JPS6376111A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPS6376111A
JPS6376111A JP22136586A JP22136586A JPS6376111A JP S6376111 A JPS6376111 A JP S6376111A JP 22136586 A JP22136586 A JP 22136586A JP 22136586 A JP22136586 A JP 22136586A JP S6376111 A JPS6376111 A JP S6376111A
Authority
JP
Japan
Prior art keywords
medium
magnetic
noise
thin film
magnetic recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22136586A
Other languages
Japanese (ja)
Other versions
JPH077495B2 (en
Inventor
Takaaki Shirokura
白倉 高明
Makoto Sano
誠 佐野
Shinya Matsuoka
松岡 伸也
Motoi Aoi
青井 基
Yoshihiro Shiroishi
芳博 城石
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP22136586A priority Critical patent/JPH077495B2/en
Publication of JPS6376111A publication Critical patent/JPS6376111A/en
Publication of JPH077495B2 publication Critical patent/JPH077495B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 (産業上の利用分野〕 本発明は、磁気記録媒体に関し、特にスパッタリング法
、メッキ法、蒸着法等で磁性膜が膜付けされる磁気記録
媒体において、媒体ノイズを低減してm磁変換特性を改
善するのに好適な磁気記録媒体に関する。
Detailed Description of the Invention (Industrial Field of Application) The present invention relates to magnetic recording media, and particularly to magnetic recording media on which a magnetic film is deposited by sputtering, plating, vapor deposition, etc., to reduce media noise. The present invention relates to a magnetic recording medium suitable for improving m-magnetic conversion characteristics.

〔従来の技術〕[Conventional technology]

従来より主として用いられている塗布形の磁気記録媒体
に変わり、 「日経ニューマテリアル12−21985
 pp、24〜35」に示されるように、スパッタリン
グ法、メッキ法、蒸着法等により形成される。
In place of the coating-type magnetic recording media that has been mainly used in the past, "Nikkei New Materials 12-21985
pp. 24-35'', it is formed by a sputtering method, a plating method, a vapor deposition method, etc.

いわゆる薄膜媒体が開発されており、一部実用に供され
ている。塗布形媒体に比べこれらの薄膜媒体は、磁性膜
厚が約1710程度にできること、連続膜を形成できる
ため、高保磁力化、高残留磁束密度化が容易であること
等で飛岡的に記録密度を向上し得ることが知られている
。これらの薄膜媒体の磁性膜材料としてはCO系合金(
Co−Ni(コバルト−ニッケル)、Co−Cr(コバ
ルト−クロム)。
So-called thin film media have been developed and some are in practical use. Compared to coated media, these thin film media can have a magnetic film thickness of approximately 1710 mm, and can form a continuous film, making it easy to increase coercive force and high residual magnetic flux density, making it possible to increase recording density in a Tobioka way. It is known that it can be improved. The magnetic film materials for these thin film media include CO-based alloys (
Co-Ni (cobalt-nickel), Co-Cr (cobalt-chromium).

Co−N1−P(コバルト−ニッケルーリン)、Co−
Ni−○(コバルト−ニッケルー酸素)、Co−N1−
N(コバルト−ニッケル〜チッ素)、  G o−N 
i−Cr(コバルト−ニッケルークロム)等)が一般的
に用いられている。
Co-N1-P (cobalt-nickel-phosphorus), Co-
Ni-○ (cobalt-nickel-oxygen), Co-N1-
N (cobalt-nickel to nitrogen), G o-N
i-Cr (cobalt-nickel-chromium), etc.) are commonly used.

第2図は、薄膜媒体と塗布形媒体を比較した媒体ノイズ
の記録密度依存性を表したものであり、横軸に記録密度
、縦軸に各記録密度での媒体ノイズを示す。
FIG. 2 shows the dependence of medium noise on recording density in a comparison between a thin film medium and a coated medium, with the horizontal axis showing the recording density and the vertical axis showing the medium noise at each recording density.

