JPS6376231A - Exposure method of color cathode-ray tube - Google Patents
Exposure method of color cathode-ray tubeInfo
- Publication number
- JPS6376231A JPS6376231A JP61221297A JP22129786A JPS6376231A JP S6376231 A JPS6376231 A JP S6376231A JP 61221297 A JP61221297 A JP 61221297A JP 22129786 A JP22129786 A JP 22129786A JP S6376231 A JPS6376231 A JP S6376231A
- Authority
- JP
- Japan
- Prior art keywords
- light
- light source
- exposure
- receiving element
- shutter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 5
- 239000011159 matrix material Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 230000032683 aging Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
- H01J9/22—Applying luminescent coatings
- H01J9/227—Applying luminescent coatings with luminescent material discontinuously arranged, e.g. in dots or lines
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、カラーブラウン管の蛍光面におけるブラック
マトリックス膜を製作する際の露光方法に関するもので
ある。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an exposure method for producing a black matrix film on a fluorescent screen of a color cathode ray tube.
−ａにシャドウマスク型カラーブラウン管においてブラ
ックマトリックス膜を得るためパネル内面にフォトレジ
ストを塗布しシャドウマスクを通して露光する方法が行
われている。相反則不軌性の大きいフォトレジストの特
徴として第５図に示す如く、露光光量とホール径の関係
は光源の光量（明るさ）がパラメータとして作用し、ホ
ール径を一定にするには光源の光量（明るさ）を一定に
する必要がある。In order to obtain a black matrix film in a shadow mask type color cathode ray tube, a method is used in which a photoresist is applied to the inner surface of the panel and exposed through a shadow mask. As shown in Figure 5, a characteristic of photoresists with large reciprocity failure is that the light intensity (brightness) of the light source acts as a parameter in the relationship between the exposure light amount and the hole diameter, and in order to keep the hole diameter constant, the light intensity of the light source is (brightness) needs to be constant.
第４図は従来の露光装置の概略を示すもので、ランプハ
ウス１の超高圧水銀灯（光源）２から発する光を露光に
用い露光光路には実際の電子ビームの軌跡と一致させる
ための補正レンズ４とパネル内面の各位置における照度
を補正するための調光フィルター５が配置されている。Figure 4 shows an outline of a conventional exposure device, in which light emitted from an ultra-high pressure mercury lamp (light source) 2 in a lamp house 1 is used for exposure, and a correction lens is installed in the exposure optical path to match the trajectory of the actual electron beam. 4 and a light control filter 5 for correcting the illuminance at each position on the inner surface of the panel.
受光素子７は光源２から発する光の一部を受光できる位
置にあり光量計８に接続されている。露光台６にシャド
ウマスク１１を装着したパネル１２を載せてランプハウ
ス１の上部のシャッター３を開動作させて露光するので
ある。露光動作は光量計８にあらかじめ露光光量値（光
源の光量値Ｘ時間、即ち光量の精算値）を設定しておき
、シャッター３を開くと同時に受光素子７かち得られた
光量を精算しながら露光光量値が設定値に達するまでシ
ャッター３を開かせて行う。露光光量値が設定値に達し
た時点でシャッター３は閉じ露光は終了する。The light receiving element 7 is located at a position where it can receive part of the light emitted from the light source 2, and is connected to a light meter 8. The panel 12 equipped with the shadow mask 11 is placed on the exposure table 6, and the shutter 3 at the top of the lamp house 1 is opened to perform exposure. In the exposure operation, the exposure light amount value (the light amount value of the light source x time, i.e., the calculated value of the light amount) is set in advance on the light meter 8, and at the same time as the shutter 3 is opened, the light receiving element 7 calculates the amount of light obtained during exposure. This is done by opening the shutter 3 until the light intensity value reaches the set value. When the exposure light amount value reaches the set value, the shutter 3 closes and the exposure ends.
しかしながら、この場合の問題点は第３図の如く光源２
である超高圧水銀灯の経時変化による光量（明るさ）劣
化のため相反則不軌性の大きいフォトレジストでは一部
ホール径を得るためには最適露光光量値を頻繁に変えな
ければならないが、実際上はこのようなことは困難でホ
ール径のバラツキは避けられなかった。However, the problem in this case is that the light source 2
Due to the deterioration of light intensity (brightness) due to aging of ultra-high-pressure mercury lamps, photoresists with large reciprocity failure must frequently change the optimum exposure light intensity value in order to obtain some hole diameters. This was difficult to do, and variations in hole diameter were unavoidable.
本発明は、カラーブラウン管のブラックマトリクス膜の
製作工程において、光源がら発する光量を、受光素子で
測定しながら露光光量を制御すると共に、受光素子で光
量を測定し、光源の電源へフィードバックして光源の光
量が一定幅内に入るようにする露光方法である。In the manufacturing process of the black matrix film of a color cathode ray tube, the present invention controls the amount of exposure light while measuring the amount of light emitted from the light source with a light receiving element, and also measures the amount of light with the light receiving element and feeds it back to the power source of the light source. This is an exposure method in which the amount of light falls within a certain width.
〔実施例〕 次に本発明の１実施例を図面に基すき詳細に説明する。〔Example〕 Next, one embodiment of the present invention will be described in detail with reference to the drawings.
