JPS6366901B2 - - Google Patents
Info
- Publication number
- JPS6366901B2 JPS6366901B2 JP61129821A JP12982186A JPS6366901B2 JP S6366901 B2 JPS6366901 B2 JP S6366901B2 JP 61129821 A JP61129821 A JP 61129821A JP 12982186 A JP12982186 A JP 12982186A JP S6366901 B2 JPS6366901 B2 JP S6366901B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- aluminum
- processing equipment
- jig
- wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12982186A JPS62287063A (ja) | 1986-06-03 | 1986-06-03 | 薄膜処理設備の付着物除去方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12982186A JPS62287063A (ja) | 1986-06-03 | 1986-06-03 | 薄膜処理設備の付着物除去方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62287063A JPS62287063A (ja) | 1987-12-12 |
| JPS6366901B2 true JPS6366901B2 (2) | 1988-12-22 |
Family
ID=15019054
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12982186A Granted JPS62287063A (ja) | 1986-06-03 | 1986-06-03 | 薄膜処理設備の付着物除去方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62287063A (2) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004065654A1 (ja) * | 2003-01-23 | 2004-08-05 | Ulvac, Inc. | 成膜装置用構成部品およびその洗浄方法 |
| JP2007277687A (ja) * | 2006-04-11 | 2007-10-25 | Tosoh Corp | 溶射膜除去用組成物、及びそれを用いた除去方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4436802B2 (ja) | 2003-02-19 | 2010-03-24 | 株式会社アルバック | 成膜装置用構成部品およびその洗浄方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55154570A (en) * | 1979-05-18 | 1980-12-02 | Nec Corp | Protecting method for vacuum deposition apparatus mechanism parts |
-
1986
- 1986-06-03 JP JP12982186A patent/JPS62287063A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004065654A1 (ja) * | 2003-01-23 | 2004-08-05 | Ulvac, Inc. | 成膜装置用構成部品およびその洗浄方法 |
| US7436068B2 (en) | 2003-01-23 | 2008-10-14 | Ulvac, Inc. | Components for film forming device |
| JP2007277687A (ja) * | 2006-04-11 | 2007-10-25 | Tosoh Corp | 溶射膜除去用組成物、及びそれを用いた除去方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62287063A (ja) | 1987-12-12 |
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