JPS6415601A - Scan-type tunnel electron microscope - Google Patents

Scan-type tunnel electron microscope

Info

Publication number
JPS6415601A
JPS6415601A JP17094087A JP17094087A JPS6415601A JP S6415601 A JPS6415601 A JP S6415601A JP 17094087 A JP17094087 A JP 17094087A JP 17094087 A JP17094087 A JP 17094087A JP S6415601 A JPS6415601 A JP S6415601A
Authority
JP
Japan
Prior art keywords
sample
probe
motion mechanism
rough motion
scan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17094087A
Other languages
Japanese (ja)
Other versions
JP2633858B2 (en
Inventor
Keiji Takada
Shigeyuki Hosoki
Sumio Hosaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62170940A priority Critical patent/JP2633858B2/en
Publication of JPS6415601A publication Critical patent/JPS6415601A/en
Application granted granted Critical
Publication of JP2633858B2 publication Critical patent/JP2633858B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To prevent the damage of a sample and a probe due to their collision and to bring them close to each other in a short time, by moving a rough motion mechanism until a tunnel current is detected when the sample is brought close to the probe. CONSTITUTION:Simultaneously when a voltage is impressed between a sample 11 and a probe 10 by a current detector 12, a voltage is impressed on a Z-axis piezoelectric element 6 by the working of a feedback function of a Z-axis control circuit 6 so as to make a certain set current flow between the probe 10 and the sample 11, and thereby the probe 10 is brought close to the sample 11. A rough motion mechanism and the probe 10 supported thereby are stopped by the start of a servo circuit 2 when the current flowing between the sample 11 and the probe 10 is detected. After the fixation by a fixing mechanism 4 is released, the servo circuit 2 is turned OFF. Thereby the rough motion mechanism is made to stand still, and an image of the sample is obtained by the working of a scanning mechanism 8, the Z-axis control circuit 6, etc.
JP62170940A 1987-07-10 1987-07-10 Probe microscope Expired - Fee Related JP2633858B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62170940A JP2633858B2 (en) 1987-07-10 1987-07-10 Probe microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62170940A JP2633858B2 (en) 1987-07-10 1987-07-10 Probe microscope

Publications (2)

Publication Number Publication Date
JPS6415601A true JPS6415601A (en) 1989-01-19
JP2633858B2 JP2633858B2 (en) 1997-07-23

Family

ID=15914189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62170940A Expired - Fee Related JP2633858B2 (en) 1987-07-10 1987-07-10 Probe microscope

Country Status (1)

Country Link
JP (1) JP2633858B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01127403U (en) * 1988-02-23 1989-08-31
JPH03210406A (en) * 1990-01-12 1991-09-13 Jeol Ltd Scanning type tunnel microscope instrument
US8104316B2 (en) 2007-03-30 2012-01-31 Sumitomo Metal Industries, Ltd. Piercing mill

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63236907A (en) * 1987-03-25 1988-10-03 Agency Of Ind Science & Technol Scan type tunnel microscope
JPS63236903A (en) * 1987-03-25 1988-10-03 Agency Of Ind Science & Technol Scan type tunnel microscope

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63236907A (en) * 1987-03-25 1988-10-03 Agency Of Ind Science & Technol Scan type tunnel microscope
JPS63236903A (en) * 1987-03-25 1988-10-03 Agency Of Ind Science & Technol Scan type tunnel microscope

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01127403U (en) * 1988-02-23 1989-08-31
JPH03210406A (en) * 1990-01-12 1991-09-13 Jeol Ltd Scanning type tunnel microscope instrument
US8104316B2 (en) 2007-03-30 2012-01-31 Sumitomo Metal Industries, Ltd. Piercing mill

Also Published As

Publication number Publication date
JP2633858B2 (en) 1997-07-23

Similar Documents

Publication Publication Date Title
DE59207944D1 (en) Corpuscular beam test method with counter voltage tracking
JPS6415601A (en) Scan-type tunnel electron microscope
RU93051538A (en) THE METHOD OF MARKING A MOVING MATERIAL BODY AND A DEVICE FOR IMPLEMENTING THIS METHOD
JPS5355935A (en) Sample holding circuit
JPS5333154A (en) Developing and cleaning device for copier
JPS5619024A (en) Optical deflector
Yoshikawa et al. Operating characteristics of 1 kW hydrazine arcjet thruster
JPS55124121A (en) Analog switch circuit for triggering exposure control circuit
JPS5471604A (en) Turntable driving device
JPS5380929A (en) Memory unit
DE59106204D1 (en) High voltage generator for an electrostatic spray gun.
JPS56140686A (en) Pockels' cell driving circuit
JPS5223618A (en) Dc high voltage generator
JPS57152970A (en) Heat-sensitive recorder
JPS5466058A (en) Phase synchronizer
JPS51143852A (en) Relay testing apparatus
EP0378360A3 (en) Analog signal conditioning without precision components
JPS54139386A (en) Trigger element peak point characteristic measuring unit
JPS54116205A (en) Magnetic disc driving apparatus
JPS51142311A (en) Method for examining a visual function by leadinga visual line in an o phthalmological instrument
JPS51142253A (en) Pulse generating circuit
JPS5591215A (en) Rise time control circuit for amplifier
JPS6454922A (en) Hysteresis comparator circuit
JPS5780566A (en) Frequency deviation detector
Laporte Cooperation between manufacturers and water suppliers for eliminating pollution.

Legal Events

Date Code Title Description
S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313117

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

R370 Written measure of declining of transfer procedure

Free format text: JAPANESE INTERMEDIATE CODE: R370

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees