JPS6375780A - Manufacture of cylindrical organic photosensitive body and its device - Google Patents

Manufacture of cylindrical organic photosensitive body and its device

Info

Publication number
JPS6375780A
JPS6375780A JP21919486A JP21919486A JPS6375780A JP S6375780 A JPS6375780 A JP S6375780A JP 21919486 A JP21919486 A JP 21919486A JP 21919486 A JP21919486 A JP 21919486A JP S6375780 A JPS6375780 A JP S6375780A
Authority
JP
Japan
Prior art keywords
cylindrical support
closed space
cylindrical
coating liquid
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21919486A
Other languages
Japanese (ja)
Inventor
Heihachiro Oda
小田 平八郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP21919486A priority Critical patent/JPS6375780A/en
Publication of JPS6375780A publication Critical patent/JPS6375780A/en
Pending legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Discharging, Photosensitive Material Shape In Electrophotography (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔発明の目的〕 (産業上の利用分野) この発明は、電子写真複写機や、レーザ・プリンタなど
の一構成部品として用いられている筒状有機感光体の製
造方法に係り、特に筒状支持体に有機感光体物質を塗布
する方法を改良した筒状有機感光体の製造方法及びその
装置に関する。
[Detailed Description of the Invention] [Objective of the Invention] (Industrial Application Field) This invention provides a method for manufacturing a cylindrical organic photoreceptor used as a component of electrophotographic copying machines, laser printers, etc. In particular, the present invention relates to a method for manufacturing a cylindrical organic photoreceptor, which improves the method of coating an organic photoreceptor material on a cylindrical support, and an apparatus therefor.

(従来の技術) 一般に、電子写真複写機や、レーザプリンターの一構成
部品として用いられる筒状の有機感光体は、41を性筒
状支持体上に順次有機質の電荷発生物質層と、電荷搬送
物質層が設けられた浅脅型が広く用いられている。
(Prior Art) In general, a cylindrical organic photoreceptor used as a component part of an electrophotographic copying machine or a laser printer has a layer 41 of an organic charge-generating material on a cylindrical support, and a charge-transporting material layer. A shallow type with a material layer is widely used.

ところで、支持体上の感光物質層は、平滑かつ均一な所
定厚さに形成されることが望まれ、その形成方法として
、従来よりSe、 Si、 Cdおよびこれらの化合物
からなる無機質感光物質については、たとえば特公昭5
7−27839号公報に示される真空蒸着、スパッタリ
ング、イオンブレーティングなどの方法で作られている
。しかし、これらは有機感光物質には適用できない。ま
た、有機感光物質については、たとえば特開昭52−1
28372号公報。
By the way, it is desired that the photosensitive material layer on the support be formed to a smooth, uniform, and predetermined thickness, and conventional methods for forming the layer include inorganic photosensitive materials made of Se, Si, Cd, and compounds thereof. , for example, Tokuko Sho 5
It is manufactured using methods such as vacuum evaporation, sputtering, and ion blasting as disclosed in Japanese Patent No. 7-27839. However, these cannot be applied to organic photosensitive materials. Regarding organic photosensitive materials, for example, JP-A-52-1
Publication No. 28372.

特開1153−111735号公報1%開昭54−10
738号公報に示された各種塗布方法があるが、筒状支
持体に対し、品質9機能において満足な結果が得られて
いない。
Unexamined Japanese Patent Publication No. 1153-111735 1% 1987-10
Although there are various coating methods shown in Japanese Patent No. 738, satisfactory results have not been obtained for the cylindrical support in terms of nine quality functions.

通常、複合型の筒状有機感光体は、厚さ約1μm以下の
電荷発生物質層と、その上に塗布された厚さ約20μm
の電荷搬送物質層とで構成され、現在は主として一般大
気中において感光物質の液槽中に筒状支持体を浸漬し、
液面を静止状態に保ちながらこれを引き上げる漬浸法で
行なわれている。しかしながら均一かつ均質な薄膜成形
を望む場合、このような方法では、成膜中に気泡や塗布
ムラが生じやすく、品質9機能の低下により部分的特性
劣化をおこす。とくに、膜厚1μm以下の超薄膜を形成
する場合は、被加工物の表面状態(表面粗さ。
Typically, a composite cylindrical organic photoreceptor has a charge generating material layer with a thickness of about 1 μm or less and a layer of charge generating material with a thickness of about 20 μm coated thereon.
Currently, the cylindrical support is immersed in a liquid bath of a photosensitive material in the general atmosphere.
This is done using the immersion method, which involves raising the liquid while keeping it stationary. However, when uniform and homogeneous thin film formation is desired, such methods tend to cause bubbles and uneven coating during film formation, resulting in partial deterioration of characteristics due to deterioration of quality 9 functions. In particular, when forming an ultra-thin film with a thickness of 1 μm or less, the surface condition (surface roughness) of the workpiece is particularly important.

キズ、汚れ1等)や、引き上げ時の振動等により欠陥が
生じやすい。中でも成膜中の気泡発生の除去は極めて困
難である。
Defects are likely to occur due to scratches, dirt, etc.) and vibrations during lifting. Among these, it is extremely difficult to eliminate bubbles generated during film formation.

(発明が解決しようとする問題点) 本発明は、上述したように筒状支持体上に有機感光物質
を塗布する際に発生する様々な問題点を顧慮してなされ
たもので、筒状支持体に平滑かつ均一な、所定厚さの有
機感光物質層を容易に形成できる筒状有機感光体の製造
方法及びその装置を得ることにある。
(Problems to be Solved by the Invention) The present invention has been made in consideration of the various problems that occur when coating an organic photosensitive material on a cylindrical support as described above. An object of the present invention is to provide a method for manufacturing a cylindrical organic photoreceptor and an apparatus therefor, in which a smooth and uniform organic photoreceptor layer of a predetermined thickness can be easily formed on the body.

〔発明の構成〕[Structure of the invention]

(問題点を解決するための手段と作用)筒状支持体を密
閉空間に格納して、減圧下にて塗布液に浸漬したのち、
加圧下にて相対的に筒状支持体を塗布液から引き上げる
ことにより、塗布欠陥のない均一な膜厚の塗膜を形状す
るようにしたものである。
(Means and actions for solving the problem) After storing the cylindrical support in a closed space and immersing it in the coating solution under reduced pressure,
By relatively lifting the cylindrical support from the coating solution under pressure, a coating film with a uniform thickness and no coating defects is formed.

(実施例)    ゛ 以下、本発明の一笑月例を図面を参照して詳述する。(Example) Hereinafter, examples of the present invention will be explained in detail with reference to the drawings.

第1図は、この実施例の筒状有機感光体の製造方法に用
いられる=yetを示している。この装置は、有機感光
体物質が塗布される筒状支持体(1)をその軸線方向が
垂直になるように保持・格納する格納部(2)と、筒状
支持体(1)外周面と格納部(2)内周面で形成される
密閉空間(3)の給気及び排気を行う給排気部(4)と
、密閉空間(3)中に上記有機感光体物質からなる塗布
液(5)を供給する塗布液供給部(6)と、密閉空間(
3)中に筒状支持体(1)の表面を洗浄するための洗浄
液(7)を供給する洗浄液供給部(8)とから構成され
ている。しかして、格納部(2)は、円柱状の基台(9
)と、この基台(9)上に同軸に立設された透明ガラス
筒部と、この透明ガラス筒四の上端部を閉塞する円筒状
の蓋体(11)と、基台(9)中央部に設けられ筒状支
持体(1)の下端部が挿入する円錐部α2が形成された
第1の挟持体a漕と、蓋体αυに設けられ筒状支持体+
1)の上端部が挿入する円錐部Iが形成され且つ第1の
挾持体a四とともに筒状支持体(1)を挾持する第2の
挾持体a9とからなっている。これら第1及び第2の挾
持体(13,(15により筒状支持体(1)が支持され
ているとき、密閉空間(3)は、外気及び筒状支持体(
1)内部に対して完全に密閉されている。
FIG. 1 shows =yet used in the method for manufacturing the cylindrical organic photoreceptor of this example. This device includes a storage part (2) that holds and stores a cylindrical support (1) to which an organic photoreceptor material is applied so that its axis is perpendicular, and an outer peripheral surface of the cylindrical support (1). A supply/exhaust section (4) for supplying and exhausting air to and from a closed space (3) formed by the inner peripheral surface of the housing section (2), and a coating liquid (5) made of the organic photoreceptor material in the closed space (3). ) and a coating liquid supply section (6) that supplies the liquid (
3) a cleaning liquid supply section (8) that supplies a cleaning liquid (7) for cleaning the surface of the cylindrical support (1). Therefore, the storage part (2) has a cylindrical base (9
), a transparent glass tube coaxially installed on this base (9), a cylindrical lid (11) that closes the upper end of this transparent glass tube 4, and a center of the base (9). A first clamping body a is formed with a conical part α2, which is provided at the bottom of the cylindrical support body (1) and into which the lower end of the cylindrical support body (1) is inserted, and a cylindrical support body +
1) A conical part I is formed into which the upper end is inserted, and it consists of a first clamping body a4 and a second clamping body a9 that clamps the cylindrical support (1). When the cylindrical support (1) is supported by these first and second clamping bodies (13, (15), the closed space (3) is filled with outside air and the cylindrical support (15).
1) Completely sealed from the inside.

