JPS6373353U - - Google Patents
Info
- Publication number
- JPS6373353U JPS6373353U JP16586786U JP16586786U JPS6373353U JP S6373353 U JPS6373353 U JP S6373353U JP 16586786 U JP16586786 U JP 16586786U JP 16586786 U JP16586786 U JP 16586786U JP S6373353 U JPS6373353 U JP S6373353U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- evaporated
- evaporation sources
- vacuum
- closable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 claims description 6
- 230000008020 evaporation Effects 0.000 claims description 6
- 238000007738 vacuum evaporation Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図はこの考案の一実施例を示す概略側断面
図である。
１…真空容器、５，６…蒸発源、９，１０…シ
ヤツタ、４…被蒸着部。
FIG. 1 is a schematic side sectional view showing an embodiment of this invention. DESCRIPTION OF SYMBOLS 1... Vacuum container, 5, 6... Evaporation source, 9, 10... Shutter, 4... Evaporation target part.
Claims (1)
１つ又は複数のアーク蒸発源と、該各蒸発源の近
傍にそれぞれ開閉自在に取り付けられると共に、
前記被蒸着部と対応する側における各蒸発源の上
方を覆うことが可能なシヤツタとを備えたことを
特徴とする真空蒸着装置。 one or more arc evaporation sources disposed in a vacuum container at a distance from the part to be evaporated; each of the evaporation sources is attached in the vicinity of the evaporation sources so as to be openable and closable;
A vacuum evaporation apparatus comprising a shutter capable of covering above each evaporation source on the side corresponding to the part to be evaporated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16586786U JPS6373353U (en) | 1986-10-28 | 1986-10-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16586786U JPS6373353U (en) | 1986-10-28 | 1986-10-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6373353U true JPS6373353U (en) | 1988-05-16 |
Family
ID=31096300
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16586786U Pending JPS6373353U (en) | 1986-10-28 | 1986-10-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6373353U (en) |
-
1986
- 1986-10-28 JP JP16586786U patent/JPS6373353U/ja active Pending