JPS6367530A - infrared detector - Google Patents

infrared detector

Info

Publication number
JPS6367530A
JPS6367530A JP61212468A JP21246886A JPS6367530A JP S6367530 A JPS6367530 A JP S6367530A JP 61212468 A JP61212468 A JP 61212468A JP 21246886 A JP21246886 A JP 21246886A JP S6367530 A JPS6367530 A JP S6367530A
Authority
JP
Japan
Prior art keywords
inner cylinder
end surface
flange
infrared
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61212468A
Other languages
Japanese (ja)
Inventor
Takashi Watanabe
孝 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP61212468A priority Critical patent/JPS6367530A/en
Publication of JPS6367530A publication Critical patent/JPS6367530A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J5/061—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by controlling the temperature of the apparatus or parts thereof, e.g. using cooling means or thermostats
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D19/00—Arrangement or mounting of refrigeration units with respect to devices or objects to be refrigerated, e.g. infrared detectors
    • F25D19/006—Thermal coupling structure or interface

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)

Abstract

PURPOSE:To reduce external heat input by using a plate made of a material with high heat conductivity for the end surface of an inner cylinder to which a package equipped with an infrared detecting element is fitted and joining the plate with end surface airtightly by soldering which is small in heat strain. CONSTITUTION:The inner cylinder is molded out of metal cylindrically and a package 7 equipped with the infrared detecting element 6 is provided to one end surface across a plate 2'. A metallic flange 4 where an airtight element 19 for input and output is sealed hermetically is joined with the other end surface. A ceramic layer 16 of 0.1-0.4mm is provided on the external surface of the inner cylinder 2 and a metallic wire 14 is buried therein. One side of the outer cylinder 3 is joined with the flange 4, and a discoid window 5 is fixed to the other end surface with a fused glass layer 17. Further, a metal vapor-deposited film 18 is formed inside the outer cylinder 3 to make the conduction of radiant heat hard. Further, the flange 4 has an airtight terminal 19 for leading a signal out of the detecting element 6.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、　　ＩｎＳｂ　、　ＨｇＣｄＴｅ　、　　
Ｐｂ８ｎＴｅ等で極低温に冷却して動作させる赤外線検
知素子を具備する赤外線検知器に関するものである。[Detailed Description of the Invention] [Industrial Field of Application] The present invention is directed to InSb, HgCdTe,
This invention relates to an infrared detector equipped with an infrared detection element that is cooled to an extremely low temperature using Pb8nTe or the like and operated.

〔従来の技術〕[Conventional technology]

第５図は従来の赤外線検知器の構成例を示すもので１図
において＋１１は低温保持容器で、ガラス裂ノ内筒（２
）、外筒Ｔ３）．７；Ｆ７ジ（４）、赤外ｍａ過材料（
例えばＧｅ　）であるウィンド（５）、赤外線検知素子
（６）を具備したパッケージ（７）で構成されている。Figure 5 shows an example of the configuration of a conventional infrared detector.
), outer cylinder T3). 7; F7 di(4), infrared ma filter material (
For example, it is composed of a window (5) made of Ge) and a package (7) equipped with an infrared sensing element (6).

上記ウィンド＋５１は、真空用接着剤（例えばＶＡＲＩ
ＡＮ社商標ＴＯＲＲ５ＥＡＬ　）　Ｋよって上記外筒（
３）の端面に接着されている。（８）はジュールトムソ
ン冷却器で。The window +51 is made of vacuum adhesive (e.g. VARI
AN company trademark TORR5EAL) K Therefore, the above outer cylinder (
3) is glued to the end face. (8) is a Joule-Thomson cooler.

