JPS6399743U - - Google Patents

Info

Publication number
JPS6399743U
JPS6399743U JP19551486U JP19551486U JPS6399743U JP S6399743 U JPS6399743 U JP S6399743U JP 19551486 U JP19551486 U JP 19551486U JP 19551486 U JP19551486 U JP 19551486U JP S6399743 U JPS6399743 U JP S6399743U
Authority
JP
Japan
Prior art keywords
reflector
disposed
reservoir
support rod
liquid metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19551486U
Other languages
English (en)
Other versions
JPH047554Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19551486U priority Critical patent/JPH047554Y2/ja
Publication of JPS6399743U publication Critical patent/JPS6399743U/ja
Application granted granted Critical
Publication of JPH047554Y2 publication Critical patent/JPH047554Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)

Description

【図面の簡単な説明】
第１図は本考案にかかわる液体金属イオン源の
断面図、第２図は本考案の平面図、第３図、第４
図はリフレクターの取付けカシメ固定図、第５図
ａ，ｂは従来例の断面図。 １……第１リフレクター、２……第２リフレク
ター、３……第３リフレクター、４……リザーバ
ー、５……ヒーター、６……碍子、７……支持棒
。

Claims (1)

    【実用新案登録請求の範囲】
  1. イオンビーム装置に用いられる液体金属イオン
    源において、リザーバー下部に固着配設された第
    １リフレクターと、前記リザーバーの支持棒に配
    設された第２のリフレクターと、前記支持棒を保
    持する碍子の外周に配設されている第３のリフレ
    クターとから構成されていることを特徴とする液
    体金属イオン源のリフレクター構造。
JP19551486U 1986-12-19 1986-12-19 Expired JPH047554Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19551486U JPH047554Y2 (ja) 1986-12-19 1986-12-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19551486U JPH047554Y2 (ja) 1986-12-19 1986-12-19

Publications (2)

Publication Number Publication Date
JPS6399743U true JPS6399743U (ja) 1988-06-28
JPH047554Y2 JPH047554Y2 (ja) 1992-02-27

Family

ID=31153475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19551486U Expired JPH047554Y2 (ja) 1986-12-19 1986-12-19

Country Status (1)

Country Link
JP (1) JPH047554Y2 (ja)

Also Published As

Publication number Publication date
JPH047554Y2 (ja) 1992-02-27

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