JPS6410055B2 - - Google Patents
Info
- Publication number
- JPS6410055B2 JPS6410055B2 JP13467180A JP13467180A JPS6410055B2 JP S6410055 B2 JPS6410055 B2 JP S6410055B2 JP 13467180 A JP13467180 A JP 13467180A JP 13467180 A JP13467180 A JP 13467180A JP S6410055 B2 JPS6410055 B2 JP S6410055B2
- Authority
- JP
- Japan
- Prior art keywords
- photopolymerizable composition
- image forming
- compound
- image
- formula
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 41
- 150000001875 compounds Chemical class 0.000 claims description 27
- 239000000203 mixture Substances 0.000 claims description 26
- 239000000126 substance Substances 0.000 claims description 9
- 239000003999 initiator Substances 0.000 claims description 8
- 229910052736 halogen Inorganic materials 0.000 claims description 5
- 150000002367 halogens Chemical class 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 3
- 125000003118 aryl group Chemical group 0.000 claims description 2
- 150000002391 heterocyclic compounds Chemical group 0.000 claims description 2
- 125000005843 halogen group Chemical group 0.000 claims 1
- 229920000642 polymer Polymers 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 33
- -1 propyl ether Chemical compound 0.000 description 26
- 206010040844 Skin exfoliation Diseases 0.000 description 17
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 12
- 238000005530 etching Methods 0.000 description 12
- 239000000243 solution Substances 0.000 description 10
- 230000007547 defect Effects 0.000 description 8
- 239000000853 adhesive Substances 0.000 description 7
- 230000001070 adhesive effect Effects 0.000 description 7
- 238000001035 drying Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 6
- 239000004793 Polystyrene Substances 0.000 description 6
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 229920002601 oligoester Polymers 0.000 description 5
- 239000005020 polyethylene terephthalate Substances 0.000 description 5
- 229920000139 polyethylene terephthalate Polymers 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 4
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 4
- 239000004709 Chlorinated polyethylene Substances 0.000 description 4
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 4
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- 229940126062 Compound A Drugs 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- NLDMNSXOCDLTTB-UHFFFAOYSA-N Heterophylliin A Natural products O1C2COC(=O)C3=CC(O)=C(O)C(O)=C3C3=C(O)C(O)=C(O)C=C3C(=O)OC2C(OC(=O)C=2C=C(O)C(O)=C(O)C=2)C(O)C1OC(=O)C1=CC(O)=C(O)C(O)=C1 NLDMNSXOCDLTTB-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- 239000004677 Nylon Substances 0.000 description 3
- 239000004743 Polypropylene Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- FQPSGWSUVKBHSU-UHFFFAOYSA-N methacrylamide Chemical class CC(=C)C(N)=O FQPSGWSUVKBHSU-UHFFFAOYSA-N 0.000 description 3
- 125000005395 methacrylic acid group Chemical group 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 229920001778 nylon Polymers 0.000 description 3
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 3
- 239000004926 polymethyl methacrylate Substances 0.000 description 3
- 229920001155 polypropylene Polymers 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 150000003440 styrenes Chemical class 0.000 description 3
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 3
- ORTVZLZNOYNASJ-UPHRSURJSA-N (z)-but-2-ene-1,4-diol Chemical compound OC\C=C/CO ORTVZLZNOYNASJ-UPHRSURJSA-N 0.000 description 2
- ARXKVVRQIIOZGF-UHFFFAOYSA-N 1,2,4-butanetriol Chemical compound OCCC(O)CO ARXKVVRQIIOZGF-UHFFFAOYSA-N 0.000 description 2
- LEJBBGNFPAFPKQ-UHFFFAOYSA-N 2-(2-prop-2-enoyloxyethoxy)ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOC(=O)C=C LEJBBGNFPAFPKQ-UHFFFAOYSA-N 0.000 description 2
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 229920001328 Polyvinylidene chloride Polymers 0.000 description 2
- 229920000297 Rayon Polymers 0.000 description 2
- 235000000126 Styrax benzoin Nutrition 0.000 description 2
- 244000028419 Styrax benzoin Species 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 235000008411 Sumatra benzointree Nutrition 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical class C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 2
