JPS6385703A - Production of color filter - Google Patents

Abstract

PURPOSE:To eliminate the mistaking of the pattern of color separating filters by changing, by colors, the distances between the plural register marks of the color separating filters. CONSTITUTION:A film to be dyed which is obtd. by exposing an developing is dipped in a dye soln. and is dyed, by which the color separating filter layer 1R of the 1st color is formed. Both the register marks 3R on the right and left side on a substrate 2 and the register marks for exposing are matched at the time of forming the color separating filter of the 1st layer. Even if the matching is mistaken with the register marks of another color; for example, 3B at this time, the distance of the left 3B from the right 3B are different and the marks do not coincide with each other even if both the marks are matched; therefore, the operator recognizes that the matching the marks with 3B is a mistake. The operator is eventually forced to match the color separating filters by using the register marks of the correct 3R. The mistaking of the register marks for the patterns of the color separating filter with the pattern of the color separating filters of other color is thereby obviated.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method of manufacturing a color filter used in an image pickup tube, a solid-state image sensor, or a color liquid crystal display device, which is the heart of a color video camera.

(Prior Art) A color filter is formed on a transparent substrate such as glass or a base such as a solid-state image sensor, and is indispensable for obtaining color signals of natural colors.

However, as shown in the plan view in FIG. It is formed as a fine pattern of the order, and color separation filters (1R), (1B), (
1G) The mutual positional relationship requires absolute precision. Outside the area (1), alignment marks (3R), (3B), and (3G) are provided at one location each on the left and right sides of the base (2).

The alignment mark (3) was formed into a cross or other suitable pattern as shown in the figure by photo-etching a deposited layer of metallic chromium.

(Problem to be Solved by the Invention) In the prior art as described above, since the patterns of the color separation filter layers in each layer are similar, the alignment marks of the color separation filter pattern and the colors of other colors are different from each other. It turned out that the pattern of the decomposition filter was mixed up.

(Means for Solving the Problem) In order to solve the above-mentioned problems, the distance between the plurality of alignment marks of the color separation filter is changed depending on the color.

Although it is possible to change the distance between multiple alignment marks for all colors, a considerable effect can also be obtained by changing the distance between the alignment marks of the color separation filter for the next color, such as short or long. I can do things.

The substrate in this case is generally a glass plate, but it can also refer to any transparent material such as synthetic resin.Also, the color separation filter layer is often made of RGB three colors. It also points to objects of any color.

Furthermore, although the alignment mark is generally a cross, it is not necessarily limited to this. There are various types such as star shapes.

In addition, the photographic method involves coating the surface of a substrate uniformly with resist, placing a mask with a pattern corresponding to the color separation filter layer on top of it, and irradiating the resist with light such as ultraviolet, visible, or infrared light. A method of forming a layer by removing the non-irradiated area after curing, or applying the material uniformly on the surface of the substrate in advance, applying a resist evenly over it, and color separation from above. Put this mask on the pattern corresponding to the filter layer, harden the resist by irradiating it with ultraviolet rays, visible light, infrared rays, etc., then remove the resist in the non-irradiated areas, and then perform etching to leave the resist on top. It points out a method of forming a pattern on the object by removing the object except for the portions that are covered by the resist, and then removing all the remaining resist.

(Function) When aligning the patterns of color separation filters as in the present invention, if the distances between the alignment marks of the patterns are different, the operator may mix up the patterns of the color separation filters. However, since the distances of each pattern are different from those of the mixed-up pattern, it becomes possible to reliably recognize that it is the alignment mark of the wrong color separation filter.

Particularly in the case of color filters such as those of the present invention, the patterns of the color separation filters themselves are similar, and therefore the patterns of the color separation filters were sometimes confused, but this is no longer the case. In addition, most normal-sized color filters are made up of two patterns on the left and right, but a plurality of patterns may also be used.

(Example) An example of the present invention will be described in detail using the drawings. FIG. 1 is a partial plan view of the left end and right end of the first color of the alignment mark provided in advance on the substrate used in the present invention, and metal chromium is vapor-deposited on the substrate (2). Next, a photosensitive resin is applied uniformly over the entire surface, and only the parts that are desired to remain are exposed using a photographic method, that is, through an exposure mask with openings in the desired pattern, and developed to create a desired pattern of metallic chromium. Get the pattern. This metal chrome putter has cross-shaped positioning marks (3) provided on the left and right sides corresponding to all the color division filter layers.

Next, a water-soluble polypeptide resin that is easily dyed, such as gelatin, low-molecular-weight gelatin, greens, and casein, and a photocrosslinking agent such as dichromate or diazonium salt are added to water to make a resin-dyed filter. A negative photosensitive resin obtained by dissolving is uniformly applied onto the substrate (2),
Photographic method: exposing only the part that is desired to remain through an exposure mask having openings in a desired pattern, developing it to obtain a dyed film in the desired pattern, and soaking this dyed film in a dye solution. The first color separation filter layer (1R) is obtained by dyeing the first color separation filter layer (1R).

At this time, when creating the first color separation filter layer, use the alignment marks (3fL) on the left and right substrates (2).
) and the alignment marks on the exposure mask. At this time, use another color alignment mark, for example (
Even if you mix it up with 3B), even if you match it with the left (3B), it won't match the right (3B) because the distance and power are different. Therefore, the worker realized that it was a mistake to set (5B) to 5.
Now use the correct (3R) alignment marks to match the color separation filters. In addition, although resin dyed type color separation filter layers (1 liter) and alignment marks (3 liters) have been mentioned, there is no particular limitation to this, and color filters obtained by vapor-depositing dyes or pigments can also be used. Of course, the manufacturing method of the present invention can also be applied to color filters made by electrodeposition coating of colloidal pigments.

When the above-mentioned color separation filter layer is formed for each color, a color filter is completed.

(Effects of the Invention) According to the present invention, it is no longer necessary to mix up the patterns of color separation filters and align them with color separation filters of other colors, thereby improving the yield of color filters.

[Brief explanation of the drawing]

FIG. 1 is a plan view showing a first color portion of a positioning mark provided in advance on a substrate used in the present invention, and FIG. 2 is a plan view of the conventional example.

Claims (1)

[Claims] (1) In a method for manufacturing a color filter in which color separation filter layers of two or more colors are formed in a pattern at predetermined positions on a substrate using a photographic method, the distance between the plurality of alignment marks of the color separation filter is , a method for manufacturing a color filter characterized by changing the color depending on the color.