JPS6370084U - - Google Patents
Info
- Publication number
- JPS6370084U JPS6370084U JP16351786U JP16351786U JPS6370084U JP S6370084 U JPS6370084 U JP S6370084U JP 16351786 U JP16351786 U JP 16351786U JP 16351786 U JP16351786 U JP 16351786U JP S6370084 U JPS6370084 U JP S6370084U
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- optical fiber
- electrodes
- light receiving
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measurement Of Current Or Voltage (AREA)
- Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16351786U JPH059657Y2 (mo) | 1986-10-27 | 1986-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16351786U JPH059657Y2 (mo) | 1986-10-27 | 1986-10-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6370084U true JPS6370084U (mo) | 1988-05-11 |
| JPH059657Y2 JPH059657Y2 (mo) | 1993-03-10 |
Family
ID=31091786
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16351786U Expired - Lifetime JPH059657Y2 (mo) | 1986-10-27 | 1986-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH059657Y2 (mo) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12119246B2 (en) | 2020-10-30 | 2024-10-15 | Ebara Corporation | Method, device, and non-transitory computer readable medium for determining timing of removing substrate from cassette in substrate processing device, and substrate processing device |
-
1986
- 1986-10-27 JP JP16351786U patent/JPH059657Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12119246B2 (en) | 2020-10-30 | 2024-10-15 | Ebara Corporation | Method, device, and non-transitory computer readable medium for determining timing of removing substrate from cassette in substrate processing device, and substrate processing device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH059657Y2 (mo) | 1993-03-10 |