- 150000003926 acrylamides Chemical class 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 229960002130 benzoin Drugs 0.000 description 2
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 2
- POULHZVOKOAJMA-UHFFFAOYSA-N dodecanoic acid Chemical compound CCCCCCCCCCCC(O)=O POULHZVOKOAJMA-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- 235000019382 gum benzoic Nutrition 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- OPECTNGATDYLSS-UHFFFAOYSA-N naphthalene-2-sulfonyl chloride Chemical compound C1=CC=CC2=CC(S(=O)(=O)Cl)=CC=C21 OPECTNGATDYLSS-UHFFFAOYSA-N 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920000915 polyvinyl chloride Polymers 0.000 description 2
- 239000004800 polyvinyl chloride Substances 0.000 description 2
- 239000005033 polyvinylidene chloride Substances 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 150000005846 sugar alcohols Polymers 0.000 description 2
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
- ROVRRJSRRSGUOL-UHFFFAOYSA-N victoria blue bo Chemical compound [Cl-].C12=CC=CC=C2C(NCC)=CC=C1C(C=1C=CC(=CC=1)N(CC)CC)=C1C=CC(=[N+](CC)CC)C=C1 ROVRRJSRRSGUOL-UHFFFAOYSA-N 0.000 description 2
- 229920001567 vinyl ester resin Polymers 0.000 description 2
- JNYAEWCLZODPBN-JGWLITMVSA-N (2r,3r,4s)-2-[(1r)-1,2-dihydroxyethyl]oxolane-3,4-diol Chemical compound OC[C@@H](O)[C@H]1OC[C@H](O)[C@H]1O JNYAEWCLZODPBN-JGWLITMVSA-N 0.000 description 1
- MSAHTMIQULFMRG-UHFFFAOYSA-N 1,2-diphenyl-2-propan-2-yloxyethanone Chemical compound C=1C=CC=CC=1C(OC(C)C)C(=O)C1=CC=CC=C1 MSAHTMIQULFMRG-UHFFFAOYSA-N 0.000 description 1
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- DKEGCUDAFWNSSO-UHFFFAOYSA-N 1,8-dibromooctane Chemical compound BrCCCCCCCCBr DKEGCUDAFWNSSO-UHFFFAOYSA-N 0.000 description 1
- DURPTKYDGMDSBL-UHFFFAOYSA-N 1-butoxybutane Chemical compound CCCCOCCCC DURPTKYDGMDSBL-UHFFFAOYSA-N 0.000 description 1
- NSOAQRMLVFRWIT-UHFFFAOYSA-N 1-ethenoxydecane Chemical compound CCCCCCCCCCOC=C NSOAQRMLVFRWIT-UHFFFAOYSA-N 0.000 description 1
- YAOJJEJGPZRYJF-UHFFFAOYSA-N 1-ethenoxyhexane Chemical compound CCCCCCOC=C YAOJJEJGPZRYJF-UHFFFAOYSA-N 0.000 description 1
- XXCVIFJHBFNFBO-UHFFFAOYSA-N 1-ethenoxyoctane Chemical compound CCCCCCCCOC=C XXCVIFJHBFNFBO-UHFFFAOYSA-N 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- GOXQRTZXKQZDDN-UHFFFAOYSA-N 2-Ethylhexyl acrylate Chemical compound CCCCC(CC)COC(=O)C=C GOXQRTZXKQZDDN-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- RCSBILYQLVXLJG-UHFFFAOYSA-N 2-Propenyl hexanoate Chemical compound CCCCCC(=O)OCC=C RCSBILYQLVXLJG-UHFFFAOYSA-N 0.000 description 1
- PZGMUSDNQDCNAG-UHFFFAOYSA-N 2-Propenyl octanoate Chemical compound CCCCCCCC(=O)OCC=C PZGMUSDNQDCNAG-UHFFFAOYSA-N 0.000 description 1
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 1
- DSKYSDCYIODJPC-UHFFFAOYSA-N 2-butyl-2-ethylpropane-1,3-diol Chemical compound CCCCC(CC)(CO)CO DSKYSDCYIODJPC-UHFFFAOYSA-N 0.000 description 1
- KMNCBSZOIQAUFX-UHFFFAOYSA-N 2-ethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)C(=O)C1=CC=CC=C1 KMNCBSZOIQAUFX-UHFFFAOYSA-N 0.000 description 1
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 1
- HZGJTATYGAJRAL-UHFFFAOYSA-N 3,4,4a,5,6,7,8,8a-octahydro-2h-naphthalene-1,1-diol Chemical compound C1CCCC2C(O)(O)CCCC21 HZGJTATYGAJRAL-UHFFFAOYSA-N 0.000 description 1
- IWTYTFSSTWXZFU-UHFFFAOYSA-N 3-chloroprop-1-enylbenzene Chemical compound ClCC=CC1=CC=CC=C1 IWTYTFSSTWXZFU-UHFFFAOYSA-N 0.000 description 1
- SSZWWUDQMAHNAQ-UHFFFAOYSA-N 3-chloropropane-1,2-diol Chemical compound OCC(O)CCl SSZWWUDQMAHNAQ-UHFFFAOYSA-N 0.000 description 1
- BJOWTLCTYPKRRU-UHFFFAOYSA-N 3-ethenoxyoctane Chemical compound CCCCCC(CC)OC=C BJOWTLCTYPKRRU-UHFFFAOYSA-N 0.000 description 1
- JLBJTVDPSNHSKJ-UHFFFAOYSA-N 4-Methylstyrene Chemical compound CC1=CC=C(C=C)C=C1 JLBJTVDPSNHSKJ-UHFFFAOYSA-N 0.000 description 1
- YYROPELSRYBVMQ-UHFFFAOYSA-N 4-toluenesulfonyl chloride Chemical compound CC1=CC=C(S(Cl)(=O)=O)C=C1 YYROPELSRYBVMQ-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229920000298 Cellophane Polymers 0.000 description 1
- 229920001747 Cellulose diacetate Polymers 0.000 description 1
- 229920002284 Cellulose triacetate Polymers 0.000 description 1
- FBPFZTCFMRRESA-FSIIMWSLSA-N D-Glucitol Natural products OC[C@H](O)[C@H](O)[C@@H](O)[C@H](O)CO FBPFZTCFMRRESA-FSIIMWSLSA-N 0.000 description 1
