JPS6389233U - - Google Patents
Info
- Publication number
- JPS6389233U JPS6389233U JP1986184270U JP18427086U JPS6389233U JP S6389233 U JPS6389233 U JP S6389233U JP 1986184270 U JP1986184270 U JP 1986184270U JP 18427086 U JP18427086 U JP 18427086U JP S6389233 U JPS6389233 U JP S6389233U
- Authority
- JP
- Japan
- Prior art keywords
- source
- wafer
- tube
- supersaturated
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986184270U JPS6389233U (2) | 1986-11-28 | 1986-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986184270U JPS6389233U (2) | 1986-11-28 | 1986-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6389233U true JPS6389233U (2) | 1988-06-10 |
Family
ID=31131786
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986184270U Pending JPS6389233U (2) | 1986-11-28 | 1986-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6389233U (2) |
-
1986
- 1986-11-28 JP JP1986184270U patent/JPS6389233U/ja active Pending
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