JPS6379637U - - Google Patents

Info

Publication number
JPS6379637U
JPS6379637U JP17444686U JP17444686U JPS6379637U JP S6379637 U JPS6379637 U JP S6379637U JP 17444686 U JP17444686 U JP 17444686U JP 17444686 U JP17444686 U JP 17444686U JP S6379637 U JPS6379637 U JP S6379637U
Authority
JP
Japan
Prior art keywords
mounting surface
processing
wafer mounting
container
processing container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17444686U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17444686U priority Critical patent/JPS6379637U/ja
Publication of JPS6379637U publication Critical patent/JPS6379637U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)

Description

【図面の簡単な説明】
第１図及び第２図は、夫々本考案の実施例を示
すプラズマ処理装置の断面構成図、第３図は、従
来のプラズマ処理装置の構成図である。 尚、図中１は処理容器、２は処理ガス散気ノズ
ル、３は排気口、４，５は電極板、６は電源、Ａ
は放電エリア、ｓはウエハー載置面、ｗは半導体
ウエハーである。

Claims (1)

    【実用新案登録請求の範囲】
  1. 処理容器内の底部中央に半導体ウエハー載置面
    を設け、内部の周側部に処理ガス散気ノズルを配
    設するとともに天井部に排気口を形成し、該処理
    容器外に容器を挾んで対向する電極を設けたもの
    であつて上記ウエハ載置面のウエハーをプラズマ
    処理する装置において、上記電極は放電エリアを
    ウエハー載置面と重ならない位置に設けられたこ
    とを特徴とするプラズマ処理装置。
JP17444686U 1986-11-13 1986-11-13 Pending JPS6379637U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17444686U JPS6379637U (ja) 1986-11-13 1986-11-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17444686U JPS6379637U (ja) 1986-11-13 1986-11-13

Publications (1)

Publication Number Publication Date
JPS6379637U true JPS6379637U (ja) 1988-05-26

Family

ID=31112837

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17444686U Pending JPS6379637U (ja) 1986-11-13 1986-11-13

Country Status (1)

Country Link
JP (1) JPS6379637U (ja)

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