JPS6389233U - - Google Patents
Info
- Publication number
- JPS6389233U JPS6389233U JP18427086U JP18427086U JPS6389233U JP S6389233 U JPS6389233 U JP S6389233U JP 18427086 U JP18427086 U JP 18427086U JP 18427086 U JP18427086 U JP 18427086U JP S6389233 U JPS6389233 U JP S6389233U
- Authority
- JP
- Japan
- Prior art keywords
- source
- wafer
- tube
- supersaturated
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000001875 compounds Chemical class 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000001947 vapour-phase growth Methods 0.000 claims 2
- 239000012808 vapor phase Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000005192 partition Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18427086U JPS6389233U (2) | 1986-11-28 | 1986-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18427086U JPS6389233U (2) | 1986-11-28 | 1986-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6389233U true JPS6389233U (2) | 1988-06-10 |
Family
ID=31131786
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18427086U Pending JPS6389233U (2) | 1986-11-28 | 1986-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6389233U (2) |
-
1986
- 1986-11-28 JP JP18427086U patent/JPS6389233U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6389233U (2) | ||
| JPS6382929U (2) | ||
| JPH0165128U (2) | ||
| JPS61147274U (2) | ||
| JPS62136222U (2) | ||
| JPS63140618U (2) | ||
| JPS6329929U (2) | ||
| JPS63128719U (2) | ||
| JPH03116029U (2) | ||
| JPS60149132U (ja) | 半導体熱処理炉 | |
| JPS6186471U (2) | ||
| JPS6262432U (2) | ||
| JPS6142832U (ja) | 気相成長装置 | |
| JPS6151730U (2) | ||
| JPH0165872U (2) | ||
| JPS6186472U (2) | ||
| JPS59185828U (ja) | 半導体製造装置 | |
| JPH0226232U (2) | ||
| JPH0373429U (2) | ||
| JPS6139937U (ja) | 拡散炉型気相成長装置 | |
| JPH01107124U (2) | ||
| JPS62168636U (2) | ||
| JPS60158730U (ja) | 半導体製造装置 | |
| JPS62170628U (2) | ||
| JPH01114680U (2) |