- FBPFZTCFMRRESA-JGWLITMVSA-N D-glucitol Chemical compound OC[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO FBPFZTCFMRRESA-JGWLITMVSA-N 0.000 description 1
- ZFDIRQKJPRINOQ-HWKANZROSA-N Ethyl crotonate Chemical compound CCOC(=O)\C=C\C ZFDIRQKJPRINOQ-HWKANZROSA-N 0.000 description 1
- MZNHUHNWGVUEAT-XBXARRHUSA-N Hexyl crotonate Chemical compound CCCCCCOC(=O)\C=C\C MZNHUHNWGVUEAT-XBXARRHUSA-N 0.000 description 1
- 239000005639 Lauric acid Substances 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 229920002319 Poly(methyl acrylate) Polymers 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 1
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 229920002433 Vinyl chloride-vinyl acetate copolymer Polymers 0.000 description 1
- 235000010724 Wisteria floribunda Nutrition 0.000 description 1
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 1
- ZCZFEIZSYJAXKS-UHFFFAOYSA-N [3-hydroxy-2,2-bis(hydroxymethyl)propyl] prop-2-enoate Chemical compound OCC(CO)(CO)COC(=O)C=C ZCZFEIZSYJAXKS-UHFFFAOYSA-N 0.000 description 1
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 125000005250 alkyl acrylate group Chemical group 0.000 description 1
- 229940072049 amyl acetate Drugs 0.000 description 1
- PGMYKACGEOXYJE-UHFFFAOYSA-N anhydrous amyl acetate Natural products CCCCCOC(C)=O PGMYKACGEOXYJE-UHFFFAOYSA-N 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- MWZGUEWUOKSFNL-UHFFFAOYSA-N benzoic acid;styrene Chemical compound C=CC1=CC=CC=C1.OC(=O)C1=CC=CC=C1 MWZGUEWUOKSFNL-UHFFFAOYSA-N 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- CQEYYJKEWSMYFG-UHFFFAOYSA-N butyl acrylate Chemical compound CCCCOC(=O)C=C CQEYYJKEWSMYFG-UHFFFAOYSA-N 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical class C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 1
- 229960003280 cupric chloride Drugs 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 125000004386 diacrylate group Chemical group 0.000 description 1
- XSBSXJAYEPDGSF-UHFFFAOYSA-N diethyl 3,5-dimethyl-1h-pyrrole-2,4-dicarboxylate Chemical compound CCOC(=O)C=1NC(C)=C(C(=O)OCC)C=1C XSBSXJAYEPDGSF-UHFFFAOYSA-N 0.000 description 1
- 125000004177 diethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 229940105990 diglycerin Drugs 0.000 description 1
- GPLRAVKSCUXZTP-UHFFFAOYSA-N diglycerol Chemical compound OCC(O)COCC(O)CO GPLRAVKSCUXZTP-UHFFFAOYSA-N 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- YCUBDDIKWLELPD-UHFFFAOYSA-N ethenyl 2,2-dimethylpropanoate Chemical compound CC(C)(C)C(=O)OC=C YCUBDDIKWLELPD-UHFFFAOYSA-N 0.000 description 1
- WNMORWGTPVWAIB-UHFFFAOYSA-N ethenyl 2-methylpropanoate Chemical compound CC(C)C(=O)OC=C WNMORWGTPVWAIB-UHFFFAOYSA-N 0.000 description 1
- MEGHWIAOTJPCHQ-UHFFFAOYSA-N ethenyl butanoate Chemical compound CCCC(=O)OC=C MEGHWIAOTJPCHQ-UHFFFAOYSA-N 0.000 description 1
- LZWYWAIOTBEZFN-UHFFFAOYSA-N ethenyl hexanoate Chemical compound CCCCCC(=O)OC=C LZWYWAIOTBEZFN-UHFFFAOYSA-N 0.000 description 1
- BLZSRIYYOIZLJL-UHFFFAOYSA-N ethenyl pentanoate Chemical compound CCCCC(=O)OC=C BLZSRIYYOIZLJL-UHFFFAOYSA-N 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- SUPCQIBBMFXVTL-UHFFFAOYSA-N ethyl 2-methylprop-2-enoate Chemical compound CCOC(=O)C(C)=C SUPCQIBBMFXVTL-UHFFFAOYSA-N 0.000 description 1
- UHESRSKEBRADOO-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical compound OC(=O)C=C.CCOC(N)=O UHESRSKEBRADOO-UHFFFAOYSA-N 0.000 description 1
- 125000000816 ethylene group Polymers [H]C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 150000008282 halocarbons Chemical class 0.000 description 1
- MNWFXJYAOYHMED-UHFFFAOYSA-M heptanoate Chemical compound CCCCCCC([O-])=O MNWFXJYAOYHMED-UHFFFAOYSA-M 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 239000012433 hydrogen halide Substances 0.000 description 1
- 229910000039 hydrogen halide Inorganic materials 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 238000007644 letterpress printing Methods 0.000 description 1
- 150000002734 metacrylic acid derivatives Chemical class 0.000 description 1
- MCVVUJPXSBQTRZ-ONEGZZNKSA-N methyl (e)-but-2-enoate Chemical compound COC(=O)\C=C\C MCVVUJPXSBQTRZ-ONEGZZNKSA-N 0.000 description 1
- 229940065472 octyl acrylate Drugs 0.000 description 1