この図から既に報告されているように(R,A、Bau
gh、E、S、Murdock  and  B、R,
Natrajam  ;  IEEE  Trans、
 MAG19.pp、1722−1724,5ept、
1983参照)、塗布形媒体のノイズは記録密度の増加
に伴ない減少するが、Co系合金の薄膜媒体のノイズは
、記録密度の増加とともに増大し、高記録密度(20K
PCI前後)でピークに達した後減少する傾向を示す。
As already reported from this figure (R, A, Bau
gh, E, S, Murdock and B, R,
Natrajam; IEEE Trans;
MAG19. pp, 1722-1724, 5ept,
1983), the noise of coated media decreases as the recording density increases, but the noise of Co-based alloy thin film media increases as the recording density increases;
It shows a tendency to decrease after reaching a peak (before and after PCI).

また、媒体ノイズの値も高記録密度(20KPCI前後
)で、塗布形媒体に比べ2〜3倍と大きな値を示す。
In addition, the value of medium noise is 2 to 3 times larger than that of coated media at high recording density (around 20 KPCI).

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

上述した従来技術では、Co系合金の薄膜媒体は高記録
密度達成の可能性を有しているが、一方。
In the prior art described above, the Co-based alloy thin film medium has the possibility of achieving high recording density;

第2図に示す如く、塗布形媒体に比較して媒体ノイズが
大きいという問題がある。
As shown in FIG. 2, there is a problem in that the medium noise is greater than that of coated media.

本発明の目的は、このような従来の問題点を改善し、C
o系合金薄膜媒体の高記録密度時の媒体ノイズが低減さ
れる磁気記録媒体を提供することにある。
The purpose of the present invention is to improve such conventional problems and to
An object of the present invention is to provide a magnetic recording medium in which medium noise is reduced during high recording density of an o-based alloy thin film medium.

〔問題点を解決するための手段] 上記問題点を解決するため、本発明では、スパッタリン
グ法、メッキ法、蒸着法等で磁性膜が膜付けされる磁気
記録媒体でかつ磁性膜がCo系の合金材料よりなる磁気
記録媒体において、上記磁性膜の保磁力角形比S+を0
.68〜0.8 の範囲に特定することに特徴がある。
[Means for Solving the Problems] In order to solve the above problems, the present invention provides a magnetic recording medium on which a magnetic film is deposited by sputtering, plating, vapor deposition, etc., and the magnetic film is Co-based. In a magnetic recording medium made of an alloy material, the coercive force squareness ratio S+ of the magnetic film is 0.
.. The characteristic is that it is specified in the range of 68 to 0.8.

〔作用〕[Effect]

磁気記録媒体の磁気特性を表現する手段として第3図に
示すB−8曲線が一般に用いられる。また、媒体の電磁
変換特性を表す値として第3図中のb/aの値を保磁力
角形比S”(以下、S+どのみ記す)が一般に用いられ
ている。従来はこのS+は大きい方がディスクとしては
良好であると考えられていた。
The B-8 curve shown in FIG. 3 is generally used as a means of expressing the magnetic characteristics of a magnetic recording medium. Furthermore, as a value representing the electromagnetic conversion characteristics of the medium, the value of b/a in Fig. 3 is generally used as the coercive force squareness ratio S'' (hereinafter referred to as S+). Conventionally, this S+ is the larger one. was considered to be in good condition as a disc.

第4図に上述のS+をパラメータとして作られた媒体の
媒体ノイズとS+どの関係を示す。第4図に見られるよ
うに、媒体ノイズはS+に強い依存性を示し、S”=0
.8以上では急激に増加する傾向が見られる。この傾向
は高記録密度時(20KPCI)にはより顕著に見られ
る。
FIG. 4 shows the relationship between the medium noise and S+ of the medium created using the above-mentioned S+ as a parameter. As seen in Figure 4, the media noise shows a strong dependence on S+, with S''=0
.. There is a tendency for a rapid increase in values of 8 or higher. This tendency is more noticeable at high recording density (20 KPCI).

第5図にCo系合金薄膜媒体の磁区構造模式図を示す。FIG. 5 shows a schematic diagram of the magnetic domain structure of a Co-based alloy thin film medium.

第5図に示すように、Co系合金薄膜媒体では結晶粒間
の磁気的結合により、磁化反転部分が鋸歯状磁区になる
(松本光功著 磁気記録共立出版 PP、157〜15
8参照)。このように磁化反転部分が鋸歯状になり磁界
の急峻な変化を妨げることが、Co系合金薄膜媒体の媒
体ノイズの主要因である。
As shown in Figure 5, in a Co-based alloy thin film medium, the magnetization reversal portion becomes a sawtooth magnetic domain due to magnetic coupling between crystal grains (Mitsuko Matsumoto, Magnetic Recording Kyoritsu Publishing PP, 157-15
8). The fact that the magnetization reversal portion becomes sawtooth and prevents a sharp change in the magnetic field is the main cause of medium noise in the Co-based alloy thin film medium.