一方、給排気部(4)は、蓋体Iを介して密閉空間(3
)に開口する空気管αQと、この空気管αeに接続され
た真空源αηと、同じく真空源αηとともに空気管Oe
に接続された圧縮空気源α段とからなっている。また、
塗布液供給部(6)は、基台(9)を介して密閉空間(
3)に開口する塗布液出入管lと、この塗布液出入管α
9に接続された塗布液源(イ)と、蓋体αυを介して密
閉空間(3)に開口するオーバーフロー液回収管Cυと
、このオーバーフロー液回収管Qυに接続され密閉空間
(3)中でオーバー70−した液体を回収する回収タン
ク@とからなっている。また、洗浄液供給部(6)は、
基台(9)を介して密閉空間(3)に開口する洗浄液出
入管CI’31と、この洗浄液出入管(ハ)に接続され
た洗浄液源241とからなっている。
On the other hand, the air supply/exhaust section (4) is connected to the closed space (3) via the lid I.
), a vacuum source αη connected to this air pipe αe, and an air pipe Oe connected to the same vacuum source αη.
The compressed air source α stage is connected to the compressed air source α stage. Also,
The coating liquid supply section (6) is connected to the closed space (
3) Coating liquid inlet/outlet pipe l and this coating liquid inlet/outlet pipe α
A coating liquid source (a) connected to It consists of a recovery tank to recover the over-70% liquid. In addition, the cleaning liquid supply section (6)
It consists of a cleaning liquid inlet/output pipe CI'31 that opens into the closed space (3) via the base (9), and a cleaning liquid source 241 connected to this cleaning liquid inlet/outlet pipe (c).

つぎに、上記構成の装置を用いて、本実施例の筒状有機
感光体の製造方法について述べる。
Next, a method for manufacturing the cylindrical organic photoreceptor of this example will be described using the apparatus configured as described above.