- ANISOHQJBAQUQP-UHFFFAOYSA-N octyl prop-2-enoate Chemical compound CCCCCCCCOC(=O)C=C ANISOHQJBAQUQP-UHFFFAOYSA-N 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- HVAMZGADVCBITI-UHFFFAOYSA-M pent-4-enoate Chemical compound [O-]C(=O)CCC=C HVAMZGADVCBITI-UHFFFAOYSA-M 0.000 description 1
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- ULDDEWDFUNBUCM-UHFFFAOYSA-N pentyl prop-2-enoate Chemical compound CCCCCOC(=O)C=C ULDDEWDFUNBUCM-UHFFFAOYSA-N 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920001084 poly(chloroprene) Polymers 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920001748 polybutylene Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920001195 polyisoprene Polymers 0.000 description 1
- 229920000193 polymethacrylate Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920002689 polyvinyl acetate Polymers 0.000 description 1
- 239000011118 polyvinyl acetate Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 1
- HAFZJTKIBGEQKT-UHFFFAOYSA-N prop-2-enyl hexadecanoate Chemical compound CCCCCCCCCCCCCCCC(=O)OCC=C HAFZJTKIBGEQKT-UHFFFAOYSA-N 0.000 description 1
- AABBHSMFGKYLKE-SNAWJCMRSA-N propan-2-yl (e)-but-2-enoate Chemical compound C\C=C\C(=O)OC(C)C AABBHSMFGKYLKE-SNAWJCMRSA-N 0.000 description 1
- BOQSSGDQNWEFSX-UHFFFAOYSA-N propan-2-yl 2-methylprop-2-enoate Chemical compound CC(C)OC(=O)C(C)=C BOQSSGDQNWEFSX-UHFFFAOYSA-N 0.000 description 1
- ULWHHBHJGPPBCO-UHFFFAOYSA-N propane-1,1-diol Chemical compound CCC(O)O ULWHHBHJGPPBCO-UHFFFAOYSA-N 0.000 description 1
- NHARPDSAXCBDDR-UHFFFAOYSA-N propyl 2-methylprop-2-enoate Chemical compound CCCOC(=O)C(C)=C NHARPDSAXCBDDR-UHFFFAOYSA-N 0.000 description 1
- PNXMTCDJUBJHQJ-UHFFFAOYSA-N propyl prop-2-enoate Chemical compound CCCOC(=O)C=C PNXMTCDJUBJHQJ-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Polymers [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 230000005180 public health Effects 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 239000000600 sorbitol Substances 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
- ZFDIRQKJPRINOQ-UHFFFAOYSA-N transbutenic acid ethyl ester Natural products CCOC(=O)C=CC ZFDIRQKJPRINOQ-UHFFFAOYSA-N 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- UBOXGVDOUJQMTN-UHFFFAOYSA-N trichloroethylene Natural products ClCC(Cl)Cl UBOXGVDOUJQMTN-UHFFFAOYSA-N 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/085—Photosensitive compositions characterised by adhesion-promoting non-macromolecular additives
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Polymerisation Methods In General (AREA)
Description
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The present invention relates to an image forming material in which a photopolymerizable composition layer containing a specific photopolymerization initiator and an adhesion improver is provided on a transparent support. An image for release development that can provide a precision image with good adhesion and adhesion of the exposed portion to the substrate by peeling off the support after exposure and heat treatment if necessary. It concerns the forming material. Conventionally, solution-type photoresists and film-type photoresists have been commercially available for use in producing printed wiring boards, but these both utilize the difference in solubility in the solution between exposed and unexposed areas. It formed an image. However, in recent years, the operation of using a developer has become complicated, and the use of a developer has the potential to cause waste fluid to harm public health.
No. 38-9663, Special Publication No. 1972-22901, Japanese Patent Publication No. 1973-
No. 7728, Japanese Patent Publication No. 48-43126, Japanese Patent Publication No. 47-33623
Peelable and developable image forming materials and image forming methods as described in Japanese Patent Publication No. 51-48516, Japanese Patent Publication No. 40537, Japanese Patent Publication No. 53-19205, and Japanese Patent Publication No. 53-35722. is proposed. These methods utilize the difference in adhesive strength between the exposed and unexposed areas to the base material and the support to form an image by peeling. Although relatively thin photopolymerizable composition layers with easy to cut interfaces can produce somewhat satisfactory images, they are not suitable for use as etching resists (referred to as tenting resists) used, for example, when etching through-hole copper substrates.
