JPS6382931U - - Google Patents
Info
- Publication number
- JPS6382931U JPS6382931U JP17850186U JP17850186U JPS6382931U JP S6382931 U JPS6382931 U JP S6382931U JP 17850186 U JP17850186 U JP 17850186U JP 17850186 U JP17850186 U JP 17850186U JP S6382931 U JPS6382931 U JP S6382931U
- Authority
- JP
- Japan
- Prior art keywords
- base
- raw material
- suspended
- wafer holder
- storing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
第１図及び第２図は本考案の実施例を示す斜視
図及び断面図、第３図は従来例を示す断面図であ
る。 １……ルツボ、２……Ｓｉ原料、５……基板、
７……ウエハホルダ、７ａ……基部、７ｂ……支
柱、７ｃ……載置部。
図及び断面図、第３図は従来例を示す断面図であ
る。 １……ルツボ、２……Ｓｉ原料、５……基板、
７……ウエハホルダ、７ａ……基部、７ｂ……支
柱、７ｃ……載置部。
Claims (1)
- Ｓｉ原料を収納するカーボン製ルツボ、基部と
該基部の下面より吊下され、上記下面との対向面
が基板載置面となる載置部とからなるウエハホル
ダを有したことを特徴とするＳｉＣ液相成長装置
。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17850186U JPS6382931U (ja) | 1986-11-20 | 1986-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17850186U JPS6382931U (ja) | 1986-11-20 | 1986-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6382931U true JPS6382931U (ja) | 1988-05-31 |
Family
ID=31120690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17850186U Pending JPS6382931U (ja) | 1986-11-20 | 1986-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6382931U (ja) |
-
1986
- 1986-11-20 JP JP17850186U patent/JPS6382931U/ja active Pending
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