スパイラル状に巻かれたフィンチューブ＋９１とノズル
ｆｉＯを具備しており、高圧ガス（例えばｉ素）の光填
されたボンベαＢと弁α２を介して配管１３によって連
通している。ここで、低温保持容器＋１１の内部は、外
部からの侵入熱を遮断するため、１０’〜１Ｏ−５ＴＯ
ＲＲ程度の真空に保たれている。赤外線検知素子（６１
の信号は金属線Ｉにより、端子ａりから低温保持容器＋
１１の外部に取出すことができる。It is equipped with a spirally wound fin tube +91 and a nozzle fiO, and communicates with a cylinder αB filled with high-pressure gas (for example, i-element) through a pipe 13 via a valve α2. Here, the inside of the low-temperature holding container
It is maintained at a vacuum level of RR. Infrared detection element (61
The signal is sent from terminal a to cryogenic container + by metal wire I.
It can be taken out to the outside of 11.

次に以上のような構成からなる従来の赤外線検知器の動
作について説明する。弁α２を開放し、ボンベａυから
ジュールトムソン冷却器（８）に高圧ガスを供給すると
、スパイラル状に巻かれたフィンチューブ＋９１　ヲ通
ってノズル０υからガスが噴出する。Next, the operation of the conventional infrared detector having the above configuration will be explained. When the valve α2 is opened and high pressure gas is supplied from the cylinder aυ to the Joule-Thomson cooler (8), the gas passes through the spirally wound fin tube +91 and is ejected from the nozzle 0υ.

この時ガスは高圧から低圧（大気圧）に開放されるため
、ジュールトムソン効果によって温度降下する。この温
度降下は微々たるものであるが、内筒（２）の内側に沿
って排出されるガスと、フィンチューブ（９）の内部を
流れる新たに供給されるガスとの間に熱交換な行なわせ
ることにより、究極的には上記ガスはその液化温度（窒
素の場合で７７°Ｋ）に達する。赤外線検知素子（６）
およびパッケージ（７）は上記液化温度に達したガスを
吹きつけられることにより毬低温に冷却されることにな
るが、上記ジュールトムソン冷却器の冷却能力は通常Ｉ
Ｗ〜５Ｗ程度と少ないので、外部からの熱侵入を妨げな
ければノズルα・から噴出するガスを液化温度に到達せ
しめる事はできない。低温保持容器（１１は外部からの
侵入熱を遮断するための接脂であり、内筒（２）、外筒
（３）、フランジ（４）、ウィンド（５）で囲まれてい
る容器内部は外部と密閉され、かつ真空に保たれている
。At this time, the gas is released from high pressure to low pressure (atmospheric pressure), so the temperature drops due to the Joule-Thomson effect. Although this temperature drop is slight, heat exchange takes place between the gas discharged along the inside of the inner tube (2) and the newly supplied gas flowing inside the fin tube (9). Eventually, the gas will reach its liquefaction temperature (77°K for nitrogen). Infrared sensing element (6)
The package (7) is cooled to a low temperature by being blown with the gas that has reached the liquefaction temperature, but the cooling capacity of the Joule-Thomson cooler is usually I
Since the amount is as small as W~5W, it is not possible to make the gas ejected from the nozzle α reach the liquefaction temperature unless heat intrusion from the outside is prevented. Low-temperature holding container (11 is a greasy seal to block heat from entering from the outside, and the inside of the container is surrounded by an inner cylinder (2), an outer cylinder (3), a flange (4), and a window (5). It is sealed from the outside and kept in a vacuum.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかし１以上のような構成から成る従来の赤外線検知器
は次のような問題点があった。However, conventional infrared detectors having one or more configurations have the following problems.

９）　ウィンド（５）と外筒（３）の接合のため使用し
ている接着剤は有機生成物であるから長期的に見れば、
多量の有機ガスを放出し、低温保持容器＋１１の真空度
維持上９％に寿命という面で好ましくない。9) The adhesive used to join the window (5) and outer cylinder (3) is an organic product, so in the long run,
It is unfavorable in terms of emitting a large amount of organic gas and having a lifespan of 9% in order to maintain the degree of vacuum in the cryostat container +11.