In this case, the through-hole area must be covered with a resist that can withstand the spray pressure of the etching solution, so the resist film that covers the through-hole area must have sufficient film strength. Although it is necessary to increase the thickness to some extent, the present situation is that no satisfactory tenting resist has yet been obtained, which requires a relatively thick photopolymerizable composition layer. When etching a through-hole copper board,
Since it is necessary to withstand the spray pressure of the etching solution, the resist film covering the through-hole portion must have strength and elongation. Image-forming materials that can be developed with organic solvents or alkaline aqueous solutions use a method in which the portions that are cured by exposure remain on the substrate, and the unexposed portions are dissolved and removed by the developer. For,
The adhesive strength between the photopolymerizable composition layer and the base material can be made sufficiently large in advance, and there is little problem with peeling of exposed areas during development. However, when forming an image by peeling, it is necessary to easily peel off the unexposed areas, so it is not possible to increase the adhesive strength between the photopolymerizable composition layer and the base material sufficiently in advance. Therefore, only the exposed areas are required to have very high practical adhesion to the substrate (adhesion that can resist peeling, tension, shear scratching, etc.). In particular, when used as a tenting resist, it is necessary to increase the film thickness of the resist to provide film strength, but the thicker the film, the more difficult it is to cut the interface between the exposed and unexposed parts. At the same time, a large force is applied during peeling, so even if the exposed portion has a certain degree of adhesion to the substrate, the exposed portion tends to peel off during peeling, such as when the adhesive area with the substrate is small. In particular, the photopolymerizable composition layer, which is made to have extremely good elongation in order to obtain a tough film, tends to have a relatively small modulus of elasticity in the exposed area, and the unexposed area is peeled off along with the support. As the exposure progressed, the exposed portions tended to deform. An object of the present invention is to easily peel off the photopolymerizable composition layer in the unexposed parts of an etching resist in which the resist film covering the through-hole part has excellent elongation so as to sufficiently withstand the spray pressure of the etching solution. is possible, and during peeling development,
The object of the present invention is to provide a peelable and developable image forming material that has excellent adhesion and does not peel off even in exposed areas with a very small adhesive area. As a result of extensive studies to overcome the shortcomings of the prior art in line with the above objectives, the present inventors have developed a compound having a film-forming polymeric substance and at least one addition-polymerizable unsaturated bond on a transparent support. In an image forming material provided with a photopolymerizable composition layer containing a photopolymerization initiator as an essential component, the photopolymerization initiator has the general formula (However, R 1 is OX in the H region, and X is CH 3 or C 2 H 5 ,
For R 2 , a compound represented by OCH 3 , OC 2 H 5 , OC 3 H 7 or OC 4 H 9 ) is used, and as an adhesion improver, a compound represented by the general formula (However, R 3 is a substituted or unsubstituted aromatic residue or heterocyclic compound residue, R 4 is a halogen or
By adding a compound represented by CHmYn (âY is halogen, m+n=3, n is 1 or moreâ) in a range of 0.01 to 5% by weight based on the total amount of the photopolymerizable composition (solid content), Excellent adhesion (i.e., the exposed area does not easily peel off from the substrate during peel development)
It was discovered that this material can be used as an image forming material, leading to the present invention. Examples of the compound represented by the general formula (A) used in the present invention include benzoin methyl ether, benzoin ethyl ether, benzoin (iso)propyl ether, benzoin (iso) butyl ether, benzyl dimethyl ketal, and benzyl diethyl ketal. Further, examples of the compound represented by the general formula (B) include compounds having the following structural formula.
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æåºŠã¯PSã¹ãããã¬ã€ãã§ïŒæ®µã§ãã€ãã[Formula] etc. Therefore, various compounds have been known as photopolymerization initiators generally used in image forming materials, but the compound of the above general formula (A) is different from the compound of the general formula (B). A major feature of the present invention is that the adhesion to the image forming substrate is improved by using it in combination with. According to the experiments conducted by the present inventors, even if Compound B is added to Compound A in a photopolymerizable composition for image formation, the phenomenon of accelerating the photopolymerization rate and improving the reaction rate is not observed. It has been confirmed that the adhesive strength of the exposed portion to the substrate is the same regardless of the presence or absence of Compound B, and that almost no photopolymerization reaction occurs with Compound B alone. Incidentally, although the reason for the improved adhesion of the exposed area to the base material in the present invention is not clear, most of the compound A acts as an original photopolymerization initiator, but a part of it acts to activate compound B. , hydrogen halide is generated from the halogen radicals emitted from compound B, and by activating the surface of the substrate (for example, a copper-clad laminate for printed wiring boards), the adhesion and adhesion of the exposed area are improved and peeling is facilitated. It is presumed that this will be prevented. However, there are restrictions on the amount of compound B added, which is 0.01 to 5% relative to the total amount of photopolymerizable composition (solid content).
It is necessary to add it within a range of % by weight. If the amount added is less than 0.01% by weight, a sufficient effect to improve adhesion cannot be obtained, while if it is more than 5% by weight, the effect of improving adhesion can be obtained, but the physical properties such as cohesive force of the photopolymerizable composition layer This is not desirable because it changes the image quality and reduces the accuracy of the image. The photopolymerization initiator represented by the compound A is
It is preferable to use it in a range of 0.1 to 20 parts by weight. To explain other materials constituting the image-forming material of the present invention, the transparent support has good transmittance to light in the wavelength range of 300 to 500 nm that can photopolymerize the photopolymerizable composition layer, and has a surface. Those that are uniform are selected. Specific examples of such supports include polyethylene terephthalate, polypropylene, polyethylene, cellulose triacetate, cellulose diacetate, polyvinyl chloride, polyvinyl alcohol, polycarbonate, polystyrene, cellophane, polyvinylidene chloride copolymer, polyamide ( For example 6-
Various types of plastic films can be used, such as nylon, 6,6-nylon, 6,10-nylon, etc.), polyimide, vinyl chloride-vinyl acetate copolymer, polytetrafluoroethylene, and polytrifluoroethylene. Furthermore, a composite material consisting of two or more of these types can also be used. The support generally has a thickness of 10 to 150 ÎŒm, preferably 20 to 50 ÎŒm, but supports having a thickness outside the above range can also be used. The film-forming polymeric substance that can be used in the present invention can be selected from a wide variety of polymeric substances, but those that have extremely poor compatibility with other constituents are not preferred. Examples of preferred film-forming polymeric substances include:
Chlorinated polyolefins (e.g. chlorinated polyethylene, chlorinated polypropylene), polymethyl methacrylate, polymethyl acrylate, polyvinyl chloride, polyvinylidene chloride, polyvinyl butyral, polyvinyl acetate, vinyl chloride.