この実施例の製造方法は、筒状支持体(1)を格納部(
2)に格納する格納工程と、密閉空間(3)に洗浄液供
給部(8)から洗浄液(7)を洗浄液出入v四を経由し
て供給したのち排出させることにより筒状支符体(1)
外周面を洗浄する洗浄工程と、この洗浄工程終了後に密
閉空間(31に塗布液供給部(6)から塗布液(5)を
供給したのち排出させることにより筒状支持体(1)外
周面に筒状有機感光体薄膜を形成する薄膜形成工程と、
この薄膜形成後に格納t!15(2)から筒状支持体(
1)を取出す取出し工程とからなっている。しかして、
上記格納工程は、基台(9)上に面状支持体(1)をそ
の軸線が垂直になるように載置し透明ガラス筒(I(I
中に収納する工程と、透明ガラス筒G(%上端部に蓋体
αυを嵌着し第1及び第2の挟持体t13.Q5により
筒状支持体(1)を挾持するとともに密閉空間(3)を
形成する工程とからなっている。他方、洗浄工程は、真
空源αηを起動し空気管σeを介して密閉空間(3)の
減圧を行う工程と、減圧下くある密閉空間(3)中に洗
浄g源(2)を起動して洗浄液出入管□□□を介して洗
浄液(力をオーバ70−するまで供給する工程と、一定
時間経過後に圧縮空気源aaを起動して密閉空間(3)
中の洗浄液(7)の液面を空気圧により加圧し洗浄液出
入管のを経由して洗浄* (7)を密閉空間(3)から
排出する工程とからなっている。さらに、薄膜形成工程
は、真空源Uノを起動し空気管α0を介して密閉空間(
3)の減圧を行う第1工程と、減圧下にある密閉空間(
3)中に塗布敵源(至)を起動して塗布液出入管部を介
して塗布液(5)をオーバーフローした後塗布液源(イ
)からの塗布液(5)の供給を停止し真空源(+7)に
よる減圧を高め脱泡を行う第3工程と、真空源αηによ
る減圧をゆるめいったん大気圧にする第4工程と、真空
源αηの代りに圧縮空気源餞を起動させ空気管αeを介
して圧縮空気を密閉空間(3)に供給することにより塗
布液(5)の液面を加圧しながら塗布液出入管α]を介
して筒状支持体(1)の外周面が完全に露出するまで塗
布ty、(5)を徐々に排出する第5工程と、圧縮空気
源u8の作動を停止し密閉空間(3)を大気圧にする第
6エ程とからなっている。しかして、第2工程にでは減
圧下において気泡を含有している含泡液がオーバーフロ
ー液回収管Qυを介して回収タンク@に回収される。ま
た、同時に、第2工程においても第3工程と同じように
、脱泡が行われる。したがって、形成された薄膜に気す
(ピンホール)や塗布ムシが生じることがない。さらに
、第5工程を加圧状態下において行っているので、塗布
液(5)の排出速度の制御を高精度に行うことができる
。さらに、液面振動がほとんどなくなり、均一な膜厚の
平滑な塗布面を得ることができる。
In the manufacturing method of this example, the cylindrical support (1) is
2) and supplying the cleaning liquid (7) from the cleaning liquid supply part (8) to the closed space (3) via the cleaning liquid inlet/output v4 and then discharging it to the cylindrical support body (1).
A cleaning process of cleaning the outer circumferential surface, and after the completion of this cleaning process, the coating liquid (5) is supplied from the coating liquid supply part (6) to the closed space (31 and then discharged, thereby cleaning the outer circumferential surface of the cylindrical support (1). a thin film forming step of forming a cylindrical organic photoreceptor thin film;
After this thin film is formed, it is stored t! From 15(2) to the cylindrical support (
1) A take-out process for taking out the material. However,
In the above storage step, the planar support (1) is placed on the base (9) so that its axis is perpendicular, and the transparent glass tube (I (I)
The process of storing the transparent glass cylinder G (%) in the closed space (3 ).On the other hand, the cleaning process consists of a step of activating the vacuum source αη to reduce the pressure in the closed space (3) via the air pipe σe, and a step of forming the closed space (3) under reduced pressure. There is a process in which the cleaning g source (2) is started to supply the cleaning liquid (until the force exceeds 70 -) through the cleaning liquid inlet/output pipe □□□, and after a certain period of time, the compressed air source aa is started to supply the air to the closed space ( 3)
This process consists of pressurizing the surface of the cleaning liquid (7) inside using air pressure and discharging the cleaning liquid (7) from the closed space (3) via the cleaning liquid inlet/output pipe. Furthermore, in the thin film forming process, the vacuum source U is activated and the air is passed through the air pipe α0 into the closed space (
3) The first step is to reduce the pressure, and the closed space under reduced pressure (
3) After starting the coating liquid source (1) and overflowing the coating liquid (5) through the coating liquid inlet/output pipe, stop supplying the coating liquid (5) from the coating liquid source (A) and vacuum. The third step is to increase the reduced pressure by the vacuum source (+7) and remove bubbles, the fourth step is to loosen the reduced pressure by the vacuum source αη and bring it to atmospheric pressure once, and to start the compressed air source instead of the vacuum source αη and open the air pipe αe. While pressurizing the surface of the coating liquid (5) by supplying compressed air to the closed space (3) through the coating liquid inlet/output pipe α], the outer peripheral surface of the cylindrical support (1) is completely covered. It consists of a fifth step of gradually discharging the coating ty (5) until it is exposed, and a sixth step of stopping the operation of the compressed air source u8 and bringing the closed space (3) to atmospheric pressure. Thus, in the second step, the foam-containing liquid containing air bubbles is collected under reduced pressure into the collection tank @ via the overflow liquid collection pipe Qυ. Further, at the same time, defoaming is performed in the second step as well as in the third step. Therefore, pinholes and coating blemishes do not occur in the formed thin film. Furthermore, since the fifth step is performed under pressure, the discharge speed of the coating liquid (5) can be controlled with high precision. Furthermore, liquid level vibration is almost eliminated, and a smooth coated surface with uniform film thickness can be obtained.