（ロ）主要構造部材である内筒（２）、外筒（３），７
ランジ（４）がガラス製で靭性に欠ける゛の厳しい耐振
動性、耐＠撃性が要求される場合（例えはミサイル。(b) Main structural members: inner cylinder (2), outer cylinder (3), 7
When the lunge (4) is made of glass and lacks toughness, severe vibration resistance and impact resistance are required (for example, missiles).

航空機等に搭載される場合）には機械的強度の面で適さ
ない。In terms of mechanical strength, it is not suitable for mounting on aircraft, etc.).

Ｅ−１低温保持容器（１１の内筒（２）にはジュールト
ムソン冷却器（８）が挿入され、この時上記内筒（２）
とジュールトムソン冷却器（姐との隙間は、ノズル（１
（Ｉから噴出され外部へ排出されるガスとフィンチュー
ブ（９）円を流れる新たに供給されるガスとの熱交換効
率に大きな影替を与えるので、内筒（２）には精密な加
工寸法精度が要求されるが、内筒（２）がガラス製なの
で研磨等生産性の悪い加工手段でなければ達成できない
。A Joule-Thomson cooler (8) is inserted into the inner cylinder (2) of the E-1 cryogenic container (11), and at this time, the inner cylinder (2)
The gap between the Joule Thomson cooler and the nozzle (1
(The inner tube (2) has precise machining dimensions because it greatly affects the heat exchange efficiency between the gas ejected from I and the newly supplied gas flowing through the fin tube (9). Accuracy is required, but since the inner cylinder (2) is made of glass, this can only be achieved by processing methods with low productivity such as polishing.

この発明は以上のような問題点を改善するためになされ
たもので、真空度維持の寿命か長く９機械的強度が高く
、かつ生産性の良い赤外線検知器を提案するものである
。This invention was made to improve the above-mentioned problems, and proposes an infrared detector that has a long vacuum maintenance life, has high mechanical strength, and is highly productive.

〔問題点を解決するための手段〕[Means for solving problems]

この発明に係る赤外線検知器は、主要構造部材である内
面、外面、７ランジを金属性にし、赤外線検知素子を具
備したパッケージを取りつけろ端面に熱伝導率の高い材
質のプレートラ用い１両者をロウ付によって気密接合し
、真空断熱容器を形成したものである。In the infrared detector according to the present invention, the main structural members, the inner surface, the outer surface, and the 7 lunges are made of metal, and the package equipped with the infrared detection element is attached. They are hermetically sealed together by brazing to form a vacuum insulated container.

〔作用〕[Effect]

この発明においては、内筒を熱伝導率が低（。 In this invention, the inner cylinder has a low thermal conductivity (.

機械加工精度が得やすい金属とし、また赤外線検知素子
を具備したパッケージを取付ける側の内筒の端面に、熱
伝導率の高い材質のプレートを用い。It is made of a metal that allows easy machining accuracy, and a plate made of a material with high thermal conductivity is used for the end surface of the inner cylinder on the side where the package equipped with the infrared detection element is attached.

両者を熱歪の少ないロウ付をして、気密接合することＫ
より、７ランジ側から内筒を伝わってくる外部からの熱
侵入を少なくシ、かつクーラから赤外線検知素子への熱
伝達をよくして、さらに内筒の機械加工精度を維持した
ままで低温保持容器を真空維持できるようにした。The two should be brazed with low heat distortion to make an airtight connection.
This reduces heat intrusion from the outside through the inner cylinder from the 7 lange side, improves heat transfer from the cooler to the infrared sensing element, and maintains low temperatures while maintaining the machining accuracy of the inner cylinder. The container can now be kept under vacuum.

