JPS6410548A - Gas phase ion source - Google Patents

Gas phase ion source

Info

Publication number
JPS6410548A
JPS6410548A JP62166555A JP16655587A JPS6410548A JP S6410548 A JPS6410548 A JP S6410548A JP 62166555 A JP62166555 A JP 62166555A JP 16655587 A JP16655587 A JP 16655587A JP S6410548 A JPS6410548 A JP S6410548A
Authority
JP
Japan
Prior art keywords
emitter
voltage
electric field
electrode
acceleration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62166555A
Other languages
English (en)
Inventor
Hiroshi Sawaragi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP62166555A priority Critical patent/JPS6410548A/ja
Publication of JPS6410548A publication Critical patent/JPS6410548A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0802—Field ionization sources
    • H01J2237/0807—Gas field ion sources [GFIS]

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP62166555A 1987-07-03 1987-07-03 Gas phase ion source Pending JPS6410548A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62166555A JPS6410548A (en) 1987-07-03 1987-07-03 Gas phase ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62166555A JPS6410548A (en) 1987-07-03 1987-07-03 Gas phase ion source

Publications (1)

Publication Number Publication Date
JPS6410548A true JPS6410548A (en) 1989-01-13

Family

ID=15833432

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62166555A Pending JPS6410548A (en) 1987-07-03 1987-07-03 Gas phase ion source

Country Status (1)

Country Link
JP (1) JPS6410548A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012138360A (ja) * 2005-12-02 2012-07-19 Arisu Corporation:Kk イオン源、システム及び方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012138360A (ja) * 2005-12-02 2012-07-19 Arisu Corporation:Kk イオン源、システム及び方法

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