以上のように、この実施例の筒状有機感光体の製造方法
及びその装置は、均一なplX厚の平滑な塗布膜を、ピ
ンホールや塗布ムラなどの塗布欠陥を生じることなく確
実かつ容易に得ることができる。
As described above, the method and apparatus for manufacturing a cylindrical organic photoreceptor of this example can reliably and easily form a smooth coating film with a uniform PLX thickness without causing coating defects such as pinholes or coating unevenness. Obtainable.

なお、上記実施例において、洗浄液供給部及びこれに付
随する洗浄工程は、あらかじめ洗浄された筒状支持体(
+1を用いる場合は、不要となる。また、薄膜形成工程
の第5工程は、塗布液(5)を下降させず、筒状支持体
(1)を垂直上方に引き上げるようにしてもよい。
In the above examples, the cleaning liquid supply unit and the accompanying cleaning process are performed using a cylindrical support (
If +1 is used, it becomes unnecessary. Furthermore, in the fifth step of the thin film forming step, the cylindrical support (1) may be lifted vertically upward without lowering the coating liquid (5).

〔発明の効果〕〔Effect of the invention〕

本発明の筒状有機感光体の製造方法及びその装置は、均
一な膜厚の平滑な有機感光体薄膜を、ピンホールや塗布
ムシなどの塗布欠陥を生じることなく、確実かつ容易に
得ることができる。
The method and apparatus for manufacturing a cylindrical organic photoreceptor of the present invention make it possible to reliably and easily obtain a smooth organic photoreceptor thin film with a uniform thickness without causing coating defects such as pinholes or coating blemishes. can.

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本発明の一実施例の筒状有機感光体の製造方法に
用いられる装atの構成図である。 (1)二部状支持体、    (21:格納部。 (3):密閉空間、   (4):給排気部。 (5):塗布液、    (6):塗布液供給部。 代理人 弁理士  則 近 憲 佑 同     竹 花 喜久男
The drawing is a configuration diagram of an apparatus AT used in a method of manufacturing a cylindrical organic photoreceptor according to an embodiment of the present invention. (1) Two-part support, (21: Storage part. (3): Closed space, (4): Supply/exhaust part. (5): Coating liquid, (6): Coating liquid supply part. Agent: Patent attorney Noriyuki Noriyuki Yudo Takehana Kikuo

Claims (2)