〔発明の実施例〕[Embodiments of the invention]

第１図はこの発明による赤外線検知器の構成例を示す図
であり、第１図は第２図の一部詳細を示す図である。第
１図および第２図ではジュールトムソン冷却器、配管、
弁、ボンベ等この発明と直接係りのない部品は省略して
いる。FIG. 1 is a diagram showing an example of the configuration of an infrared detector according to the present invention, and FIG. 1 is a diagram showing some details of FIG. 2. In Figures 1 and 2, the Joule-Thomson cooler, piping,
Parts that are not directly related to this invention, such as valves and cylinders, are omitted.

図において、（２）は内筒で金属を内筒状に成形したも
ので、一方の端面にはプレー）　（２’）を介して赤外
線検知素子（６）を具備するパッケージ（７）が設けら
れており、もう一方の端面には入出力の気密端子醤がハ
ーメチックされた金属製のフランジ（４）が接合されて
いる。上記内筒（２）の外面には０．１〜０，４鴫のセ
ラミック磨ａｅがあり、金属線αＯはこのセラミック層
ａｅに埋設されており、金属線どおしおよび内筒（２）
と電気的に絶縁状態で支持されている。In the figure, (2) is an inner cylinder formed of metal into an inner cylinder shape, and a package (7) equipped with an infrared detection element (6) is installed on one end surface via a plate (2'). A metal flange (4) with hermetically sealed input/output terminals is joined to the other end face. The outer surface of the inner cylinder (2) has a ceramic polishing ae of 0.1 to 0.4 mm, and the metal wire αO is embedded in this ceramic layer ae, and the metal wire and the inner cylinder (2)
and is supported in an electrically insulated state.

＋３３は外筒で金属（例えばステンレス）を内筒状に成
形したもので１片方の端面は上記フランジ（４）と接合
され、もう一方の端面には赤外線透過材料（例えばＧｅ
　）である円板状のウィンド（５）がガラス融着層側に
より固定されている。さらに、外筒（３）の内側は金属
蒸着膜α＆が形成され、内筒（２）、パッケージ（））
および赤外線検出素子（６）に外筒（３）からのふく射
熱が伝わりＫくいようＫなっている。上記フランジ（４
）は検出素子（６）からの信号を低温保持容器（１１の
外部に取り出す必要性からガラスで絶縁された気密端子
ａ９を有している。+33 is an outer cylinder made of metal (e.g. stainless steel) molded into an inner cylinder shape. One end face is joined to the above flange (4), and the other end face is made of an infrared transmitting material (e.g. Ge
) is fixed by the glass fusion layer side. Furthermore, a metal vapor deposition film α& is formed on the inside of the outer cylinder (3), and the inner cylinder (2), the package ())
The radiant heat from the outer cylinder (3) is transmitted to the infrared detecting element (6), and the heat is transmitted to the infrared detecting element (6). Above flange (4
) has an airtight terminal a9 insulated with glass because it is necessary to extract the signal from the detection element (6) to the outside of the low temperature holding container (11).

ところで、この低温保持容器（１）は外部からの熱侵入
をできるだけ少なくシ、かつジュールトムソン冷却器（
８）による冷却をできるだけ効率よく赤外線検出素子（
６）忙伝えてやる必要があるが、熱侵入のうちわけは、
第３図のようになっているから。By the way, this low temperature holding container (1) is designed to minimize heat intrusion from the outside and is equipped with a Joule-Thomson cooler (
8) to efficiently cool the infrared detection element (
6) I need to tell them that I am busy, but the reason for the heat intrusion is as follows.
Because it looks like Figure 3.

この図かられかるように熱侵入を減らすには特にフラン
ジ（４）から内筒（２）への熱伝導による侵入を小さく
するのが効果的である。すなわち９内筒（２）はできる
だけ肉厚を薄クシ、またフィンチューブ＋９１が挿入さ
れるため、内面の表面あらさが少なく。As can be seen from this figure, it is particularly effective to reduce the intrusion of heat from the flange (4) into the inner cylinder (2) due to heat conduction. In other words, the wall thickness of the inner cylinder (2) 9 is made as thin as possible, and since the fin tube +91 is inserted, the inner surface has less roughness.