この鋸歯状磁区の大きさは、残留磁束密度Brに比例し
、保磁力Hcに反比例する。
The size of this sawtooth magnetic domain is proportional to the residual magnetic flux density Br and inversely proportional to the coercive force Hc.

本発明においては、BrおよびHcO値より定まるS+
の値を特定することにより、低ノイズ化を図る。
In the present invention, S+ determined from Br and HcO values
By specifying the value of , noise is reduced.

〔実施例〕〔Example〕

息下、本発明の一実施例を、図面により詳細に説明する
An embodiment of the present invention will now be described in detail with reference to the drawings.

第6図にGo合金系の薄膜媒体の一般的な構成を示す。FIG. 6 shows a general configuration of a Go alloy thin film medium.

これは、Co−Niスパッタ媒体の構成を示している。This shows the composition of the Co-Ni sputtering medium.

以下、このような一般的なスパッタ媒体の製造プロセス
を説明する。
The manufacturing process of such a general sputtering medium will be described below.

まず、アルミニウム合金(AQ−Mg)基板上に無電解
メッキ法で約lo陣程度のNi−PMを形成する。次に
、磁性膜の水平方向の結晶磁気異方性を増して保磁力H
eを向上するように、スパッタで約2000人程度のC
r層を形成する。形成されたCr層の上にスパッタリン
グにより磁性膜となるCo−Ni膜(層)を約600人
程度の膜厚で形成する。この後、これらの形成膜を保護
するためのコーティング層である0層をスパッタリング
により約400人程度の膜厚で形成する。以上のプロセ
スによりCo−Ni  薄膜媒体が製造される。
First, Ni-PM of approximately the lo group size is formed on an aluminum alloy (AQ-Mg) substrate by electroless plating. Next, we increase the horizontal magnetocrystalline anisotropy of the magnetic film to increase the coercive force H.
Approximately 2,000 carbon atoms are applied by sputtering to improve
Form an r layer. On the formed Cr layer, a Co--Ni film (layer), which will become a magnetic film, is formed to a thickness of about 600 nm by sputtering. Thereafter, an 0 layer, which is a coating layer for protecting these formed films, is formed by sputtering to a thickness of about 400 layers. A Co--Ni thin film medium is manufactured by the above process.

本発明の実施例として第6図に示した膜構成における磁
性膜(Co−N i )の組成および、成膜条件(アル
ゴンガス圧、投入パワ)をパラメータとした実験結果例
を第7図に示す。なお、本実験は、DCマグネトロンス
パッタ装置を用いて行った。
As an example of the present invention, an example of the experimental results using the composition of the magnetic film (Co-N i ) in the film configuration shown in FIG. 6 and the film forming conditions (argon gas pressure, input power) as parameters is shown in FIG. show. Note that this experiment was conducted using a DC magnetron sputtering device.

第7図に示す如く、S+は容易にコントロールすること
が可能である。
As shown in FIG. 7, S+ can be easily controlled.

第1図は、本発明の一実施例を示す薄膜媒体における磁
性膜の保磁力角形比と媒体ノイズ比の関係を示す図であ
る。これは上記サンプルの信号対媒体ノイズ比(以下、
S/Nと記す)とS+の関係を示している。ここで、記
録密度は10,15゜20KPCIである。
FIG. 1 is a diagram showing the relationship between the coercive force squareness ratio of a magnetic film and the medium noise ratio in a thin film medium showing an embodiment of the present invention. This is the signal-to-medium noise ratio (hereinafter referred to as
It shows the relationship between S/N) and S+. Here, the recording density is 10.15°20 KPCI.

第1図に見られるように、S/NはS+が0.7〜0.
75の間で最大となる。本発明において。
As seen in FIG. 1, the S/N ratio is 0.7 to 0.
The maximum value is between 75 and 75. In the present invention.

高S/Nを得るために、S′″の値を、管理可能な巾も
考慮して0.68〜0.8の間に特定する。
In order to obtain a high S/N, the value of S''' is specified between 0.68 and 0.8, taking into account the manageable width.

