JPS6388635U - - Google Patents

Info

Publication number
JPS6388635U
JPS6388635U JP18127386U JP18127386U JPS6388635U JP S6388635 U JPS6388635 U JP S6388635U JP 18127386 U JP18127386 U JP 18127386U JP 18127386 U JP18127386 U JP 18127386U JP S6388635 U JPS6388635 U JP S6388635U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
box body
substrate storage
magazine
multiple stages
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18127386U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18127386U priority Critical patent/JPS6388635U/ja
Publication of JPS6388635U publication Critical patent/JPS6388635U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例の側面図、第２図は
従来の一般的半導体基板収納マガジンの正面図、
第３図は半導体基板へ記号付けを行うときの記号
記入台と半導体ウエーハを示す斜視図である。 １……マガジン箱体、２……箱体内側面の凸条
、３……組合せ突起、４……ストツパ、５……半
導体ウエーハ、５ａ……ウエーハ露呈面、６……
記号記入台、７……ウエーハ受け板。

Claims (1)

    【実用新案登録請求の範囲】
  1. マガジン箱体の内部に多数の半導体基板が棚板
    式に多段に収納保持される半導体基板収納マガジ
    ンにおいて、前記箱体の背面が前記多段のピツチ
    に合せて階段状に形成されていることを特徴とす
    る半導体基板収納マガジン。
JP18127386U 1986-11-25 1986-11-25 Pending JPS6388635U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18127386U JPS6388635U (ja) 1986-11-25 1986-11-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18127386U JPS6388635U (ja) 1986-11-25 1986-11-25

Publications (1)

Publication Number Publication Date
JPS6388635U true JPS6388635U (ja) 1988-06-09

Family

ID=31125990

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18127386U Pending JPS6388635U (ja) 1986-11-25 1986-11-25

Country Status (1)

Country Link
JP (1) JPS6388635U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017038013A (ja) * 2015-08-12 2017-02-16 株式会社ディスコ 収容カセット

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017038013A (ja) * 2015-08-12 2017-02-16 株式会社ディスコ 収容カセット

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