出電極である。
FIG. 1 is a block diagram showing the main parts of an embodiment of the ion beam device of the present invention, FIG. 2 is an enlarged perspective view showing the insulating sapphire block part 21 of the example in FIG. 1, and FIG. 3 is a conventional ion beam device. A configuration diagram showing the main parts of the device,
FIG. 4 is a sectional view showing a main part of an ion gun of another conventional ion beam device, and FIG. 5 is a partially enlarged view of the insulating sapphire portion of the example shown in FIG. 20 is the tip of the refrigerator, 21 is the insulating sapphire block, 22 is the ion gun, 23 is the emitter,
24 and 25 are sapphire blocks for the collar, respectively;
26 and 27 are connecting sapphire blocks, respectively;
42 is an extraction electrode.
Claims (1)
エミツタが設けられたイオンビーム装置において
、上記絶縁部材を鍔部材と連結部材とを重畳して
構成する様にしたことを特徴とするイオンビーム
装置。 An ion beam device in which an emitter of an ion gun is provided at the tip of a refrigerator via an insulating member, characterized in that the insulating member is constructed by overlapping a collar member and a connecting member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10070786U JPS636657U (en) | 1986-06-30 | 1986-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10070786U JPS636657U (en) | 1986-06-30 | 1986-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS636657U true JPS636657U (en) | 1988-01-18 |
Family
ID=30970782
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10070786U Pending JPS636657U (en) | 1986-06-30 | 1986-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS636657U (en) |
-
1986
- 1986-06-30 JP JP10070786U patent/JPS636657U/ja active Pending