かつよい寸法精度を得られ、さらに熱伝導を小さくする
ために第４図かられかるようにチタン合金の材料を用い
るのが適切である。一方、ジュールトムソンクーラ（８
１によって赤外線検知素子（６）を冷却するため、プレ
ー）　（２’）は熱伝達をよくする必要があり、第４図
かられかるように銅の材料を用いるのが適切である。ま
た、低温保持容器（１１は断熱のために真空にする必要
があるが、異種金属とおしの内筒（２）とプレート（２
’）を接合時に生じる熱ひずみの小さいロー付を用いて
気密接合することにより、内筒（２）とプレー）　（２
’）は機械加工したままの寸法精度を維持できるので、
冷却性能のよい低温保持容器を形成することができる。It is appropriate to use a titanium alloy material, as shown in FIG. 4, in order to obtain good dimensional accuracy and to further reduce heat conduction. On the other hand, Jules Thomson Cooler (8
In order to cool the infrared sensing element (6) by the plate (2'), it is necessary to improve heat transfer, and as shown in FIG. 4, it is appropriate to use copper material. In addition, the low temperature holding container (11) needs to be vacuumed for insulation, but the inner cylinder (2) of the dissimilar metal plate (2) and the plate (2)
') and the inner cylinder (2) are airtightly joined using brazing which causes small thermal strain during joining.
') can maintain the same dimensional accuracy as machined, so
A low temperature holding container with good cooling performance can be formed.

〔発明の効果〕〔Effect of the invention〕

この発明による赤外線検知器は以上のような構成から成
るため１次のような利点がある。Since the infrared detector according to the present invention has the above-described configuration, it has the following advantages.

ビ）　主要構造部材である内筒（２）、外筒１３）．フ
ランジ（４）が金属性であることから１機械的強度にす
ぐれ、厳しい耐振性、耐衝撃性が要求される場合（例え
ば、ミサイルや航空機に搭載される場合）でも、要求を
満足することができる。B) Inner cylinder (2) and outer cylinder 13) which are the main structural members. Since the flange (4) is made of metal, it has excellent mechanical strength and can meet severe vibration and impact resistance requirements (for example, when mounted on a missile or aircraft). can.

（−従来のガラス製の赤外線検知器に比較して。(- compared to traditional glass infrared detectors.

プレス加工１機械加工が可能なので９寸法精度が容易に
得られ生産性が極めて良くなる。Since press work 1 machining is possible, 9 dimensional accuracy can be easily obtained and productivity is extremely high.

ｅ′４　　内筒（２１を例えばチタン合金にすれば１機
械加工により極薄にできることから、フランジ（４）方
向からの侵入熱を伝わりにククシ、一方、赤外線検知素
子の取りつくプレートが９例えば銅のように熱伝導膜の
高い材質であるため冷却熱を伝えやすい構造になってい
るので、極めて冷却効率か高く９機器の誤動作が少ない
。すなわち、性能および信頼性の高い赤外線検知器とす
ることができる。e'4 If the inner cylinder (21) is made of, for example, a titanium alloy, it can be made extremely thin by machining, so that it can be used to transmit heat entering from the flange (4) direction.On the other hand, the plate to which the infrared detecting element is attached is made of, for example, 9. Since it is made of a material with a high thermal conductivity film such as copper, it has a structure that easily transmits cooling heat, so it has extremely high cooling efficiency and fewer malfunctions of equipment.In other words, it is an infrared detector with high performance and reliability. be able to.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はこの発明による赤外線検知器の実施例を示す断
面図、第２図は第１図のＡ部を詳細に説明した断面図、
従来の赤外線検知器の構成例な示す断面図、第３図は赤
外線検知素子へ入ってくる熱量の割合を示す図、第４図
は金属材料の熱伝導率を示す図、第５図は従来の赤外線
検知器を示ず断面図である。 図において、（ｌ）は低温保持容器、（２）はチタン合
金製の内筒、　　（２’）は銅製のプレート、（３）は
外筒。 （４）はフランジ、（５Ｉはウィンド、（６）は赤外線
検知素子、（７）はパッケージ、（８）はジュールトム
ソン冷却器、ａ４は金属線、住９は気密端子である。 なお９図中同一あるいは相当部分には同一符号を付して
示しである。FIG. 1 is a cross-sectional view showing an embodiment of an infrared detector according to the present invention, and FIG. 2 is a cross-sectional view illustrating part A in FIG. 1 in detail.
A cross-sectional view showing an example of the configuration of a conventional infrared detector. Figure 3 is a diagram showing the proportion of heat entering the infrared sensing element. Figure 4 is a diagram showing the thermal conductivity of metal materials. Figure 5 is a diagram showing the conventional infrared detector. FIG. 2 is a sectional view without showing an infrared detector. In the figure, (l) is a low temperature holding container, (2) is an inner cylinder made of titanium alloy, (2') is a copper plate, and (3) is an outer cylinder. (4) is a flange, (5I is a window, (6) is an infrared detection element, (7) is a package, (8) is a Joule-Thomson cooler, a4 is a metal wire, and housing 9 is an airtight terminal. Identical or equivalent parts are indicated by the same reference numerals.