【特許請求の範囲】[Claims] (1)筒状支持体を密閉空間に軸線をほぼ鉛直方向にし
て格納する工程と、上記密閉空間内を減圧しながら上記
筒状支持体の下方から上方に向つて有機感光物質からな
る塗布液を上記密閉空間内に供給し上記筒状支持体を上
記塗布液中に浸漬する工程と、上記密閉空間内に圧縮気
体を供給し上記塗布液面の加圧状態下にて上記筒状支持
体を上記塗布液に対して相対的に引き上げ上記筒状支持
体の側面に塗膜を形成する工程とからなることを特徴と
する筒状有機感光体の製造方法。
(1) Storing the cylindrical support in a closed space with its axis in a substantially vertical direction, and applying a coating liquid made of an organic photosensitive material from the bottom to the top of the cylindrical support while reducing the pressure in the closed space. is supplied into the closed space and the cylindrical support is immersed in the coating liquid, and compressed gas is supplied into the closed space and the cylindrical support is immersed in the coating liquid under a pressurized state. 1. A method for producing a cylindrical organic photoreceptor, comprising the steps of: pulling up the above-mentioned organic photoreceptor relative to the coating solution to form a coating film on the side surface of the cylindrical support.
(2)筒状支持体をその軸線をほぼ鉛直方向にして格納
する密閉空間を有する格納部と、この格納部の上部にて
上記密閉空間に対する給気及び排気を行う給排気部と、
上記格納部の下部にて上記密閉空間に対する有機感光物
質からなる塗布液の給液及び排液を行う塗布液供給部と
を具備することを特徴とする筒状有機感光体の製造装置
(2) a storage section having an airtight space for storing the cylindrical support with its axis in a substantially vertical direction; and an air supply/exhaust section for supplying and exhausting air to and from the airtight space at the upper part of the storage section;
An apparatus for manufacturing a cylindrical organic photoreceptor, comprising a coating liquid supply section that supplies and drains a coating liquid made of an organic photosensitive material to and from the closed space at a lower part of the storage section.
JP21919486A 1986-09-19 1986-09-19 Manufacture of cylindrical organic photosensitive body and its device Pending JPS6375780A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21919486A JPS6375780A (en) 1986-09-19 1986-09-19 Manufacture of cylindrical organic photosensitive body and its device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21919486A JPS6375780A (en) 1986-09-19 1986-09-19 Manufacture of cylindrical organic photosensitive body and its device

Publications (1)

Publication Number Publication Date
JPS6375780A true JPS6375780A (en) 1988-04-06

Family

ID=16731682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21919486A Pending JPS6375780A (en) 1986-09-19 1986-09-19 Manufacture of cylindrical organic photosensitive body and its device

Country Status (1)

Country Link
JP (1) JPS6375780A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015528887A (en) * 2012-06-22 2015-10-01 シーメンス コンセントレイテッド ソーラー パワー リミテッドSiemens ConcentratedSolar Power Ltd. Glass sleeve coating

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015528887A (en) * 2012-06-22 2015-10-01 シーメンス コンセントレイテッド ソーラー パワー リミテッドSiemens ConcentratedSolar Power Ltd. Glass sleeve coating
US9908134B2 (en) 2012-06-22 2018-03-06 Siemens Concentrated Solar Power Ltd. Coating of a glass sleeve

Similar Documents

Publication Publication Date Title
JPS60210840A (en) Spinning proccessor
JPS6375780A (en) Manufacture of cylindrical organic photosensitive body and its device
JPH1080656A (en) Perpendicular coating applicator for cylindrical body and coating application method as well as manufacture of electrophotographic photoreceptor
JPS5914891B2 (en) Spin coating method and spin coating device
JPH01149961A (en) Device for regenerating amorphous silicon photoreceptive member forming jig
JP2901596B1 (en) Electrophotographic photoreceptor coating film edge processing method and processing apparatus
JP2669054B2 (en) Developing device
JP3324011B2 (en) Unnecessary film removal device for coated substrate formed by spin coating
JP2787525B2 (en) Method of manufacturing reproduction cylinder, method of manufacturing reproduction electrophotographic photosensitive drum using the same, and bulge processing apparatus used for the method
JPS6196738A (en) Treatment for silicon substrate
JPS61131860A (en) Polishing method
JP2001232747A (en) Combination factory for making gravure printing plate/ flexographic printing plate
US4268612A (en) Method for making relief deepenings in printing plate materials
JP2889934B2 (en) Method of forming resist film
JPH0315852A (en) Coating method for sensitive body
JPS63250124A (en) Resist coating device
JPH10277931A (en) Manufacture of hard substrate and its device
JPH0391232A (en) Developing device
JPH0252067A (en) Coating apparatus
JPH1157635A (en) Substrate processing method and substrate processing apparatus
JPH11231557A (en) Device and method for coating cylindrical body
JPS624187B2 (en)
JPH02257634A (en) Etching of semiconductor wafer
JPS6254065B2 (en)
JPH04267981A (en) drying equipment