なお、本発明は、保磁力角形比S1を特定するものであ
り、実施例に開示した。膜構成9組成。
Note that the present invention specifies the coercive force squareness ratio S1, and is disclosed in the Examples. Membrane configuration 9 composition.

成膜条件に限られるものでないことはTFJ白である。TFJ White is not limited to the film forming conditions.

このように、本実施例においては、S+値を特定するこ
とにより、媒体ノイズを約1/3に軽減し、S/Nを約
5dB改善することが可能である6〔発明の効果〕 以上説明したように、本発明によれば、Go系合金薄膜
媒体の高記録密度時の媒体ノイズが低減されるようにな
る。
As described above, in this embodiment, by specifying the S+ value, it is possible to reduce the medium noise to about 1/3 and improve the S/N by about 5 dB.6 [Effects of the Invention] As explained above. As described above, according to the present invention, the medium noise at high recording density of the Go-based alloy thin film medium is reduced.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す保磁力角形比とS/H
の関係を示す図、第2図は媒体ノイズの記録密度依存性
を示す図、第3図は媒体磁化曲線を示す図、第4図は保
磁力角形比と媒体ノイズの関係を示す図、第5図はGo
系合金薄膜媒体の磁区構造模式図、第6図はGo系合金
薄膜媒体の膜構成例を示す図、第7図は本発明の実施例
における実験結果例を示す図である。 第     1     図 保磁力角形比S” (Co系合金薄膜膜体) 第     2     図 記録密度(KFO工) 第     3     図 第     4    図 保磁力角形比S* 第     6     図 第    7    図
Figure 1 shows the coercive force squareness ratio and S/H of an embodiment of the present invention.
Figure 2 is a diagram showing the recording density dependence of media noise, Figure 3 is a diagram showing the media magnetization curve, Figure 4 is a diagram showing the relationship between coercive force squareness ratio and media noise, Figure 5 is Go
FIG. 6 is a diagram showing an example of the film structure of a Go-based alloy thin film medium, and FIG. 7 is a diagram showing an example of experimental results in an example of the present invention. Fig. 1 Coercive force squareness ratio S” (Co-based alloy thin film body) Fig. 2 Recording density (KFO process) Fig. 3 Fig. 4 Coercive force squareness ratio S* Fig. 6 Fig. 7

Claims (1)

【特許請求の範囲】[Claims] 1、スパッタリング法、メッキ法、蒸着法等で磁性膜が
膜付けされる磁気記録媒体でかつ磁性膜がCo系の合金
材料よりなる磁気記録媒体において、上記磁性膜の保磁
力角形比S^+を0.68〜0.8の範囲に特定するこ
とを特徴とする磁気記録媒体。
1. In a magnetic recording medium in which a magnetic film is deposited by a sputtering method, a plating method, a vapor deposition method, etc., and the magnetic film is made of a Co-based alloy material, the coercive force squareness ratio S^+ of the magnetic film is 1. A magnetic recording medium characterized by specifying a range of 0.68 to 0.8.
JP22136586A 1986-09-19 1986-09-19 Magnetic recording medium Expired - Lifetime JPH077495B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22136586A JPH077495B2 (en) 1986-09-19 1986-09-19 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22136586A JPH077495B2 (en) 1986-09-19 1986-09-19 Magnetic recording medium

Publications (2)

Publication Number Publication Date
JPS6376111A true JPS6376111A (en) 1988-04-06
JPH077495B2 JPH077495B2 (en) 1995-01-30

Family

ID=16765651

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22136586A Expired - Lifetime JPH077495B2 (en) 1986-09-19 1986-09-19 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH077495B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6335103B1 (en) * 1988-08-10 2002-01-01 Hitachi, Ltd. Magnetic recording media for longitudinal recording
US6627253B2 (en) 1988-08-10 2003-09-30 Hitachi, Ltd. Magnetic recording media for longitudinal recording, process for producing the same and magnetic memory apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6335103B1 (en) * 1988-08-10 2002-01-01 Hitachi, Ltd. Magnetic recording media for longitudinal recording
US6627253B2 (en) 1988-08-10 2003-09-30 Hitachi, Ltd. Magnetic recording media for longitudinal recording, process for producing the same and magnetic memory apparatus

Also Published As

Publication number Publication date
JPH077495B2 (en) 1995-01-30

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