第１図は本発明に用いる露光装置の概略を示すもので、
光源２から発する光の一部を受光できる位置にある受光
素子７は光量計２３に接続されている。光量計２３では
あらかじめ光源２の光量（明るさ）の上限、下限、及び
その光量（明るさ）での最適露光光量値を設定しておき
光源２の光量（明るさ）が下限に達すると光源２の電源
２４へ信号を出し電圧を上昇させて光源２の光量（明る
さ）を上限に達するまでアップさせ第２図の如く光源２
の光量（明るさ）を一定幅にコントロールする。シャド
ウマスク１１を装着したパネル１２を露光台６に載せて
、調光フィルター５の上部に設けたシャッター３を開動
作させて露光する。シャッター３の開動作と同時に受光
素子７より得られた明るさを光量計２３で積算し、設定
値に達したらシャッター３を閉動作させて露光を終了す
る。FIG. 1 schematically shows an exposure apparatus used in the present invention.
A light receiving element 7 located at a position where it can receive part of the light emitted from the light source 2 is connected to a light meter 23. In the light meter 23, the upper and lower limits of the light intensity (brightness) of the light source 2 and the optimum exposure light intensity value at those light intensity (brightness) are set in advance, and when the light intensity (brightness) of the light source 2 reaches the lower limit, the light source is turned off. A signal is sent to the power supply 24 of the light source 2 to increase the voltage and increase the amount of light (brightness) of the light source 2 until it reaches the upper limit.
Control the amount of light (brightness) within a certain range. A panel 12 equipped with a shadow mask 11 is placed on an exposure table 6, and a shutter 3 provided above a light control filter 5 is opened to expose the panel 12 to light. Simultaneously with the opening operation of the shutter 3, the brightness obtained from the light receiving element 7 is integrated by the light meter 23, and when the set value is reached, the shutter 3 is closed and the exposure is completed.
以上のように本発明によれば、ブラックマトリクス膜の
製作工程において相反則不軌性の大きいホトレジストの
場合でも、ホール径を±３μｍ程度のバラツキ範囲で製
作できる露光方法が得られる。As described above, according to the present invention, even in the case of a photoresist having a large reciprocity law failure in the manufacturing process of a black matrix film, an exposure method can be obtained that allows hole diameters to be manufactured within a variation range of approximately ±3 μm.
第１図は本発明に用いる露光装置の概略図、第２図は本
発明による露光装置での光源の光量の経時変化を示すグ
ラフ、第３図は従来の露光装置での光源の光量の経時変
化を示すグラフ、第４図は従来の露光装置の概略図、第
５図は相反則不軌性の大きいフォト・レジストを使った
場合のホール径と露光光量の関係図である。
１・・・ランプハウス、２・・・光源、３・・・シャッ
ター、４・・・補正レンズ、５・・・調光フィルター、
６・・・露光台、７・・・受光素子、８，２３・・・光
量計、１１・・・シャドウマスク、１２・・・パネル、
２４・・・電源。
単２ 図
鵠
牢３ 回Fig. 1 is a schematic diagram of the exposure apparatus used in the present invention, Fig. 2 is a graph showing changes in the light intensity of the light source over time in the exposure apparatus according to the present invention, and Fig. 3 is a graph showing the change in the light intensity of the light source over time in the conventional exposure apparatus. A graph showing the changes, FIG. 4 is a schematic diagram of a conventional exposure apparatus, and FIG. 5 is a diagram showing the relationship between the hole diameter and the exposure light amount when a photoresist with large reciprocity law failure is used. 1... Lamp house, 2... Light source, 3... Shutter, 4... Correction lens, 5... Light control filter,
6... Exposure table, 7... Light receiving element, 8, 23... Light meter, 11... Shadow mask, 12... Panel,
24...Power supply. AA 3 times
Claims (1)
おいて、光源から発する光量を、受光素子で測定しなが
ら露光光量（光量×時間）を制御すると共に、前記受光
素子で光量を測定し、光源の電源へフィードバックして
光源の光量を一定幅内に保つことを特徴とするカラーブ
ラウン管の露光方法。In the manufacturing process of the black matrix film of color cathode ray tubes, the amount of light emitted from the light source is measured by a light receiving element and the exposure light amount (light amount x time) is controlled.The light receiving element also measures the light amount and feeds it back to the power source of the light source. A color cathode ray tube exposure method characterized by keeping the amount of light from the light source within a certain range.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61221297A JPS6376231A (en) | 1986-09-18 | 1986-09-18 | Exposure method of color cathode-ray tube |
| KR870010315A KR880004528A (en) | 1986-09-18 | 1987-09-17 | Exposure method of color CRT |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61221297A JPS6376231A (en) | 1986-09-18 | 1986-09-18 | Exposure method of color cathode-ray tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6376231A true JPS6376231A (en) | 1988-04-06 |
Family
ID=16764578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61221297A Pending JPS6376231A (en) | 1986-09-18 | 1986-09-18 | Exposure method of color cathode-ray tube |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS6376231A (en) |
| KR (1) | KR880004528A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5524318A (en) * | 1978-08-09 | 1980-02-21 | Hitachi Ltd | Exposure device for color braun tube |
| JPS5825037A (en) * | 1981-08-05 | 1983-02-15 | Hitachi Ltd | Exposure light amount control method |
| JPS58189944A (en) * | 1982-04-30 | 1983-11-05 | Nec Corp | Exposure device for color cathode-ray tube |
-
1986
- 1986-09-18 JP JP61221297A patent/JPS6376231A/en active Pending
-
1987
- 1987-09-17 KR KR870010315A patent/KR880004528A/en not_active Ceased
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5524318A (en) * | 1978-08-09 | 1980-02-21 | Hitachi Ltd | Exposure device for color braun tube |
| JPS5825037A (en) * | 1981-08-05 | 1983-02-15 | Hitachi Ltd | Exposure light amount control method |
| JPS58189944A (en) * | 1982-04-30 | 1983-11-05 | Nec Corp | Exposure device for color cathode-ray tube |
Also Published As
| Publication number | Publication date |
|---|---|
| KR880004528A (en) | 1988-06-04 |
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