JPS639908A - Magnet - Google Patents
MagnetInfo
- Publication number
- JPS639908A JPS639908A JP15445886A JP15445886A JPS639908A JP S639908 A JPS639908 A JP S639908A JP 15445886 A JP15445886 A JP 15445886A JP 15445886 A JP15445886 A JP 15445886A JP S639908 A JPS639908 A JP S639908A
- Authority
- JP
- Japan
- Prior art keywords
- titanium
- magnet
- earth iron
- rare
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
この発明は、希土類鉄系磁石の表面処理に関するもので
ある。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to surface treatment of rare earth iron magnets.
（発明の概要）
この発明は、希土類鉄系磁石の表面上に真空蒸着、スパ
ッタリング、イオンブレーティング等の物理蒸着法（Ｐ
ＶＤ）や熱分解反応等による化学蒸着法（ＣＶＤ）によ
り金属チタン、窒化チタン。(Summary of the Invention) This invention provides a physical vapor deposition method (P
Metallic titanium and titanium nitride are produced by chemical vapor deposition (CVD) using thermal decomposition reactions, etc.
炭化チタン、ＷＸｔ化チクチタン金属チタンまたはチタ
ン系化合物皮膜を形成することにより耐食性。Corrosion resistance achieved by forming a titanium carbide, WXt titanium metal titanium or titanium compound film.
耐薬品性を向上させたものである。It has improved chemical resistance.
（従来の技術）
従来、希土類磁石として釦−ＣＯ系磁石が広く用いられ
てきたが、コスト、磁気特性等の点で有利なＭｄ −Ｆ
ｅ系磁石をはじめどする希土類鉄系磁石を用いる気運が
ある。(Prior art) Conventionally, button-CO magnets have been widely used as rare earth magnets, but Md-F has advantages in terms of cost, magnetic properties, etc.
There is a trend to use rare earth iron-based magnets such as e-based magnets.
しかし、希土類鉄系磁石は、ｓｍ−ｃｏ系磁石に比べ耐
食性、耐薬品性という点で劣り、変色、Ｉなどが生じや
すく、何らかの表面処理を施す必要性があった。However, rare earth iron magnets are inferior to sm-co magnets in terms of corrosion resistance and chemical resistance, and are prone to discoloration, I, etc., and require some kind of surface treatment.
（発明が解決しようとする問題点）
希土類′鉄系磁石は、耐薬品性、とくに酸、アルカリ溶
液に対し弱く、湿式めっき等による表１而処理では処理
工程中に表面が侵されてしまうという困難がつきまとっ
ていた。また樹脂を主体とする高分子材料によるコーテ
ィング等も考えられているが、密着性や有機物であるた
めの柔かさのためによる強度の弱さのため実用的でない
という欠点を有している。(Problems to be Solved by the Invention) Rare earth iron-based magnets have poor chemical resistance, especially against acids and alkaline solutions, and when treated with wet plating or the like shown in Table 1, the surface is attacked during the treatment process. It was fraught with difficulties. Coatings using polymeric materials mainly composed of resins have also been considered, but they have the drawback of being impractical due to their poor adhesion and strength due to their softness as they are organic materials.
本発明は上記のような欠点を解決し、耐食性。The present invention solves the above-mentioned drawbacks and improves corrosion resistance.
耐薬品性２表面の強度に優れた希土類鉄系磁石を提供す
るものである。A rare earth iron magnet with excellent chemical resistance 2 surface strength is provided.
（問題点を解決するための手段）
上記問題を解決するため、鉄系材料に耐し密着力が強（
、かつ耐食性、耐薬品性にすぐれたチタン、窒化チタン
、炭化チタン、酸化チタン等のチタンまたはチタン系化
合物皮膜をスパッタリング。(Means for solving the problem) In order to solve the above problem, the
, sputtering titanium or titanium-based compound films such as titanium, titanium nitride, titanium carbide, and titanium oxide, which also have excellent corrosion resistance and chemical resistance.