Vinyl acetate copolymer, vinylidene chloride-acrylonitrile copolymer, polyisoprene, chlorinated rubber,
Examples include polychloroprene, polychlorosulfonated ethylene and polychlorosulfonated propylene, and solvent-soluble linear saturated polyesters. Two or more of these polymeric substances can be used in combination. The compound having at least one addition-polymerizable unsaturated bond used in the present invention includes a wide range of addition-polymerizable compounds. Examples include acrylic esters, acrylamides, methacrylic esters, methacrylamides, allyl compounds, vinyl ethers, vinyl esters, N-vinyl compounds, styrenes, crotonic esters, and the like. Specific examples of compounds having one addition-polymerizable unsaturated bond include acrylic esters, such as acrylic acid, alkyl acrylates (such as propyl acrylate, butyl acrylate, amyl acrylate, ethylhexyl acrylate, octyl acrylate). ), methacrylic esters, such as methacrylic acid, alkyl methacrylates (such as methyl methacrylate, ethyl methacrylate, propyl methacrylate, isopropyl methacrylate),
Acrylamides, such as acrylamide, N-
alkylacrylamide, (such alkyl groups include, for example, methyl, ethyl, butyl, isopropyl, t-butyl, ethylhexyl, etc.), methacrylamide, such as methacrylamide, N-alkylmethacrylamide ( Examples of the alkyl group include methyl group, ethyl group, isopropyl group, t-butyl group, and ethylhexyl group), allyl compounds such as allyl esters (such as allyl acetate, allyl caproate, allyl caprylate, and lauric acid) allyl, allyl palmitate), vinyl ethers such as alkyl vinyl ethers (e.g. hexyl vinyl ether, octyl vinyl ether, decyl vinyl ether, ethylhexyl vinyl ether),
Vinyl esters such as vinyl butyrate, vinyl isobutyrate, vinyl trimethyl acetate, vinyl diethyl acetate, vinyl valerate, vinyl caproate, and the like. Other styrenes include styrene, methylstyrene, chloromethylstyrene, alkoxystyrene, halogenated styrene, and styrene benzoate. Examples of crotonate esters include methyl crotonate, ethyl crotonate, butyl crotonate, hexyl crotonate, and isopropyl crotonate. Next, specific examples of compounds having two or more addition-polymerizable unsaturated bonds are illustrated, and these are more preferably used than the above-mentioned compounds having one addition-polymerizable unsaturated bond. First, acrylic esters and methacrylic esters include polyacrylates and polymethacrylates (herein, "poly" refers to diacrylate or higher) of polyhydric alcohols. The polyhydric alcohol mentioned above is
Polyethylene glycol, polypropylene oxide, polybutylene oxide, (β-hydroxyethoxy)benzene, glycerin, diglycerin,
Neobentyl glycol, trimethylolpropane, triethylolpropane, pentaerythritol, dipentaerythritol, sorbitan, sorbitol, 1,4-butanediol, 1,2,
4-butanetriol, 2-butene-1,4-diol, 2-butyl-2-ethyl-propanediol, 2-butene-1,4-diol, 1,3-
Examples include propanediol, triethanolamine, decalindiol, 3-chloro-1,2-propanediol, and the like. In addition, oligoester acrylate, oligoester methacrylate, epoxy acrylate,
Acrylates and methacrylates commercially available under names such as urethane acrylate can also be suitably used. Two or more kinds of such compounds having at least one addition-polymerizable unsaturated bond can also be used in combination. These compounds are film-forming polymeric substances.
It is used in an amount of 10 to 500 parts by weight, preferably 30 to 200 parts by weight per 100 parts by weight. The photopolymerizable composition layer of the image forming material of the present invention is composed of the film-forming polymeric substance, addition polymerizable unsaturated compound, specific photopolymerization initiator, and adhesion improver as described above. In addition, various additives such as thermal polymerization inhibitors, colorants, fillers, and plasticizers can be added as necessary. Each material constituting the photopolymerizable composition layer used in the present invention is dissolved in a solvent to form a coating solution, which is coated onto a support and dried. Solvents for the coating solution include ketones such as acetone, methyl ethyl ketone, and methyl isobutyl ketone, aromatic hydrocarbons such as toluene, benzene, and xylene, esters such as ethyl acetate, butyl acetate, and amyl acetate, carbon tetrachloride, chloroform,
Examples include halogenated hydrocarbons such as trichloroethylene and methylene chloride, ethers such as diethyl ether, tetrahydrofuran, dioxane, and ethylene glycol monomethyl ether, dimethylformamide, and dimethyl sulfoxide. The photopolymerizable composition layer has a thickness of 5 to 100 ÎŒm, preferably 10 ÎŒm after coating the coating solution on the support and drying it.
