JPS6385704A - Production of color filter - Google Patents

Abstract

PURPOSE:To eliminate the mistaking of the patterns of color separating filters by successively registering the register marks attached with the corresponding layer symbols of color separating filter layers of respective colors and the patterns of the color separating filter layers, thereby forming the color separating filter layers. CONSTITUTION:If the discriminated layer symbols 4 are put on the register marks 3 of the patterns of the color separating filters, the operator is forced to surely recognize the register marks 3 corresponding to the patterns of the color separating filters at the time of registering the patterns of the color separating filters. The pattern themselves of the color separating filters resemble to each other particularly in the case of color filters, but the mingling and mistaking of the patterns of the respective color separating filters are prevented. The operator proceeds with the job while recognizing that the layer symbols of the register marks on the substrate and the layer symbols of the register marks for the patterns of the color separating filters are the same, if the layer symbols 4 are attached to the register marks 3 for the patterns of the color separating filters. The sure recognition is thereby obtd.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method of manufacturing a color filter used in an image pickup tube, a solid-state image sensor, or a color liquid crystal display device, which is the heart of a color video camera.

(Prior Art) A color filter is formed on a transparent substrate such as glass or a base such as a solid-state image sensor, and is indispensable for obtaining color signals of natural colors.

However, as shown in the plan view in FIG. It is formed as a custom-made fine pattern, and each color separation filter (1 liter), (1B),
(1G) The mutual positional relationship requires precision without even the slightest deviation. Positioning marks (3R), (3B), and (5G) are provided outside this area (1). Conventionally, the alignment mark (3) is made of a vapor-deposited layer of metallic chromium.
Using the technique of otoenoting, a cross or other suitable pattern was formed as shown in the figure.

(Problem to be Solved by the Invention) In the prior art as described above, since the patterns of the color separation filter layers in each layer are similar, the alignment marks of the color separation filter pattern and the colors of other colors are different from each other. There were cases where the pattern was confused with that of the decomposition filter.

(Means for solving the problem) In order to solve the above-mentioned problems, the color separation filter layer symbol of each color is formed in advance by attaching it to the alignment mark corresponding to the corresponding color separation filter layer. Then, a color filter is manufactured by sequentially aligning the pattern of the color separation filter layer with the alignment mark attached with the corresponding layer arrangement of the color separation filter layer of each color to form a color separation filter layer. .

The substrate in this case is generally a glass plate, but it can also be any transparent material such as synthetic resin.

Furthermore, the term "color separation filter layer" refers to a layer in many colors of RGB, but it can also refer to a layer in any number of colors.

In addition, the layer arrangement is generally a number indicating the layer number of the color separation filter layer, but it may also be indicated by R, G, B, etc. indicating the color itself, color name, Chinese numerals, Roman numerals, etc. It doesn't matter if you point it out.

Furthermore, although the alignment mark is generally a cross, it is not necessarily limited to this. There are various shapes such as star shapes.

In addition, the photographic method involves coating the surface of a substrate uniformly with resist, placing a mask with a pattern corresponding to the color separation filter layer on top of it, and irradiating the resist with light such as ultraviolet, visible, or infrared light. A method of forming a layer by removing non-irradiated areas after curing, or a method of uniformly applying the object to be formed on the surface of the substrate in advance, applying a resist evenly over it, and then applying a color separation filter layer on top of that. This mask is placed on the corresponding butter, and the resist is cured by irradiation with ultraviolet, visible, or infrared light, and then the resist in the non-irradiated areas is removed, and then etching is performed on top of the resist. A method of forming a pattern on the object is shown by removing the object except for the resist portion, and then removing all remaining resist.

(Function) When aligning the pattern of a color separation filter as in the present invention, if the pattern is used as an alignment mark and the layer arrangement to be distinguished is written, the operator will be able to align the pattern of the color separation filter. The alignment mark corresponding to the pattern can be reliably recognized.

Particularly in the case of color filters such as those of the present invention, the patterns of the color separation filters themselves are similar, and therefore the patterns of the color separation filters were sometimes confused, but this is no longer the case.

Furthermore, if a layer arrangement is attached to the alignment mark of the pattern of the color division filter of the present invention, the layer arrangement of the alignment mark on the substrate is the same as the layer arrangement of the alignment mark of the pattern of the color division filter. Since the worker performs the work while being aware of the fact, this becomes a reliable recognition.

(Example) An example of the present invention will be described in detail using the drawings. FIG. 1 is a partial plan view of the first color of alignment marks provided in advance on the substrate used in the present invention;
The figure is a plan view showing the positioning mark part of the pattern of the color separation filter layer of the same color, and FIG.
FIG. 6 is a plan view of what the operator can see when the same position is aligned.

Metallic chromium is deposited on the substrate (2). Next, a photosensitive resin is applied uniformly over the entire surface, and only the parts that are desired to remain are exposed using a photographic method, that is, through an exposure mask with openings in the desired pattern, and developed to create a desired pattern of metallic chromium. Get the pattern. This metallic chrome pattern consists of a cross-shaped alignment mark (3) and a layer arrangement (4) located at the upper left of the cross-shaped alignment mark (3), and is provided in an amount corresponding to all the color division filter layers.

Next, a water-soluble resin such as gelatin, low molecular weight gelatin, grue, casein, etc., which is easily dyed, and a dichromate or diazonium salt as a photocrosslinking agent are dissolved in water, called a resin dyed filter. The resulting negative-type photosensitive resin is uniformly applied onto the substrate (2), and only the portions desired to remain are exposed using a photographic method, that is, through an exposure mask having openings in a desired pattern, and developed. In this way, a dyed film in a desired pattern is obtained, and this dyed film is immersed in a dye solution to be dyed to form a first color separation filter layer (1 liter).

At this time, when creating the first color separation filter layer, it is of course necessary to align the alignment mark (3) on the substrate (2) and the alignment mark (3)' on the exposure mask. The layer number (4) on the base (2) at the top left and the layer number (5) preset on the mask.
), also check that the numbers at the bottom right match. In addition, as for the color separation filter layer (IR) and the alignment mark (3), resin-stained ones were mentioned,
There is no particular limitation to this (it goes without saying that the manufacturing method of the present invention can also be applied to color filters obtained by vapor-depositing dyes or pigments, or color filters created by electrodeposition coating of colloidal pigments). It is.

When the above-mentioned color separation filter layer is formed for each color, a color filter is completed.

(Effects of the Invention) According to the present invention, it is no longer necessary to mix up the patterns of color separation filters and perform alignment with color separation filters of other colors, thereby improving the yield of color filters.

[Brief explanation of the drawing]

FIG. 1 is a plan view showing the first color portion of the alignment mark provided in advance on the substrate used in the present invention, and FIG. 2 is a plan view showing the pattern alignment of the color separation filter layer of the first color. FIG. 3 is a plan view showing the mark portion, and FIG. 3 is a plan view as seen by the operator when the marks are aligned.

Claims (1)

[Claims] (1) In a method for manufacturing a color filter in which color separation filter layers of two or more colors are formed in a pattern at predetermined positions on a substrate using a photographic method, the layer symbols of the color separation filter layers of each color are determined in advance according to the color separation. The alignment mark corresponding to the filter layer is formed, and then the alignment mark attached with the corresponding layer symbol of the color separation filter layer of each color is sequentially aligned with the pattern of the color separation filter layer. A method for producing a color filter, characterized in that a color separation filter layer is formed using a color separation filter layer.