イオンブレーティング等の物理蓋＠法や化学蒸着法とよ
ばれる成膜方法により上記希土類鉄系磁石表面上に形成
する。It is formed on the surface of the rare earth iron magnet by a film forming method called a physical lid method such as ion blating or a chemical vapor deposition method.
（作用）
上記を行うに当り、前処理として酸、アルカリ溶液を用
いず、有機溶剤による脱脂のみでも上記のような気相め
っき法によると、イオンボンバード等のクリーニングが
真空中で可能なため十分に密着力を有する皮膜を形成す
ることができるので問題点である希土類鉄系磁石の耐食
性、耐薬品性の向上、改善を図ることができるのである
。(Function) In carrying out the above process, degreasing with an organic solvent alone without using an acid or alkaline solution as a pretreatment is sufficient because cleaning by ion bombardment etc. can be performed in a vacuum according to the vapor phase plating method described above. Since it is possible to form a film that has adhesive strength on the magnet, it is possible to improve the corrosion resistance and chemical resistance of rare earth iron magnets, which are problems.
（実施例−１）
希土類鉄系磁石としてＮｄ−Ｆｅ−Ｂ系の磁石用焼結合
金から成形した電子時計用ロータを用いて本発明を適用
した。(Example 1) The present invention was applied using a rotor for an electronic watch molded from a Nd-Fe-B based sintered alloy for magnets as a rare earth iron based magnet.
ます、ロータをトリクロールエチレンにより脱脂洗浄を
行い、物理蒸着法の代表である三極方式の反応性イオン
ブレーティングによりチタンと窒素より窒化チタン皮膜
をロータ表面に３ＩＪＩＲ形成した。この際、皮膜形成
に先立ち、皮膜の密着性を高めるため、アルゴンガスの
放電によるイオンボンバードによるスパッタクリーニン
グによりロータ表面を清浄化しておいた。First, the rotor was degreased and cleaned with trichlorethylene, and a titanium nitride film was formed on the rotor surface using titanium and nitrogen using three-electrode reactive ion blating, which is a typical physical vapor deposition method. At this time, prior to film formation, in order to improve the adhesion of the film, the rotor surface was cleaned by sputter cleaning using ion bombardment using argon gas discharge.
このようにして得られたロータは恒温恒湿試験（４０℃
Ｘ９５％、１００時間）を行った結果、錯、変色や皮Ｗ
Ａ（窒化チタン）のハクリ、フクレ等などは全く発生し
なく良好であった。The rotor obtained in this way was subjected to a constant temperature and humidity test (40℃
X95%, 100 hours) As a result, complexion, discoloration and peeling
A (titanium nitride) had no peeling, blistering, etc., and was in good condition.
また、このロータとカナを組合せるにあたっても皮膜の
ハクリや脱落を生じなく良好であった。Also, when this rotor and pinion were combined, the film did not peel off or fall off.
（実施例−２）
実施例−１と同様、Ｎｄ−Ｆｅ−Ｂ系の磁石用焼結合金
から成形した電子時計用ロータを用いて本発明を適用し
た。(Example 2) As in Example 1, the present invention was applied using a rotor for an electronic watch molded from a Nd-Fe-B based sintered alloy for magnets.
前処理としては、まずロータをトリクロールエチレンに
より脱脂洗浄し、次いで、マグネトロンスパッタ装置内
におき、真空排気後、アルゴンによりロータ表面をアル
ゴンガスの放電により逆スパツタを行い清浄化した。次
にスパッタリングターゲットとして金属チタンを用い、
スパッタを行゛いロータ表面上に金属チタン皮膜を約１
１Ｊ！Ｒ形成した。As a pretreatment, the rotor was first degreased and cleaned with trichlorethylene, then placed in a magnetron sputtering device, and after being evacuated, the rotor surface was cleaned with argon by performing reverse sputtering by discharging argon gas. Next, using metallic titanium as a sputtering target,
Approximately 1 layer of metallic titanium is applied to the rotor surface by sputtering.