Provided so that the thickness is ~60 ÎŒm. The image forming material of the present invention has a structure in which a photopolymerizable composition layer is provided on a support, but a protective film can also be provided on the photopolymerizable composition layer if necessary. As the protective film, polyethylene, polypropylene, various films treated with non-adhesive treatment, paper, etc. can be used. To explain the method of forming an image using the image forming material of the present invention, if the image forming material has a protective film, the protective film is peeled off and then the photopolymerizable composition layer is pressure-bonded to a desired substrate. The image is then exposed through the transparent support. As the light source, a light source containing light with a wavelength in the range of 350 to 500 nm, such as a high-pressure mercury lamp, an ultra-high-pressure mercury lamp, a xenon lamp, a carbon arc lamp, etc., can be used. In addition, laser beams, electron beams, X-rays, etc. may be used as the light source. After image exposure,
Heat treatment may be added if necessary (50â~120â)
â for about 1 minute to 120 minutes), when the support is peeled off from the substrate, the exposed portion in the image exposure is cured and remains on the substrate, and the unexposed portion is removed together with the support without being cured, thus forming the desired image on the substrate. is formed. When the image-forming material of the present invention is used as a so-called tenting resist with a thick photopolymerizable composition layer, the cured portion has good adhesion to the substrate, so that it provides an image free from defects due to peeling. Although it is conveniently used, it can of course also be suitably used for producing other resist images not intended for tenting. Furthermore, it can also be used for the production of printing plates such as planographic printing and letterpress printing, and the production of other relief images. The present invention will be specifically explained below using Examples, but the present invention is not limited to these Examples. Example 1 Chlorinated polyethylene (Super Chron CPE907LTA manufactured by Sanyo Kokusaku Pulp Co., Ltd.) 80 (parts by weight) Polymethyl methacrylate (Dyanal BR-80 manufactured by Mitsubishi Rayon Co., Ltd.) 20 Pentaerythritol acrylate 40 Oligoester acrylate (Juiasei Kagaku Kogyo Co., Ltd.) Aronix M-6100) 100 Benzoin isobutyl ether 7.0 2-naphthalene sulfonyl chloride 1.0 Paramethoxyphenol 0.1 Victoria Pure Blue 0.3 Toluene 400 A solution of the photopolymerizable composition was prepared by uniformly dissolving and mixing the above materials. . Spread this liquid to a thickness of 25ÎŒ
It was coated on a polyethylene terephthalate film of 400 mL to a thickness of 40 Όm after drying, and heated at 80°C.
An image forming material was obtained by drying for 10 minutes. Next, this image forming material was laminated under pressure on both sides of a double-sided copper-clad substrate for a printed wiring board having through holes whose surface had been cleaned. In this state, the negative original with the wiring circuit pattern was brought into close contact with the support of the image forming material laminated on the copper surface, and the negative original was exposed to light for 25 seconds from a distance of 60 cm using a 3KW ultra-high pressure mercury lamp. (Both sides of the board are exposed).
Next, when the substrate is heated to 35°C and the polyethylene terephthalate film support is peeled off from the substrate, the exposed portions of the photosensitive layer harden and remain on the copper-clad substrate, and the unexposed portions are coated with the support. It was removed from the copper-clad substrate, and a positive original image corresponding to the negative original was formed on the copper-clad substrate. The resist pattern formed in this way faithfully reproduces the negative original (resolution down to a fine line of 125 Όm), but there are some defects such as the exposed part peeling off from the substrate and the image being disconnected or missing.
Also, there were no defects such as tearing of the tenting part. Similar operations were performed on nine more substrates, and resist patterns with no defects were similarly obtained. The copper layer of the copper-clad substrate having the resist pattern thus obtained was etched at a temperature of 40°C using a cupric chloride aqueous solution, but the photosensitive layer remained intact during this etching process. It was confirmed that it adheres strongly to copper and that no phenomena such as peeling, generation of pinholes, or tearing of the tenting part occurred at all. Further, the photosensitive layer after etching could be easily peeled off from the substrate using methylene chloride. Further, when the sensitivity of this image forming material was examined using a PS step guide manufactured by Fuji Photo Film Co., Ltd. under the above exposure conditions, a number of development steps of 9 was obtained. Comparative Example 1 Example 1 except that 2-naphthalenesulfonyl chloride in the photopolymerizable composition of Example 1 was removed.
An image forming material was obtained in the same manner as described above. Resist pads were formed on 10 substrates by the same operations as in Example 1 using the same substrates and negative originals as in Example 1. If you look at these 10 cards, 1 in 2
It was confirmed that disconnection defects due to the exposed portion peeling off from the substrate occurred in approximately 100% of the substrates. However, the subsequent etching process did not cause the resist pattern to peel off further and the number of defective areas did not increase. Note that this image forming material is Example 1.
