JPS6367683U - - Google Patents
Info
- Publication number
- JPS6367683U JPS6367683U JP14468487U JP14468487U JPS6367683U JP S6367683 U JPS6367683 U JP S6367683U JP 14468487 U JP14468487 U JP 14468487U JP 14468487 U JP14468487 U JP 14468487U JP S6367683 U JPS6367683 U JP S6367683U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- partition wall
- temperature
- cylinder
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005192 partition Methods 0.000 claims description 5
- SANRKQGLYCLAFE-UHFFFAOYSA-H uranium hexafluoride Chemical compound F[U](F)(F)(F)(F)F SANRKQGLYCLAFE-UHFFFAOYSA-H 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14468487U JPH0244071Y2 ( ) | 1987-09-22 | 1987-09-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14468487U JPH0244071Y2 ( ) | 1987-09-22 | 1987-09-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6367683U true JPS6367683U ( ) | 1988-05-07 |
| JPH0244071Y2 JPH0244071Y2 ( ) | 1990-11-22 |
Family
ID=31055516
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14468487U Expired JPH0244071Y2 ( ) | 1987-09-22 | 1987-09-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0244071Y2 ( ) |
-
1987
- 1987-09-22 JP JP14468487U patent/JPH0244071Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0244071Y2 ( ) | 1990-11-22 |