1J! R was formed.
このようにして得られたロータは恒温恒湿試験（４０’
ＣＸ９５％、 １００［１１１Ｊ） ヲ行ツｔ、結果、
錆、変色や皮膜（金属チタン）のハクリ、フクレ等など
を生ぜず良好であった。The rotor thus obtained was subjected to a constant temperature and humidity test (40'
CX95%, 100 [111J), result,
It was in good condition with no rust, discoloration, peeling or blistering of the film (metallic titanium), etc.
また、このロータとカナを組合せるにあたっても、皮膜
のハクリや脱落を生じなく良好であった。Also, when this rotor and pinion were combined, the film did not peel off or fall off.
（発明の効果）
以上、実施例に述べたように本発明によれば、耐食性、
耐薬品性の悪い希土類鉄系磁石に金属チタンまたはチタ
ン系化合物の皮膜を形成することにより、耐食性、耐薬
品性にすぐれ、かつ、磁気特性にもすぐれた磁石を提供
することができる。(Effects of the Invention) As described above in the Examples, according to the present invention, corrosion resistance,
By forming a film of metallic titanium or a titanium-based compound on a rare earth iron-based magnet that has poor chemical resistance, it is possible to provide a magnet that has excellent corrosion resistance, chemical resistance, and magnetic properties.
なお、実施例において、希土類鉄系磁石としてＮｄ−Ｆ
ｅ−Ｂ系磁石について述べたが他の希土類鉄系磁石につ
いても同様の効果が期待できることはいうまでもない。In addition, in the examples, Nd-F was used as the rare earth iron magnet.
Although the e-B magnet has been described above, it goes without saying that similar effects can be expected with other rare earth iron magnets.
また、チタン系皮膜形成方法法 ゛としてイオンブレー
ティングによる窒化チタン皮膜とスパッタリングによる
金属チタン皮膜をあげたが、プラズマＣｖＤや熱反応に
よるＣＶＤなども本発明に適用することができることは
言うまでもない。In addition, although titanium nitride film by ion blasting and metallic titanium film by sputtering have been mentioned as the titanium-based film forming method, it goes without saying that plasma CVD, CVD by thermal reaction, etc. can also be applied to the present invention.
Claims (2)
化チタン、酸化チタン等の金属チタンまたはチタン系化
合物皮膜を形成したことを特徴とする磁石。(1) A magnet characterized by forming a film of metallic titanium or a titanium-based compound such as titanium, titanium nitride, titanium carbide, or titanium oxide on the surface of a rare-earth iron-based magnet.
０％のＲ（但しＲはＹを含む希土類元素の少なくとも一
種）、２〜２８％のＢ、および残部がＦｅおよび不可避
の不純物からなる特許請求の範囲の第１項記載の磁石。(2) The rare earth iron-based magnet has an atomic percentage of 8 to 3
The magnet according to claim 1, comprising 0% R (where R is at least one rare earth element including Y), 2 to 28% B, and the balance Fe and unavoidable impurities.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15445886A JPS639908A (en) | 1986-07-01 | 1986-07-01 | Magnet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15445886A JPS639908A (en) | 1986-07-01 | 1986-07-01 | Magnet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS639908A true JPS639908A (en) | 1988-01-16 |
Family
ID=15584671
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15445886A Pending JPS639908A (en) | 1986-07-01 | 1986-07-01 | Magnet |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS639908A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7655325B2 (en) | 2005-12-28 | 2010-02-02 | Hitachi Metals, Ltd. | Rare earth magnet and method for producing same |
-
1986
- 1986-07-01 JP JP15445886A patent/JPS639908A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7655325B2 (en) | 2005-12-28 | 2010-02-02 | Hitachi Metals, Ltd. | Rare earth magnet and method for producing same |
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