It was confirmed that a 125 ÎŒm image was resolved in the same way as in the previous example, and the sensitivity was 9 steps with the PS step guide. Example 2 Chlorinated polyethylene (Super Chron CPE907HA manufactured by Sanyo Kokusaku Pulp Co., Ltd.) 70 (parts by weight) Polymethyl methacrylate (Dyanal BR-83 manufactured by Mitsubishi Rayon Co., Ltd.) 30 Trimethylolpropane triacrylate 40 Oligoester acrylate (Toagosei Chemical Co., Ltd.) Aronix M-6300 manufactured by Kogyo Co., Ltd.) 100 Benzyl dimethyl ketal 4.0 Tripromomethylphenylsulfone 0.5 Paramethquine phenol 0.1 Victoria Pure Blue 0.3 Toluene 400 A solution of the photopolymerizable composition is prepared by uniformly dissolving and mixing the above materials. Then, apply this liquid to a thickness of 25 ÎŒm.
It was coated on a polyethylene terephthalate film so that the thickness after drying was 40 ÎŒm, and it was heated at 80â for 10 minutes.
An imaging material was obtained by drying for a minute. This material was laminated on 10 substrates similar to those in Example 1, and exposure was carried out in the same manner as in Example 1, except that the same negative original was used and the exposure time was 20 seconds.
Next, peeling development was performed, but no defects such as peeling were observed in the resulting resist pattern. It was also confirmed that no problem occurred even if the etching treatment was performed. The resolution of this material was 125 ÎŒm, and the sensitivity under the above exposure conditions was 8 steps with a PS step guide. Example 3 Chlorinated polyethylene (Superchron CPE907LTA manufactured by Sanyo Kokusaku Pulp Co., Ltd.) 100 (parts by weight) Oligoester acrylate (Aronix M-8060 manufactured by Toagosei Chemical Industry Co., Ltd.) 70 Diethylene glycol diacrylate 70 Benzoin isopropyl ether 7.5 Para-toluenesulfonyl chloride 1.0 Paramethoxyphenol 0.1 Ether violet 0.3 Toluene 400 A solution of the photopolymerizable composition was prepared by uniformly dissolving and mixing the above materials, and this liquid was spread to a thickness of 25 ÎŒm.
It was coated on a polyethylene terephthalate film so that the thickness after drying was 50 ÎŒm, and it was heated at 80â for 10 minutes.
An imaging material was obtained by drying for a minute. Using this material, resist patterns were produced on 10 substrates using the same substrates, negative originals, and processing conditions as in Example 1. No defects such as peeling were observed in this resist pattern, and no problems occurred even during the etching process. The resolution of this material was 150 ÎŒm, and the sensitivity under the above exposure conditions was 9 steps with a PS step guide. Comparative Example 2 An image forming material was prepared in the same manner as in Example 2 except that 8 parts of benzyl was used in place of the benzyl dimethyl ketal in Example 2. A resist pattern was prepared using this material in the same manner as in Example 2, but it was confirmed that defects due to peeling of exposed areas occurred in about 1 out of 3 out of 10 substrates. I was caught. The resolution of this material was 125 ÎŒm, and the sensitivity was 7 steps using a PS step guide.
Claims (1)
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åœ¢æææã[Claims] 1. A photopolymerizable composition layer containing a film-forming polymer substance, a compound having at least one addition-polymerizable unsaturated bond, and a photopolymerization initiator as essential components is provided on a transparent support. In the image forming materials consisting of (However, R 1 is H or OX, and X is CH 3 or C 2 H 5 ,
For R 2 , a compound represented by OCH 3 , OC 2 H 5 , OC 3 H 7 or OC 4 H 9 ) is used, and as an adhesion improver, a compound represented by the general formula (However, R 3 is a substituted or unsubstituted aromatic residue or heterocyclic compound residue, R 4 is a halogen or
CHmYn "Y is halogen, m + n = 3, n is 1 or more") is added in an amount of 0.01 to 5% by weight based on the total amount of the photopolymerizable composition (solid content). An image forming material that can be peeled off and developed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13467180A JPS5760327A (en) | 1980-09-27 | 1980-09-27 | Image forming material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13467180A JPS5760327A (en) | 1980-09-27 | 1980-09-27 | Image forming material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5760327A JPS5760327A (en) | 1982-04-12 |
| JPS6410055B2 true JPS6410055B2 (en) | 1989-02-21 |
Family
ID=15133835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13467180A Granted JPS5760327A (en) | 1980-09-27 | 1980-09-27 | Image forming material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5760327A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5854334A (en) * | 1981-09-26 | 1983-03-31 | Nitto Electric Ind Co Ltd | Image forming material |
| JP4308585B2 (en) * | 2003-06-09 | 2009-08-05 | ïœãšã¬ã¯ããããã¯ãããªã¢ã«ãºæ ªåŒäŒç€Ÿ | Photosensitive resin composition adhesion improver and photosensitive resin composition containing the same |
| JP6325887B2 (en) * | 2014-05-15 | 2018-05-16 | æåææ ªåŒäŒç€Ÿ | LAMINATE FOR PATTERN FORMATION, METHOD FOR MANUFACTURING PATTERN WITH PATTERN, AND PATTERN WITH PATTERN |
-
1980
- 1980-09-27 JP JP13467180A patent/JPS5760327A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5760327A (en) | 1982-04-12 |
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