Claims (3)

【特許請求の範囲】[Claims] （１）金属製の内筒と、上記内筒の一端面に熱伝導率の
高い材質のプレートを気密接合し、さらに上記プレート
に取りつけられたパッケージに固定された赤外線検知素
子と、上記内筒の他端面に設けられた金属製のフランジ
と、上記フランジの外周部を気密接合し、かつ上記内筒
を覆うように取りつけられた金属製の外筒と、上記外筒
の上記フランジと接合する端面と相対する端面に取りつ
けられた赤外線透過材料である平板上に形成したウイン
ドとを具備したことを特徴とする赤外線検知器。(1) A metal inner cylinder, a plate made of a material with high thermal conductivity is hermetically sealed to one end surface of the inner cylinder, an infrared sensing element fixed to a package attached to the plate, and an infrared detection element fixed to a package attached to the plate, and the inner cylinder A metal flange provided on the other end surface and an outer peripheral portion of the flange are hermetically joined together, and a metal outer cylinder attached to cover the inner cylinder is joined to the flange of the outer cylinder. An infrared detector comprising an end face and a window formed on a flat plate made of an infrared transmitting material attached to the opposite end face. （２）金属性の内筒をチタン合金で形成したことを特徴
とする特許請求の範囲第（１）項記載の赤外線検知器。(2) The infrared detector according to claim (1), wherein the metallic inner cylinder is made of a titanium alloy. （３）プレートを銅で形成したことを特徴とする特許請
求の範囲第（１）項記載の赤外線検知器。(3) The infrared detector according to claim (1), wherein the plate is made of copper.
JP61212468A 1986-09-09 1986-09-09 infrared detector Pending JPS6367530A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61212468A JPS6367530A (en) 1986-09-09 1986-09-09 infrared detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61212468A JPS6367530A (en) 1986-09-09 1986-09-09 infrared detector

Publications (1)

Publication Number Publication Date
JPS6367530A true JPS6367530A (en) 1988-03-26

Family

ID=16623143

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61212468A Pending JPS6367530A (en) 1986-09-09 1986-09-09 infrared detector

Country Status (1)

Country Link
JP (1) JPS6367530A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0604790A3 (en) * 1992-12-30 1994-11-02 Bodenseewerk Geraetetech Detector device with cooled sensor.

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58186974A (en) * 1982-04-23 1983-11-01 Fujitsu Ltd Cooled photoelectric converter

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58186974A (en) * 1982-04-23 1983-11-01 Fujitsu Ltd Cooled photoelectric converter

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0604790A3 (en) * 1992-12-30 1994-11-02 Bodenseewerk Geraetetech Detector device with cooled sensor.

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