JPS6399748U - - Google Patents

Info

Publication number
JPS6399748U
JPS6399748U JP19514986U JP19514986U JPS6399748U JP S6399748 U JPS6399748 U JP S6399748U JP 19514986 U JP19514986 U JP 19514986U JP 19514986 U JP19514986 U JP 19514986U JP S6399748 U JPS6399748 U JP S6399748U
Authority
JP
Japan
Prior art keywords
electrode
signal voltage
scanning device
parallel
controlled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19514986U
Other languages
English (en)
Other versions
JPH0615389Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19514986U priority Critical patent/JPH0615389Y2/ja
Publication of JPS6399748U publication Critical patent/JPS6399748U/ja
Application granted granted Critical
Publication of JPH0615389Y2 publication Critical patent/JPH0615389Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図はこの考案の一実施例の説明図、第２図
はその概略断面図、第３図は第１の電極の電極間
隔を調整する手段を示す断面図である。 １……ビーム、２……第１の電極、３……第２
の電極、１５〜１８……平行板。

Claims (1)

    【実用新案登録請求の範囲】
  1. 荷電粒子のビームの両側に対向配置された一対
    の平行板により構成されて前記ビームをスキヤン
    させる信号電圧が印加される第１の電極と、この
    第１の電極の前記ビームの射出側に前記平行板と
    平行な一対の平行板により構成されるとともに前
    記第１の電極と反対向きに前記信号電圧と同期し
    た信号電圧が印加されて前記ビームの方向を前記
    第１の電極に入射するビームの方向と平行に制御
    する第２の電極とを備え、前記第１の電極および
    第２の電極の少なくとも一方の電極間隔を調整可
    能に構成したことを特徴とするビーム走査装置。
JP19514986U 1986-12-18 1986-12-18 ビ−ム走査装置 Expired - Lifetime JPH0615389Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19514986U JPH0615389Y2 (ja) 1986-12-18 1986-12-18 ビ−ム走査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19514986U JPH0615389Y2 (ja) 1986-12-18 1986-12-18 ビ−ム走査装置

Publications (2)

Publication Number Publication Date
JPS6399748U true JPS6399748U (ja) 1988-06-28
JPH0615389Y2 JPH0615389Y2 (ja) 1994-04-20

Family

ID=31152774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19514986U Expired - Lifetime JPH0615389Y2 (ja) 1986-12-18 1986-12-18 ビ−ム走査装置

Country Status (1)

Country Link
JP (1) JPH0615389Y2 (ja)

Also Published As

Publication number Publication date
JPH0615389Y2 (ja) 1994-04-20

Similar Documents

Publication Publication Date Title
JPH03115050U (ja)
JPS6399748U (ja)
JPS6276325U (ja)
JPS6442488U (ja)
JPS63111764U (ja)
JPS61119368U (ja)
JPH01142822U (ja)
JPH0178133U (ja)
JPS6321868U (ja)
JPH0327327U (ja)
JPS6245824U (ja)
JPH01158959U (ja)
JPS61120190U (ja)
JPS62108814U (ja)
JPS6148654U (ja)
JPS6055293U (ja) バイオアクチユエ−タ
JPS61143642U (ja)
JPS6338012U (ja)
JPS624726U (ja)
JPS61149272U (ja)
JPH02116199U (ja)
JPS62191099U (ja)
JPS62184444U (ja)
JPS6344217U (ja)
JPS63198023U (ja)