JPS637667U - - Google Patents
Info
- Publication number
- JPS637667U JPS637667U JP9976286U JP9976286U JPS637667U JP S637667 U JPS637667 U JP S637667U JP 9976286 U JP9976286 U JP 9976286U JP 9976286 U JP9976286 U JP 9976286U JP S637667 U JPS637667 U JP S637667U
- Authority
- JP
- Japan
- Prior art keywords
- coupler
- entrance
- exit
- fitting
- abutting surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 3
- 239000012535 impurity Substances 0.000 claims 1
- 239000011247 coating layer Substances 0.000 description 1
Landscapes
- Closures For Containers (AREA)
- Drying Of Semiconductors (AREA)
Description
図面はこの考案の実施例を示すもので、第１図
は正断面図、第２図は高純度材料の出口の拡大断
面図、第３図はガス入口の拡大断面図である。
１……容器、２……ガス入口、３……出口、４
……口部、５……フランジ、６……出入口取付板
、７……ボルト、８……通孔、９……通孔、１０
……密閉リング、１１……移動用パイプ、１２…
…カプラー、１３……ネジ、１４……フランジ、
１５……フランジ、１６……装着手段、１７……
送出孔、１８……密閉リング、１９……装着溝、
２０……導出パイプ、２１……取付具、２２……
ネジ、２３……貫通孔、２４……通孔、２５……
コーテイング層。
The drawings show an embodiment of this invention; FIG. 1 is a front sectional view, FIG. 2 is an enlarged sectional view of the outlet of high-purity material, and FIG. 3 is an enlarged sectional view of the gas inlet. 1... Container, 2... Gas inlet, 3... Outlet, 4
... Mouth part, 5 ... Flange, 6 ... Entrance/exit mounting plate, 7 ... Bolt, 8 ... Through hole, 9 ... Through hole, 10
...Sealing ring, 11...Movement pipe, 12...
...Coupler, 13...Screw, 14...Flange,
15...flange, 16...attachment means, 17...
Delivery hole, 18... Sealing ring, 19... Mounting groove,
20... Leading pipe, 21... Fitting tool, 22...
Screw, 23... through hole, 24... through hole, 25...
coating layer.
Claims (1)
料保存容器から突出させた略筒状の出入口と、こ
の出入口と当接して通孔を連通させると共に、他
の場所へ高純度材料を移動させる移動用パイプを
装着可能にしたカプラーと、出入口とカプラーと
を係止する取付具とからなり、出入口は、その端
面をカプラーとの当接面とし、カプラーは、その
一方の端部にフランジを形成すると共に、フラン
ジを含む端面を出入口との当接面とし、取付具は
、有底筒状でその底にフランジを除くカプラーを
貫通させると共に、出入口の当接面とカプラーの
当接面との間に密閉リングを介在させながら取付
具をカプラーに被せ、取付具内周と出入口外周と
の間の係止手段により出入口とカプラーとを係止
すべく形成したことを特徴とする高純度材料保存
容器の出入口カプラー取付構造。 A roughly cylindrical entrance and exit that protrudes from a high-purity material storage container that is designed to prevent the presence of impurities inside, and abuts against this entrance to communicate with the through hole, as well as for transporting the high-purity material to another location. It consists of a coupler to which a pipe can be attached, and a fitting that locks the inlet/outlet and the coupler. At the same time, the end face including the flange is the abutting surface with the entrance/exit, and the fitting has a cylindrical shape with a bottom, through which the coupler excluding the flange is passed through the bottom, and between the abutting surface of the entrance/exit and the abutting surface of the coupler. A high-purity material storage container, characterized in that the fitting is placed over the coupler with a sealing ring interposed therebetween, and the opening and the coupler are locked together by a locking means between the inner periphery of the fitting and the outer periphery of the opening. Entrance/exit coupler mounting structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986099762U JPH0417507Y2 (en) | 1986-06-28 | 1986-06-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986099762U JPH0417507Y2 (en) | 1986-06-28 | 1986-06-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS637667U true JPS637667U (en) | 1988-01-19 |
| JPH0417507Y2 JPH0417507Y2 (en) | 1992-04-20 |
Family
ID=30968944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986099762U Expired JPH0417507Y2 (en) | 1986-06-28 | 1986-06-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0417507Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014082250A (en) * | 2012-10-15 | 2014-05-08 | Tokyo Electron Ltd | Gas introduction device and induction coupling plasma processing apparatus |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL1035684A1 (en) * | 2007-07-23 | 2009-01-27 | Asml Netherlands Bv | Small Volume Resist Dispenser. |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS489885U (en) * | 1971-06-16 | 1973-02-03 |
-
1986
- 1986-06-28 JP JP1986099762U patent/JPH0417507Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS489885U (en) * | 1971-06-16 | 1973-02-03 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014082250A (en) * | 2012-10-15 | 2014-05-08 | Tokyo Electron Ltd | Gas introduction device and induction coupling plasma processing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0417507Y2 (en) | 1992-04-20 |